• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.37.2-37.2
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• 2011

반도체공정에서 Photo-lithography는 특정 광원을 사용하여 구현하고자 하는 패턴을 기판상에 형성하는 기술이다. 이러한 Photo-lithography 공정에서는 패턴이 형성되어 있는 마스크가 핵심적인 역할을 하며 반도체소자의 전체적인 성능을 결정한다. 이에 따라 Photo-lithography용 마스크에 사용되는 Blank 마스크는 Defect의 최소화 및 우수한 평탄도 등의 조건들이 요구되고 있다. 이러한 Blank 마스크 재료로 광원을 효율적으로 투과시키는 성질이 우수하고 다른 재료에 비해 열팽창계수가 작은 석영기판이 사용되고 있다. 석영 기반의 마스크는 UV Lithography에서 주로 사용되고 있으며 그 밖에 UV-NIL (Nano Imrpint Lithography), EUVL (Extreme Ultra Violet Lithography) 등에도 이용되고 있다. 석영기판을 가공하여 Blank 마스크로 제작하기 위해 석영기판의 Lapping/Polishing 등이 핵심기술이며 현재 일본에서 전량 수입에 의존하고 있어, 이에 대한 연구의 필요성이 절실한 상황이다. 본 연구에서는 Blank 마스크제작을 위한 석영기판의 Polishing 공정에 사용되는 Ceria Slurry의 특성 연구 및 이에 따른 연마평가를 실시하였으며 첨가제의 조건에 따른 pH/Viscosity/Stability 등의 물리적인 특성을 관찰하여 석영기판 Polishing에 효율적인 Ceria slurry의 최적조건을 도출했다. 또한, 조건에 따른 Slurry의 정확한 분석을 위해 Zeta Potential Analyzer를 이용하여 연마입자의 크기 및 Zeta Potential에 대한 평가를 실시한 후 연마제와 석영기판의 Interaction force를 측정하였다. 상기 실험에 의해 얻어진 최적화된 연마 공정 조건하에서 Ceria slurry를 사용하여 연마평가를 실시함으로써 Removal Rate/Roughness 등의 결과를 관찰하였다. 본 연구를 통해 반도체 photo mask 제작을 위한 Ceria slurry의 주요특성을 파악하고 석영기판의 Polishing에 효율적인 조건을 도출함으로써 Lithography 마스크를 효율적으로 제작할 수 있을 것으로 예상된다.

• Economic and Environmental Geology
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• v.56 no.3
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• pp.239-257
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• 2023

Sangdong deposit, a W-Mo skarn deposit, is located in Taebaeksan mineralized district, hosting vertically developed scheelite-quartz veins that formed at the late ore-forming stage. In this study, we tried to examine the geochemical signatures of ore-forming fluids and vein-forming mechanisms by analyzing the micro-texture of quartz veins and trace element concentrations of quartz. As a result of texture analyses, quartz veins in the hanging wall orebody and the foot wall orebody commonly exhibit the blocky and the elongate blocky texture, respectively, whereas quartz veins in the main orebody show both textures. These textural differences indicate that quartz veins from the hanging wall orebody were precipitated by the primary hydrofracturing due to H₂O saturation in the igneous body with relatively high temperature and pressure at a vein-skarn stage, and after that, repeated hydrofracturing caused the formation of quartz veins from the main orebody and foot wall orebody. The results of trace element concentrations show that Li⁺+Al³⁺↔Si⁴⁺ is a main substitution mechanism. However, those of the foot wall orebody were clearly divided into a Li⁺-dominated substitution and a Na⁺-, K⁺-dominated substitution. Considering that quartz veins from the foot wall orebody commonly show the elongate blocky texture, such a distinction means that it is a result of repeated injections of fluid with the different composition. Ti concentrations of quartz from the hanging wall, main, and the foot wall orebody are 28.6, 8.2, and 15.7 ppm in average, respectively. Given a proportional relationship between the precipitation temperature and Ti concentrations, it seems that quartz veins from the hanging wall orebody were precipitated at the highest temperature. Al concentrations of the hanging wall, main, and the foot wall orebody having an inverse relationship with fluid pH are 162.3, 114.2, and 182.5 ppm in average, respectively. These results show that Al concentrations in vein-forming fluids were not changed dramatically. Moreover, these concentrations are extremely low in comparison with the other hydrothermal deposits. This indicates that quartz in overall ore veins at Sangdong deposit was precipitated from the constant condition with slightly acidic to near neutral pH.

