• Title/Summary/Keyword: 손상제어실험

Search Result 116, Processing Time 0.032 seconds

반도체 및 디스플레이 세정 공정용 $CO_2$ 클러스터 장비의 클러스터 발생 특성 분석

  • Choe, Hu-Mi;Jo, Yu-Jin;Lee, Jong-U;Kim, Tae-Seong
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2013.02a
    • /
    • pp.303-303
    • /
    • 2013
  • 표면에 부착된 나노/마이크로 입자는 다양한 분야에서 오염물질로 작용한다. 특히 형상이 미세하고 공정 단계가 복잡한 반도체 및 디스플레이 등의 전자 소자 공정에서 미치는 영향이 크다. 따라서 입자상 오염물질의 제거에 관하여 상용화된 습식 세정 방법이 다양하게 존재하지만 표면 손상, 화학 반응, 부산물, 세정 효율 등 여러 가지 문제점이 있어 새로운 세정 방법이 요구된다. 이에 건식 세정 방법, 그 중에서도 입자의 충돌을 통해 제거하는 방법인 에어로졸 세정, 필렛 세정 등이 개발되었으나 마이크로 크기로 생성되는 입자로 인하여 형상의 손상이 크다. 따라서 본 연구에서는 나노 단위로 기체/고체 혼합물만 생성하여 세정하는 가스 클러스터 세정 방법을 이용하여 이러한 문제점을 해결하고자 하였다. 클러스터 세정 장비를 이용한 표면 처리는 충돌에 의한 제거에 기반한다. 따라서 생성 및 가속되는 클러스터로부터 대상으로 전달되는 운동량의 정도가 세정 특성에 영향을 미치며 이는 생성되는 클러스터의 크기에 종속적이다. 생성 클러스터의 크기 분포는 분사 거리, 유량, 분사 각도, 노즐 냉각 온도 등의 변수에 관한 함수이다. 따라서 본 연구에서는 $CO_2$ 클러스터를 이용한 세정 특성을 정의 및 제어하기 위하여 생성되는 클러스터 특성에 관하여 이론적, 수치 해석적, 실험적 연구를 수행하였다. 먼저, $CO_2$의 물리적 특성 및 이를 이용한 특정 크기 오염 물질을 제거하는데 요구되는 임계 클러스터 크기 계산을 이론적으로 구하였다. 이는 오염물질의 부착력과 클러스터의 운동량 전달에 의한 제거력의 비교를 통해 이루어졌다. 두 번째로 클러스터 크기분포를 수치 해석적으로 예측하기 위하여 각 조건에 대하여 유동해석을 수행하고 이를 통해 구해진 노즐 내 기체의 냉각 속도를 GDE (General Dynamic Equation) 계산에 대입하여 구하였다. 마지막으로 PBMS(Particle Beam Mass Spectrometer)를 이용하여 실험적으로 클러스터 크기분포를 각 조건에 대하여 구할 수 있었다. 또한 크기 분포 경향에 대한 간접적 확인을 위하여 포토레지스트가 코팅된 웨이퍼에 클러스터의 충격으로 생성된 크레이터 크기의 경향을 분석하였다. 이와 같은 방법에 의하여 생성되는 클러스터는 노즐의 유량 증가, 온도 상승에 각각 비례하여 작아지는 것을 확인할 수 있었다.

  • PDF

Development of a Cutting Support Cleaning System considering the Dross Adhesion Characteristics (드로스 부착 특성을 고려한 절단 정반 크리닝 시스템 개발)

  • Kim, Ho-Kyeong;Ko, Dae-Eun
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.15 no.10
    • /
    • pp.5919-5924
    • /
    • 2014
  • Accumulated dross adhered to the cutting support degrades the cutting accuracy and aggravates the working environment by reducing the efficiency of the dust collector. Furthermore, the cutting machine and product can be damaged by the scattering of molten metal. In this study, an attempt was made to increase the productivity of steel cutting process and improve the working environment by dross control. The dross adhesion characteristics were invested by a cutting experiment and the design concept for a dross removal machine was devised. Finally, a cutting support cleaning system and its operating algorithm were developed. The applicability of the developed system was examined and verified by a long-term field test after installation of the plasma arc cutting system of a shipyard.

