• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.6
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• pp.599-607
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• 2011

In this paper, a reaction-force compensation system for an XY linear motion stage, without an additional external isolation structure or extra motors, is developed. This system consists of a movable magnet track, a spring, a dummy weight, and a dedicated sensor module that measures the relative positions of the movable magnet track with respect to the motor coil. The reaction force compensation system is modeled, and simulations are carried out to optimize design parameters such as the moving distance of the magnet track, the transmission force, the dummy weight, and the allowed size of the mechanism. An XY linear motion stage is built, incorporating the reaction force compensation system, and the performance of the system is verified experimentally. For acceleration and deceleration values of 10 m/$s^2$, 85% of the reaction force is absorbed by the reaction force compensation system.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.11
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• pp.554-560
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• 2020

In the manufacturing process of flat panel displays, a high-precision planar motion stage is used to position a specimen. Stages of this type typically use frictionless linear motors and air bearings, and laser interferometers. Real-time dynamic correction of the yaw motion error is very important because the inevitable yaw motion error of the stage means a change in the specimen orientation. Gantry control is generally used to compensate for yaw motion errors. Flexure units that allow rotational motion are applied to the stage to apply this method to a stage using an air-bearing guide. This paper proposes a method to improve the constant speed motion performance of a H-type XY stage equipped with air bearing and flexure units. When applying the gantry control to the stage, including the flexure units, the cause of the mutual ripple generated from the linear motors is analyzed, and adaptive learning control is proposed to compensate for the mutual ripple. A simulation was performed to verify the proposed method. The speed ripple was reduced to approximately the 22 % level. The ripple reduction was verified by simulating the stage state where yaw motion error occurs.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.10
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• pp.929-934
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• 2014

Reaction force compensation (RFC) mechanism can relieve the vibration of base system caused by acceleration and deceleration of mover. In this paper, we propose a new passive RFC mechanism with a movable additional mass to reduce vibration of the system base as well as displacement of the magnet track. First, equation of motion for the new passive RFC mechanism is derived and simulated to tune design parameters such as masses and spring coefficients. Simulation results show that the vibration of the system base of the stage with the new RFC mechanism.