• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.247-251
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• 2004

반도체 소자의 제조에 있어 실리콘 표면에 성장한 자연산화막을 제거하기 위해 일반적으로 습식 세정 기술이 이용되어 왔다. 하지만 소자의 최소 선폭(design rule)이 nano급으로 고집적화 됨에 따라 contact hole 바닥의 자연산화막을 깨끗이 제거하는데 있어서 그 한계를 나타나고 있다. 이에 대한 효과적인 대안 공정으로 가스 건식 세정 기술이 연구되고 있다. 본 논문에서는 한 번에 50매 이상의 웨이퍼를 처리함으로써 생산성 측면에서 월등한 배치식 설비에서 원거리 플라즈마(remote plasma) 장치에서 2.450Hz의 마이크로웨이브(${\mu}$-wave)에 의해 형성시킨 수소라디칼과 $NF_3$ 가스를 이용하여 실리콘에 결함을 주지 않고 자연산화막을 선택적으로 제거하는 공정에 대해 고찰하였다. AFM을 이용한 표면분석, TEM을 이용한 물성분석, 그리고 ToF-SIMS 및 XPS를 이용한 화학 분석을 습식 및 건식 세정을 비교 평가한 결과, 건식 세정 공정이 실리콘 표면에 결함을 주지 않고 자연산화막을 제거 할 수 있음을 확인하였다. 산화막$(SiO_2)$, 질화막$(Si_3N_4)$, 그리고 다결정 실리콘(Poly-Si) 등의 각 막질별 식각 특성을 고찰하였으며, $NH_3$의 캐리어 가스인 $N_2$의 주입량을 조절함으로써 수소라디칼 형성 효율의 개선이 가능하였으며, 이로부터 게이트와 소스/드레인 사이를 절연하기 위해 이용되는 질화막의 식각 선택비를 2배 정도 개선할 수 있었다. nano급 소자에 실장하여 평가한 결과에서 불산(HF)에 의한 습식 세정 방식에 비하여 약 $20{\sim}50%$ 정도의 contact 저항 감소 효과가 있음이 확인되었다.두 소자 모두 $40mA/cm^2$ 에서 이상적인 화이트 발란스와 같은(0.33,0.33)의 색좌표를 보였다.epsilon}_0=1345$의 빼어난 압전 및 유전특성과 $330^{\circ}C$의 높은 $T_c$를 보였고 그 조성의 vibration velocity는 약4.5 m/s로 나타났다.한 관심이 높아지고 있다. 그러나 고 자장 영상에서의 rf field 에 의한 SAR 증가는 중요한 제한 요소로 부각되고 있다. 나선주사영상은 SAR 문제가 근원적으로 발생하지 않고, EPI에 비하여 하드웨어 요구 조건이 낮아 고 자장에서의 고속영상방법으로 적합하다. 본 논문에서는 고차 shimming 을 통하여 불균일도를 개선하고, single shot 과 interleaving 을 적용한 multi-shot 나선주사영상 기법으로 $100{\times}100$에서 $256{\times}256$의 고해상도 영상을 얻어 고 자장에서 초고속영상기법으로 다양한 적용 가능성을 보였다. 연구에서 연구된 $[^{18}F]F_2$가스는 친핵성 치환반응으로 방사성동위원소를 도입하기 어려운 다양한 방사성의 약품개발에 유용하게 이용될 수 있을 것이다.었으나 움직임 보정 후 영상을 이용하여 비교한 경우, 결합능 변화가 선조체 영역에서 국한되어 나타나며 그 유의성이 움직임 보정 전에 비하여 낮음을 알 수 있었다. 결론: 뇌활성화 과제 수행시에 동반되는 피험자의 머리 움직임에 의하여 도파민 유리가 과대평가되었으며 이는 이 연구에서 제안한 영상정합을 이용한 움직임 보정기법에 의해서 개선되었다. 답이 없는 문제, 문제 만들기, 일반화가 가능한 문제 등으로 보고, 수학적 창의성 중 특히 확산적 사고에 초점을 맞추어 개방형 문제가 확

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.166-166
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• 2017

