• Journal of the Korea Organic Resources Recycling Association
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• v.31 no.3
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• pp.5-13
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• 2023

In this study, a comparative study is conducted on the synthesis methods for silica nanoparticle employing the silicon sludge waste generated from the semiconductor manufacturing processes. Specifically, acid-washed silicon sludge wastes with no impurities are employed as the precursors of sol-gel and hydrothermal methods for silica nanoparticles preparation. The morphologies and properties of silica nanoparticles synthesized via two synthetic methods are examined by various analysis methods. As a result, silica nanoparticles from the sol-gel method are fabricated with high purity and uniform shape, while the hydrothermal method exhibits advantages in yield and ease of synthetic process. This comparative study offers detailed experimental results on the two synthetic methods for silica nanoparticle synthesis, which may contribute to the establishment of manufacturing high-value materials using the by-products generated in the semiconductor process.

• Journal of the Korea Organic Resources Recycling Association
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• v.32 no.1
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• pp.21-29
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• 2024

In this study, EMC(Epoxy molding compound) waste from the semiconductor molding process is recycled and synthesized into silica nanoparticles, which are then applied as abrasive materials contains CMP(Chemical mechanical polishing) slurry. Specifically, silanol precursor is extracted from EMC waste according to the ultra-sonication method, which provides heat and energy, using ammonia solution as an etchant. By employing as-extracted silanol via a facile sol-gel process, uniform silica nanoparticles(e-SiO₂, experimentally synthesized SiO₂) with a size of ca. 100nm are successfully synthesized. Through physical and chemical analysis, it was confirmed that e-SiO₂ has similar properties compared to commercially available SiO₂(c-SiO₂, commercially SiO₂). For practical CMP applications, CMP slurry is prepared using e-SiO₂ as an abrasive and tested by polishing a semiconductor chip. As a result, the scratches that are roughly on the surface of the chip are successfully removed and turned into a smooth surface. Hence, the results present a recycling method of EMC waste into silica nanoparticles and the application to high-quality CMP slurry for the polishing process in semiconductor packaging.

• Journal of the Korean Ceramic Society
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• v.41 no.7
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• pp.528-533
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• 2004

Macroporous SiC with pore size 84∼658 nm and mesoporous SiC with pore size 15∼65 nm were respectively prepared by infiltrating low viscosity preceramic polymer solutions into the various sacrificial templates obtained by natural sedimentation or centrifuge of 20∼700 nm silica sol, which were subsequently etched off with HF after pyrolysis at 1000∼140$0^{\circ}C$ in an argon atmosphere. Three-dimensionally long range ordered macroporous SiC ceramics derived from polymethylsilane (PMS) showed surface area 584.64$m^2$g$^{-1}$ when prepared with 112nm silica sol and at 140$0^{\circ}C$, whereas mesoporous SiC from polycarbosilane (PCS) exhibited the highest surface area 619.4 $m^2$g$^{-1}$ with random pore array when prepared with 20-30 nm silica sol and at 100$0^{\circ}C$. Finally, tile pore characteristics of porous SiC on the types of silica sol, polymers and pyrolytic conditions were interpreted with the analytical results of SEM, TEM, and BET instruments.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.89.2-89.2
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• 2012

