• Title/Summary/Keyword: 시험챔버

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플라즈마 임피던스를 이용한 RPS내 아노다이징 코팅진단 및 수명예측에 대한 연구

  • Kim, Dae-Uk;An, Yeong-O;Im, Eun-Seok;Lee, Han-Yong;Wi, Sun-Im;Choe, Dae-Gyu;Choe, Sang-Don
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.141.2-141.2
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    • 2015
  • 교류임피던스 측정기법을 이용하여 전기화학적으로 외부환경에서 소재 금속까지 물질 및 전하이동에 관한 임피던스 측정이 가능하며 도막의 부식 및 노화정도 및 내식성의 평가가 가능하여 산업체에서 널리 이용되고 있다. RPCS(Remote Plasma Cleaning Source)는 패널 및 반도체 제조공정에서 CVD 증착공정 후 챔버 내부에 입혀지는 Si(실리콘)을 화학적으로 세정하기 위한 F(불소) Radical을 공급하는 원격 고밀도 플라즈마를 발생시키는 제품이다. RPCS의 바디는 알루미늄을 사용하고 절연 및 플라즈마에 대한 내구성을 확보하기 위해 아노다이징 코팅을 한다. 반응기 내벽의 표면이 공정 플라즈마에 노출될 때 소재는 화학적으로 매우 활성이 높은 라디칼과의 반응뿐만 아니라 이온의 충격을 동시에 받게 되며 이 과정에서 다량의 불소 (Fluorine) 라디칼과 전계에 반응한 이온의 운동에 노출되면서 아노다이징 코팅이 손상되는데 이는 기기의 수명 단축 및 파티클을 발생시키며, Arc의 원인이 되기도 한다. 실제 사용 환경에서는 기기의 분해 없이 아노다이징의 상태를 주기적으로 모니터링 하기가 대단히 어려워, 정기적으로 교체하고 있는 실정이다. 본 연구에서는 RPCS내 발생된 플라즈마 현상을 컨덕터로 활용하여 고주파 리액턴스를 임피던스로 환산하여 아노다이징 코팅의 손상 정도를 진단 및 모니터링하였다. 아노다이징이 손상된 내부 블럭과 정상상태인 내부 블럭의 임피던스를 비교하였고, 아노다이징 두께별 임피던스를 측정하였다. 그 결과 아노다이징 절연막이 손상된 블록의 임피던스가 정상 블록에 비해 낮았으며 두께별 임피던스도 비례함을 알 수 있었다. 향후에는 장기간 현장에서 축척되어진 시험데이터를 바탕으로 아노다이징 코팅의 수명예측진단 시스템을 구축하고자 한다.

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Evaluation of volatile organic compounds emitted from door-trim armrest using micro chamber and 20 L static chamber (마이크로 챔버와 20 L static chamber를 이용한 도어트림 암레스트로부터 방출되는 휘발성 유기화합물 평가)

  • Lee, Ik-Hee;Yoo, Ji-Ho;Kim, Man-Goo
    • Analytical Science and Technology
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    • v.24 no.4
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    • pp.290-297
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    • 2011
  • In present, evaluation method for car cabin air quality has been developed in ISO, China, Japan. Also The management standard for new produced car has been applied since 1, July, 2010. To manage car cabin air quality, It is important to evaluate VOC emitted from interior material. In this study, complete component of door trim armrest was evaluated in accordance with ISO 12219-5, cut component was evaluated in accordance with ISO 12219-3. The vapour gas was collected with stainless tube packed with Tenax TA and analyzed with TD-GC/MS. It was confirmed that emission rate of each compounds was difficult in each evaluation method. As a result, to evaluating each components composing door trim armrest, main sources of emitting VOCs in door trim armrest were PP substrate and adhesive.

Performance Analysis of the Pintle Thruster Using 1-D Simulation -I : Steady State Characteristics (1-D 시뮬레이션을 활용한 핀틀추력기의 성능해석 -I : 정상상태 특성)

  • Kim, Jihong;Noh, Seonghyeon;Huh, Hwanil
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.43 no.4
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    • pp.304-310
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    • 2015
  • Pintle thrusters use pintle stroke to change nozzle throat area, and this controls thrust. Using MATLAB, one-dimensional simulation has been investigated and the results are compared to those of cold flow tests and computational fluid dynamics for the pintle thruster of Chungnam National University. The prediction based on one-dimensional flow theory shows good agreement with measurements for chamber pressure, but deviates for thrust, partly because of nozzle wall separation. Computational results show that nozzle wall separation occurs at an early stage of nozzle expansion, near the design nozzle throat, for the course of pintle strokes. Empirical thrust prediction incorporates nozzle wall separation, and thus 1-D simulation using empirical thrust prediction showed good results for an early stage of pintle stroke.

