• 한국군사과학기술학회지
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• 제20권5호
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• pp.620-632
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• 2017

A chemical vapor curing method(CVC) was developed to cure polycarbosilane(PCS) fibers by using cyclohexene vapour as a non-oxygen active reactant, instead of air in oder to prepare the silicon carbide(SiC) fiber with low oxygen content. A cross-linked PCS fibers by cyclohexene vapor showed a completely different variation in IR spectra in comparison to the air-cured PCS fiber. CVC method resulted in less than 3 wt% in oxygen content. In this experiment conditions, The average tensile strength and modulus of SiC fiber obtained by CVC had 1995 MPa and 183 GPa respectively, which is higher than that of SiC fiber prepared by air-curing process.

• 한국산업보건학회지
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• 제21권3호
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• pp.177-183
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• 2011

Occupational exposure to silicon carbide dust of manufacturing industries has seldom been evaluated in Korea. Accordingly, we evaluated various silicon carbide dust concentrations in the breathing zone of workers between May 2010 and July 2010. To compare silicon carbide dust concentrations, three dust samplers including the Institute of Occupational Medicine (IOM) sampler, 37mm cassette sampler, and Aluminum cyclone sampler were used. A total of 5 manufacturing industries producing abrasive and refractory materials using silicon carbide were investigated. The geometric mean concentrations were 2.04, 0.97, and $0.48mg/m^3$ in inhalable, total and respirable silicon carbide dust, respectively. The geometric mean concentrations of silicon carbide in abrasive material manufacturing industries were slightly higher than that of refractory manufacturing industries, and finishing operations were higher than that of other operations. It was found that the results of exposure assessment in airborne dust at manufacturing industries using silicon carbide in Korea showed exceeding rate to American Conference of Governmental Industrial Hygienists Threshold Limit Value ($3mg/m^3$) was 10% in respirable dust samples. Therefore, with the consideration of the close relationship between smaller dust size and the occurrence of occupational respiratory diseases, it is suggested to promulgate the new occupational exposure limit for respirable silicon carbide dust.

• 한국안광학회지
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• 제12권2호
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• pp.19-23
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• 2007

안경렌즈 절삭용 탄화규소재료의 미세구조와 기계적 특성을 CaO를 첨가해서 연구하였다. 조성이 다른 4종류의 시편을 $1,880^{\circ}C$에서 4시간 일축가압소결 하였다. 주사전자현미경으로 미세구조를 분석하였고, X-ray를 통해 상분석을 하였다. 본 실험에서 연구된 안경렌즈 절삭공구의 대표적인 파괴인성은 $5.4MPa{\cdot}m^{1/2}$을 나타내었다. 또한, 경도값은 밀도값에 비례적인 경향성을 보여주었다.

• 자원리싸이클링
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• 제2권4호
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• pp.17-22
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• 1993

왕겨와 활성탄을 출발물질로 하여 탄소열 환원법으로 SiC 휘스커를 합성하였다. 그리고, 이에 있어서 가수와 첨가제의 영향을 조사하였다. 실험온도는 $1450^{\circ}C$ 이었고 합성도니 SiC 휘스커는 후처리 후 SEM, XRD 분석을 행하였다. 반응관내에 수소의 농도가 높을수록, 총유량이 클수록 휘스커의 생성율이 증가하였으며 가스의 유속이 Ar : $H_2$=300:45(cc/min)이고 NaF : $CaF_2$= 1:1가 되도록 혼합하여, 첨가하고, Ni를 flake ($1{\times}1$mm)로 첨가한 경우에 가장 양호한 형태의 휘스커를 얻을 수 있었다.

• 한국해양공학회:학술대회논문집
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• 한국해양공학회 2006년 창립20주년기념 정기학술대회 및 국제워크샵
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• pp.158-161
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• 2006

SiC materials have been extensively studied for high temperature components in advanced energy conversion system and advanced gas turbine. However, the brittle characteristics of SiC such as law fracture toughness and law strain-to fracture impose a severe limitation on the practical applications of SiC materials. SiC/SiC composites can be considered as a promising candidate in various structural materials, because of their good fracture toughness. In this composite system, the direction of SiC fiber will give an effect to the mechanical properties. It is therefore important to control a properdirection of SiC fiber for the fabrication of high performance SiC/SiC composites. In this study, unidirection and two dimension woven structures of SiC/SiC composites were prepared starting from Tyranno SA fiber. SiC matrix was obtained by nano-powder infiltration and transient eutectoid (NITE) process. Effect of microstructure and density on the sintering temperature in NITE-SiC/SiC composites are described and discussed with the fiber direction of unidirection and two dimension woven structures.