$150^{\circ}$ 이상의 접촉각을 가지는 초소수성 표면은 self-cleaning, anti-fingerprint, anti-contamination 등의 특성을 가지므로 전자, 도료, 자동차 등 다양한 산업에서 활용될 수 있다. 재료 표면의 친/소수성은 물리적 요인과 화학적 요인 두 가지 요인을 조절함으로써 제어할 수 있다. 즉, 표면의 거칠기를 크게 하거나 표면에너지를 낮춰줌으로써 초소수성 표면을 구현할 수 있다. 실리카는 자연계에 매우 풍부하게 존재하고 있으며, 생체무해하며 내구성과 내마모성, 화학적 안정성, 고온 안정성 등을 지니고 있어 박막소재로 이용하기에 우수한 특징을 지니고 있다. 이러한 실리카 초소수성 코팅층을 형성하는 방법으로 본 연구에서는 전기분무법으로 마이크로 크기의 실리카 입자로 형성된 코팅층을 형성하였다. 이러한 마이크로 구조의 표면거칠기를 더욱 높이기 위하여 금 나노입자를 부가적으로 형성시켜 마이크로-나노구조 혼성의 계층구조를 만들고자 하였다. 금 나노입자는 자외선 조사 광환원법을 사용하였고, 이러한 계층구조에 플루오린 처리를 하여 계층구조 초소수성 코팅층을 형성하였다. 계층구조를 가지는 실리카 코팅층은 물 이외에 표면장력이 낮은 용액에서도 높은 접촉각을 보였고, 이러한 코팅층의 고온 안정성과 내구성, UV 저항성 등을 조사하여 실제 응용 가능성을 검토하였다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2011.05a
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• pp.61-62
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• 2011

실리카 나노입자를 분산시킨 기능성 코팅 소재를 개발하였다. 본 기능성 코팅 소재는 마그내슘 판재에 적용하여 내스크래치 및 내부식성을 향상시키기 위한 것이다. 최근 마그네슘 판재는 스마트 폰 및 이동통신 기기의 외장재소재로 각광을 받고 있다. 그러나 표면의 기계적 강도가 약하고, 특히 수분에 의한 부식이 심각하여 사용에 많은 제한을 받고 있다. 본 연구에서는 실리카 나노입자가 분산된 유무기 하이브리드 코팅을 적용하여 기계적 강도 및 내부식성을 향상하고자 하였다. 분산하는 나노입자의 크기를 달리하여 코팅층으로부터 각각 다른 물리적 화학적 특성을 유도할 수 있었다. 각 코팅 층의 특성은 연필경도, 기판 휨 각도, 그리고 electrochemical impedance spectroscopy 등을 이용하여 평가하였고, 최종적으로 휴대폰 신뢰성 평가 기법을 적용하여 상용화 적용성도 평가하였다.

• Journal of the Korea Organic Resources Recycling Association
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• v.31 no.3
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• pp.15-25
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• 2023

In this study, silicon sludge from semiconductor dicing process is recycled to fabricate silica nanoparticles, which are applied as dispersing materials for electro-responsive (ER) smart fluid. In specific, metal impurities are removed from silicon sludge by acid washing to obtain the high-purity silicon powder. And then, silica nanoparticles are synthesized by facile hydrothermal method employing the silicon powder as reactant material. To control the size of silica nanoparticles, the reaction time of hydrothermal method is varied as 8, 15, 20, and 30 hours are applied to control the size of silica nanoparticles. Sizes of silica nanoparticles are increased proportionally to the reaction time owing to the increased numbers of hydrolysis and condensation reactions. As-synthesized silica nanoparticles are prepared as electro-responsive smart fluids by dispersing into silicon oil. Silica nanoparticles synthesized by 30 hours of hydrothermal reaction (SiO₂-H30) exhibit the highest shear stress of 21.4 Pa under an applied electric field strength of 3.0kV mm^-1. Such enhancement in ER performance of SiO₂-H30 among various silica nanoparticles are attribute to the reinforcing effect originated from the mixed particle size, which allowing the formation of rigid chain-like structures. Accordingly, this study successfully propose a recycling method of silicon sludge to synthesize silica nanoparticles and their derived ER fluids, which may suggest new possibility to ESG management emphasizing the eco-friendliness.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.123-123
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• 2012

