• Title/Summary/Keyword: 셀 제조

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트렌치 게이트 Power MOSFET의 고신뢰성 게이트 산화막 형성 연구

  • Kim, Sang-Gi;Yu, Seong-Uk;Gu, Jin-Geun;Na, Gyeong-Il;Park, Jong-Mun;Yang, Il-Seok;Kim, Jong-Dae;Lee, Jin-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.108-108
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    • 2011
  • 최근 에너지 위기와 환경 규제 강화 및 친환경, 녹색성장 등의 이슈가 대두되면서 에너지 절감과 환경보호 분야에 그린 전력반도체 수요가 날로 증가되고 있다. 이러한 그린 전력반도체는 휴대용컴퓨터, 이동통신기기, 휴대폰, 조명, 자동차, 전동자전거, LED조명 등 다양한 종류의 전력소자들이 사용되고 있으며, 전력소자의 수요증가는 IT, NT, BT 등의 융복합기술의 발달로 새로운 분야에 전력소자의 수요로 창출되고 있다. 특히 환경오염을 줄이기 위한 고전압 대전류 전력소자의 에너지 효율을 높이는 연구 개발이 활발히 진행되고 있다. 종래의 전력소자는 평면형의 LDMOS나 VDMOS 기술을 이용한 소전류 주로 제작되어 수십 암페어의 필요한 대전류용으로 사용이 불가능하다. 반면 수직형 전력소자인 트렌치를 이용한 power 소자는 집적도를 증가 시킬 수 있을 뿐만 아니라 대전류 고전압 소자 제작에 유리하다. 특히 평면형 소자에 비해 약 30%이상 칩 면적을 줄일 수 있을 뿐만 아니라 평면형에 비해 on-저항을 낮출 수 있기 때문에 수요가 날로 증가하고 있다. 트렌치 게이트 power MOS의 중요한 게이트 산화막 형성 기술은 트렌치 내부에 균일한 두께의 산화막 형성과 높은 신뢰성을 갖는 게이트 산화막 형성이 매우 중요하다. 본 연구에서는 전력소자를 제조하기 위해 트렌치 기술을 이용하여 수직형 전력소자를 제작하였다. 트렌치형 전력소자는 게이트 산화막을 균일하게 형성하는 것이 매우 중요한 기술이다. 종래의 수평형 소자 제조시 게이트 산화막 형성 후 산화막 두께가 매우 균일하게 성장되지만, 수직형 트렌치 게이트 산화막은 트렌치 내부벽의 결정구조가 다르기 때문에 $1000^{\circ}C$에서 열산화막 성장시 결정구조와 결정면에 따라 약 35% 이상 열산화막 두께가 차이가 난다. 본 연구는 이러한 문제점을 해결하기 위해 트렌치를 형성한 후 트렌치 내부의 결정구조를 변화 및 산화막의 종류와 산화막 형성 방법을 다르게 하여 균일한 게이트 산화막을 성장시켜 산화막의 두께 균일도를 향상시켰다. 그 결과 고밀도의 트렌치 게이트 셀을 제작하여 제작된 트렌치 내부에 동일한 두께의 게이트 산화막을 여러 종류로 산화막을 성장시킨 후 성장된 트렌치 내벽의 산화막의 두께 균일도와 게이트 산화막의 항복전압을 측정한 결과 약 25% 이상 높은 신뢰성을 갖는 게이트 산화막을 형성 할 수 있었다.

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Mixed Carbon/Polypyrrole Electrodes Doped with 2-Naphthalenesulfonic Acid for Supercapacitor (2-Naphthalenesulfonic Acid로 도핑된 혼합카본/폴리피롤을 이용한 Supercapacitor용 전극)

