• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.9
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• pp.77-86
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• 1998

A two-chip humidity sensor system has been developed which consists of a capacitive sense element die and a CMOS interface chip. The sense element was fabricated using thin polyimide films on (100) silicon substrate and showed excellent linearity(0.72%FS), low hysteresis (<3%) and low temperature coefficient(-0.0285 ~-0.0542pF/K) over a wide range of relative humidity and temperature. The capacitance-relative humidity characteristic exhibited a drift of 2~3% after 9 weeks of exposure to 4$0^{\circ}C$/90%RH. The signal-conditioning circuitry was fabricated using an 1.2- ${\mu}{\textrm}{m}$, one poly double metal CMOS process. The measured output voltage of the sensor system was directly proportional to relative humidity and showed good agreement with theory.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.48-48
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• 2018

습도는 대기중에 분포되어있는 물 분자의 양으로 사람이 살아가는데 있어 막대한 영향을 주는 환경적 요소중 하나이다. 산업적 가스의 순도에 막대한 영향을 끼치기도 하고, 반도체 산업에서 불량률과도 밀접한 관련이 있다. 또한, 식품학이나 기상학, 농사와도 밀접한 관련이 있어서 습도를 측정하는 것은 중요시 되고 있다. 이를 위해서 많은 물질들이 사용되고, 연구되었다. 산화 구리, 산화 아연, 산화 납 등의 산화금속 물질들이나 전도성 고분자, 실리콘 기반의 물질들이 주로 사용되고 있는데, 그 중 산화 금속이 쉬운 합성 방법과 낮은 단가, 명확한 작동 원리로 인해 널리 사용되고 있다. 산화 아연의 경우 넓은 direct band gap energy와 우수한 내화학성으로 인해 주로 사용되는데 그 중 1차원 물질인 nanowire의 경우 비등성 구조와 높은 비표면적을 갖는 특성으로 인해 산화 아연의 nanowire 구조가 많이 사용된다. 본 연구에서는 열처리 공정을 이용하여 산화아연의 nanowire 구조를 합성하였고, 합성된 nanowire는 양쪽의 미세전극을 직접적으로 연결하여 간편한 방식으로 소형 소자를 만들 수 있다는 장점이 있다. 열처리 공정 이전에 전기도금 방식을 이용하여 아연층을 증착 하였다. 전기도금 조건은 0.1 M의 염화 아연과 1 M의 염화 칼륨으로 구성된 용액에 -1.1 V를 인가하였다. 합성된 아연층은 열처리 공정에 의해 산화아연의 nanowire 구조체로 변환되고, SEM (scanning electron microscope)를 통해 표면 형상을 관찰 하였고, XRD (X-ray diffraction)을 통해 미세구조를 확인하였다. -1 V부터 1 V 범위의 전압을 흘려주어 형성된 소자의 전기적 특성을 확인하였고, 1 V를 인가하였을 때, 습도 변화에 따른 센서 소자의 저항변화를 통해 습도 센서로서의 특성을 확인 하였다.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.42 no.11
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• pp.1-8
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• 2005

In this paper, we present design and prototyping of a low-cost, integrated multi-functional micro health sensor chip that can be used or embedded in widely consumer devices, such as cell phone and PDA, for monitoring environmental condition including air pressure, temperature and humidity. This research's scope includes basic individual sensor study, architecture for integrating sensors on a chip, fabrication process compatibility and test/evaluation of prototype sensors. The results show that the integrated TPH sensor has good characteristics of ${\pm}\;1\%FS$ of linearity and hysteresis for pressure sensor and temperature sensor and of ${\pm}\;5\%FS$ of linearity and hysteresis But if we use 3rd order approximation for humidity sensor, full scale error becomes much smaller and this will be one of our future study.

• Korean Chemical Engineering Research
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• v.55 no.4
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• pp.478-482
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• 2017

Humidity control of proton exchange membrane fuel cell(PEMFC) is very important control condition during driving. In terms of water management, low humidification conditions are advantageous, and high humidification is advantageous in terms of drainage utilization and energy efficiency. In this study, the characteristics of outlet water in low humidification and high humidification process were studied in terms of utilization of discharged water. Since the impurities in the effluent are generated during the degradation of the membrane and the electrode assembly(MEA), degradation of the MEA under low humidification and high humidification conditions was also studied. The rate of radical generation was high at low humidification condition of the anode RH 0%, which showed that it was the main cause of the degradation of the polymer membrane. Analysis of effluent showed low concentration of fluoride ion concentration of about 20 ppb at high humidification (both electrodes RH 100%) and 0.6 V, which was enough to be used as the feed water for electrolysis. Very low concentration of platinum below 0.2 ppb was detected in the condensate discharged from the high humidification condition.

