• Title/Summary/Keyword: 산화-환원 과정

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Properties of the interfacial oxide and high-k dielectrics in $HfO_2/Si$ system ($HfO_2/Si$시스템의 계면산화막 및 고유전박막의 특성연구)

  • 남서은;남석우;유정호;고대홍
    • Proceedings of the Korea Crystallographic Association Conference
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    • 2002.11a
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    • pp.45-47
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    • 2002
  • 반도체 소자의 고집적화 및 고속화가 요구됨에 따라 MOSFET 구조의 게이트 절연막으로 사용되고 있는 SiO₂ 박막의 두께를 감소시키려는 노력이 이루어지고 있다. 0.1㎛ 이하의 소자를 위해서는 15Å 이하의 두께를 갖는 SiO₂가 요구된다. 하지만 두께감소는 절연체의 두께와 지수적인 관계가 있는 누설전류를 증가시킨다[1-3]. 따라서 같은 게이트 개패시턴스를 유지하면서 누설전류를 감소시키기 위해서는 높은 유전상수를 갖는 두꺼운 박막이 요구되는 것이다. 그러므로 약 25정도의 높은 유전상수를 갖고 5.2~7.8 eV 정도의 비교적 높은 bandgap을 갖으며, 실리콘과 열역학적으로 안정한 물질로 알려진 HfO2[4-5]가 최근 큰 관심을 끌고 있다. 본 연구에서는 HfO₂ 박막을 실제 소자에 적용하기 위하여 전극 및 열처리에 따른 HfO₂ 박막의 미세구조 및 전기적 특성에 관한 연구를 수행하였다. 이를 위해, HfO₂ 박막을 reactive DC magnetron sputtering 방법으로 증착하고, XRD, TEM, XPS를 사용하여 ZrO₂ 박막의 미세구조를 관찰하였으며, MOS 캐패시터 구조의 C-V 및 I-V 특성을 측정하여 HfO₂ 박막의 전기적 특성을 관찰하였다. HfO₂ 타겟을 스퍼터링하면 Ar 스퍼터링에 의해 에너지를 가진 산소가 기판에 스퍼터링되어 Si 기판과 반응하기 때문에 HfO₂ 박막 형성과 더불어 Si 기판이 산화된다[6]. 그래서 HfO₂같은 금속 산화물 타겟 대신에 순수 금속인 Hf 타겟을 사용하고 반응성 기체로 O₂를 유입시켜 타겟이나 시편위에서 high-k 산화물을 만들면 SiO/sub X/ 계면층을 제어할 수 있다. 이때 저유전율을 갖는 계면층은 증착과 열처리 과정에서 형성되고 특히 500℃ 이상에서 high-k/Si를 열처리하면 계면 SiO₂층은 증가하는 데, 이것은 산소가 HfO₂의 high-k 박막층을 뚫고 확산하여 Si 기판을 급속히 산화시키기 때문이다. 본 방법은 증착에 앞서 Si 표면을 희석된 HF를 이용해 자연 산화막과 오염원을 제거한 후 Hf 금속층과 HfO₂ 박막을 직류 스퍼터링으로 증착하였다. 우선 Hf 긍속층이 Ar 가스 만의 분위기에서 증착되고 난 후 공기중에 노출되지 않고 연속으로 Ar/O₂ 가스 혼합 분위기에서 반응 스퍼터링 방법으로 HfO₂를 형성하였다. 일반적으로 Si 기판의 표면 위에 자연적으로 생기는 비정질 자연 산화막의 두께는 10~15Å이다. 그러나 Hf을 증착한 후 단면 TEM으로 HfO₂/Si 계면을 관찰하면 자연 산화막이 Hf 환원으로 제거되기 때문에 비정질 SiO₂ 층은 관찰되지 않았다. 본 실험에서는 HfO2의 두께를 고정하고 Hf층의 두께를 변수로 한 게이트 stack의 물리적 특성을 살펴보았다. 선증착되는 Hf 금속층을 0, 10, 25Å의 두께 (TEM 기준으로 한 실제 물리적 두께) 로 증착시키고 미세구조를 관찰하였다. Fig. 1(a)에서 볼 수 있듯이 Hf 금속층의 두께가 0Å일때 13Å의 HfO₂를 반응성 스퍼터링 방법으로 증착하면 HfO₂와 Si 기판 사이에는 25Å의 계면층이 생기며, 이것은 Ar/O₂의 혼합 분위기에서의 스퍼터링으로 인한 Si-rich 산화막 또는 SiO₂ 박막일 것이다. Hf 금속층의 두께를 증가시키면 계면층의 성장은 억제되는데 25Å의 Hf 금속을 증착시키면 HfO₂ 계면층은 10Å미만으로 관찰된다. 그러므로 Hf 금속층이 충분히 얇으면 플라즈마내 산소 라디칼, 이온, 그리고 분자가 HfO₂ 층을 뚫고 Si 기판으로 확산되어 SiO₂의 계면층을 성장시키고 Hf 금속층이 두꺼우면 SiO/sub X/ 계면층을 환원시키면서 Si 기판으로의 산소의 확산은 막기 때문에 계면층의 성장은 억제된다. 따라서 HfO₂/Hf(Variable)/Si 계에서 HfO₂ 박막이 Si 기판위에 직접 증착되면, 순수 HfO₂ 박막의 두께보다 높은 CET값을 보이고 Hf 금속층의 두께를 증가시키면 CET는 급격하게 감소한다. 그러므로 HfO₂/Hf 박막의 유효 유전율은 단순 반응성 스퍼터링에 의해 형성된 HfO₂ 박막의 유전율보다 크다. Fig. 2에서 볼 수 있듯이 Hf 금속층이 너무 얇으면 계면층의 두께가 두꺼워 지고 Hf 금속층이 두꺼우면 HfO₂층의 물리적 두께가 두꺼워지므로 CET나 EOT 곡선은 U자 형태를 그린다. Fig. 3에서 Hf 10초 (THf=25Å) 에서 정전 용량이 최대가 되고 CET가 20Å 이상일 때는 high-k 두께를 제어해야 하지만 20Å 미만의 두께를 유지하려면 계면층의 두께를 제어해야 한다.