금속 재료 중 철강은 기계적 특성이 우수하고 대량생산이 가능하여 선박, 건축, 자동차 등 다양한 분야에 기초재료로써 널리 사용되고 있다. 그러나 스테인리스강 등과 같은 일부 특수한 용도의 강을 제외하고는 부식환경에 취약한 특성을 가지기 때문에 내식성을 향상을 위한 표면처리에 관한 연구가 활발히 진행되고 있다. 가장 일반적으로 습식법(wet process)을 통해 표면상에 아연(Zn)을 도금해 사용하며, 아연이 자체적으로 포함한 희생양극(sacrificial anode) 및 차폐(barrier) 효과가 철강의 부식을 방지하게 된다. 하지만 산업의 고도화에 따라 더욱 가혹해진 노출환경으로 인해 고내식 강재에 대한 수요가 점차 증가하고 있으며, 아연코팅 층의 두께를 증가하여 내식성을 확보하는 방안은 미래 환경 및 자원적인 측면에서 근본적인 해결책으로 제시하기 어려움이 있다. 한편, 건식 프로세스(wet process)로 대별되는 PVD(physical vacuum deposition)에 의해 내식성을 향상시키고자 하는 연구들이 다양하게 진행되고 있다. 이것은 표면에 고순도 양질의 금속 막을 형성시킴으로써 외부환경과의 반응을 효과적으로 제어가 가능하며, 형성된 막은 그 물질의 고유 특성뿐만 아니라 제작 조건에 따른 표면의 기하학적 혹은 결정학적 구조에 의해 크게 영향을 받게 된다. 본 연구에서는 실용금속 중 이온화 경향이 가장 크고 산소와 반응하여 투과성이 작은 산화 피막 형성이 유리한 마그네슘(Mg)을 활용해 표면의 전기화학적 특성을 향상시켰다. 또한 금속 증착 중 진공도조절을 위해 도입되는 불활성 가스로 아르곤(Ar) 및 질소($N_2$)를 사용하여 표면에 형성한 막의 모폴로지 및 결정배향성이 내식성에 미치는 상관관계를 해석하고자 하였다. 실험방법으로 PVD법 중 비교적 간편하고 기초적인 지침을 제시하기 적합할 것으로 고려된 진공증착(vacuum evaporation)법을 이용해 아르곤 및 질소 분위기에서 진공도를 조절하며 용융아연도금상 Mg막을 형성하였다. 제작조건별 막의 기초 특성을 분석하기위해 SEM, EDS, XRD를 이용하였고, 결정배향성(crystal orientation) 분석을 위해 면간격(d-value)과 상대강도(relative intensity)를 확인하였다. 또한 내식성 평가로 염수분무(salt sprat test) 및 양극분극(anode polarization)을 각각 실시하였다. 실험결과에 따르면, Ar 및 $N_2$ 모두에서 가스압이 증가할수록 코팅층의 증착량은 적어지고 입상정(granular structure)의 모폴로지 형성 및 면간격과 상대강도가 증가하는 것이 확인되었다. 또한 쳄버 내 동일 진공도에서, $N_2$ 도입 시 Mg막은 더욱 치밀하고 미세한 입상정의 모폴로지로 형성되며 면간격과 상대강도는 더욱 증가한 것으로 나타났다. 내식성 평가에서 저진공 $N_2$ 조건에서 형성시킨 막이 가장 우수한 내식성이 나타났는데, 이는 상대적으로 불안정하고 반응하기 유리한 입계면적을 많이 포함한 입상정 모폴로지 및 표면에너지가 높은면의 면점유율 증가로 인해 외부환경과의 신속한 반응은 물론 안정적인 피막형성이 용이하였기 때문일 것으로 사료된다. 이상으로 Ar 및 $N_2$ 가스압 조건에 따른 고내식 Mg 막의 유효성을 확인하였고 향후 내식성을 향상시키는 방법으로 응용 가능할 것으로 생각된다.

• Applied Chemistry for Engineering
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• v.27 no.4
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• pp.371-379
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• 2016

In this article, the foamed body of glass was manufactured from the waste borosilicate glass produced by wet pulverization process without additional pretreatment which can be used as a recycling method for waste LCD panel glass. Each 100 g of pulverized waste borosilicate glass with the size of less than 270 mesh were mixed with 0.3 weight fraction of carbon and 1.5 weight fraction of $Na_2CO_3$, $Na_2SO_4$ and $CaCO_3$ and let them foamed for 20 minutes at $950^{\circ}C$ to manufacture the foamed body having the density of less than $0.3g/cm^3$. Additionally, adding $SiO_2$ or $H_3BO_3$ to the mixture enabled the foamed body to have efficient formation of open pores which showed the possibility for producing the foamed body with new functionalities such as sound absorption.

