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http://dx.doi.org/10.9723/jksiis.2014.19.2.031

Characteristics analysis and Fabrication of Integrated Piezoresistive Temperature & Humidity Sensors  

Ryu, Jeong-Tak (대구대학교 전자전기공학부)
Publication Information
Journal of Korea Society of Industrial Information Systems / v.19, no.2, 2014 , pp. 31-36 More about this Journal
Abstract
In this paper, we developed an intergrated piezoresistive temperature and humidity sensor using nano-technology, and evaluated the properties. In the measuring range from $20^{\circ}C$ to $80^{\circ}C$, output sensitivity of temperature was about 0.75mV/$1^{\circ}C$. Output sensitivity of humidity was about 1.35mV/10%(RH). Therefore, developed sensor suggests that it is possible applicable to the general residential environment.
Keywords
Nano-technology; Temperature sensor; Humidity sensor; Piezoresistive sensor; Residential environment;
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Times Cited By KSCI : 4  (Citation Analysis)
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