• Title/Summary/Keyword: 스핀들시스템

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Development of Wafer Grinding Spindle with Porous Air Bearings (다공질 공기 베어링을 적용한 반도체 웨이퍼 연마용 스핀들 개발)

  • Donghyun Lee;Byungock Kim;Byungchan Jeon;Gyunchul Hur;Kisoo Kim
    • Tribology and Lubricants
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    • v.39 no.1
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    • pp.28-34
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    • 2023
  • Because of their cleanliness, low friction, and high stiffness, aerostatic bearings are used in numerous applications. Aerostic bearings that use porous materials as means of flow restriction have higher stiffness than other types of bearings and have been successfully applied as guide bearings, which have high motion accuracy requirements. However, the performances of porous bearings exhibit strong nonlinearity and can vary considerably depending on design parameters. Therefore, accurate prediction of the performance characteristics of porous bearings is necessary or their successful application. This study presents a porous bearing design and performance analysis for a spindle used in wafer polishing. The Reynolds and Darcy flow equations are solved to calculate the pressures in the lubrication film and porous busing, respectively. To verify the validity of the proposed analytical model, the calculated pressure distribution in the designed bearing is compared with that derived from previous research. Additional parametric studies are performed to determine the optimal design parameters. Analytical results show that optimal design parameters that obtain the maximum stiffness can be derived. In addition, the results show that cross-coupled stiffness increases with rotating speed. Thus, issues related to stability should be investigated at the design stage.

Vibration Analysis of Rotating Disk-Spindle System Using Finite Element Method and Substructure Synthesis (유한 요소법과 부분 구조 합성법을 이용한 회전 디스크-스핀들 계의 진동 해석)

  • Jeong, Myeong-Su;Jang, Geon-Hui
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.24 no.9 s.180
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    • pp.2201-2210
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    • 2000
  • Vibration of a rotating disk-spindle system is analyzed by using Hamilton's principle, FEM and substructure synthesis. A rotating disk undergoes the rigid body motion and the elastic deformation. It s equation of motion is derived by Kirchhoff plate theory and von Karman nonlinear strain. A rotating shaft is described by Rayleigh beam theory considering the axial rigid body motion. The stationay shaft supporting the rotating disk-spindle-bearing system is modeled by Euler beam theory, and the stiffness of ball bearing is determined by A.B.Jones' theory. FEM is used to solve the derived governing equations, and substructure synthesis is introduced to assemble each structure of the rotating disk-spindle system. The developed theory is applied to the spindle system of a 35' computer hard disk drive with 3 disks to verify the simulation results. The simulation results agree very well with the experimental ones. The proposed theory may be effectively expanded to the complex structure of a disk-spindle system.

A study on automation of modal analysis of a spindle system of machine tools using ANSYS (ANSYS를 활용한 공작기계 주축 시스템의 진동 모드 해석 자동화에 관한 연구)

  • Lee, Bong-Gu;Choi, Jin-Woo
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.4
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    • pp.2338-2343
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    • 2015
  • An analytical model was developed in this study and then implemented into a tool for automation of FEA (Finite Element Analysis) of a spindle system for natural frequencies and modes in the universal FEA software, ANSYS. VBA of EXCEL was used for the implementation. It allowed graphic user interfaces (GUIs) to be developed for a user to interact with the tool and, in addition, an EXCEL spreadsheet to be used for data arrangement. A code was developed in the language of ANSYS to generate the geometric model of the spindle system, sequentially to construct the analytical model based on the information in the GUIs, and finally to perform computation for the FEA. Its automation of the model generation and analysis can help to identify a near optimal design of the spindle system under design in minimum time and efforts.

A Case Study on Model Checking Online-Game Server Party System Using SPIN (온라인 게임 서버의 파티 시스템 검증을 위한 스핀 모델 체커 적용에 관한 연구)

  • Kim, Goanghun;Choi, Yunja
    • KIPS Transactions on Software and Data Engineering
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    • v.4 no.11
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    • pp.479-486
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    • 2015
  • Model checking method is able to check all possible cases automatically and is applicable to specifications or design before actual implementation so that some critical systems have adopted this method actively. However, the current practice of software verification is largely dependant on basic methods such as manual testing because of lack of understanding about this rigorous method and high verification cost. In this paper we conducted an experimental research for the automated verification using the SPIN model checker on an online-game server to study the applicability of the technique in this domain. The results show that we could verify major features of the online-game server party system with 5~7 GB memory and within 10 minutes execution time, and also found a hidden system error that passed existing testing process. This result shows the possibility of rigorous and effective verification with reasonable cost in comparison to manual testing.

