• Title/Summary/Keyword: 압전센서

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Ag metal의 급속 열처리에 따른 MgZnO 쇼트키 다이오드 특성연구

  • Na, Yun-Bin;Jeong, Yong-Rak;Lee, Jong-Hun;Kim, Hong-Seung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.231-231
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    • 2013
  • ZnO은 hexagonal wurtzite 구조를 갖는 직접 천이형 화합물 반도체로서, 상온에서 3.37 eV 정도의 wide band gap energy를 가지고 있으며, 60 meV의 큰 엑시톤 결합 에너지(exciton binding energy)를 갖는다. 또한 동종 기판이 존재하고 열, 화학적으로 안정한 상태이며 습식 식각이 가능한 장점으로 인해 각광받고 있다. 또한, ZnO 박막은 우수한 전기 전도성을 나타내며 광학적 투명도가 우수하기 때문에 투명전극으로 많이 이용되어 왔고, 태양 전지(solar cell), 가스 센서, 압전소자 등 많은 분야에서 사용되고 있다. 이와 같은 ZnO박막을 안정적인 쇼트키 다이오드 특성을 얻기 위해서는 쇼트키 배리어 장벽의 형성이 필수적이다. Mg을 ZnO에 첨가하여 MgZnO 박막을 형성할 경우, 금속의 일함수와 MgZnO의 전자친화력 차이가 증가하여 더 큰 쇼트키 장벽 형성이 가능하며, 금속의 일함수가 큰 물질을 사용해야 한다. 또한, 박막의 결함이 적은 박막을 형성해야 하는 에피탁셜 박막이 필요하다. SiC는 높은 포화 전자 드리프트 속도(${\sim}2.7{\times}107$ cm/s), 높은 절연 파괴전압(~3 MV/cm)과 높은 열전도율(~5.0W/cm) 특징을 가지고 있으며, MgZnO/Al2O3의 격자 불일치는 ~19%인 반면에 MgZnO/SiC의 격자 불일치는 ~6%를 가진다. 금속의 일함수가 큰 Ag 금속은 열처리가 될 경우 AgOx가 될 경우 더욱 안정적인 쇼트키 장벽을 형성될 수 있을 것으로 판단된다. 본 연구에서는 쇼트키 접합을 형성하기 위해 금속의 일함수가 큰 Ag 금속을 사용하였으며, Al2O3 기판과 6H-SiC 기판위에 MgZnO(30 at.%) 박막을 증착하였다. 증착 후에 Ag를 증착 한 뒤 급속 열처리를 하였다. 열처리된 MgZnO의 경우 열처리 하지않은 소자보다 약 $10^5$ 이상의 우수한 on/off 특성을 보였다.

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Electrical properties of 0.05pb($Sn_{0.5}Sb_{0.5}O_3-xPbTiO_3-yPbZrO_3$ PZT System With variation Of PT/PZ (0.05pb($Sn_{0.5}Sb_{0.5}O_3-xPbTiO_3-yPbZrO_3$계에서 PT/PZ비 변화에 따른 전기적 특성)

  • 황학인;박준식;오근호
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.7 no.4
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    • pp.589-598
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    • 1997
  • The effects of PT/PZ ratio variations in a modified PZT system on crystal structure and electrical properties were studied. $0.05Pb(Sn_{0.5}Sb_{0.5})O_3+xPbTiO_3+yPbZrO_3$+0.4Wt% $MnO_2$(=0.55PSS+0.11PT+0.84PZ+0.4wt%$MnO_2$ ; x+y=0.95) systems with variations of PT/PZ from 0.50/0.45 to 0.l1/0.84 were sintered at $1250^{\circ}C$ for 2 hr, and then sintering density, crystal structure, dielctric, piezoelectric, pyroelectic and voltage responsity to infrared were investigated. Sintering density was increased from 7.52g/$\textrm {cm}^3$ to 7.82g/$\textrm {cm}^3$ with increasing PZ content. Dielectric constants at 1 KHz were decreased from 1147 to 193 with variation of PT/PZ from 0.50/0.45 to 0.l1/0.84 after poling of $4 KV_{DC}$/mm at $140^{\circ}C$ for 20 minutes. All Dielectric losses at 1 KHz were less than 1 % in all specimens. $K_{p}$ was increased near to 1 of PT/PZ, and maximun value of 48.2 % was .at 0.45/0.50. Pyroelectric coefficient of PT/PZ with 0.l1/0.84 was maximun value, 0.0541 C/$\m^2$K, and voltage responsity to infrared was 1.5 V.

