• Korean Chemical Engineering Research
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• v.43 no.1
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• pp.27-32
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• 2005

We propose an effective and environmentally friendly dry stripping method using a supercritical carbon dioxide ($SCCO_2$) system modified by a single and multiple cosolvents to remove ion-implanted photoresist and residue from a wafer surface at three different temperatures (97, 148, $200^{\circ}C$) and pressures (200, 300, 400 bar). After high dose of ion implantation the photoresist was not easily removed by using pure $SCCO_2$, but swollen. The $SCCO_2$ system modified by single cosolvents and multiple cosolvents mixed with aprotic solvents could not effectively remove the heavy organics, but swell them. However, the $SCCO_2$ system modified with multiple cosolvent (5%, v/v) composed of DMSO and DIW showed high removal efficiency for ion-implanted photoresists at $97^{\circ}C$ and 200 bar for 30 min (about 80%). In this study it has been shown that the dry stripping method using $SCCO_2$ system modified with multiple cosolvents could replace either plasma ashing or acid and solvent wet bench method and dramatically reduce accompanied chemical usage and disposal.

• Journal of the Semiconductor & Display Technology
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• v.4 no.4 s.13
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• pp.19-26
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• 2005

The process optimization of ozone concentration and half life time was investigated in ultra pure water and alkaline solutions for the wet cleaning of silicon wafer surface at room temperature. In the ultra pure water,. the maximum concentration (35 ppm) of ozone was measured at oxygen flow rate of 3 liters/min and ozone generator power over 60%. The half life time of ozone increased at lower power of ozone generator. Additive gases such as $N_2$ and $CO_2$ were added to increase the concentration and half life time of ozone. Although the maximum ozone concentration was higher with the addition of $N_2$ gas, a longer half life time was observed with the addition of $CO_2$. When $NH_4OH$ of 0.05 or 0.10 vol% was added in DI water, the pH of the solution was around 10. The addition of ozone resulted in the half life time less than 1 min. In order to maintain high pH and ozone concentration, ozone was continuously supplied in 0.05 vol% ammonia solutions. 3 ppm of ozone was dissolved in ammonia solutions. The static contact angle of silicon wafer surface became hydrophilic. The particle removal was possible alkaline ozone solutions. The organic contamination can be removed by ozonated ultra pure water and then alkaline solution containing ozone can remove the particles on silicon surface at room temperature.

• Korean Journal of Materials Research
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• v.8 no.6
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• pp.532-537
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• 1998

The purpose of this study was to investigate the behavior of ozone in DI water and the reaction with wafers during the semiconductor wet cleaning process. The solubility of ozone in DI water was not only dependent on the temperature but also directly proportional to the input concentration of ozone. The lower the initial ozone concentration and the temperature, the longer the half-life time of ozone. The reaction order of ozone in DI water was calculated to be around 1.5. The redox potential reached a saturation value in 5min and slightly increased as the input ozone concentrations increased. The completely hydrophilic surface was created in Imin when HF etched silicon wafer was cleaned in ozonized DI water containing higher ozone concentrations than 2ppm. Spectroscopic ellipsometry measurements showed that the chemical oxide formed by ozonized DI water was measured to be thicker than that by piranha solution. The wafers contaminated with a non-ionic surfactant were more effectively cleaned in ozonized DI water than in piranha and ozonized piranha solutions.

• Membrane Journal
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• v.19 no.4
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• pp.261-267
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• 2009

Polyimide which is the glassy polymer has high chemical resistance, thermal stability and high mechanical property. In this study, the polyimide hollow fiber membranes were prepared by the dry-jet wet phase inversion in order to investigate the permeation porperties of the $H_2S$ and $CH_4$. The morphology of prepared hollow fiber membranes and their permeation behaviors of $H_2S$ and $CH_4$ before and after silicon coating were evaluated. The permeance of $H_2S$ and $H_2S/CH_4$ selectivity increased due to plasticization with increasing the feed pressure. The permeance of KSM03b and selectivity of KSM03d were highest among the three type membranes used this experiments. The permeance decreased but the $H_2S/CH_4$ selectivity increased with increasing the air gap. The permeance reduced after silicon coating. However, the selectivity increased and the selectivity of KSM03d was 275 at 7 atm.

