• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
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• pp.165-165
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• 2004

정밀한 3차원 좌표측정을 위한 삼차원좌표측정기(Coordinate Measuring Machine)는 광학 스케일이나 헤테로다인 레이저 간섭계를 이용해서 x, y, z 축의 좌표를 측정한다. 이 경우 측정 정밀도에 가장 큰 영향을 주는 요인은 아베 오차(Abbe's error)이다. 인공위성용 광학계를 비롯해서 첨단 산업부품에 이르기까지 현재의 3차원 좌표측정은, 높은 정밀도와 대영역 측정을 동시에 요구하는 추세이다. 대영역으로 갈수록 _아베 오차의 영향은 더 커지므로 보다 근본적인 해결책이 필요하다.(중략)

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1438-1441
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• 2005

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In this system, measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100um\times{100um}$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. Using this AFM system, 3um pitch specimen was measured. As a result, the uncertainty of total system has been evaluated.

• 한국정밀공학회지
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• 제23권6호
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• pp.96-103
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• 2006

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In the long range (about several tens of ${\mu}m$), measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100{\mu}m\times100{\mu}m$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. As a result, XY scanner can have good performance. Using this AFM system, 3um pitch specimen was measured. The uncertainty of total system has been evaluated. X and Y direction performance is different. X-direction measuring performance is better. So to evaluate only ID pitch length, X-direction scanning is preferable. Its expanded uncertainty(k=2) is $\sqrt{(3.96)^2+(4.10\times10^{-5}{\times}p)^2}$ measured length in nm.

• 대한기계학회논문집A
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• 제27권12호
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• pp.2028-2038
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• 2003

High-speed feed drive systems have been widely used in the manufacturing and semiconductor industries. Specifications for high-speed systems require more advanced capabilities than conventional feed drive systems. It is necessary to devise special design concepts to achieve the level of performance for high-speed feed drive systems. In this paper, an integrated design method is proposed for high-speed feed drive systems in which the interactions between mechanical and electrical subsystems ought to be considered simultaneously during the design process. Based on the integrated design method, a nonlinear optimal design procedure of mechanical subsystems considering the Abbe and radius errors is accomplished through the design process of electrical subsystems satisfying the control stability and the saturation condition of actuators as well as the relative stability. Both mechanical and electrical parameters are considered as design variables. Simulations and numerical case studies show that the integrated design method of high-speed feed drive systems creates results satisfying the desired performances of mechatronic systems.

• 한국정밀공학회지
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• 제11권4호
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• pp.158-164
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• 1994

A volumetric error compensation method was stueide with measuring systematic error of a Coordinate Measuring Machine(CMM). The volumetric error equations were proposed for a Moving Bridge type CMM. Using the error equations, error vectors in the measuring volume were corrected by a software method. The CMM was controlled by the compensation program separately in the measuring and moving function of the CMM proving. The linear accuracy of the CMM was measured by the Laser Interferometer and compared with the data before the volumetric error compensation. This method was proved as low cost and effective to reduce the systematic error of the CMM, as no hardware modification is required.

• 한국정밀공학회지
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• 제34권1호
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• pp.53-58
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• 2017

A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.

• 한국정밀공학회지
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• 제29권8호
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• pp.863-872
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• 2012

The squareness measurement of driving axes of a machine tool is very important to evaluate the performance of the machine. Laser interferometer measurement system is one of the most reliable equipment to measure the squareness. However, squareness measurement using laser system with an optical square result in restriction of straightness optics setup and Abbe's offset. This offset combines with angular errors during the motion of an axis to cause Abbe's error. In addition, the difficulty in optical square setup causes restriction of other optics and limitation of measurable range. In this paper, mathematical approaches are presented to eliminate the Abbe's error and to estimate squareness for full range by using the best fit of straightness data measured without an optical square. Experiments for squareness measurement of 3 axis machine tool were conducted and the proposed techniques were used for squareness evaluation with elimination of Abbe's error and squareness estimation for the full travel range.

• 대한기계학회논문집A
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• 제28권7호
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• pp.1029-1037
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• 2004

High-speed/precision servomechanisms have been widely used in the manufacturing and semiconductor industries. In order to ensure the required high-speed and high-precision specifications in servomechanisms, an integrated design methodology is required, where the interactions between mechanical and electrical subsystems will have to be considered simultaneously. For the first step of the integrated design process, it is necessary to obtain not only strict mathematical models of separate subsystems but also formulation of an integrated design problem. A two-degree-of-freedom controller described in the discrete-time domain is considered as an electrical subsystem in this paper. An accurate identification process of the mechanical subsystem is conducted to verify the obtained mathematical model. Mechanical and electrical constraints render the integrated design problem accurate. Analysis of the system performance according to design and operating parameters is conducted for better understanding of the dynamic behavior and interactions of the servomechanism. Experiments are performed to verify the validity of the integrated design problem in the x-Y positioning system.

• 대한기계학회논문집A
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• 제28권7호
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• pp.1038-1046
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• 2004

In order to acquire high-speed and high-precision performances in servomechanisms, an integrated design method have been proposed. Based on strict mathematical modeling and analysis of system performance according to design and operating parameters, a nonlinear constrained optimization problem including the relevant subsystem parameters of the servomechanism is formulated. Optimum design results of mechanical and electrical parameters are obtained according to the design parameters specified by designers through the integrated design processes. Motors are optimally selected from the servo motor database. Both the geometric errors referring to Abbe offset and the contour errors are minimized while required constraints such as stability conditions and saturated conditions are satisfied. This design methodology both offers the improved possibility to evaluate and optimize the dynamic motion performance of the servomechanism and improves the quality of the design process to achieve the required performance for high-speed/precision servomechanisms.

• 한국광학회지
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• 제11권4호
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• pp.232-238
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• 2000

백색 시준광의 시준 정도로 정밀하게 측정하기 위하여 두 직선격자나 원형격자에 의한 버니어(vernier) 무아레 무늬를 이용하는 새로운 시준 방법을 제안하였다. 버니아 무아레 무늬의 피치 간격을 측정함으로써 렌즈의 초점 종이동 오차($\Deltaf$), 발산각($\theta$) 및 종색수차 $(L_{ch})$ 를 구하였다. 초점 길이가 120.0mm이고 F/2.4인 렌즈를 사용하여 측정한 결과 $\Deltaf$=2.19mm이고 $\theta$=mm이고 F/1.6 그리고 아베수가 64.1인 렌즈의 종색수차를 버니어 무아레 무늬를 이용하여 측정하였다. 자동초점방법을 이용하여 측정한 결과,$L_{ch}=1.58mm(\pm0.01mm)$와 무아레 간섭법을 이용하여 측정한 결과인 1.59mm($\pm$0.1mm)와 거의 일치함을 알 수 있었다.