• Economic and Environmental Geology
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• v.39 no.5 s.180
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• pp.583-595
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• 2006

Quartz veins from the Hwawon area are an epithermal quartz vein that is filling the fault zone within Precambrian metasedimentary rocks and Jurassic granite. Mineralization can be divided into hypogene and supergene stages. Hypogene stage is associated with hydrothermal alteration minerals(propylitic and argillic zones) such as epidote, chlorite, illite, sericite and sulfides such as pyrite, sphalerite, chalcopyrite, galena, bornite, cubanite, argentian tetrahedrite, Pb-Ag-S system and Pb-Te-S system. Supergene stage is composed of Fe-Mn oxide, Zn-Fe oxide and Pb oxide. Fluid inclusion data indicate that homogenization temperatures and salinity of hypogene stage range from $291.2^{\circ}C$ to $397.3^{\circ}C$ and from 0.0 to 9.3 wt.% eq. NaCl, respectively. It suggests that ore forming fluids were cooled and diluted with the mixing of meteoric water. Oxygen($-0.7{\sim}3.5%_{\circ}$(white quartz: $-0.7{\sim}3.5%_{\circ}$, transparent quartz: $2.4%_{\circ}$)) and hydrogen($-70{\sim}55%_{\circ}$(white quartz: $-70{\sim}55%_{\circ}$, transparent quartz: $-62%_{\circ}$)) isotopic composition indicates that hydrothermal fluids were derived from magmatic and evolved by mixing with meteoric water during mineralization.

• The Journal of the Petrological Society of Korea
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• v.23 no.1
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• pp.1-15
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• 2014

The Yeongam mineralized zone is located in the southwestern part of the Korean peninsula, including the Sangeun, Eunjeok and Baramjai mines. This zone is located in the northeastern part of the Mokpo-Haenam-Yeongam volcanic circular structure. The 13 sites of quartz vein with mineralization are developed in the Sangeun-Eunjeok-Baramjai area, within rhyolitic welded tuff, showing N-S or NNW trend with highly dipping to the west. The quartz veins occur as a single vein or a bundle of veins with width of 1-5 cm in each. The existence of faults parallel to the quartz veins indicates that the faulting occurred before and after the development of quartz veins and mineralization. The quartz veins and mineralized zone are displaced by NW-trending sinistral strike-slip faults. The extension of the Sangeun-Eunjeok mineralized belt is traced to the south, following a NNW-trending tectonic line, and the Au-Ag contents are analysed in the 12 sites of quartz veins. Contents of gold and silver are 12.3 g/t and 1,380.0 g/t in Eunjeok mine, 2.7 g/t, 23.5g in Sangeun mine, and <0.1 g/t, 5.7 g/t in Baramjai mine respectively. Therefore, a highly Ag-Au mineralized zone is not developed in the southern part of the studied area.

• Korean Journal of Mineralogy and Petrology
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• v.34 no.2
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• pp.147-156
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• 2021

We report fluid inclusion study results of copper-bearing quartz veins in Zogdor area, which is located within the Gurvansayhan island arc terrane of Southern Mongolia. At the Zogdor area, structurecontrolled copper mineralization is hosted in granodiorite-porphyry, which emplaced in the late Cretaceous formation. Within this granodiorite porphyry, copper-bearing quartz veins are associated with the hydrothermal alteration that includes quartz-epidote-magnetite, and quartz-magnetite in the propylitic zones. The veins are classified into two types, according to their mineral composition, which occur mainly as chalcopyrite, rare amounts of bornite, magnetite, and pyrite. Fluid inclusions in the quartz veins from the quartz-magnetite±chalcopyrite and quartz-epidote-magnetite veins are two-phase aqueous inclusions having bubble sizes of 5-30 vol.%, evident salinities of 2.0-22.6 wt.% NaCl, and homogenization temperatures of 107-270℃. Based on mineral assemblages of the observed veins, along with the geochemical properties and alteration faces of the host rock, fluid inclusion data show that the study area corresponds to propylitic alteration zone in the porphyry Cu related mineralization.

• Economic and Environmental Geology
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• v.50 no.6
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• pp.509-515
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• 2017

Quartz is the most abundant mineral in the Earth's continental crust. Therefore, understanding of quartz dissolution and precipitation is very important to know about weathering processes and interactions between rocks and water in hydrothermal and metamorphic environments. This paper presents a basic review on the research about quartz dissolution mechanism under various physico-chemical conditions. We rearranged the relationship between each physico-chemical factor and dissolution mechanism from the results of previous researchers in this paper. From this result, we understood that quartz dissolution and precipitation are affected by each factor such as temperature, pH, and applied stress conditions at contact point. In particular, we recognized that the high pH and temperature conditions have different anion concentrations on mineral's surface. As a result, high pH and temperature conditions have a better effect than applied stress condition to the quartz dissolution mechanism.