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Low Temperature Structural Tests of a Composite Wing with Room Temperature-Curing Adhesive Bond (상온접합 본딩이 있는 복합재 날개의 저온 구조시험)

  • Ha, Jae Seok;Park, Chan Yik;Lee, Kee Bhum
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.43 no.10
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    • pp.928-935
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    • 2015
  • This paper presents low temperature structural tests of a UAV wing which has room temperature-curing adhesive bond. The wing structure is made of carbon fiber reinforced composites, and the skins are bonded to the inner structures (such as ribs and spars) using room temperature-curing adhesive bond. Also, to verify damage tolerance design of the wing structure, barely visible impact damages are intentionally created in the critical areas. The attachment fittings of the wing are fixed in a specially designed chamber which can simulate the low temperature environments of the operating altitudes. The test load is applied by hydraulic actuators which are placed outside the chamber. The structural tests consist of strain survey tests and a durability test for 1-life fatigue load spectrum. During the tests, strains of major parts are measured by strain gauges and FBG sensors. The change of the initial impact damages is also monitored using piezoelectric sensors. The 1-life damage tolerance of the composite structure is verified by the structural tests under the simulated environments.

Growth of Thin Film Using Chemical Bath Deposition Method and Their Photoconductive Characteristics (CBD 방법에 의한 CdS 박막의 성장과 광전도 특성)

  • Hong, K.J.;Lee, S.Y.;You, S.H.;Suh, S.S.;Moon, J.D.;Shin, Y.J.;Jeoung, T.S.;Shin, H.K.;Kim, T.S.;Song, J.H.;Rheu, K.S.
    • Journal of Sensor Science and Technology
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    • v.2 no.1
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    • pp.3-10
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    • 1993
  • Polycrystalline CdS thin films were grown on ceramic substrate using a chemical bath deposition method. They were annealed at various temperature and X-ray diffraction patterns were measured by X-ray diffractometer in order to study CdS polycrystal structure. Using extrapolation method of X-ray diffraction patterns for the CdS samples annealed in $N_{2}$ gas at $550^{\circ}C$ it was found hexagonal structure whose lattice constants $a_{o}$ and $c_{o}$ were $4.1364{\AA}$ and $6.7129{\AA}$, respectively. Its grain size was about $0.35{\mu}m$. Hall effect on this sample was measured by Van der Pauw method and studied on carrier density and mobility defending on temperature. From Hall data, the mobility was likely to be decreased by piezo electric scattering at temperature range of 33K and 150k and by polar optical scattering at temperature range of 150K and 293K. We measured also spectral response, sensitivity (${\gamma}$), maximum allowable power dissipation and response time on these samples.

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Fabrication and Electrical Properties of High Tc $A_{2}B_{2}O_{7}$ Piezoelectric Ceramics Using the Powders Prepared by the Chemical Coprecipitation Method (화학적공침법에 의한 $A_{2}B_{2}O_{7}$ 고온압전세라믹스의 제작과 전기적 특성)

  • Son, Chang-Heon;Jeon, Sang-Jae;Nam, Hyo-Duk
    • Journal of Sensor Science and Technology
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    • v.6 no.4
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    • pp.316-327
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    • 1997
  • Polycrystalline $Sr_{2}Nb_{2}O_{7}$ and $La_{2}Ti_{2}O_{7}$ ceramics with very high Curie temperatures were synthesized by the chemical coprecipitation method (CCP). The powders synthesized were identified by XRD and their sintering behavior and physical properties were studied. The grain-orientation and electrical properties of sintered ceramics were investigated as a function of firing temperature. Single phase could be obtained by CCP method at temperature lower than that of the conventional method by 100 - $150^{\circ}C$. Strontium niobate, $Sr_{2}Nb_{2}O_{7}$, powder was Prepared by CCP method at temperatures as low as $800^{\circ}C$ via intermediate phase of $Sr_{5}Nb_{4}O_{15}$ formed at $700^{\circ}C$. The resulting CCP-derived powder was observed to have finer and more uniform particle size distribution than those obtained through the conventional or the molten salt synthesis method. Sintering of CCP-derived $Sr_{2}Nb_{2}O_{7}$ powder at $1500^{\circ}C$ yielded a highly dense ceramics with 97% theoretical density. Very high grain-orientation developed along the (0k0) direction was observed by SEM, which resulted in anisotropic dielectric properties of the sintered samples, with the dielectric constant values approaching those for single crystal.