  • Jang, In-Young;Kang, An-Soo
    • Korean Chemical Engineering Research
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    • v.43 no.3
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    • pp.425-431
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    • 2005
  • New type of supercapacitor using high surface area activated carbons mixed with high conductivity polypyrrole (Ppy) has been prepared in order to achieve low impedance and high energy density. Mixed carbons of BP-20 and MSP-20 were used as the active electrode material, and polypyrrole doped with 2-naphthalenesulfonic acid (2-NSA) and carbon black (Super P) as conducting agents were added to activated carbons in order to enhance good electric conductivity. Electrodes prepared with the activated electrode materials and the conducting agents were added to a solution of organic binder [P(VdF-co-HFP) / NMP]. The ratio of optimum electrode composition was 78 : 17 : 5 wt.% of (MSP20 : BP-20=1 : 1), (Super P : Ppy=10 : 7) and P(VdF-co-HFP) respectively. The performance of unit cell with addition of 7 wt% Ppy have shown specific capacitance of 28.02 F/g, DC-ESR of $1.34{\Omega}$, AC-ESR of $0.36{\Omega}$, specific energy of 19.87 Wh/kg and specific power of 9.77 kW/kg. With addition of Ppy, quick charge-discharge of unit cell was possible because of low ESR, low charge transfer resistance and quick reaction rate. And good stability up to 500 chargedischarge cycles were retained about 80% of their original capacity. It was concluded that the specific capacitance originated highly from compound phenomena of the pseudocapacitance by oxidation-reduction of polypyrrole and the nonfaradaic capacitance by adsorption-desorption of activated carbons.

Synthesis and Water Repellency of Polymers with Fluorinated Alkyl Group and Isocyanate Group (불소화 알킬기와 이소시아네이트기를 가지는 고분자의 합성과 발수성)

  • Baek Chang-Hoon;Kong Jong-Yun;Hyun Seok-Hee;Lim Yong-Jin;Kim Woo-Sik
    • Polymer(Korea)
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    • v.29 no.5
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    • pp.433-439
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    • 2005
  • The copolymers were prepared by the emulsion copolymerization of fluoroalky lacrylate-stearylacrylate-m-isopropenyl-${\alpha},\;{\alpha}'$-dimethylbenzyl isocyanate (TMI) in order to obtain water repellent polymers. The respective copolymerization rates of the three monomers considerably depended upon the use of the nonionic emulsifier and the nonionic-cationic mixed emusifier, and the optimum conditions were obtained. The particle sizes of the copolymers were in the range of 105 to 222nm. The particle sizes of the copolymers prepared by the use of the mixed emulsifiers were smaller than those of the copolymers prepared by the use of the nonionic emulsifier. The reactions of both TMI-N-methyl acetamide and TMI-cellobiose did not take place. However, the reaction of TMI-n-butylamine occurred. The water contact angles before and after washing three times for nylon and poly(ethylene terephthalate) (PET) fabrics coated with the copolymer prepared by the use of mixed emulsifier were about $139^{\circ}\;and\;133^{\circ}$ Therefore, the copolymer showed good durable repellency for nylon and PET.

Water repellency of glass surface coated with fluorosilane coating solutions containing nanosilica (나노실리카를 함유한 불소실란으로 코팅된 유리 표면의 발수 특성)

  • Lee, Soo;Kim, Keun Min
    • Journal of the Korean Applied Science and Technology
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    • v.36 no.2
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    • pp.531-540
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    • 2019
  • Hydrophilic and hydrophobic nanosilica and tetraethyl orthosilicate (TEOS) as a coupling agent was used to form a coarse spike structure as well as an excellent reactive hydroxyl groups on the glass surface. Then, a second treatment was carried out using a trichloro-(1H,1H,2H,2H)perfluorooctylsilane(TPFOS) solution for ultimate water repellent glass surface formation. The formation of hydrophobic coating layer on glass surface using silica aerosol, which is hydrophobic nanosilica, was not able to form a durable hydrophobic coating layer due to the absence of reactive -OH groups on the surface of nanosilica. On the other hand, a glass surface was first coated with a coating liquid prepared with hydrophilic hydroxyl group-containing nanosilica and hydrolyzed TEOS, and then coated with a TPFOS solution to introduce a hydrophobic surface on glass having a water contact angle of $150^{\circ}$ or more. The sliding angle of the coated glass was less than $1^{\circ}$, which meant the surface had a super water-repellent property. In addition, as the content of hydrophilic nanosilica increased, the optical transmittance decreased and the optical transmittance also decreased after 2nd coating with the TPFOS solution. The super-hydrophobic property of the coated glass was remained up to 50 times of rubbing durability test, but only hydrophobic property was shown after 200 times of rubbing durability test. Conclusively, the optimal coating conditions was double 1st coatings with the HP3 coating solution having a hydrophilic nanosilica content of 0.3 g, and subsequent 2nd coating with the TPFOS solution. It is believed that the coating solution thus prepared can be used as a surface treatment agent for solar cells where light transmittance is also important.