Thermal Behavior of Spacecraft Liquid-Monopropellant Hydrazine($N_2$$H_4$) Propulsion System (인공위성 단기액체 하이드라진($N_2$$H_4$) 추진시스템의 열적 거동)

  • Kim, Jeong-Soo
    • Journal of the Korean Society of Propulsion Engineers
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    • v.3 no.4
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    • pp.1-11
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    • 1999
  • Thermal behavior of spacecraft propulsion system utilizing monopropellant hydrazine ($N_2$$H_4$) is addressed in this paper. Thermal control performance to prevent propellant freezing in spacecraft-operational orbit was test-verified under simulated on-orbit environment. The on-orbit environment was thermally achieved in space-simulation chamber and by the absorbed-heat flux method that implements an artificial heating through to the spacecraft bus panels enclosing the propulsion system. Test results obtained in terms of temperature history of propulsion components are presented and reduced into duty cycles of the avionics heaters which are dedicated to thermal control of those components. The duty cycles are subsequently converted into the electrical power required in the operational orbit. Additionally, cyclic temperature of each component, which was made under thermal-balanced condition of spacecraft, is compared to the acceptable design range and justified from the viewpoint of system verification.

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Cathode Power Development of Hall Thruster for Small Satellite using Microwave cathode (마이크로웨이브 음극을 이용한 소형 인공위성의 홀 추력기용 음극전원 개발)

  • Kang, Seokhyun;Choo, Wongyo;Choi, Junku;Jeong, Yunhwang;Kim, Younho;Kang, Seongmin;Kuninaka, Hitoshi;Cha, Hanju
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.42 no.11
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    • pp.974-980
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    • 2014
  • A power supply of cathode has been developed for hall-effect thruster for small satellite. A microwave cathode has been applied to the electric propulsion system and cathode power is necessary in oder to work securely. Anode current is varied by a flow rate controlled by anode tank pressure. Then cathode current has to be controled in proportion by anode current. So cathode power supply has been designed to offer a current proportional to anode current. Also cathode power has been tuned to work securely for cathode to emit more electron than anode within 0.03A. The function test of cathode power was performed by constructing an equivalent load for anode and cathode. It has been tested in a vacuum chamber in order to ensure a stable operation of the thruster. And it was confirmed that thruster normally has been operated in the space environment after the launch.

Effect of Chamber Configuration on Combustion Characteristic Velocity of Full-scale Combustion Chamber (실물형 연소기의 형상에 따른 연소특성속도 비교)

  • Kim, Jong-Gyu;Han, Yeoung-Min;Ahn, Kyu-Bok;Kim, Mun-Ki;Seo, Seong-Hyeon;Choi, Hwan-Seok
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2008.05a
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    • pp.149-152
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    • 2008
  • Effects of chamber configuration on combustion characteristic velocity of full-scale combustion chamber for 30-tonf-class liquid rocket engine were studied. The configurations of combustion chamber are ablative and channel cooling chamber (${\varepsilon}$=3.2) which have detachable mixing head, and single body regenerative cooling chamber which has nozzle expansion ratio of 3.5 and 12, respectively. The combustion chambers have chamber pressure of 53${\sim}$60 bar and propellant mass flow rate of 89 kg/s, and the injectors of all combustion chamber have recess number 1.0 and double-swirl characteristics. The hot firing test results at design point show that the combustion characteristic velocity of the regenerative cooling chamber which has nozzle expansion ratio of 12 is higher than that of other combustion chambers. The reasons for the above result are the increases of combustion pressure and enthalpy of kerosene which is heated due to cooling of the chamber wall before injection into the combustion field.

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A Study on Tensile Properties of CFRP Composites under Cryogenic Environment (극저온 환경에서 탄소섬유강화 복합재의 인장 물성에 관한 연구)

  • Kim Myung-Gon;Kang Sang-Guk;Kim Chun-Gon;Kong Cheol-Won
    • Composites Research
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    • v.17 no.6
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    • pp.52-57
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    • 2004
  • In this study, mechanical tensile properties of carbon fiber reinforced polymeric (CFRP) composite cycled with thermo-mechanical loading under cryogenic temperature (CT) were measured using cryogenic environmental chamber. Thermo-mechanical tensile cyclic loading (up to 10 times) was applied to graphite/epoxy unidirectional laminate composites far room temperature (RT) to $-50^{\circ}C$, RT to $-100^{\circ}C$ and RT to $-150^{\circ}C$. Results showed that tensile stiffness obviously increased as temperature decreased while the thermo-mechanical cycling has little influence on it. Tensile strength, however, decreased as temperature down to CT while the reduction of strength showed little after CT-cycling. For the analysis of the test results, coefficient of thermal expansion (CTE) of laminate composite specimen at both RT and CT were measured and the interface between fiber and matrix was observed using SEM images.

