• Journal of the Korean Ceramic Society
• /
• v.36 no.3
• /
• pp.301-306
• /
• 1999

CO2 감지용 La2O3-SnO2 계 후막형 소자를 제조하여 CO2가스에 대한 기초 감지 특성을 조사하였고, 감지 분말의 입자크기와 제조방법에 따른 감도 변화를 고찰하였다. 후막 소자는 40$0^{\circ}C$의 작동온도와 4wt.%의 La2O3가 첨가되 srjt에서 가장 좋은 감도를 나타내었고, 낮은 습도영역에서 우수한 감지 특성을 보였다. 분말 혼합법에 의해 제조된 소자에 있어서 La2O3와SnO2 분말의 입자가 미세할수록 우수한 감도를 나타내었고, La2O3의 입도가 SnO2의 입도 보다 감도에 더 큰 영향을 주었다. SnO2 후막 표면에 La 용액을 코팅하여 제조된 센서는 가장 우수한 CO2 감도특성을 보였다.

• The Transactions of the Korean Institute of Power Electronics
• /
• v.9 no.2
• /
• pp.105-111
• /
• 2004

In this paper, a new self-oscillated type high voltage power supply for the OPC(Organic Photo Conductor) charge is proposed, which has variable constant current source characteristics to improve the charge characteristic of the OPC roller. The proposed control method enables high quality printing characteristics regardless of the circumstance change such as ambient temperature or humidity by changing the current reference signal. To verify the proposed control method various experiments are performed.

• Electrical & Electronic Materials
• /
• v.7 no.4
• /
• pp.325-330
• /
• 1994

In this paper, $TiO_2$ thin films were fabricated by Sol-Gel method and their electrical conductivity and humidity sensing properties have been investigated. The structure of Sol can be changed by controlling for hydrolysis condition. The uniform surface of thin films was confirmed by SEM. The electrical conductivity of thin films decreased with increasing heat treatment temperature. The humidity sensing properties of thin films were good in high humidity and low frequency regions.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2003.03a
• /
• pp.133-133
• /
• 2003

가스센서는 인간의 오감 중에 후각 기능을 대신하는 것으로 사회 여러 분야에 응용범위가 확대되고 있다. 유기화합물(VOC; volatile organic compounds) 가스는 대기환경을 오염시켜 스모그를 발생하며 인체에 발암을 유발하는 물질이기 때문에 많은 문제와 규제가 예상되고 있다. 따라서 VOC를 감지하고 정확히 분석할 수 있는 환경 측정용 센서에 대한 요구가 절실해지고 있다. 최근에는 고온에서 동작하는 산화물 반도체 센서와는 달리 상온에서 유해성 가스를 감지할 수 있는 전도성 고분자의 특성이 알려지면서 센서 물질로 각광을 받고 있으며, 특히 유해성 가스인 VOC 가스를 검지 할 수 있는 센서로서 주목을 받고 있다. 전도성 고분자인 Polypyrrole를 pyrrole monomer, APS, DBSA를 사용하여 $0^{\circ}C$, 1기압에서 화학중합을 하였다. 만들어진 powder를 chloroform과 DBSA를 사용하여 용액을 만들어 전극에 dipping하고 7$0^{\circ}C$, 질소 분위기에서 1시간동안 건조를 하고 methanol에서 1시간동안 soaking 처리를 한 뒤 7$0^{\circ}C$, 질소 분위기에서 4시간동안 열처리 과정을 통해 센서를 제조하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1999.11a
• /
• pp.402-405
• /
• 1999

The Study of this paper is to establish the optimum fabricating condition of specimens using Vapor Deposition Polymerization Method which belongs to a mode of preparation of functional organic thin films with dry process and to develop thin film type humidity sensor which has good humidity sensitive Characteristics. Scanning electron microscopy Atomic force microscopy were used to analyze the characteristics of thin film and the basic structure of the humidity sensor is a parallel capacitor which consists of three layers of Al/PI/Al. The characteristics of fabricated samples were measured under various conditions and obtained linear characteristics in the range of 20∼80%RH independent of temperature change and low hysteresis characteristics.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
• /
• v.12 no.4
• /
• pp.366-372
• /
• 2019

In this paper, we fabricated a capacitive humidity sensor with an IDT(Interdigitated) electrode using commercial polyimide containing fluorine, and its properties were measured and analyzed. First, in order to analyze the composition of commercial polyimide, EDS analysis was performed after patterning process on a silicon wafer. The area of the humidity sensor was $1.56{\times}1.66mm^2$, and the width of the electrode and the gap between the electrodes were $3{\mu}m$ each. The number of electrodes was 166 and the length of the electrode was 1.294mm for the sensitivity of the sensor. The fabricated sensor showed that the sensitivity was 24 fF/%RH, linearity <${\pm}2.5%RH$ and hysteresis <${\pm}4%RH$. As a result of measuring the capacitance value according to the frequency change, the capacitance vlaue decreased with increasing frequency. Capacitance deviations with 10kHz and 100kHz were measured as 0.3pF on average.