Performance Evaluation for Scheduling Policies on a Realtime Database (실시간 데이터베이스에 대한 스케쥴링 정책의 성능 평가)

  • Kim, Suhee;Han, Kwangrok;Kim, Hwankoo;Son, Sang-Hyuk
    • Convergence Security Journal
    • /
    • v.4 no.3
    • /
    • pp.57-82
    • /
    • 2004
  • The confluence of computers, communications, and databases is quickly creating a distributed database where many applications require real-time access to temporally consistent sensor data. We have developed an object-oriented real-time database system called BeeHive to provide a significant improvement in performance and functionality over conventional non-real-time database and object management systems. In this paper, the performance of two data-deadline cognizant scheduling policies EDDF and EDF-DC and the baseline EDF policy with/without admission control are evaluated through extensive experiments on BeeHive. The ranges where data-deadline cognizant scheduling policies are effective and where admission control plays a role are identified.

  • PDF

MaCE (Metal-Assisted Chemical etching)에 의한 GaAs 마이크로 구조 제어 및 메커니즘 연구

  • Lee, A-Ri;Yun, Seok-Hun;Ji, Taek-Su;Sin, Jae-Cheol
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2014.02a
    • /
    • pp.330.2-330.2
    • /
    • 2014
  • III-V족 화합물반도체는 트랜지스터와 광다이오드, 레이저 등의 광전소자 제작물질로 오랫동안 사용 되어 왔다. III-V 화합물 반도체로 제작된 광전소자의 특성을 향상시키기 위해선 다양한 형태의 표면구조가 필요하며, distributed feedback 레이저나 distributed Bragg reflector 레이저의 경우 높은 aspect-ratio를 가지는 구조를 필요로 한다. 현재까지 높은 aspect-ratio를 가지는 III-V족 화합물반도체 구조제작을 위해 reactive ion etching (RIE) 방식을 사용 하였는데, 이 방법은 ion collision에 의한 표면손상과 더불어 에칭 잔여물이 남아 반도체 표면을 오염시키는 문제점을 가지고 있다. 이를 개선하기 위하여 MaCE (Metal-Assited chemical etching)법이 최근 제안되었는데, 본 연구에서는 MaCE 방법을 통하여 다양한 형태의 GaAs 표면구조를 제작하였다. 본 실험을 통하여 에칭용액 조건에 따라 GaAs의 구조적 특성과 morphology가 달라지는 것을 확인하였다.

  • PDF

Design of Rework Device using Multi-wave IR-heater (다파장 IR-heater를 이용한 재작업 장치 설계)

  • Cho, Do-Hyeoun
    • 전자공학회논문지 IE
    • /
    • v.47 no.1
    • /
    • pp.6-11
    • /
    • 2010
  • This research is the result for studding about the IR Rework station which is using a multi-wave IR-heater for soldering and de-soldering on the substrate such as PCB. This IR repair and reflow system is increasing the temperature on the target area under stable temperature control following setting point melting point of solder and lead free solder using IR-heater. So this system is not giving any therrna1 damage on the target PCB and components even closed components. The soldering and de-soldering quality is evaluated through the actual test.

Strength and Crack-Damage Control Characteristics of Concrete Beams Layered with Strain-Hardening Cement Composites (SHCCs) (변형 경화형 시멘트 복합체로 단면 대체된 콘크리트 보의 강도 및 균열손상 제어 특성)

  • Yun, Hyun-Do;Kim, Sun-Woo;Jeon, Esther;Kim, Yun-Soo;Jang, Kwang-Soo
    • Proceedings of the Korea Concrete Institute Conference
    • /
    • 2008.11a
    • /
    • pp.269-272
    • /
    • 2008
  • This paper reports on the cracking mitigation and flexural behavior experimentally observed in concrete prisms layered with strain-hardening cement composites (SHCCs) which is micro-mechanically designed cement composite and exhibits pseudo tensile strain-hardening behavior accompanied by multiple cracking while using a moderate amount of fiber, typically less than 2 percent in term of fiber volume fraction. In this study, SHCC is reinforced with 1.3 percent polyvinyl alcohol (PVA) and 0.20 percent polyethylene (PE) in volume fraction. Tests were conducted using $100{\times}100{\times}400mm$ long prisms supported over a simply supported span of 350mm. The four point load was applied using MTS servo control machine. The thickness patched with SHCC is the main variable for this study. Experimental study shows that when subject to monotonic flexural loading, the SHCC layered repair system showed 2.7 - 4.2 times increased load carrying capacity, and mitigated cracking damage of concrete beams layered with SHCC compared with plain concrete beams.