Thermally Conductive Polymer Composites for Electric Vehicle Battery Housing (전기자동차 배터리 하우징용 열전도성 고분자 복합재료)

  • Yoon, Yeo-Seong;Jang, Min-Hyeok;Moon, Dong-Joon;Jang, Eun-jin;Oh, Mee-Hye;Park, Joo-Il
    • Journal of the Korea Convergence Society
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    • v.13 no.4
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    • pp.331-337
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    • 2022
  • Manufactured thermoplastic composite materials to replace the metal materials used as battery housing materials for electric vehicles with lightweight materials. As the matrix material, nylon 6 which is a polymer material was used. Boron Nitrate(BN), which has high thermal conductivity, was used to provide heat dissipation performance. The heat dissipation characteristics of the thermally conductive polymer composite material according to the BN content and particle size were analyzed. The thermal conductivity value increased as the filler content increased, and composite materials particle size of 60 to 70㎛ and BN content of 50%, the thermal conductivity was 1.4 W/mK. The larger the particle size, the wider the inter-particle interface contact surface, which means that a thermal path was formed. wider the interfacial contact surface between the particles, and the thermal path was formed. A battery housing was manufactured using the manufactured thermally conductive polymer composite material, and the temperature change during charging and discharging of the cell was observed, and the possibility as a substitute material for the battery housing was confirmed.

Study on Ti-doped LiNi0.6Co0.2Mn0.2O2 Cathode Materials for High Stability Lithium Ion Batteries (고안정성 리튬이온전지 양극활물질용 Ti 치환형 LiNi0.6Co0.2Mn0.2O2 연구)

  • Jeon, Young Hee;Lim, Soo A
    • Journal of the Korean Electrochemical Society
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    • v.24 no.4
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    • pp.120-132
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    • 2021
  • Although the development of high-Nickel is being actively carried out to solve the capacity limitation and the high price of raw cobalt due to the limitation of high voltage use of the existing LiCoO2, the deterioration of the battery characteristics due to the decrease in structural stability and increase of the Ni content. It is an important cause of delaying commercialization. Therefore, in order to increase the high stability of the Ni-rich ternary cathod material LiNi0.6Co0.2Mn0.2O2, precursor Ni0.6Co0.2Mn0.2-x(OH)2/xTiO2 was prepared using a nanosized TiO2 suspension type source for uniform Ti substitution in the precursor. It was mixed with Li2CO3, and after heating, the cathode active material LiNi0.6Co0.2Mn0.2-xTixO2 was synthesized, and the physical properties according to the Ti content were compared. Through FE-SEM and EDS mapping analysis, it was confirmed that a positive electrode active material having a uniform particle size was prepared through Ti-substituted spherical precursor and Particle Size Analyzer and internal density and strength were increased, XRD structure analysis and ICP-MS quantitative analysis confirmed that the capacity was effectively maintained even when the Ti-substituted positive electrode active material was manufactured and charging and discharging were continued at high temperature and high voltage.

Separation of $H_2$/$N_2$ Gas Mixture by SiO$_2$-B$_2$O$_3$ Membrane (SiO$_2$-B$_2$O$_3$ 막에 의한 수소/질소 혼합기체 분리)

  • Kang Tae-Bum;Park Jin-Ho
    • Membrane Journal
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    • v.14 no.4
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    • pp.312-319
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    • 2004
  • The porous SiO$_2$-B$_2$O$_3$ membrane was prepared from Si(OC$_2$$H_5$)$_4$-($CH_3$O)$_3$B-C$_2$$H_5$OH-$H_2O$ system by sol-gel method. In order to investigate the characteristics of this membrane, we examined that using BET, IR spectrophotometer, X-ray diffractometer, SEM and TEM. At $700^{\circ}C$, the surface area of SiO$_2$-B$_2$O$_3$ membrane was 354.398 $m^2$/, the median pore diameter was 0.0048 ${\mu}{\textrm}{m}$, and the particle size of SiO$_2$-B$_2$O$_3$ membrane was 7 nm. The separation properties of the gas mixture ($H_2$/$N_2$) through the SiO$_2$-B$_2$O$_3$ membrane was studied as a function of pressure. The real separation factor($\alpha$) of SiO$_2$-B$_2$O$_3$ membrane for $H_2$/$N_2$ gas mixture was 4.68 at 155.15 cmHg and $25^{\circ}C$. The real separation factor($\alpha$), head separation factor($\beta$) and tail separation factor((equation omitted)) were increased as the pressure of permeation cell increased.