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Characterization of CdSe Thin Film Using Chemical Bath Deposition Method (Chemical Bath Deposition 방법으로 제작한 CdSe 박막의 특성)

  • Hong, K.J.;Lee, S.Y.;You, S.H.;Suh, S.S.;Moon, J.D.;Shin, Y.J.;Jeong, T.S.;Shin, H.K.;Kim, T.S.;Song, J.H.;Rheu, K.S.
    • Journal of Sensor Science and Technology
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    • v.2 no.1
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    • pp.81-86
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    • 1993
  • Polycrystalline CdSe thin films were grown on ceramic substrate using a chemical bath deposition (CBD) method. They were annealed at various temperature and X-ray diffraction patterns were measured by X-ray diffractometer in order to study CdSe polycrystal structure. Using extrapolation method of X-ray diffraction patterns for the CdSe samples annealed in $N_{2}$ gas at $450^{\circ}C$ it was found hexagonal structure whose lattice parameters $a_{o}$ and $c_{o}$ were $4.302{\AA}$ and $7.014{\AA}$, respectively. Its grain size was about $0.3{\mu}m$. Hall effect on this sample was measured by Van der Pauw method and studied on carrier density and mobility depending on temperature. From Hall data, the mobility was likely to be decreased by piezo electric scattering at temperature range of 33 K and 200 K, and by polar optical scattering at temperature range of 200 K and 293 K. We measured also spectral response, sensitivity (${\gamma}$), maximum allowable power dissipation and response time on these samples.

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Development and Characterization of Hafnium-Doped BaTiO3 Nanoparticle-Based Flexible Piezoelectric Devices (Hf 도핑된 BaTiO3 나노입자 기반의 플렉서블 압전 소자 개발 및 특성평가)

  • HakSu Jang;Hyeon Jun Park;Gwang Hyeon Kim;Gyoung-Ja Lee;Jae-Hoon Ji;Donghun Lee;Young Hwa Jung;Min-Ku Lee;Changyeon Baek;Kwi-Il Park
    • Journal of Sensor Science and Technology
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    • v.33 no.1
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    • pp.34-39
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    • 2024
  • Energy harvesting technology that converts the wasted energy resources into electrical energy is emerging as a semipermanent power source for self-powered electronics and wireless low-power sensor systems. Among the various energy conversion techniques, flexible piezoelectric energy harvesters (f-PEHs), using materials with piezoelectric effects, have attracted significant interest because they can harvest a small mechanical energy into electrical signals without constraints of time and space in various environments. In this study, we used a flexible piezoelectric composite film fabricated by dispersing BaHfxTi(1-x)O3 (x = 0, 0.01, 0.05, 0.1) piezoelectric powders inside a polymeric matrix to facilitate f-PEHs. The fabricated f-PEH with optimal Hf contents (x = 0.05) generated a maximum output voltage of 0.95 V and current signal of 130 nA with stable electrical/mechanical disabilities under periodically bending deformations. In addition, we demonstrated a cantilever-type f-PEH and investigated its potential as a sensor by characterizing the output performance under mechanical vibrations at various frequencies. This study provides the breakthrough for realizing self-powered energy harvesting and sensing systems by adopting the lead-free piezoelectric composites under vibrational environments.