  • PDF

Design of Frequency Synthesizer using Novel Architecture Programmable Frequency Divider (새로운 구조의 프로그램어블 주파수 분주기를 사용한 주파수 합성기 설계)

  • 김태엽;박수양;손상희
    • The Journal of Korean Institute of Communications and Information Sciences
    • /
    • v.27 no.5C
    • /
    • pp.500-505
    • /
    • 2002
  • In this paper, a novel architecture of programmable divider with fifty percent duty cycle output and programmable dividing number has been proposed. Through HSPICE simulation, a 900MHz frequency synthesizer with proposed frequency divider has designed in a standard 0.25$\mu\textrm{m}$ CMOS technology. To verify the operation of proposed frequency divider, a chip had been fabricated using 0.65$\mu\textrm{m}$ 2-poly, 3-metal standard CMOS processing and experimental result shows that the proposed frequency divider works well. The designed voltage controlled oscillator(VCO) has a center frequency of 900MHz, a tuning range of ${\pm}$10%, and a gain of 154MHz/V. The simulated frequency synthesizer performance has a settling time of 1.5${\mu}\textrm{s}$, a frequency range from 820MHz to 1GHz and power consumption of 70mW at 2.5V power supply voltage.

Design of Frequency Synthesizer using Novel Architecture Programmable frequency Divider (새로운 구조의 프로그램어블 주파수 분주기를 사용한 주파수 합성기 설계)

  • 김태엽;박수양;손상희
    • The Journal of Korean Institute of Communications and Information Sciences
    • /
    • v.27 no.6C
    • /
    • pp.619-624
    • /
    • 2002
  • In this paper, a novel architecture of programmable divider with fifty percent duty cycle output and programmable dividing number has been proposed. Through HSPICE simulation, a 900MHz frequency synthesizer with proposed (sequency divider has designed in a standard 0.25㎛ CMOS technology To verify the operation of proposed frequency divider, a chip had been fabricated using 0.65㎛ 2-poly, 3-metal standard CMOS processing and experimental result shows that the proposed frequency divider works well. The designed voltage controlled oscillator(VCO) has a center frequency of 900MHz a tuning range of $\pm$10%, and a gain of 154HHz/V. The simulated frequency synthesizer performance has a settling time of 1.5$\mu$s, a frequency range from 820MHz to IGHz and power consumption of 70mW at 2.5V power supply voltage.

Comparison of Performance of Restrainers of Steel Cables and Shape Memory Alloy Bars for Multiple-Span-Simply-Supported Bridges (다경간 단순지지 교량의 강케이블 및 형상기억합금 변위제어장치의 성능 비교)

  • Choi, Eun Soo;Kim, Lee Hyeon;Park, Joo Nam;Cho, Hyo Nam
    • Journal of Korean Society of Steel Construction
    • /
    • v.19 no.6
    • /
    • pp.587-597
    • /
    • 2007
  • Steel restrainer cables for multiple frame bridges in California in the United States have been shown to be effective in preventing unseating at internal hinges during the past several earthquakes. Consequently, the steel-cable-restrainer is being tested for applications on multiple-span-simply-supported (MSSS) bridges in the mid-American region. In addition, shape memory alloy (SMA) bars in tension are being studied for the same application, multiple frame bridges, the developed seismic forces are transferred to piers through the restrainers. However, in MSSS bridges, the seismic forces are transferred to abutments by the restrainers. Therefore, the abutment' behavior should also be investigated. In this study, we assessed the seismic performance of the three types of restrainers, such as steel restrainer cables, SMA in tension, and SMA in bending for an MSSS bridge from moderate to strong ground motion, bending test of an SMA bar was conducted and its analytical model was determined for this study. Nonlinear time history analyses were conducted to assess the seismic responses of the as-built and the retrofitted bridges. All three types of restrainers reduced the hinge opening and the SMA in tension was the most effective of the three devices in preventing the unseating, all restrainers produced damage on the abutment from the pulling action of the MSSS bridge due to strong ground motions, was found that the retrofit of the abutment in the pulling action is required in the installation of restrainers in MSSS bridges.

An Active Region Detection Method for The Speech Playback-speed Control (음성재생 속도 제어를 위한 활성화 영역 검출방법)

  • Yoo, Deok-Hyeon;Kim, Dong-Hyeok;Jeon, Joon-Hyeon
    • Journal of the Institute of Electronics Engineers of Korea SP
    • /
    • v.49 no.3
    • /
    • pp.98-105
    • /
    • 2012
  • This paper describes a new method for a speech playback speed control with high quality. The proposed method provides an adaptive threshold filtering solution for detecting active regions of a speech signal that are followed by playback speed. For a given playback speed, threshold value is adaptively determined with the statistics(:mean and standard deviation) of each frame in speech, and is used to select only active blocks within the current frame. To minimize quality degradation(i.e., pitch degradation) caused due to high-speed playback, the threshold filtering priorly eliminates relatively low-activity blocks including voice and unvoice. Simulation results show that the proposed scheme provides a playback speed control solution with higher quality than SOLA(Synchonized OverLap Add) method using the pitch extraction of speech.