Fabrication of Tailor-Made 3D PCL Scaffold Using a Bio-Plotting Process (바이오-플로팅시스템을 통한 Tailor-Made 3D PCL Scaffold 제작)

  • Son, Joon-Gon;Kim, Geun-Hyung;Park, Su-A;Kim, Wan-Doo
    • Polymer(Korea)
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    • v.32 no.2
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    • pp.163-168
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    • 2008
  • Biomedical scaffold for tissue regeneration was fabricated by one of rapid prototyping processes, bioplotting system, with a biodegradable and biocompatible poly($\varepsilon$-carprolactone)(PCL). Through dynamic mechanical test, it was observed that the PCL scaffold manufactured by the bioplotting process has the superior mechanical properties compared to the conventional scaffold fabricated by a salt-leaching process, and the plotted scaffold could be employed as a potential scaffold to regenerating hard and soft tissue. The plotted scaffold was consisted of porous structures. which were interconnected with each pore to help cells be easily adhered and proliferated in the wall of pore tunnels, and metabolic nutrients can be transported within the matrix. By using the plotting system, we could adjust the pore size, porosity, strand pitch, and, strand diameter of PCL scaffolds, which were important parameters to control mechanical properties of the scaffolds, and consequently we could determine that the mechanically controlled scaffolds could be used as a matching scaffold for any required mechanical properties of the target organ. The fabricated 3D PCL scaffold showed enough possibility as a 3D biomedical scaffold, which was cell-cultured with chondrocytes.

Mesoporous Carbon Electrodes for Capacitive Deionization (축전식 탈염 공정을 위한 메조포러스 탄소 전극)

  • Lee, Dong-Ju;Park, Jin-Soo
    • Journal of the Korean Electrochemical Society
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    • v.17 no.1
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    • pp.57-64
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    • 2014
  • Carbon electrodes for capacitive deionization were fabricated through mixing two different carbon powders (activated carbon powder, carbon black) with different particle sizes to investigate physical or electrochemical properties and finally desalination performances of the electrodes with various compositions of two carbon powders in weight and were compared with the electrode consisting of activated carbon. As a result, the electrode structure became more packed as increasing the amount of carbon black and resulted in 10% increase in mesopore fraction. The specific capacitance obtained from cyclic voltammograms of various electrodes showed that the electrode containing carbon black only had 107.4 F/g, while the specific capacitance of the electrode having more amount of carbon black increased and was higher than the one having no carbon black. The results of desalination runs in a capacitive deionization cell exhibited that the electrode having the highest amount of carbon black (1 wt%) in this study had the highest desalting efficiency, and no significant pH variation was observed during the runs. It was analyzed using accumulated charge that the fraction of non-Faraday current increased as the amount of carbon black increased in the electrodes. It can be concluded that the addition of carbon black changed the electrode structure resulting in an increase in the fraction of mesopore and finally enhanced the desalting efficiency by decreasing Faraday current.

Electrochemical Behavior of Lithium-Iron Oxide Electrode and Measurement of Chemical Diffusion Coefficient of Lithium (리튬-철계 산화물 전극의 전기화학 거동 및 리튬의 화학확산 계수 측정)

  • Lee Joung-Jun;Chong Won-Jung;Ju Jeh-Beck;Sohn Tai-Won;Cho Won-Il;Cho Byung-Won;Kim Hyung-Sun
    • Journal of the Korean Electrochemical Society
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    • v.4 no.4
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    • pp.139-145
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    • 2001
  • Various compositions of iron oxide based materials as a cathode of lithium secondary battery have been fabricated and tested with electrochemical method. A layered form of $LiFeO_2$ was synthesized by mixing and heating the initial materials of $FeCl_3\;6H_2O,\;LiOH$ and NaOH at low temperature. The effect of changing the precursors composition was investigated. As a result, when increasing the additive amount of NaOH, the capacity of the electrode is decreased but the performance and declining rate of capacity became smaller. $LiFeO_2$ synthesized with the weight ratio of $NaOH/FeCl_3/LiOH,\;2/1/7$ showed the largest capacity, but the discharging efficiency was sharply decreased after 30 cycles. Charge-discharge tests of lithium cells with $LiFeO_2$ cathode having the layer structure were performed. This cell showed the reversibility in the range of 1.5-4.5V of cell voltage. By using CPR method, chemical diffusion coefficients were measured in 1M $LiPF_6/EC/DEC$ solution. The value of chemical diffusion coefficient decreased with increasing the lithium content x, In 0.5$10^{-11}^cm^2/s$.