Multi-purpose Geophysical Measurements System Using PXI (PXI를 이용한 다목적 물리탐사 측정 시스템)

  • Choi Seong-Jun;Kim Jung-Ho;Sung Nak-Hun;Jeong Ji-Min
    • Geophysics and Geophysical Exploration
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    • v.8 no.3
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    • pp.224-231
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    • 2005
  • In geophysical field surveys, commercial equipments often fail to resolve the subsurface target or even sometimes fail to be applied because they do not fit to the various field situations or the physical properties of the medium or target. We developed a geophysical measurement system, which can be easily adapted for the various field situations and targets. The system based on PXI with A/D converter and some stand alone equipment such as Network Analyzer was applied to borehole radar survey, borehole sonic measurement and electromagnetic noise measurement. The system for borehole radar survey consists of PXI, Network Analyzer, dipole antennas, GPIB interface is used for PXI to control Network Analyzer. The system for borehole sonic measurement consists of PXI, 24 Bit A/D converter, high voltage pulse generator, transmitting and receiving piezoelectric sensors. The electromagnetic noise measurement system consists of PXI, 24 Bit A/D converter, 2 horizontal component electric field sensors and 2 horizontal and 1 vertical component magnetic filed sensors. The borehole radar system has been successfully applied to detect the width of the artificial tunnel through which the borehole pass and to image buried steel pipe, while the commercial borehole radar equipment failed. The borehole sonic system was tested to detect the width of artificial tunnel and showed a reasonable result. The characteristic of electromagnetic noise was grasped at an urban area with the data from the electromagnetic noise measurement system. The system is also applied to characterize the signal distortion by induction between the electric cables in resistivity survey. The system can be applied various geophysical problems with a simple modification of the system and sensors.

International Conference on Electroceramics 2005 (2005년도 국제 전자세라믹 학술회의)

  • 한국세라믹학회
    • Proceedings of the Korean Ceranic Society Conference
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    • 2005.06a
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    • pp.1-112
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    • 2005
  • This report is results of a research on recent R&D trends in electroceramics, mainly focusing on the papers submitted to the organizing committee of the International Conference on Electroceramics 2005 (ICE-2005) which was held at Seoul on 12-15 June 2005. About 380 electroceramics researchers attended at the ICE-2005 from 17 countries including Korea, presenting and discussing their recent results. Therefore, we can easily understand the recent research trends in the field of electroceramics by analyses of the subject and contents of the submitted papers. In addition to the analyses of the papers submitted to the ICE-2005, we also collected some informations about domestic and international research trends to help readers understand this report easily. We analysed the R&D trends on the basis of four main categories, that is, informatics electroceramics, energy and environment ceramics, processing and characterization of electroceramics, and emerging fields of electroceramics. Each main category has several sub-categories again. The informatics ceramics category includes integrated dielectrics and ferroelectrics, oxide and nitride semiconductors, photonic and optoelectronic devices, multilayer electronic ceramics and devices, microwave dielectrics and high frequency devices, and piezoelectric and MEMS applications. The energy and environment ceramics category has four sub-categories, that is, rechargable battery, hydrogen storage, fuel cells, and advanced energy conversion concepts. In the processing and characterization category, there exist domain, strain, and epitaxial dynamics and engineering sub-category, innovative processing and synthesis sub-category, nanostructured materials and nanotechnology sub- category, single crystal growth and characterization sub-category, theory and modeling sub-category. Nanocrystalline electroceramics, electroceramics for smart sensors, and bioceramics sub-categories are included to the emerging fields category. We hope that this report give an opportunity to understand the international research trend, not only to Korean ceramics researchers but also to science and technology policy researchers.

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A Study on the Characteristics of Natural Frequency and Impedance of Elastically Restrained Cracked Beam with a Tip Mass (말단질량을 갖는 탄성지지 균열보의 고유주파수와 임피던스 특성 연구)

  • Lee, Jong-Won
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.21 no.11
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    • pp.317-325
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    • 2020
  • The development of a technique that can monitor the cracks, which is one of the typical types of damage, is necessary to secure the structural safety of elastically restrained cantilever-type beams with a tip mass that is used widely in infrastructure. Impedance techniques have been actively researched to detect cracks, and the cracks were estimated mainly by experimentally investigating the relationship between the crack and impedance signal. This study examined the correlation between the change in the impedance signals due to the crack, and the natural frequency obtained analytically. After updating the analysis model for the intact beam, the impedance signal was measured while gradually inflicting cracks in the cantilever-type beam, and the damage index was obtained. The results were compared with the natural frequencies calculated from the updated analysis model to investigate the correlation. A close correlation was observed between the experimentally obtained impedance damage index, and the analytically calculated natural frequency. Using this correlation, the structural characteristics could be evaluated more accurately from the damage estimation results, and the behavior of the structure could be predicted effectively using the analysis model.