• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.217-217
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• 2011

플라즈마를 이용하는 식각 및 증착등의 반도체공정에 있어서 최근에는 기판의 크기가 점차 증가하는 추세에 있다. 이러한 대면적 플라즈마 발생장치 내에서 플라즈마 밀도와 라디칼 농도의 공간적인 특성을 이해하는 것에 대한 중요성이 더해지고 있다. 이를 위해 Langmuir probe와 같은 전기적 접근법에 의한 진단방법이나 광학적 접근법에 의한 진단방법에 대한 연구가 이루어 졌다. 전기적 접근법에 의한 플라즈마의 진단방법은 원리가 간단하고 정확도가 높다는 장점이 있지만 진단 장치에 의한 플라즈마의 간섭이 크고 식각가스의 경우 진단이 어렵다는 단점이 있다. 그에 비해 광학적 진단방법은 플라즈마에 간섭이 많지 않은 방법으로 알려져 있고 레이저 형광법(LIF), 원적외선 레이저 흡수 분광법(IR laser Absorption Spectroscopy), 광량측정법(Actinometry)등이 있다. 이 중 레이저 형광법, 원적외선 레이저 흡수 분광법의 경우, 진단장치가 매우 복잡하고 가격이 비싸다는 단점을 가지고 있다. 반면 광량측정법의 경우 다른 광학적 접근법에 의한 진단방법에 비해 원리와 실험장치가 간단하고 공간적인 라디칼 분포의 진단이 쉽다는 점에서 장점을 가지고 있다. Actinometry는 Ar과 같은 불활성 기체를 작은 비율을 넣어서 여기 된 불활성 기체의 파장세기와 여기 된 측정 라디칼의 파장세기의 비교를 통해 상대밀도를 측정하는 방법이다. 이 측정 방법에 Abel's inversion equation을 적용함으로 해서 대면적 M-ICP(Magnetized - Induced Coupled Plasma)에서 식각가스인 $CF_4$플라즈마에서 F 라디칼 농도의 공간적인 분포를 측정하고 분석하였다. 또한 플라즈마의 압력, 소스 전력 값과 기판 전력 값등의 조건의 변화에 따라 F 라디칼 농도의 분포가 어떻게 달라지는지에 대해 측정 분석하여 다루었다.

• The Journal of the Acoustical Society of Korea
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• v.24 no.8
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• pp.454-461
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• 2005

Time spread due to the multipath in underwater acoustic channel, induces ISI (Inter-Symbol Interference) which degrades the performance of the underwater acoustic communication system. The passive phase conjugation (PPC) which improves the signal to multipath interference ratio (SMR) and therefore reduces the frequency selectivity. is a diversity communication technique giving a less ISI under multipath fading channel. Its frequency selectivity depends on the number of receiver array sensors and time varying source to receiver range. In this study, frequency selectivity of the PPC and its effects on bit error of underwater acoustic communication is analyzed by numerical simulation.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.41 no.9
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• pp.39-45
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• 2004

A design method is proposed for the sequence detection with fixed decision delay with less hardware complexity using the concept of the Voronoi diagram and its dual, the Delaunay tessellation. This detector design is based on the Fixed Delay Tree Search (FDTS) detection. The FDTS is a computationally efficient sequence detection algerian and has been shown to achieve near-optimal performance in the severe Intersymbol Interference (ISI) channels when combined with decision feedback equalization and the appropriate channel coding. In this approach, utilizing the information contained in the Voronoi diagram or equivalently the Delaunay tessellation, the relative location of the detector input sequence in the multi-dimensional Euclidean space is found without any computational redundancy, which leads to a reduced complexity implementation of the detector.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.25 no.12
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• pp.1258-1268
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• 2014

In this paper, we propose and design IBFD system based on DCR. And then, we analyze effect of DC offset by self-interference in the proposed system. Also, we evaluate BER performance of the proposed system according to DC offset. As a result of the simulation, we can confirm that when the self-interference is not completely cancelled by the RF cancellation, linearity of desired signal and self-interference is distorted by DC offset. Also, in the proposed system using m-QAM modulation, DC offsets of multi-level are caused by self-interference with m-QAM modulation. As a result, constellations of desired signal and self-interference are greatly distorted. In contrast, in the proposed system using m-PSK modulation, DC offset of single level is caused by self-interference with m-PSK modulation. In this condition, we confirm that distortion of constellations of desired signal and self-interference is less than when using m-QAM modulation. That is, we can confirm that m-PSK modulation is effective than m-QAM modulation in DCR based IBFD system. Also, we can confirm that it is important to cancel self-interference as much as possible in RF-stage.

• Korean Journal of Optics and Photonics
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• v.20 no.1
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• pp.29-33
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• 2009

We propose a new measuring technique based on optical low-coherence reflectometry that enables us to determine the refractive index and the geometrical thickness of a transparent sample by one-time scanning only. By passing a collimated beam having a finite size through the edge of the sample, the refractive index and the geometrical thickness can be determined simultaneously from the comparison of interferograms generated by two kinds of reflected beams. In this study, a refractive index could be determined with the accuracy of $10^{-3}$, and its accuracy would be enhanced by using a more precise translator and a thicker sample.

