• Journal of the Institute of Electronics Engineers of Korea SC
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• v.43 no.6 s.312
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• pp.27-32
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• 2006

A temperature-compensated hygrometer has been developed using resistive humidity sensors. It consist of a sine wave generator, logarithm converters, rectifiers, and amplifiers. The hygrometer accomplishes the linearization and temperature compensation of sensor characteristics. The theory of operation is presented and experimental results are used to verify theoretical predictions. The experimental results show that the conversion sensitivity of the hygrometer is about 24.8 mV/%RH and the linearity error of the conversion characteristic is less than 17.2 % over a relative humidity range from 30 to 80 %RH. The results also show that the temperature coefficient of the output voltage is less than $10149ppm/^{\circ}C$ over a temperature range from 22 to $40^{\circ}C$.

• Journal of the Korean Society of Industry Convergence
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• v.9 no.4
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• pp.317-321
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• 2006

본 연구는 웰빙 환경 조성에 적합한 습도센서, 온도센서와 기류센서를 이용한 쾌적도 측정시스템에 관한 것이다. 이 측정시스템이 나타내는 쾌적도는 기류와 온도에 민감하게 나타났다. 시스템을 위한 온도와 습도 일체형 센서와 기류센서를 설계 및 제작하고, 마이크로 컨트롤러에서 센서 신호를 측정하여 ISO7730에서 나타내는 예상온열 감지수(PMV)와 쾌적감 지수(CSV)를 계산하고, 각각의 계산 값을 LCD에 표시하도록 하였다. 인위의 환경에서 실험한 결과, 본 시스템이 공기조화시스템, 자동차 기류조정시스템, 가정과 사무실 병원 등의 많은 분야에 적용이 될 수 있음을 알 수 있었다.

• Journal of the Institute of Electronics Engineers of Korea CI
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• v.48 no.2
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• pp.96-105
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• 2011

Ubiquitos sensor network(USN) is a technology which is widely used in our life. This paper introduces an example of design and implementation for a system which is based on the USN technology and can provide an efficient management tool for a space that should be precisely controlled for a certain range of uniformity in temperature and humidity. This introduced system builds a wireless sensor network using a number of sensor modules that are equipped with temperature and humidity sensors, and collects temperature and humidity information in real-time while simultaneously providing a method for monitoring the status of temperature and humidity by the graphical user interface. Also, the system will give a warning signal if the monitored values are differ from the pre-specified values of temperature and humidity for each sensor module more than a certain amount of tolerance. This temperature and humidity logging and monitoring system can perform better management for the space easily and efficiently by automating the existing manual method for data collection and management. Furthermore, using the stored data, it can make possible to perform post-analysis on the problems caused by temperature and humidity and to obtain information for environmental enhancement for the space.

• Polymer(Korea)
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• v.36 no.4
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• pp.486-493
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• 2012

Photocurable sulfonated polyimide (SPI) polyelectrolyte containing chalcone group was prepared and fabricated on an alumina electrode pretreated with chalcone-containing silane-coupling agent. SPI films with bis(tetramethyl)ammonium 2,2'-benzidinedisulfonate ($Me_4N$-BDS)/4,4'-diaminochalcone (DAC)/pyromellitic dianhydride (PA)= 90/10/100 possessed very linear response(Y = -0.04528X+7.69446, $R^2=0.99675$) and showed resistance changing from 4.48 to $2.1k{\Omega}$ between 20 and 95 %RH. The response time for absorption and desorption measurements between 33 and 94 %RH% was about 79 s, which affirmed the high efficiency of crosslinked SPI film for rapid detection of humidity. A negative temperature coefficient showing $-0.49%RH/^{\circ}C$ was found and proper temperature compensation should be considered in future applications. Moreover, pretreatment of the substrates with chalcone-containing silane-coupling agent was performed to improve the water durability and the stability of the humidity sensors at a high humidity and a high temperature and long-term stability for 480 h. The crosslinked SPI films anchored to electrode substrate could be a promising material for the fabrication of efficient humidity sensors with superior characteristics compared to the commercially available sensors.