• Economic and Environmental Geology
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• v.50 no.5
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• pp.341-352
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• 2017

Along with Cs-137 (half-life: 30.17 years), Sr-90 (half-life: 28.8 years) is one of the most important environmental monitoring radioactive elements. Rapid and easy monitoring method for Sr-90 using Laser-Induced Breakdown Spectroscopy (LIBS) has been studied. Strontium belongs to a bivalent alkaline earth metal such as calcium and has similar electron arrangement and size. Due to these similar chemical properties, it can easily enter into the human body through the food chain via water, soil, and crops when leaked into the environment. In addition, it is immersed into the bone at the case of human influx and causes the toxicity for a long time (biological half-life: about 50 years). It is a very reductive and related with the specific reaction that makes wet analysis difficult. In particular, radioactive strontium should be monitored by nuclear power plants but it is very difficult to be analysed from high-cost problems as well as low accuracy of analysis due to complicated analysis procedures, expensive analysis equipment, and a pretreatment process of using massive chemicals. Therefore, we introduce the Laser-Induced Breakdown Spectroscopy (LIBS) analysis method that analyzes the elements in the sample using the inherent spectrum by generating plasma on the sample using pulse energy, and it can be analyzed in a few seconds without preprocessing. A variety of analytical plates for samples were developed to improve the analytical sensitivity by optimizing the laser, wavelength, and time resolution. This can be effectively applied to real-time monitoring of radioactive wastewater discharged from a nuclear power plant, and furthermore, it can be applied as an emergency monitoring means such as possible future accidents at a nuclear power plants.

• Korean Chemical Engineering Research
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• v.50 no.5
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• pp.795-801
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• 2012

Nanoparticles have received significant attention because of their unusual characteristics including high surface area to volume ratios. Thiol ligand have been used as stabilizers of metal nanoparticles since Brust et al. They reported the preparation method of ligand capped metal nanoparticles by protecting the nanoparticles with a self-assembled monolayer of dodecanethiolate. In this method, volatile organic compounds (VOCs) were used as sovents. This study was carried out to replace these VOCs with room temperature ionic liquids (RTILs). We used two type of ILs to prepare metal nanoparticles. One is a hydrophobic IL, [BMIM][[$PF_6$] (1-Butyl-3-methylimidazolium hexafluorophosphate) purchased from IL maker, C-Tri from Korea and the other one is a hydrophilic one, [BMIM][Cl] (1-Buthy-3-methylimdazolium chloride) sinthesized by us. In the case of preparing Ag and Au nanoparticles using [BMIM][Cl], we didn't use phase transition reagents and ethanol because it has hydrophilic property and preparing Au, Ag nanoparticles using [BMIM][[$PF_6$] the method is as same as Brust et al.'s except using [BMIM][[$PF_6$] instead of organic solvent because it has hydrophobic property. FT-IR and UV-vis, TEM, TGA analysis have been used in an attempt to determine the particle size and verify functional groups. The particle size obtained from TEM was very similar to those obtained by Brust et al. This is a clear example of ligand capped metal nanoparticles prepared using ionic liquids. And the experimental result demonstrated ionic liquids can act as a highly effective medium for the preparation and stabilization of gold and silver metal nanoparticles.

• Journal of dental hygiene science
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• v.11 no.4
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• pp.333-337
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• 2011

The purpose of this experiment was to examine possibility of microleakage by water, temperature change, and bite force inside the mouth during the period of using light-activated temporary filling materials. 2 kinds of light-activated temporary filling materials were used in order to measure weight and compressive strength and to evaluate microleakage between filling material and cavity wall according to frequency of thermal circulation. First, Light-activated temporary filling material was increased the weight, which was measured according to the period of using. As for the result of comparing between products, the weight of Quicks was indicated to be higher. Second, Compressive strength of Spacer had significant difference depending on period of using. However, significant difference wasn't shown in the compressive strength of Quicks. In Spacer that showed significant difference, the compressive strength increased greatly in the difference of 3 days. Third. As for micro-leakage according to frequency of thermal circulation, the microleakage was indicated to be the highest in the group that carried out 7,000 times. The group with operation of 1,000 times and the group with operation of 3,000 times were indicated the statistically lower micro-leakage than the group with operation of 7,000 times. This study brought about a rise in micro-leakage depending on the passage in the period of using. However, it is obvious fact that micro-leakage increases according to the passage of time after restoration.