• Korean Journal of Optics and Photonics
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• v.8 no.4
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• pp.333-339
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• 1997

We fabricated a sensor head which consists of spliced different-diameter fiber gratings for discrimination between strain and temperature. Because the fibers were drawn from the same preform, their temperature characteristics were the same but not for strain sensitivities which are inversely proportional to fibers cross-sectional areas. In measurement range of 0-1500$\mu$strain and 20-10$0^{\circ}C$, we could obtain, by using the matrix calculation, the unknown physical quantities within 10% of calculation error compared with the micrometer and thermocouple values. To improve the strain measurement accuracy, we suggest a new, novel method which deploys an unbalanced fiber Mach-Zehnder interferometer. This new signal processing technique converts the strain information to interference signal amplitude variation, temperature-independently. we obtained measurement accuracy nearly 80 times better than that obtainable with the conventional optical spectrum analyzer usage.

• Polymer(Korea)
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• v.37 no.5
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• pp.656-662
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• 2013

The flexible patterned cover film was made by a simple solution coating process using polymethyl methacrylate (PMMA) solution with glass beads. The effect of patterned cover film on the efficiency of solar cell has been investigated. It was found that the relative solar cell efficiency increased up to 3.4% with the incident light angle between $0-90^{\circ}$ by the sphere shape of glass bead coated on the film surface. This was understood that the loss of transmittance and scattering due to the light directional dependency on solar cell were minimized because the light entered glass beads normal to its surface regardless of incident light angle. The maximum relative solar cell efficiency was achieved when glass bead shape on the film is hemisphere and the relative efficiency increased with increasing the amount of glass bead on the film surface. However, too much glass beads on the film surface resulted in the lower relative solar cell efficiency due to the lowering of transmittance as well as the occurring of light interference.

• Journal of the Korea Concrete Institute
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• v.24 no.2
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• pp.129-136
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• 2012

Compression splices are required for all compression members in almost all of the floors in high-rise buildings. Therefore, a clear understanding of the behavior of compression splices can provide a rational design of compression splices. Tests of compression splices with bearing only and bond only cases were conducted to investigate the component resistance characteristics of compression splices. Test results showed that the circumferential tensile stresses induced by bearing and bond overlapped at the end of the splice length deterred bond and bearing splices from developing target splicing strength when both normal bond and bearing splices were used. In particular, the bearing strength was more significantly reduced than the bond strength since the bearing relied on the limited area near the end of the splice length. However, the strength of the normal splice was always higher than the strength of the bond only or the bearing only case. Consequently, the study results showed that splice strength in compression cannot be improved by means of removing bond or bearing. In addition, the bond strength in bond only splices was nearly same as the bond strength in tension splices and the strength increase of compression splice is attributed to end bearing only characteristic.

• Proceedings of the Korean Association of Geographic Inforamtion Studies Conference
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• 2008.10a
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• pp.324-328
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• 2008

지상 LiDAR(Light Detection And Ranging)는 정밀하고 빠르게 물체의 3차원 형상을 측량할 수 있는 시스템이다. 기본적으로 종전의 레이저 측량기의 기능을 갖고 있으며, 초당 최대 $5,000{\sim}50,000$ point의 레이저를 대상체 표면에 발사하여 대상체면에 투사한 레이저의 간섭이나 반사를 이용하여 대상체면상의 point could의 공간정보를 취득하는 관측방식의 3차원 정밀 측량으로서 대상체의 표면으로부터 상대적인 3차원(X, Y, Z) 지형공간좌표를 각각의 Point 데이터로 기록한다. 이러한 측정방법은 레이저가 반사되어 돌아오는 시간을 계산하여 거리를 결정하고 ${\theta}_h$(수평각)과 ${\theta}_v$(수직각) 각도만큼 수평, 수직으로 회전하여 측정한 점의 위치를 결정하므로 데이터 취득 각도에 따른 오차가 발생하게 된다. 본 연구 에서는 지상LiDAR 데이터 취득각도에 따른 오차 시뮬레이션 실시하여 실제 실험과의 비교 및 입사각에 따른 정확도 분석을 실시하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.177-180
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• 2001

This paper describes the calibration method and the evaluation method of relative expanded uncertainty for a multi-axis force/moment sensor. This sensor should be calibrated to be use in the industry. Now, the confidence of the calibration result is expressed with interference error. But it is no inaccurate, because an interference error, besides, a reproducibility error of the sensor, a error of this six-axis force/moment sensor calibrator, and so on. Thus, in order to accurately evaluate the relative expanded uncertainty of it, the concept of the uncertainty should be induced, and these errors must be contained in the relative expanded uncertainty. In this paper, the calibration method is exhibited and the evaluation method of the relative expanded uncertainty is also exhibited. And, a six-axis force/moment sensor was calibrated and the relative expanded uncertainty was evaluated.