• Journal of the Mineralogical Society of Korea
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• v.20 no.4
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• pp.339-349
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• 2007

For various types of the Pungchon limestone, diverse mineral characters of the limestone including their size and morphology are investigated by using of ELS and SEM to examine the possibility of application as fillers to paper industry. Also, the measurement of zeta potential and the evaluation of coagulation properties in calcite suspension was made for fine powders of the limestone to examine the applicability and efficiency in wet-papermaking process. Fine powder of the Pungchon lime-stone, largely controlled by original mineral characters of ore in mineralogical aspects, exhibits some-what different trend in particle morphology according to ore types, and thereby, the size distribution, zeta potential and coagulation properties also become different. The examined whiteness, brightness, opacity and sheet strength in hand sheet also show remarkable differences according to ore types. These are seemed to be basically due to the results of combined effects of whiteness, site distribution, refractive index, and morphology of the limestone powder on the properties of hand sheet. Considering the investigated results, all types of the Pungchon limestone appear to be sufficiently applicable to paper industry. Especially, the mega-crystalline calcite type is evaluated to be overall suitable for the purpose of paper industry due to the higher values in whiteness and brightness. In addition the fine powder of micro-crystalline calcite type is assessed particularly to have a good quality in sheet strength by virtue of irregular particle shape.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2003.05a
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• pp.14-14
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• 2003

Silicon carbide (SiC)는 높은 power 영역과 높은 온도영역에서도 작동 가능한 우수한 반도체 물질이다. 또한 우수한 열적 화학적, 안정성을 가지고 있어 가흑한 조건에서의 소자로써도 사용 가능하다. 현재 SiC 적용분야로는 우수한 전기적, 기계적 성질을 이용한 미세소자(MEMS)와 GaN 와 거의 유사한 격자상수를 가지는 것을 이용한 GaN epitaxial 성장의 기판으로도 사용되어진다. 그러나 SiC 는 기존의 습식식각 용매에 대해 화학적 안정성을 가지고 있기 때문에 전자소자의 제작에 있어서 플라즈마를 이용한 건식식각의 중요성이 대두되어지고 있다. 소자제작에 있어 이러한 건식식각시 식각 단면의 제어, 이온에 의한 낮은 손상 정도, 매끄러운 식각 표면, 그리고 고속의 식각 속도둥이 요구되어진다. 본 실험에서는 식각 속도의 증가와 수직한 식각 단면둥을 획득하기 위하여 SF6 플라즈마에서 Source power, dc bias voltage, 그리고 외부에서 인가되는 자속의 세기를 변화시쳐가며 식각 속도, 식각 마스크와의 식각 션택비, 식각 단면둥과 같은 SiC 의 식각 특성을 관찰하였다. 식각 후 식각 단면은 주사전자 현미경(SEM)을 통해 관찰하였다. 본 실험에서의 가장 높은 식각 속도는 분당 1850n 로써 이때의 공정조건은 1400W 의 inductive power, -600V 의 dc bias voltage, 20G 의 외부자속 세기이었다. 또한, 높은 inductive power 조건과 낮은 dc bias voltage 조건에서 Cu는 $SF_6$ 플라즈마 내에서 식각부산물의 증착으로 인해 SiC 와 무한대의 식각선택비를 보였다. 이러한 Cu 마스크를 사용한 SiC 의 식각에서는 식각 후 수직한 식각 단변을 관찰할 수 있었다. 것올 알 수 있다. 따라서, 기존의 pve 보다 세라믹 기판의 경우가 수분 흡수율이 높아 더 오랫동안 전류를 흐르게 하여 방식성이 개선된 것으로 판단된다.을 통해 경도가 증가한 시편의 경우 석출상의 크기가 5nm 이하로 매우 작고 대체로 기지와 연속적인 계면을 형성하나, 열처리가 진행될수록 석 출상의 크기가 커지고 임계크기 이상에 이르면 연속적인 계면은 거의 발견되지 않고, 대부 분 불연속적이고 확연한 계면을 형성함을 관찰 할 수 있었다. 알루미나(${\alpha}-Al_2O_3$) 기판 위에 증착한 $(Ti_{1-x}AI_{x})N$ 피막은 마찬가지로 (200) 우선 방위를 나타내었으나, 그 입자의 크기가 수십 nm로 고속도강위에 증착한 피막에 비해 상당히 크게 형성되었다. 또한 열처리 후에 AIN의 석출이 진행됨에도 불구하고 경도 증가는 나타나지 않고, 열처리가 진행됨에 따라 경도가 감소하는 양상만을 나타내었다. 결국 $(Ti_{1-x}AI_{x})N$ 피막이 열처리 전후에 보아는 기계적 특성의 변화 양상은 열역학적으로 안정한 Wurzite-AlN의 석출에 따른 것으로 AlN 석출상의 크기에 의존하며, 또한 이러한 영향은 $(Ti_{1-x}AI_{x})N$ 피막에 존재하는 AI의 함량이 높고, 초기에 증착된 막의 업자 크기가 작을 수록 클 것으로 여겨진다. 그리고 환경의 의미의 차이에 따라 경관의 미학적 평가가 달라진 것으로 나타났다.corner$적 의도에 의한 경관구성의 일면을 확인할수 있지만 엄밀히 생각하여 보면 이러한 예의 경우도 최락의 총체적인 외형은 마찬가지로 $\ulcorner$순응$\lrcorner$의 범위를 벗어나지 않는다. 그렇기 때문에

• Resources Recycling
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• v.4 no.1
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• pp.12-19
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• 1995