• Applied Chemistry for Engineering
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• v.31 no.6
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• pp.697-700
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• 2020

We report the synthesis and characterization of quartz nanocrystals (NCs). Quartz NCs were synthesized from the dissolution of amorphous silica nanoparticle precursors under the mild hydrothermal condition of ~250 ℃ and autogenic pressure. It was confirmed that the average size of the nanostructure with a highly crystalline phase of α-quartz can be tuned in a relatively narrow range from 407.5 to 826.2 nm with respect to the reaction time. α-Quartz NCs have potential uses for technological applications in optoelectronics, sensing, and rechargeable battery devices.

• Korean Journal of Mineralogy and Petrology
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• v.34 no.1
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• pp.1-14
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• 2021

The Unsang gold deposit has been one of the three largest deposits (Daeyudong, Kwangyang) in Korea. The geology of this deposit consists of series of host rocks including Precambrian metasedimentary rock and Jurassic Porphyritic granite. The deposit consists of Au-bearing quartz veins which filled fractures along fault zones in Precambrian metasedimentary rock and Jurassic Porphyritic granite, which suggests that it is an orogenic-type deposit. Quartz veins are classified as 1) galena-quartz vein type, 2) pyrrhotite-quartz vein type, 3) pyrite-quartz vein type, 4) pegmatic quartz vein type, 5) muscovite-quartz vein type and 6) simple quartz vein type based on mineral assembles. The studied quartz vein is pyrite-quartz vein type which occurs as sericitization, chloritization and silicification. The white mica from stylolitic seams of laminated quartz vein occurs as fine or medium aggregate associated with white quartz, pyrite, chlorite, rutile, monazite, apatite, K-feldspar, zircon and calcite. The structural formular of white mica from laminated quartz vein is (K0.98-0.86Na0.02-0.00Ca0.01-0.00Ba0.01-0.00 Sr0.00)1.00-0.88(Al1.70-1.57Mg0.22-0.09Fe0.23-0.10Mn0.00Ti0.04-0.02Cr0.01-0.00V0.00Ni0.00)2.06-1.95 (Si3.38-3.17Al0.83-0.62)4.00O10(OH2.00-1.91F0.09-0.00)2.00. It indicated that white mica of laminated quartz vein has less K, Na and Ca, and more Si than theoretical dioctahedral micas. Compositional variations in white mica from laminated quartz vein are caused by phengitic or Tschermark substitution [(Al3+)VI+(Al3+)IV <-> (Fe2+ or Mg2+)VI+(Si4+)IV] and direct (Fe3+)VI <-> (Al3+)VI substitution. The structural formular of chlorite from laminated quartz vein is((Mg1.11-0.80Fe3.69-3.14Mn0.01-0.00Zn0.01-0.00K0.07-0.01Na0.01-0.00Ca0.04-0.01Al1.66-1.09)5.75-5.69 (Si3.49-2.96Al1.04-0.51)4.00O10 (OH)8. It indicated that chlorite of laminated quartz vein has more Si than theoretical chlorite. Compositional variations in chlorite from laminated quartz vein are caused by phengitic or Tschermark substitution (Al3+,VI+Al3+,IV <-> (Fe2+ or Mg2+)VI+(Si4+)IV) and octahedral Fe2+ <-> Mg2+ (Mn2+) substitution. Therefore, laminated quartz vein and alteration minerals of the Unsan Au deposit was formed during ductile shear stage of orogeny.

• 전기산업
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• v.7 no.3
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• pp.12-28
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• 1996

• Applied Biological Chemistry
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• v.14 no.3
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• pp.183-189
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• 1971

The studies reported herein were conducted to inquire the effect of fused siliceous materials which mixed with sand and quartz added calcium fertilzer on rice grown on low available silica content soil. The applied nitrogen level were examined for the two plots, nitrogen 10kg and 20kg per 10 a., and the siliceous materials(Wollastonite, Fused sand and Fused quartz) were applied as levels to 100kg, 300kg and 500kg per 10a. in the pots. The results are summerized as follows; 1. The available silica content solved in N/2 HCl solution of fused sand was more than of fused quartz but the silica solubility in 2% citric acid of fused quartz were higher than other. 2. The absorbed silica content by plant grown on the fused quartz plot was the highest among other siliceous materials and of fused sand and natural wollastonite were at almost equal. The ratio of absorbed silica of natural wollastonite was highest among them and in fused materials, the quartz was higher than sand. 3. The productivity of rice was increased by percentage of filled grain, weights of 1000 grains, and number of spikelets on account of the large quantity of the silica absorbed by plant Especially fused quartz showed the highest productive effect among siliceous materials and natural wollastonite and fused sand were similar effect. 4. From the above results. the fused quartz was selected as expelled siliceous fertilizer on rice plant among them and the fused sand was equal effect to natural wollastonite.