Characteristics of Piezoelectric Actuator Prepared by Screen Printing Method and MEMS Process (스크린 프린팅법과 MEMS 공정을 이용한 압전 액츄에이터의 특성)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2004.07b
- /
- pp.806-808
- /
- 2004