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초고속 터보 분자펌프의 자기부상 회전 안정성 연구

  • No, Seung-Guk;Gyeong, Jin-Ho;Park, Yong-Tae;Go, Deuk-Yong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.117-117
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    • 2012
  • 반도체 및 디스플레이 공정등에서 고진공 및 급 배기 환경을 제공하기 위하여 사용되는 터보 분자펌프(Turbomolecular Pump, TMP)는 다층의 회전깃을 갖는 로터를 회전시켜 분자를 배출시키는 방식을 사용하는 진공펌프이다. 또한 최근에는 디스플레이 및 반도체 공정에서 높은 진공도뿐만 아니라, 높은 배기속도를 요구하는 추세에 따라, 터보 펌프와 드래그 펌프부분을 동시에 가지고 있어 상대적으로 작동 진공도 영역이 넓은 복합 분자펌프(Compound Turbomolecular Pump, CMP)의 활용도가 넓어지고 있다. 이러한 분자펌프가 장시간의 고속회전에 적합하고, 베어링에서의 오염을 없앨 수 있는 비접촉 방식인 자기부상 방식이 주로 적용된다. 자기베어링 시스템은 하드웨어와 소프트웨어로 나누어질 수 있는데, 하드웨어는 회전하게 되는 블레이드로터 및 자기베어링 로터, 모터 로터 등이 포함된 축과 고정되어 있는 자기베어링 코어와 코일, 변위센서 등의 펌프 하우징 부분, 또한 이를 제어하기 위한 전력 증폭 시스템 등의 기전적인 요소들이 이루어져 있다. 소프트웨어라 할 수 있는 제어시스템에 있어서 자기베어링이 불안정한 특성을 갖는 개루프계를 갖고 있으므로 안정화를 위한 능동제어 시스템이 필수적이며 진동 제어 등의 기능을 갖도록 적용된다. 따라서 이러한 복합분자펌프의 성능은 이러한 시스템을 구성하는 개별 요소의 성능과 이를 통합한 제어시스템의 성능이 결정한다고 할 수 있다. 본 논문에서는 현재 개발중인 2,500 l/s급의 자기부상형 고진공 복합분자펌프의 시작품에 대하여 고속회전의 안정성에 대한 연구를 수행한 내용을 보고하고 있다. 디지털 제어시스템을 적용한 시작품의 최대 26,000 rpm 까지의 고속회전시의 회전 응답 및 진동 특성을 측정 분석하였으며, 로터의 고유진동수 및 진동 모우드를 분석하였다. 또한 연속 작동시의 발열특성과 각 부분의 온도와 회전 안정성과의 관계를 평가하였다.

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X3D Based Web Visualization by Data Fusion of 3D Spatial Information and Video Sequence (3D 공간정보와 비디오 융합에 의한 X3D기반 웹 가시화)

  • Sohn, Hong-Gyoo;Kim, Seong-Sam;Yoo, Byoung-Hyun;Kim, Sang-Min
    • Journal of Korean Society for Geospatial Information Science
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    • v.17 no.4
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    • pp.95-103
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    • 2009
  • Global interests for construction of 3 dimensional spatial information has risen due to development of measurement sensors and data processing technologies. In spite of criticism for the violation of personal privacy, CCTV cameras equipped in outdoor public space of urban area are used as a fundamental sensor for traffic management, crime prevention or hazard monitoring. For safety guarantee in urban environment and disaster prevention, a surveillance system integrating pre-constructed 3 dimensional spatial information with CCTV data or video sequence is needed for monitoring and observing emergent situation interactively in real time. In this study, we proposed applicability of the prototype system for web visualization based on X3D, an international standard of real time web visualization, by integrating 3 dimensional spatial information with video sequence.