This study was carried out to remove the iron and impurities usmg hydrocyclone and HGMS for recycling of sludge from the granite stone cutting and polishing industrγ in the basic of chemi떠1 analysis and minerallogical investigation. This sludge consist of 70.9% $SiO_2$ 13.6% $Al_2O_3$ and It also contained 2.52% of $Fe_2O_7$ and 0.29% of $TiO_2$, as a main impurities to decrease the whiteness. As the result of hydrocyclone experiment, It was very good condition that are 100~150 g/l of sludge amount, 2.0~ 2.5 mm of underflow nozzle size, and 1.2~1.6 kg/$\textrm{cm}^2$ of pressure for 85% sludge product with the $-37{\mu}\textrm{m}$ size. $Fe_2O_3$ and $TiO_2$, contents by treatment of HGMS were decreased with 0.65% and 0.07% each at 10,000 gauss of magnetic field strength, and addih$\upsilon$n of Sodium tripolyphosphate as a dispersant was effected to get low grade F Fe,Ol and TiO, concentrate. PhYSIcal properties of this stone sludge product were showed 58.5% of whiteness, 1 13.4% of firing shrinkage and 3.0812 $\textrm{m}^2$/g of specific surface area.

• Resources Recycling
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• v.33 no.1
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• pp.58-68
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• 2024

Critical minerals such as nickel, cobalt and lithium, are known as materials for cathodic active materials of lithium ion batteries. The consumption of the minerals is expected to grow with increasing the demands of electric vehicles, resulting from carbon neutrality. Especially, the demand for LIB (lithium ion battery) recycling is expected to increase to meet the supply of nickel, cobalt and lithium for LIB. The recycling of EOL (end-of-life) LIB can be achieved by leaching EOL LIB using inorganic acid such as HCl, HNO₃ and H₂SO₄, which are regarded as hazardous materials. In the present study, the potential use of MSA (Methanesulfonic acid), as an alternative lixiviant replacing sulfuric acid was investigated. In addition, leaching behaviors of NCM black mass leaching with MSA was also investigated by studying various leaching factors such as chemical concentration, leaching time, pulp density (P/D) and temperatures. The leaching efficiency of nickel (Ni), cobalt (Co), lithium (Li), and manganese (Mn) from LIB was enhanced by increasing concentration of lixiviant and reductant, leaching time and temperature. The maximum leaching of the metals was above 99% at 80℃. In addition, MSA can replace sulfuric acid to recover Ni, Co, Li, Mn from NCM black mass.

• Applied Chemistry for Engineering
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• v.27 no.4
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• pp.391-396
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• 2016

The absorption efficiency of amine $CO_2$ absorbent (KoSol-5) developed by KEPCO research institute was evaluated using a 0.1 MW test bed. The performance of post-combustion technology to capture two tons of $CO_2$ per day from a slipstream of the flue gas from a 500 MW coal-fired power station was first confirmed in Korea. Also the analysis of the absorbent regeneration energy was conducted to suggest the reliable data for the KoSol-5 absorbent performance. And we tested energy reduction effects by improving the absorption tower inter-cooling system. Overall results showed that the $CO_2$ removal rate met the technical guideline ($CO_2$ removal rate : 90%) suggested by IEA-GHG. Also the regeneration energy of the KoSol-5 showed about $3.05GJ/tonCO_2$ which was about 25% reduction in the regeneration energy compared to that of using the commercial absorbent MEA (Monoethanolamine). Based on current experiments, the KoSol-5 absorbent showed high efficiency for $CO_2$ capture. It is expected that the application of KoSol-5 to commercial scale $CO_2$ capture plants could dramatically reduce $CO_2$ capture costs.

• Economic and Environmental Geology
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• v.45 no.2
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• pp.121-135
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• 2012

Soil dispersion and heavy metal leaching with two heavy metal-contaminated soils were studied to derive the optimal dispersion condition in the course of developing the remedial technology using magnetic separation. The dispersion solutions of pyrophosphate, hexametaphosphate, orthophosphate and sodium dodecylsulfate (SDS) at 1 - 200 mM and the pH of solutions was adjusted to be 9 - 12 with NaOH. The clay content of suspension as an indicator of dispersion rate and the heavy metal concentration of the solution were tested at the different pHs and concentrations of the dispersion solution during the experiment. The dispersion rate increased with increasing the pH and dispersion agent concentration of the solution. The dispersion efficiency of the agents showed as follows: pyrophosphate > hexametaphosphate > SDS > orthophosphate. Arsenic leaching was sharply increased at 50 mM of phosphates and 100 mM of SDS. The adsorption of $OH^-$, phosphates and dodecysulfate on the surface of Fe- and Mn-oxides and soil organic matter and the broken edge of clay mineral might decrease the surface charge and might increase the repulsion force among soil particles. The competition between arsenic and $OH^-$, phosphates and dodecylsulfate for the adsorption site of soil particles might induce the arsenic leaching. The dispersion and heavy metal leaching data indicate that pH 11 and 10 mM pyrophosphate is the optimum dispersion solution for maximizing dispersion and minimizing heavy metal leaching.