A Study On Cause Analysis and Improvement About Malfunction of Proximity Sensor Exposed High Temperature (근접센서의 고온 고장발생에 관한 원인분석 및 개선 연구)

  • Park, Jin-Saeng
    • Transactions of the KSME C: Technology and Education
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    • v.3 no.3
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    • pp.175-181
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    • 2015
  • Because internal space of combat vehicle reachs about $80^{\circ}C$ at high temperature period, Proximity Sensor exposed high temperature and humidity, which has function to sense the distance and transfer signal for control unit, have enlarged sensing distance and finally locked on. Malfunction of sensing itself occur frequently, therefore we carried out cause analysis and improvement. We accomplish improvement activity secondly. Through-out many trial and error, we find out that malfunction of sensor occur at high temperature circumstance. To improve, the another Emitter Coil is added to increase voltage difference and improve sensing accuracy about 5~10 times. And we accomplish design improvement to dull temperature and humity change after increasing molding surface to add vibration and shock resistance. We prove that the improved product do not fail after enduring 136hr at $85^{\circ}C$ temperature and 85% relative humidity circumstance chamber.

Parameters Effect on Fabrication of Nuclear Fuel by Plasma Deposition (플라즈마 침적에 의한 핵열료 제조에 미치는 변수들의 영향)

  • Jeong, In-Ha;Bae, Gi-Gwang
    • Korean Journal of Materials Research
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    • v.8 no.9
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    • pp.783-790
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    • 1998
  • New process development of nuclear fuel fabrication for nuclear power plant was attempted by induction plasma technology with yttria-stabilized-zirconia ($\textrm{ZrO}_{2}$-$\textrm{Y}_{2}\textrm{O}_{3}$)powder, similar to $\textrm{UO}_{2}$, in the respect of melting point and physicochemical characteristics. Extent of powder melting was affected greatly by plasma plate power and particle size. Being optimized such as, sheath gas composition, probe position, particle size and spraying distance, dense deposit of 97.91% T.D. with deposition rate 20mm/min was attained at the condition of 120/20$\ell$/min of Ar/$\textrm{H}_{2}$ flow rate, 80kw of plate power, 8cm of probe position, 200Torr of chamber pressure and 18cm of spraying distance. The pellet of 96.5% of theoretical density was formed with homogeneity and nice exterior view at the best condition of deposition experiments, and the possibility of new nuclear pellet fabrication process was confirmed. The main and interrelated effects on deposit density were assessed by ANOVA(Ana1ysis of Variance).

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An Estimation of Performance Test and Uncertainty of Measurement for a Large Axial-flow Fan Based on ANSI/AMCA 210 Standard (ANSI/AMCA 210 기준에 의한 대형 축류 송풍기의 성능시험 및 측정 불확도 평가)

  • Ko, Hee-Hwan;Chung, Cheol-Young;Kim, Kyung-Yup
    • The KSFM Journal of Fluid Machinery
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    • v.17 no.2
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    • pp.24-29
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    • 2014
  • In general, a large-capacity axial flow fan is used for industrial processes or ventilation in a social overhead capital infrastructure. The main characteristics of the large axial-flow fan need a lot of electrical power consumption and operate 24 hours a day, 365 days a year. Since the large axial flow fan consumes several hundreds to thousands kW per hour, both manufacturer and consumer are struggling to select high efficiency products for saving energy and reducing operation cost. Therefore, the performance testing should be accurately conducted in experimental equipments. The performance estimation and uncertainty of measurement of the axial-flow fan gathered from the result from nozzle shaped testing equipments certified with ANSI/AMCA standard and duct shaped testing equipment under the same experimental condition. The experimental results from both facilities have maximum 17% differences in performance evaluation and uncertainty of measurement. As considering that the differences, it is doubt about the reliability of testing result. The test was repeated with the specific term during 12 months because it is important to fully reflect the real conditions and to decide the repeatability of data. The evaluation of duct type testing facilities was failed to get an uncertainty measure. Testing results were previously published. As a series of previous paper, axial fan (∅1690 mm) and duct type testing facilities were fabricated. The purpose of fabricating testing equipment was testing an uncertainty measurement under the controlled environments.