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A Study on the Control Characteristics of Thrust Vector Control Actuation System for Movable Nozzle of Solid Motor (고체모터 가동노즐 추력벡터제어용 구동장치시스템의 제어특성 연구)

  • Min, Byeong-Joo;Lee, Hee-Joong;Park, Moon-Su;Choi, Hyung-Don
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.33 no.1
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    • pp.85-92
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    • 2005
  • The motion of flexseal bearing for movable nozzle has inherent nonlinear characteristics due to floating rotational center and compression by combustion pressure of solid motor. To perform precise attitude control in spite of these characteristics, the TVC actuation system requires counter potentiometer as an extra position feedback sensor of movable nozzle to form a compensated control loop. The prototype TVC actuation system, test equipments and compensated controller are newly designed, manufactured and tested in consideration of counter potentiometer. On the basis of integration test, the inherent characteristics of movable nozzle and control characteristics of its TVC actuation system are analyzed and summarized in this paper.

A Study on Scalable Bluetooth Network for Secure Ubiquitous Environment (안전한 유비쿼터스 환경을 위한 확장성 있는 블루투스 네트워크에 관한 연구)

  • Baek, Jang-Mi;Seo, Dae-Hee
    • Journal of Internet Computing and Services
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    • v.9 no.1
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    • pp.159-170
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    • 2008
  • The ubiquitous network revolution is beginning with the onset of digital convergence, whereby computers, horne appliances, and communications and broadcast media are being unified into digital media with the founding of the information super high speed. This technical advancement is creating a new culture and a new space and accelerating society's transition to the new and unique social paradigm of a 'ubiquitous society'. In particular, studies on ubiquitous communications are well underway. Lately, the focus has been on the Bluetooth technology due to its applicability in various environments. Applying Bluetooth connectivity to new environments such as ubiquitous or sensor networks requires finding new ways of using it. Thus, the scalable Bluetooth piconet scheme with independent slave device is proposed. It follows from work by Sea et al. But extended scatternet is not considered is Kiisc05 paper. Therefore, we propose secure bridge connection scheme for scalable Bluetooth scatternet.

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Dynamic Threshold-Based Multicast Scheme for N-Screen Services in Indoor and Ship Area Networks (선박 및 실내 N-스크린 서비스를 위한 동적 Threshold 기반 멀티캐스트 기술)

  • Hur, Kyeong;Lee, Seong Ro
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.40 no.7
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    • pp.1369-1376
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    • 2015
  • A wireless bridge is essential to transmit control and managing information to sensors or instruments from a central integrated ship area network station. In this paper, a WiMedia Distributed-MAC(D-MAC) protocol is adopted for development of a seamless N-Screen wireless service in Indoor and Ship Area Networks. Furthermore, to provide the OSMU(One Source Multi Use) N-screen service through P2P streaming in the seamless D-MAC protocol, a Dynamic Threshold-based Multicast(DTM) technology is proposed and analyzed. For this technology, a new Hard/Soft Vertical Region(HVR-SVR) based time slot allocation and a multicast resource reservation scheme are combined. From simulation results, proposed DTM scheme expands the number of time slots available for unicast and multicast realtime N-Screen reservations with various service time interval requests. Furthermore, it enhances performances in vewpoints of realtime N-Screen data reservation conflict and throughput.

A Swine Management System for PLC baed on Integrated Image Processing Technique (통합 이미지 처리기법 기반의 PLF를 위한 Swine 관리 시스템)

  • Arellano, Guy;Cabacas, Regin;Balontong, Amem;Ra, In-Ho
    • Smart Media Journal
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    • v.3 no.1
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    • pp.16-21
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    • 2014
  • The demand for food rises proportionally as population grows. To be able to achieve sustainable supply of livestock products, efficient farm management is a necessity. With the advancement in technology it also brought innovations that could be harness in order to achieve better productivity in animal production and agriculture. Precision Livestock Farming (PLF) is a budding concept of making use of smart sensors or available devices to automatically and continuously monitor and manage livestock production. With this concept, this paper introduces a swine management system that integrates image processing technique for weight monitoring. This system captures pig images using camera, evaluate and estimate the weight base on the captured image. It is comprised of Pig Module, Breeding Module, Health and Medication Module, Weighr Module, Data Analysis Module and Report Module to help swine farm administrators better understand the performance and situation of the swine farm. This paper aims to improve the management in both small and big livestock raisers.