• 자원리싸이클링
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• 제15권5호
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• pp.11-16
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• 2006

폐 폴리스티렌과 모터 오일의 혼합물로부터 마이크로웨이브 열분해를 이용하여 유용한 고분자 원료물질의 회수를 위한 연구를 수행하였다. 마이크로웨이브 반응기로 quartz tube를 사용하였으며 마이크로웨이브 흡수체로 실리콘 카바이드를 사용하였다. 공정 변수로 마이크로웨이브 입력 파워를 180에서 250 W까지 변화시켰으며, 마이크로웨이브 조사시간을 30분에서 1시간까지 변화시키며 실험하였다. 열분해를 통하여 얻어진 생성물을 GC/MS를 사용하여 분석한 결과 스티렌, 메틸 스티렌, 톨루엔, 그리고 에틸벤젠이 4개의 주요 회수 성분이었으며, 이 중 폴리스티렌으로부터 스티렌의 회수율은 약 50% 이었다. 열분해에 마이크로웨이브를 사용함으로써 일반 열분해 보다 훨씬 낮은 온도에서 열분해가 이루어졌다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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• pp.58-62
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• 2003

Silicon carbide (SiC) was etched in a $NF_3/CH_4$ inductively coupled plasma. The etch process was modeled by using a neural network called generalized regression neural network (GRNN). For modeling, the process was characterized by a $2^4$ full factorial experiment with one center point. To test model appropriateness, additional test data of 16 experiments were conducted. Particularly, the GRNN predictive capability was drastically improved by a genetic algorithm (GA). This was demonstrated by an improvement of more than 80% compared to a conventionally obtained model. Predicted model behaviors were highly consistent with actual measurements. From the optimized model, several plots were generated to examine etch rate variation under various plasma conditions. Unlike the typical behavior, the etch rate variation was quite different depending on the bias power Under lower bias powers, the source power effect was strongly dependent on induced dc bias. The etch rate was strongly correated to the do bias induced by the gas ratio. Particularly, the etch rate variation with the bias power at different gas ratio seemed to be limited by the etchant supply.

• 한국항공우주학회지
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• 제37권12호
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• pp.1245-1251
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• 2009

고온/고압, 장시간 연소조건에서 비삭마에 가까운 삭마 특성을 갖는 초소형 목삽입재 선정을 위한 연구를 수행하였다. 평가 소재로서 C/SiC, CIT, W/$Y_2O_3$를 선정하였으며, 연소시간 20초의 내열성능평가모타로 시험하였다. 시험 결과 W/$Y_2O_3$가 가장 우수하였으나, 균열이 발생하였다. 본 연구를 통하여 각 소재들의 열반응 특성 및 내열 성능을 이해할 수 있었으며, W/$Y_2O_3$의 적용가능성을 확인하였다.

• 한국정밀공학회지
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• 제27권12호
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• pp.28-32
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• 2010

Technical demands for aspheric glass lens formed in market increases its application from simple camera lens module to fiber optics connection module in optical engineering. WC is often used as a metal core of the aspheric glass lens, but the long life time is issued because it fabricated in high temperature and high pressure environment. High hard thin film coating of lens core increases the core life time critically. Diamond Like Carbon(DLC) thin film coating shows very high hardness and low surface roughness, i.e. low friction between a glass lens and a metal core, and thus draw interests from an optical manufacturing industry. In addition, DLC thin film coating can removed by etching process and deposit the film again, which makes the core renewable. In this study, DLC films were deposited on the SiC ceramic core. The process variable in FVA(Filtered Vacuum Arc) method was the substrate bias-voltage. Deposited thin film was evaluated by raman spectroscopy, AFM and nano indenter and measured its crystal structure, surface roughness, and hardness. After applying optimum thin film condition, the life time and crystal structure transition of DLC thin film was monitored.

• 센서학회지
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• 제18권2호
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• pp.147-153
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• 2009

A thermal flow sensor has been fabricated and characterized, consisting of a center resistive heater surrounded by two upstream and one downstream temperature sensing resistors. The heater and temperature sensing resistors are fabricated from nitrogen-doped(n-type) polycrystalline silicon carbide(poly-SiC) deposited by LPCVD(low pressure chemical vapor deposition) on LPCVD silicon nitride films on a Si substrate. Cavities were etched into the Si substrate from the front side to create suspended silicon nitride membranes carrying the poly-SiC elements. One upstream sensor is located $50{\mu}m$ from the heater and has a sensitivity of $0.73{\Omega}$/sccm with ${\sim}15\;ms$ rise time in a dynamic range of 1000 sccm. N-type poly-SiC has a linear negative temperature coefficient and a TCR(temperature coefficient of resistance) of $-1.24{\times}10^{-3}/^{\circ}C$ from room temperature to $100^{\circ}C$.