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Analysis of the Effect of the Etching Process and Ion Injection Process in the Unit Process for the Development of High Voltage Power Semiconductor Devices (고전압 전력반도체 소자 개발을 위한 단위공정에서 식각공정과 이온주입공정의 영향 분석)

  • Gyu Cheol Choi;KyungBeom Kim;Bonghwan Kim;Jong Min Kim;SangMok Chang
    • Clean Technology
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    • v.29 no.4
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    • pp.255-261
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    • 2023
  • Power semiconductors are semiconductors used for power conversion, transformation, distribution, and control. Recently, the global demand for high-voltage power semiconductors is increasing across various industrial fields, and optimization research on high-voltage IGBT components is urgently needed in these industries. For high-voltage IGBT development, setting the resistance value of the wafer and optimizing key unit processes are major variables in the electrical characteristics of the finished chip. Furthermore, the securing process and optimization of the technology to support high breakdown voltage is also important. Etching is a process of transferring the pattern of the mask circuit in the photolithography process to the wafer and removing unnecessary parts at the bottom of the photoresist film. Ion implantation is a process of injecting impurities along with thermal diffusion technology into the wafer substrate during the semiconductor manufacturing process. This process helps achieve a certain conductivity. In this study, dry etching and wet etching were controlled during field ring etching, which is an important process for forming a ring structure that supports the 3.3 kV breakdown voltage of IGBT, in order to analyze four conditions and form a stable body junction depth to secure the breakdown voltage. The field ring ion implantation process was optimized based on the TEG design by dividing it into four conditions. The wet etching 1-step method was advantageous in terms of process and work efficiency, and the ring pattern ion implantation conditions showed a doping concentration of 9.0E13 and an energy of 120 keV. The p-ion implantation conditions were optimized at a doping concentration of 6.5E13 and an energy of 80 keV, and the p+ ion implantation conditions were optimized at a doping concentration of 3.0E15 and an energy of 160 keV.

Change of Spherical Aberration with Aspheric Soft Contact Lens Wear (비구면 소프트콘택트렌즈 착용에 의한 눈의 구면수차 변화)

  • Kim, Jeong Mee;Mun, Mi-Young;Kim, Young Chul;Lee, Koon-Ja
    • Journal of Korean Ophthalmic Optics Society
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    • v.17 no.4
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    • pp.365-372
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    • 2012
  • Purpose: To investigate ocular higher order aberrations (HOA) and spherical aberration changes caused by an aspheric soft contact lens designed to reduce spherical aberration (SA) of the eye. Methods: Fifty subjects who have successfully experienced soft contact lenses were refitted with aspheric design (Soflens Daily Disposable: SDD, Bausch+Lomb) soft contact lens. Ocular higher order aberrations (HOA) and stand alone SA were measured and analyzed for a 4-mm pupil size using Wave-Scan Wavefront$^{TM}$ aberrometer (VISX, Santa Clara, CA, USA). High and low contrast log MAR visual acuity and contrast sensitivity function (CSF) were also measured under photopic and mesopic conditions (OPTEC 6500 Vision Tester$^{(R)}$). All measurements were conducted monocularly with an undilated pupil. Results: The RMS mean values for total HOA with SDD contact lenses were significantly lower than those at with unaided eyes (p<0.001) and a reduction for SA in the SDD was close to the baseline SA (zero ${\mu}m$) (p<0.001). For the SDD lens, there was a statistically significant correlation between the changes in the total HOA and the contact lens power (r=0.237, p=0.018) as well as between the changes in SA and the lens power (r=0.324, p=0.001). High contrast visual acuity (HCVA) and low contrast visual acuity (LCVA) with SDD lenses were $-0.063{\pm}0.062$ and $0.119{\pm}0.060$, respectively under photopic and $-0.003{\pm}0.063$ and $0.198{\pm}0.067$, respectively under mesopic condition. Contrast Sensitivity Function (CSF) with SDD lenses under both photopic and mesopic conditions was $3.095{\pm}0.068$ and $3.087{\pm}0.074$, respectively. Conclusions: The SDD contact lens designed to control SA reduced the total ocular HOA and SA of the eye, resulting in compensating for positive SA of the eyes. Thus, the optical benefits of the lens with SA control would be adopted for improving the quality of vision.