• Applied Chemistry for Engineering
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• v.10 no.3
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• pp.461-466
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• 1999

The humidity sensor containing ammonium salt was prepared from the copolymer of 2-methacryloxyethyl dimethyl 2-hydroxyethyl ammonium bromide (MDHAB)/MMA/DAEMA = 6/3/1. The humid membrane was fabricated on the gold/alumina electrode by dipping. The impedances were $298k{\Omega},\;11k{\Omega}$, and $2.3k{\Omega}$ at 40%RH, 70%RH and 90%RH, respectively, at $5^{\circ}C$ and the humidity-sensitive characteristics were suitable for low temperature humidity sensor. The temperature-dependent coefficient between $5^{\circ}C$ and $20^{\circ}C$ was found to be $-0.80%RH/^{\circ}C$ and the hysteresis falled in the ${\pm}2%RH$ range. The response time was found to be 38 sec for the relative humidity ranging from 34%RH to 88%RH at $20^{\circ}C$. The reliabilities such as temperature cycle, humidity cycle, high temperature and humidity resistance, electrical load stability, stability of long-term storage and water durability were measured and evaluated for the application as a humidity sensor.

• 전기의세계
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• v.35 no.1
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• pp.11-19
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• 1986

본고의 내용은 다음과 같다. 1. 센서의 정의 2. 광(시각)센서 3. 온도(촉각)센서 4. 자기(촉각)센서 5. 가스.습도(후각)센서 6. 압력(촉각, 청각)센서

• Journal of the Microelectronics and Packaging Society
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• v.10 no.4
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• pp.21-27
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• 2003

The copolymers with various composition of methyl methacrylate (MMA), ethyl methacrylate (EMA), methacrylic acid (MA) and hydroxyethyl methacrylate (HEMA) were synthesized for capacitive humidity sensitive materials. The capacitive humidity sensor consisted of a polymethacrylate film coated on both sides with gold electrode. Capacitance versus relative humidity increased with HEMA content in the copolymer. In the case of self-crosslinkable MMA/MA/HEHA= 40/10/10, the average capacitance at 30%RH, 60%RH and 90%RH are 102, 134 and 166 pF, respectively. And also, the hysteresis, temperature cycle and long-term stability were evaluated as a capacitance humidity sensor.

• Electrical & Electronic Materials
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• v.6 no.2
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• pp.129-136
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• 1993

습도 감지소자의 물질 중 이온형의 대표적인 물질인 TiO$_{2}$ 습도 센서와 TiO$_{2}$에 V$_{2}$O$_{5}$를 첨가한 TiO$_{2}$-V$_{2}$O$_{5}$ 세라믹 습도센서를 제작하고 V$_{2}$O$_{5}$함량의 변화, 열처리 온도 및 열처리 시간에 따른 습도감지 특성 및 동작온도에 따른 특성 등을 조사하였으며 XRD와 SEM으로 그 원인을 규명하였다. TiO$_{2}$에 V$_{2}$O$_{5}$를 첨가하면 선형성이 좋아지는 것을 알 수 있었고 제작한 시료 중 V$_{2}$O$_{5}$의 함량이 1mol% 열처리 조건이 1000.deg.C, 1시간인 소자는 동작온도 40.deg.C에서 약 95%의 감도를 나타내었다.

• Journal of Sensor Science and Technology
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• v.8 no.1
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• pp.32-37
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• 1999

A capacitance-type humidity sensor with mesa structure in which porous silicon layer is used as humidity-sensing material is developed and its humidity sensing properties are measured. This sensor has a structure where two electrodes are set on the up-side of the wafer against the past typical structure having these electrodes on the up and down-side of the wafer. Therefore, the sensor can be fabricated monolithically to be more compatible with the IC process technology, and is possible to detect more correct output capacitance by removing the effect of the parasitic capacitance from the bottom layer and other junctions. To do this, the sensor was fabricated using process such as localized formation of porous silicon, oxidation of porous silicon layer, and etching of oxidized porous silicon layer. From the completed samples, the dependence of capacitance on the relative humidity of 55 to 90% more was measured at room temperature. As the result, the measured capacitance increased monotonously higher at the low frequency of 120 Hz, where the capacitance was observed to increase over 300%.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.9
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• pp.77-86
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• 1998

A two-chip humidity sensor system has been developed which consists of a capacitive sense element die and a CMOS interface chip. The sense element was fabricated using thin polyimide films on (100) silicon substrate and showed excellent linearity(0.72%FS), low hysteresis (<3%) and low temperature coefficient(-0.0285 ~-0.0542pF/K) over a wide range of relative humidity and temperature. The capacitance-relative humidity characteristic exhibited a drift of 2~3% after 9 weeks of exposure to 4$0^{\circ}C$/90%RH. The signal-conditioning circuitry was fabricated using an 1.2- ${\mu}{\textrm}{m}$, one poly double metal CMOS process. The measured output voltage of the sensor system was directly proportional to relative humidity and showed good agreement with theory.