• Journal of Korean Society of Environmental Engineers
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• v.33 no.2
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• pp.103-112
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• 2011

The main objective of this research was to estimate Nitrogen budget of South Korea in 2008. Input-output budgets for nitrogen fluxes were categorized into three sections: cities, agricultural area, and forest. Chemical and biological fixation, dry and wet deposition, imported food and feed were used as the nitrogen input. Crop uptake, volatilization, denitrification, leaching, runoff, and forest consumption were used as the nitrogen outputs. Annual total nitrogen input was 1,294,155 ton/yr, and output was 632,228 ton/yr. Comparison with a previous research in 2005 indicates that nitrogen input was decreased by 1.9% due to the decrease in nitrogen fertilizer while nitrogen output was decreased by 6.3%. Non-point source (NPS) pollution was also estimated by mass balance approach, which increased by 22% than the previous research in 2005. The emission of nitrous oxide ($N_2O$) caused by denitrification was newly examined in this research. About 8,289 ton/yr of $N_2O$ was released from agriculture area and domestic wastewater treatment plant.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.27 no.3
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• pp.143-147
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• 2017

To evaluate surface characteristics and improve crystalline quality of AlN single crystal grown by physical vapor transport (PVT) method, wet chemical etching process using $KOH/H_2O_2$ mixture in a low temperature condition and thermal annealing process was proceeded respectively. Conventional etching process using strong base etchant at a high temperature (above $300^{\circ}C$) had formed over etching phenomenon according to crystalline quality of materials. When it occurred to over etching phenomenon, it had a low reliability of dislocation density because it cannot show correct number of etch pits per estimated area. Therefore, it was proceeded to etching process in a low temperature (below $100^{\circ}C$) using $H_2O_2$ as an oxidizer in KOH aqueous solution and to be determined optimum etching condition and dislocation density via scanning electron microscope (SEM). For improving crystalline quality of AlN single crystal, thermal annealing process was proceeded. When compared with specimens as-prepared and as-annealed, full width at half maximum (FWHM) of the specimen as-annealed was decreased exponentially, and we analyzed the mechanism of this process via double crystal X-ray diffraction (DC-XRD).

• Journal of the Korean Electrochemical Society
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• v.17 no.1
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• pp.7-12
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• 2014

There is increasing demand on the reducing the weight and the volume of the major components in lithium secondary battery to improve energy density. Separator not only provides pathway for lithium ion movement but also prevents direct contact between anode and cathode. Herein we fabricated polyethylene separator by varying biaxial stretching ratio to obtain membrane thickness of 16, 12, and $9{\mu}m$. Mechanical and thermal properties of the separator with different thickness were investigated. Also rate capability and charge-discharge cycle property up to 500 cycles were studied using coin type full-cell with $LiCoO_2$ and graphite as a cathode and an anode, respectively. All the cells using separator with different thickness demonstrated excellent capacity retention after 500cycles (around 80%). Considering the rate capability, cell using separator with thickness of $9{\mu}m$ showed best performance. Interestingly, separator thickness of $9{\mu}m$ was more resistant to heat contraction compared to that of $16{\mu}m$ separator.

• Korean Chemical Engineering Research
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• v.52 no.5
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• pp.657-666
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• 2014

Coal gasification technology is considered as next generation clean coal technology even though it uses coal as fuel which releases huge amount of greenhouse gas because it has many advantages for carbon capture. Coal or pet-coke slurry gasification is very attractive technology at present and in the future because of its low construction cost and flexibility of slurry feeding system in spite of lower efficiency compared to dry feeding technology. In this study, we carried out gasification experiment using bituminous coal slurry sample by integrating coal slurry feeding facility and slurry burner into existing dry feeding compact gasifier. Especially, our experiment was conducted under fairly lower operation temperature than that of existing entrained-bed gasifier, resulting in partial slagging operation mode in which only part of ash was converted to slag and the rest of ash was released as fly ash. Carbon conversion rate was calculated from data analysis of collected slag and ash, and then cold gas efficiency, which is the most important indicator of gasifier performance, was estimated by carbon mass balance method. Fairly high performance considering pilot-scale experiment, 98.5% of carbon conversion and 60.4% of cold gas efficiency, was achieved. In addition, soundness of experimental result was verified from the comparison with chemical equilibrium composition and energy balance calculations.