초소수성 표면은 150도 이상의 높은 물 접촉각과 10도 이하의 낮은 sliding angle을 가지며 self-cleaning, anti-contamination 기능을 갖고 있는 것이 특징이다. 재료표면의 친수성과 소수성을 제어하기 위해서는 화학적 인자인 물질의 표면에너지나 물리적 인자인 표면 거칠기를 조절하는 방법이 있다. 초소수성 표면을 구현하기 위해서는 표면의 거칠기를 증가시키거나 표면 에너지를 낮춰야 하는데 고체 표면의 거칠기를 증가시키기 위해서는 일반적으로 표면에 microscale과 nanoscale의 계층구조를 형성시키는 방법이 사용된다. 자연계에 매우 풍부하게 존재하는 실리카는 내구성과 내마모성, 화학적 안정성, 고온 안정성 등을 지니고 있으며 인체에 무해하기 때문에 다양한 종류의 전자기기 및 부품의 내외장 코팅에 적용이 검토되고 있다. 이러한 관점에서 본 연구에서는 초소수성 코팅층을 구현하는 하나의 방법으로서 졸-겔방법으로 실리카 졸을 합성하여 전기분무법을 사용하여 microscale의 실리카 입자 코팅층을 형성하였으며, 표면 미세구조 조절 및 계층구조 형성과 불소화처리 공정을 통하여 초소수성 실리카 코팅층을 제조하였다. 이러한 초소수성 실리카 코팅층의 표면거칠기, 자외선 영향향, 내구성 등을 초소수성 관점에서 평가하였다.

• Journal of the Society of Cosmetic Scientists of Korea
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• v.30 no.3 s.47
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• pp.353-359
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• 2004

The extent of silica flocculation can be modified by varying the silica concentration, aqueous phase pH, salt and polvmer concentration. High volume fraction W/O emulsion stabilized by hydrophobic silica was established with various aqueous phase conditions for cosmetic application. By increasing the silica concentration up to $1.0\;wt\%,$ the size of droplet decreased. A high silica concentration increased the viscosity of continuous oil phase by network formation, which resulted in target size of droplet. The stability of W/O emulsion is improved as increasing the aqueous phase pH. At low and intermediate pH, the emulsions became more stable by adding salt $(0.083\;mol\;dm^{-3}\;MgSO_4).$ At high PH, the presence of salt caused significant destabilization. The gelation behavior of the emulsion indicates that the effect of salt on silica-stabilized emulsion is derived from an electrostatic attraction. The addition of xanthan gum in aqueous phase increased the mono-dispersity of the W/O emulsion by making water more hydrophobic and hindering the recombination of droplets. In conclusion, these results indicate that very stable emulsifier-free, finely dispersed W/O emulsion can be achieved for cosmetic application by changing the aqueous phase composition.

• Journal of the Mineralogical Society of Korea
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• v.31 no.4
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• pp.287-293
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• 2018

Amorphous silica ($SiO_2$) silt grains were found in some soils of Korean Peninsula. Scanning electron microscopy of polished section of soils revealed ellipsoidal amorphous $SiO_2$ grains with numerous submicron pores concentrated in the interior. Their amorphous structure was confirmed by lattice imaging and electron diffraction under transmission electron microscope. Amorphous $SiO_2$ grains were not found in the eolian sediment of the Chinese loess plateau. Although the origin of the amorphous $SiO_2$ grain is uncertain, they are likely either phytolith or weathering product of volcanic ash. The amorphous $SiO_2$ silt grains are not useful as a tracer of long-range transport mineral dust in soils.

• Journal of the Korean Recycled Construction Resources Institute
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• v.10 no.3
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• pp.269-275
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• 2022

In this study, the setting time and compressive strength of cement paste composites applied with nano-micro pozzolanic binders were experimental analyzed. The pozzolanic binder was reduced initial and final setting time and the compressive strength was increased. Micro silica was effective in decrease the initial setting and final setting time and impressing the compressive strength. When two or more cement binders were used, the using of silica fume and a small amount of nano silica at reduced the setting time to 62-64 % to OPC cement and the compressive strength was increased to 117 %. A small amount of mixing the nano silica was effect to pore filling and pozzolanic activation. However, the addition of a chemical admixture should be considered when mixing table design because pozzolanic binders high specific surface area causes a decrease in cement composites flow.