A Study on the Deep Learning-Based Defect Prediction Model Using Sensor Data of Semiconductor Equipment (반도체 설비 센서 데이터를 활용한 딥러닝 기반의 불량예측 모델에 관한 연구)
-
- Proceedings of the Korea Information Processing Society Conference
- /
- 2021.05a
- /
- pp.459-462
- /
- 2021