A Study on Dynamic Performance Improvement of HDD Disk-Spindle System (HDD 디스크-스핀들 시스템의 동특성 개선에 관한 연구)

  • 좌성훈;손진승;이행수;홍민표;고정석;곽주영;조은형
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2001.05a
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    • pp.1130-1135
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    • 2001
  • This paper investigated the dynamic performance of HDD disk-spindle system to reduce disk fluttering. Rocking frequencies of the disk-spindle system and radial NRRO are measured to escape the ball defect frequencies and to determine the relative optimal position of the disk in the motor. It was found that disk fluttering was reduced by increasing disk thickness, inserting viscoelastic material between the disk and the spacer and decreasing the gap between the disk and the base.

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마이크로 선반에서의 절삭성 평가

  • 김재건;정종운;고태조;김희술
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.05a
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    • pp.256-256
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    • 2004
  • Micro/Meso 기계적 가공은 기존 MEMS 공정에서 제작할 수 없었던 높은 세장비(aspect ratio)를 가지는 제품을 가공할 수 있을 뿐만 아니라 보다 높은 가공 정밀도를 획득할 수 있다. 따라서, 미소 부품에 대한 마이크로/매소 단위의 미세 절삭 가공을 위해서는 공간적 측면과 에너지 소비, 정밀도 측면에서 효율적인 시스템을 구성하기 위해서 마이크로 머시닝 전용 기계가 요구된다. 이에 본 연구에서는 '마이크로 팩토리' 의 기본 공작기계인 마이크로 선반을 개발하여 초정밀 미소 절삭에 대한 연구를 진행 중에 있다.(중략)

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Brand Positioning of IT Governance System -Focused on Case study of Spin-off Venture- (IT 거버넌스시스템의 브랜드 포지셔닝 전략 -스핀오프벤처기업의 사례를 중심으로-)

  • Chun, Myung-Hwan
    • Journal of Korea Society of Industrial Information Systems
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    • v.12 no.5
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    • pp.110-119
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    • 2007
  • In an extended enterprise, there is a shift to shared services, cosourcing and outsourcing, and extending out to partners, suppliers, and customers to accomplish business objectives more effectively. Along with this critical need, executives should be aware of the need to focus on optimizing the value of their information technology and reducing the related risks. So IT governance is critical, and many companies including spin-off venture are providing IT governance solution, but very little is known about brand management and marketing strategy of IT governance solution provider. The purpose of this study is to investigate brand positioning of IT governance solution company focusing on spin-off venture. The results of this study are summarized as follows. First, brand management is needed in the spin-off venture. second, IT governance solution companies including spin-off venture must provide something more than functional value. That is, they actively seek to emotional or symbolic value for their customers.

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Analysis of the Dynamic Behavior of a CNC Automatic Lathe Spindle System (CNC 자동선반 스핀들시스템의 동적 거동 해석)

  • Kim, T.J.;Koo, J.H.;Lee, S.B.;Kim, M.S.
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.19 no.3
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    • pp.261-267
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    • 2009
  • The spindle with a built-in motor can be used to simplify the structure of machine tool system, while the rotor has unbalance mass inevitably. Therefore, it is important to recognize the effect of unbalance mass. This paper presents analysis of dynamic behavior of a high speed spindle with a built-in motor. The spindle is supported by the angular contact ball bearings and the rotor is fixed at the middle of spindle. The spindle used in CNC automatic lathe has been investigated using combined methodologies of finite elements and transfer matrices. The Houbolt method is used for the integration of the system equations and the dynamic behavior of spindle is obtained considering unbalance mass of rotor. Results show that increasing rotational speed of spindle magnifies the whirl responses of spindle seriously. Also the whirl responses of spindle are affected by the other factors such as unbalance mass and bearing stiffness.

Shunt Damping of HDD Disk-Spindle System Using Piezoelectric Bimorph (압전 바이모프를 이용한 HDD 디스크-스핀들 시스템의 션트 댐핑)

  • Lim S. C.;Choi S. B,;Park Y P.;Park N, C.
    • Transactions of the Society of Information Storage Systems
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    • v.1 no.1
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    • pp.84-92
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    • 2005
  • This work presents the feasibility of shunt damping far vibration suppression of the rotating HDD disk-spindle system using piezoelectric bimorph. A target vibration mode which significantly restricts the recording density increment of the drive is determined through modal analysis and a piezoelectric bimorph is designed to suppress unwanted vibration. After deriving the two-dimensional generalized electromechanical coupling coefficient of the shunted drive, the shunt damping of the system is predicted by simulating the displacement transmissibility using the coefficient. In addition, optimal design process using sensitivity analysis is undertaken in order to improve the shunt damping of the system. The effectiveness of the proposed methodology is verified through experimental implementation by observing the vibration characteristics of the rotating disk-spindle system in frequency domain.

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