• Korean Journal of Optics and Photonics
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• v.24 no.5
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• pp.251-255
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• 2013

In this paper, the characteristics of a humidity sensor implemented by Mach Zehnder Interferometer (MZI) in a Planar Lightwave Circuit (PLC) have been designed and demonstrated. The humidity outside is detected with polyvinylpyrrolidone (PVP) coated on the etched arm of the MZI. The length of the etched arm is 10 mm and the PVP was coated by dip-coating into the etched region. As the refractive index of the PVP changes with the surrounding humidity, the PVP-coated humidity sensor presented changes in the interferogram depending on RH (Relative Humidity) around the PLC. The measured results show that the proposed humidity sensor works successfully in the range of 30% to 80% of RH.

• Journal of the Korean Society of Propulsion Engineers
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• v.4 no.3
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• pp.83-94
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• 2000

A systematic humidity correction technique that can be used for any type of engine control mode is developed to predict the variation of engine performance due to inlet humidity. Limitation of conventional method is rot identified and then, a new method is proposed to take into account the humidity effects on each engine component characteristics and to find the variation of equilibrium running point through a re-match process between the components with a given engine control variable depending on the humidity of inlet. Comparisons are made between two methods for a single spool gas turbine engine, and it was found that the conventional method leads to invalid correction when a physical variable such as rotational speed is controlled for engine operation in humid environment. It was also found that the accuracy of the conventional method depends on the engine control mode and the engine configuration whereas the proposed method can be used for any type of engine control mode and engine configuration.

• Journal of the Korean Vacuum Society
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• v.15 no.3
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• pp.287-293
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• 2006

Diamond-like carbon (DLC) film was deposited using benzene $(C_6H_6)$ by r. f-plasma assisted chemical vapor deposition. The tribological properties of the DLC film were tested by rotating ball-on-disc type tribometer isolated by a chamber. The tribological test was performed in air environment of relative humidity ranging from 0 to 90% in order to observe the tribological behavior of the DLC film with the change of humidity. We used steel ball and DLC coated steel ball to investigate the effect of the counterface material. Using steel ball, the friction coefficient of DLC film increased from 0.025 to 0.2 as the humidity increased from 0% to 90%. In case of DLC coated steel ball which didn't form the Fe-rich debris, the friction coefficient showed much lower dependence of humidity as 0.08 in relative humidity 90%. We confirmed that the high humidity dependence of the friction coefficient using steel ball resulted from the increase of debris size with humidity and the formation of Fe-rich debris by the wear of steel ball. And the friction coefficient was immediately dropped when the relative humidity changed from 90% to 0% during test using steel ball. From this result, we confirmed that the effect of the Fe-rich debris on the friction coefficient was that Fe element in debris formed the highly sensitive graphitic transfer layer to humidity.

• Journal of the Korea Concrete Institute
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• v.20 no.2
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• pp.131-138
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• 2008

Humidity and strain were estimated for understanding the relation between humidity change by self-desiccation and shrinkage in high-performance concrete with low water binder ratio. Internal humidity change and shrinkage strain were about 10%, 4% and $320\times10^{-6}$, $120\times10^{-6}$ respectively on concrete with water binder ratio 0.3, 0.4 and from the results, humidity change and shrinkage represented the strong linear relation regardless of mixture. For specifying the relation on internal humidity change and autogenous shrinkage strain, shrinkage model was established which is driven by capillary pressure in pore water and surface energy in hydrates on the assumption of a single network and extended meniscus in pore system of concrete. This model and experimental results had a similar tendency so it would be concluded that the internal humidity change by self-desiccation in HPC originated in small pores less than 20 nm, therefore controlling plan on autogenous shrinkage might be focused on surface tension of water and degree of saturation in small pore.

• Journal of Korea Society of Industrial Information Systems
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• v.19 no.2
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• pp.31-36
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• 2014

In this paper, we developed an intergrated piezoresistive temperature and humidity sensor using nano-technology, and evaluated the properties. In the measuring range from $20^{\circ}C$ to $80^{\circ}C$, output sensitivity of temperature was about 0.75mV/$1^{\circ}C$. Output sensitivity of humidity was about 1.35mV/10%(RH). Therefore, developed sensor suggests that it is possible applicable to the general residential environment.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2002.11a
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• pp.719-722
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• 2002

임베디드 시스템을 이용하여 TCP/IP 상의 인터넷 제어시스템을 구현하였다. AT90S8535 마이크로 컨트롤러 구조 및 각종명령 레지스터 동작 원리, avr-gcc 하드웨어 프로그래밍 및 명령 레지스터의 구현원리, JAVA 애플릿 프로그래밍, 전반적인 하드웨어 기초 이론을 바탕으로 Mellow Device 1300 임베디드 시스템과 AVR90S853S 마이크로 컨트롤러 상호간의 시리얼 통신을 이용하여 원격지의 온/습도 검침 및 각종 하드웨어 디바이스의 on/off를 구현하도록 설계하였고 실시간으로 검출된 온/습도 데이터를 JAVA 애플릿을 이용하여 그래픽 챠트로 보기 쉽게 표현하였으며 A/D 변환된 온도 및 습도 데이터와 각종 H/W 디바이스 on/off 상태 데이터를 RS232 인터페이스를 이용하여 Mellow Device 1300로 송/수신하도록 구현하였다.