• Journal of Sensor Science and Technology
• /
• v.5 no.1
• /
• pp.37-42
• /
• 1996

ZnO films have been deposited on oxide grown Si wafers by the conventional thermal evaporation method. Anhydrous zinc acetate was directly heated and sublimed in the laboratory-made brass boat. The substrates temperature varied from $200^{\circ}C$ to $600^{\circ}C$. Oxygen has been flowed into the deposition chamber to change the partial pressure of oxygen. The films deposited at high oxygen pressure exhibited higher resistivity than films at low pressure. X-Ray Diffraction(XRD), Energy Dispersive Spectroscopy(EDS) and Rutherford Backscattering Spectrometry (RBS) were conducted on the films to reveal the crystallinity and composition of the ZnO films. The ZnO films deposited at high oxygen pressure were extremly sensitive to the humidity of higher than 70 % RH.

• Journal of Sensor Science and Technology
• /
• v.8 no.2
• /
• pp.115-123
• /
• 1999

A micro-gas sensor with heater and sensing electrode on the same plane was fabricated on phosphosilicate glass(PSG, 800nm)/$Si_3N_4$ (150nm) dielectric membrane. PSG film was provided by atmospheric pressure chemical vapor deposition(APCVD), and $Si_3N_4$ film by low pressure chemical vapor deposition (LPCVD). Total area of the fabricated device was $3.78{\times}3.78mm^2$. The area of diaphragm was $1.5{\times}1.5mm^2$, and that of the sensing layer was $0.24{\times}0.24mm^2$. Finite-element simulation was employed to estimate temperature distribution for a square-shaped diaphragm. The power consumption of Pt heater was about 85mW at $350^{\circ}C$. Tin thin films were deposited on the silicon substrate by thermal evaporation at room temperature and $232^{\circ}C$, and tin oxide films($SnO_2$) were prepared by thermal oxidation of the metallic tin films at $650^{\circ}C$ for 3 hours in oxygen ambient. The film analyses were carried out by SEM and XRD techniques. Effects of humidity and ambient temperature on the resistance of the sensing layer were found to be negligible. The fabricated micro-gas sensor exhibited high sensitivity to butane gas.

• Proceedings of the Korean Institute of Intelligent Systems Conference
• /
• 2007.11a
• /
• pp.131-137
• /
• 2007

본 연구에서는 RLS(Rescursive Least Square) 추정 알고리즘을 이용하여 정전용량형 센서를 사용한 원격 RF 센서 시스템을 구현하고자 한다. IC 칩 형태의 원격 RF 센서 시스템이 가지는 구성의 복잡성 그리고 전력소모 문제를 해결하기 위해 보다 간단한 유도결합모델이 제안된다. 원격 RF 시스템은 페이저법을 이용하여 수학적으로 모델링되며, 모델기반의 RLS 알고리즘을 적용하기위해 시스템의 파라메타를 재배열한다. 오차 제곱합의 수렴특성을 가진 RLS 알고리즘을 이용하여 정전용량 파라메타를 추정한다. 실제 위상차를 측정하기 위해 Exclusive OR를 이용한 위상차 감지 장치를 제안한다. 센서로는 각종 환경 측정-습도, 압력 등-에 실제 활용되고 있는 정전용량형 센서를 채택한다. 잡음을 내포한 측정 데이터에 대한 추정 성능을 확인함으로써 그 유효성을 검증하고자 한다.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.63 no.9
• /
• pp.1227-1232
• /
• 2014

The purpose of this paper is to establish the optimum fabricating condition of specimens using silk screen printing, and to develop humidity sensor which has good humidity sensing properties. The specimens are fabricated under the condition of 90[wt%] $SnO_2$-10[wt%] $TiO_2$, and their microstructure, crystalline structure, humidity sensing properties are examined. From the microstructure analyses, porosity is best at 700[$^{\circ}C$]. From the crystalline structure analyses, intensity of peak becomes strong according to increasing heat treatment temperature. From the humidity sensing properties analyses, an overall results of capacitance changes, linearity and hysteresis for the specimens is best at 600[$^{\circ}C$] and 700[$^{\circ}C$]. Capacitance of specimens increases according to decreasing measurement frequency, and to increasing relative humidity.