Strategies about Optimal Measurement Matrix of Environment Factors Inside Plastic Greenhouse (플라스틱온실 내부 환경 인자 다중센서 설치 위치 최적화 전략)

  • Lee, JungKyu;Kang, DongHyun;Oh, SangHoon;Lee, DongHoon
    • Journal of Bio-Environment Control
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    • v.29 no.2
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    • pp.161-170
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    • 2020
  • There is systematic spatial variations in environmental properties due to sensitive reaction to external conditions at plastic greenhouse occupied 99.2% of domestic agricultural facilities. In order to construct 3 dimensional distribution of temperature, relative humidity, CO2 and illuminance, measurement matrix as 3 by 3 by 5 in direction of width, height and length, respectively, dividing indoor space of greenhouse was designed and tested at experimental site. Linear regression analysis was conducted to evaluate optimal estimation method in terms with horizontal and vertical variations. Even though sole measurement point for temperature and relative humidity could be feasible to assess indoor condition, multiple measurement matrix is inevitably required to improve spatial precision at certain time domain such as period of sunrise and sunset. In case with CO2, multiple measurement matrix could not successfully improve the spatial predictability during a whole experimental period. In case with illuminance, prediction performance was getting smaller after a time period of sunrise due to systematic interference such as indoor structure. Thus, multiple sensing methodology was proposed in direction of length at higher height than growing bed, which could compensate estimation error in spatial domain. Appropriate measurement matrix could be constructed considering the transition of stability in indoor environmental properties due to external variations. As a result, optimal measurement matrix should be carefully designed considering flexibility of construction relevant with the type of property, indoor structure, the purpose of crop and the period of growth. For an instance, partial cooling and heating system to save a consumption of energy supplement could be successfully accomplished by the deployment of multiple measurement matrix.

A Study on Implementation and Performance of the Power Control High Power Amplifier for Satellite Mobile Communication System (위성통신용 전력제어 고출력증폭기의 구현 및 성능평가에 관한 연구)

  • 전중성;김동일;배정철
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.4 no.1
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    • pp.77-88
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    • 2000
  • In this paper, the 3-mode variable gain high power amplifier for a transmitter of INMARSAT-B operating at L-band(1626.5-1646.5 MHz) was developed. This SSPA can amplify 42 dBm in high power mode, 38 dBm in medium power mode and 36 dBm in low power mode for INMARSAT-B. The allowable errol sets +1 dBm as the upper limit and -2 dBm as the lower limit, respectively. To simplify the fabrication process, the whole system is designed by two parts composed of a driving amplifier and a high power amplifier. The HP's MGA-64135 and Motorola's MRF-6401 were used for driving amplifier, and the ERICSSON's PTE-10114 and PTF-10021 for the high power amplifier. The SSPA was fabricated by the RP circuits, the temperature compensation circuits and 3-mode variable gain control circuits and 20 dB parallel coupled-line directional coupler in aluminum housing. In addition, the gain control method was proposed by digital attenuator for 3-mode amplifier. Then il has been experimentally verified that the gain is controlled for single tone signal as well as two tone signals. In this case, the SSPA detects the output power by 20 dB parallel coupled-line directional coupler and phase non-splitter amplifier. The realized SSPA has 41.6 dB, 37.6 dB and 33.2 dB for small signal gain within 20 MHz bandwidth, and the VSWR of input and output port is less than 1.3:1. The minimum value of the 1 dB compression point gets more than 12 dBm for 3-mode variable gain high power amplifier. A typical two tone intermodulation point has 36.5 dBc maximum which is single carrier backed off 3 dB from 1 dB compression point. The maximum output power of 43 dBm was achieved at the 1636.5 MHz. These results reveal a high power of 20 Watt, which was the design target.

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A Fast Processor Architecture and 2-D Data Scheduling Method to Implement the Lifting Scheme 2-D Discrete Wavelet Transform (리프팅 스킴의 2차원 이산 웨이브릿 변환 하드웨어 구현을 위한 고속 프로세서 구조 및 2차원 데이터 스케줄링 방법)

  • Kim Jong Woog;Chong Jong Wha
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.42 no.4 s.334
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    • pp.19-28
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    • 2005
  • In this paper, we proposed a parallel fast 2-D discrete wavelet transform hardware architecture based on lifting scheme. The proposed architecture improved the 2-D processing speed, and reduced internal memory buffer size. The previous lifting scheme based parallel 2-D wavelet transform architectures were consisted with row direction and column direction modules, which were pair of prediction and update filter module. In 2-D wavelet transform, column direction processing used the row direction results, which were not generated in column direction order but in row direction order, so most hardware architecture need internal buffer memory. The proposed architecture focused on the reducing of the internal memory buffer size and the total calculation time. Reducing the total calculation time, we proposed a 4-way data flow scheduling and memory based parallel hardware architecture. The 4-way data flow scheduling can increase the row direction parallel performance, and reduced the initial latency of starting of the row direction calculation. In this hardware architecture, the internal buffer memory didn't used to store the results of the row direction calculation, while it contained intermediate values of column direction calculation. This method is very effective in column direction processing, because the input data of column direction were not generated in column direction order The proposed architecture was implemented with VHDL and Altera Stratix device. The implementation results showed overall calculation time reduced from $N^2/2+\alpha$ to $N^2/4+\beta$, and internal buffer memory size reduced by around $50\%$ of previous works.