A Study on the Mobile Communication Network and Practical use of Smart Phone for Building of Realtime Location Based Reservation System (실시간 위치기반 예약시스템 구축을 위한 이동통신망과 스마트폰 최적 활용에 관한 연구)

  • Kang, Sin-Kwan;Lee, Jeong-Bae
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.12 no.1
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    • pp.283-294
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    • 2012
  • Recently increasing usage of smart phones so, the application field of convergence industry between IT technology using smart phone-based mobile communication networks and other industry branches is expanding. In addition, R&D technologies in other fields are applied to smart phone applications effectively in order to develop products and support daily life more convenient. However, it is very hard to control these products and there is no efficient solution for this problem when many people are sent to specific area for big events, such as Biennale, Film Festival, EXPO, and so on. In order to solve this problem, this paper describes a network-based ticket reservation system and its organization using augmented reality on smart phone and mobile communication networks. In particular, we propose a method of designing and developing prototyping system based on smart phone application design technologies, prior to developing real smart phone application.

A Study On The Design of Patient Monitoring System Using RFID/WSN Based on Complex Event Processing (복합 이벤트 처리기반 RFID/WSN을 이용한 환자모니터링 시스템 설계에 관한 연구)

  • Park, Yong-Min;Oh, Young-Hwan
    • Journal of the Institute of Electronics Engineers of Korea TC
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    • v.46 no.10
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    • pp.1-7
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    • 2009
  • Nowadays there are many studies and there's huge development about RFID and WSN which have great developmental potential to many kinds of applications. In particular, the healthcare field is expected to could be securing international competitive power in u-Healthcare and combined medical treatment industry and service. More and more real time application apply RFID and WSN technology to identify, data collect and locate objects. Wide deployment of RFID and WSN will generate an unprecedented volume of primitive data in a short time. Duplication and redundancy of primitive data will affect real time performance of application. Thus, emerging applications must filter primitive data and correlate them for complex pattern detection and transform them to events that provide meaningful, actionable information to end application. In this paper, we design a complex event processing system. This system will process RFID and WSN primitive data and event and perform data transformation. Integrate RFID and WSN system had applied each now in medical treatment through this study and efficient data transmission and management forecast that is possible.

Data Monitoring System for Activation Analysis Based on Fuel Heater of Diesel Cars (디젤차량용 연료히터의 활성화분석용 데이터 모니터링 장치)

  • Lee, Bo-Hee;Son, Byong-Min;Zhao, Xiang;Yoon, Dal-Hwan
    • Journal of IKEEE
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    • v.18 no.2
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    • pp.179-184
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    • 2014
  • In this paper, we have developed a data monitoring system for activation analysis based on fuel heater of diesel cars. The light oil of diesel engine below a constant temperature be changed to the waxing materials of a semisolid status like a paraffin, and then it may not start. In order to evaluate an engine activation performance, we suggest an engine start time with an change between an extremely low temperature and high temperature, a delay time goes with heater resistor and current and pressure. So, we have developed sensor module system that can obtain the operational status data between fuel line and fuel heater, and evaluate the performance of fuel heater through monitoring of a temperature and pressure. Finally, we can gather the temperature and pressure data of this system with mobile terminal, remotely and propose an utility of this system that can find problems of fuel heater through measured data.

Indoor Environment Monitoring and Controlling System design and implementation based on Internet of Things (사물인터넷 기반 실내 환경 관제시스템 설계 및 구현)

  • Park, Jae-Woon;Kim, Dae-Sik;Joo, Nak-Keun
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.20 no.2
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    • pp.367-374
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    • 2016
  • Recently, many people perform jobs including study and work within a common indoor space. Yet this space could have an adverse effect on operational efficiency as well as health because of many pollution factors. So maintaining a pleasant environment in the common space is important. In this thesis we study the integrated environment management system for better living conditions. This system analyzes and manages harmful environmental factors to make more pleasant environment in office, library or classroom. The proposed indoor environment management system will provide a pleasant environment by monitoring the indoor environment and driving the actuator in real time. In addition, it can be applicable to different types of indoor space to reach solutions to raise recognition of indoor environment pollution by people.