Development of Rain Shelter for Chinese Cabbage Rainproof Cultivation (배추재배용 비가림하우스 개발)

  • Yu, In Ho;Lee, Eung Ho;Cho, Myeong Whan;Ryu, Hee Ryong;Moon, Doo Gyung
    • Journal of Bio-Environment Control
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    • v.23 no.4
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    • pp.293-302
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    • 2014
  • This study was carried out to develop rain shelter which can make an appropriate size and environment for Chinese cabbage rainproof cultivation. Fifty three farms with chinese cabbage rainproof cultivation system have been investigated to set up width and height of rain shelter. Mostly the width of 6m was desired for rain shelter and the height of 1.6m for their eaves, so these values were chosen as the dimensions for rain shelter. After an analysis of their structural safety and installation costs by the specifications of the rafter pipe, Ø$25.4{\times}1.5t$ and 90cm have been set as the size of rafter that such size costs the least. This size is stable with $27m{\cdot}s^{-1}$ of wind velocity and 17cm of snow depth. Therefore it is difficult to apply this dimension to area with higher climate load. In order to sort out such problem, the rain shelter has been designed to avoid damage on frame by opening plastic film to the ridge. Once greenhouse band is loosen by turning the manual switch at the both sides of rain shelter and open button of controller is pushed then switch motor rises up along the guide pipe and plastic film is opened to the ridge. Chinese cabbage can be damaged by insects if rain shelter is opened completely as revealed a field. To prevent this, farmers can install an insect-proof net. Further, the greenhouse can be damaged by typhoon while growing Chinese cabbage therefore the effect of an insect-proof net on structural safety has been analyzed. And then structural safety has been analyzed through using flow-structure interaction method at the wind condition of $40m{\cdot}s^{-1}$. And it assumed that wind applied perpendicular to side of the rain shelter which was covered by insect-proof net. The results indicated that plastic film was directly affected by wind therefore high pressure occurred on the surface. But wind load on insect-proof net was smaller than on plastic film and pressure distribution was also uniform. The results of structural analysis by applying pressure data extracted from flow analysis indicated that the maximum stress occurred at the end of pipe which is the ground part and the value has been 54.6MPa. The allowable stress of pipe in the standard of structural safety must be 215 MPa or more therefore structural safety of this rain shelter is satisfied.

Study of system using load cell for real time weight sensing of artificial incubator (인공부화기의 실시간 중량감지를 위한 로드셀을 이용한 시스템 연구)

  • jeong, Jin-hyoung;Kim, Ae-kyung;Lee, Sang-Sik
    • The Journal of Korea Institute of Information, Electronics, and Communication Technology
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    • v.11 no.2
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    • pp.144-149
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    • 2018
  • The eggs are incubated for 18 days through the generator and incubated in the developing incubator. During the developmental period, the weight loss of the fetus is correlated with the ventricular formation, and the proper ventricular formation is also associated with the healthy embryonic hatching and the egg hatching rate. However, in the incubator period of the domestic hatchery, it is a reality to acquire the resultant side by the Iranian standard weight measurement with the experience of the hatchery and the person concerned and the development period without the apparatus for measuring the present weight. As a result, prevalence of early mortality, hunger and illness during hatching are frequent. Monitoring the reduction of weaning weight is crucial to obtaining chick quality and hatching performance with weight changes within the development machine. Water loss is different depending on the size of eggs, egg shell, and elder group. We can expect to increase the hatching rate by measuring the weight change in real time and optimizing the ventilation change accordingly. There is a need to develop a real-time measurement system that can control 10 to 13% reduction of the total weight during hatching. The system through this study is a way to check the one - time directly when moving the existing egg, and it is impossible to control the measurement of the fetal water evaporation within the development period. Unlike systems that do not affect the hatching rate, four load cells are connected in parallel on the Arduino sketch board and the AT-command command is used to connect the mobile phone and computer in real time. The communication speed of Bluetooth was set to 15200 to match the communication speed of Arduino and Hyper-terminal program. The real - time monitoring system was designed to visually check the change of the weight of the fetus in the artificial incubator. In this way, we aimed to improve the hatching rate and health condition of the hatching eggs.