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Highly Dispersed Supported Gold Catalysts -I. Effect of Gold Addition and Active Site Formation- (고분산 담지 금촉매 - I. 금의 첨가 효과 및 활성점 생성 -)

  • Ahn, Ho-Geun;Niiyama, Hiroo
    • Applied Chemistry for Engineering
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    • v.5 no.2
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    • pp.285-294
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    • 1994
  • Some supported gold catalysts were prepared by impregnation and coprecipitation methods. Effect of gold addition and active sloe formation were studied by investigating particle sizes of gold, amounts of oxygen adsorbed, adsorption properties of CO and NO, and reduction and oxidation properties, etc.. The gold particles of the catalyst by impregnation were irregular and very large as 30~100 nm, but those by coprecipitation were uniform and ultra-fine as about 4 nm. On $Au/Al_2O_3$ catalyst, the addition of gold to inactive $Al_2O_3$ caused the decomposition of $N_2O$, and CO was not irreversibly adsorbed while $O_2$ was atomically and irreversibly adsorbed. The adsorption sites of oxygen were attributed to the active sites which were restricted to the circumference of hemispherical gold particle-support interface rather than all atoms on the surface of gold particle. Also, CO was reversibly and irreversibly adsorbed on $Al_2O_3$ at low temperature, and the addition of gold weakened both reversible and irreversible adsorptions. The affinity for CO on $Au/Co_3O_4$ catalyst decreased conspicuously compared to $Co_3O_4$. The effect of gold addition did not appear in reduction step but did remarkably in reoxidation step; the added gold promoted the reoxidation of the reduced cobalt atoms.

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Physicochemical Characteristics of Cabbage Kimchi during Fermentation (양배추 김치의 숙성과정 중에 나타나는 이화학적 특성에 관한 연구)

  • Cho, Hee-Sook;Park, Bock-Hee
    • Korean journal of food and cookery science
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    • v.22 no.5 s.95
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    • pp.600-608
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    • 2006
  • The purpose of this study was to investigate the physicochemical characteristics of Cabbage Kimchi with different kinds of jeot-kal. The Cabbage Kimchis were stored at 4${\pm}$1$^{\circ}C$ for 49 days. The pH of all samples of Cabbage Kimchis decreased during fermentation. The total acidity of Cabbage Kimchis increased gradually during fermentation and that of Cabbage Kimchis with different kinds of jeot-kal was higher than that of control. Redox potentials and reducing sugar content decreased gradually during fermentation. Total vitamin C content of Cabbage Kimchis with different kinds of jeot-kal was much higher than that of control. In color measurement, the lightness value decreased gradually, whereas the redness and yellowness values increased gradually during fermentation. The content of hot water soluble pectin (HWSP) decreased as the fermentation proceeded, but that of hydrochloric acid soluble pectin (HCISP) and sodium hexametaphosphate soluble pectin (NaSP) increased.

Study of morphology on the Oxidation and the Annealing of High Burn-hp $UO_2$ Spent Fuel (고연소도 사용후 핵연료의 가열산화와 고온가열을 통한 미세조직 변화고찰)

  • Kim Dae Ho;Bang Jae Geun;Yang Yong Sik;Song Keun Woo;Lee Hyung Kwon;Kwon Hyung Moon
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.3 no.4
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    • pp.301-307
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    • 2005
  • The morphology of the high burnup $UO_2$ spent fuel, which was oxidized and annealed in a PIA (Post Irradiation Annealing) apparatus, has been observed. The high burnup fuel irradiated in Ulchin Unit 2, average rod burnup 57,000 MWd/tU, was transported to the KAERI's PIEF. The test specimen was used with about 200 mg of the spent $UO_2$ fuel fragment of the local burnup 65,000 MWd/tU. This specimen was annealed at $1400^{\circ}C$ for 4hrs after the oxidation for 3hrs to grain boundary using the PIA apparatus in a hot-cell. In order to oxidize the grain boundary, the oxidation temperature increased up to $500^{\circ}C$ and held for 3hrs in the mixed gas (60 ml He and 100 ml STD-air) atmosphere. The amount of 85Kr during the whole test process was measured to know the fission gas release behavior using the online system of a beta counter and a gamma counter. The detailed micro-structure was observed by a SEM to confirm the change of the fuel morphology after this test. As the annealing temperature increased, the fission products were observed to move to the grain surface and grain boundary of the $UO_2$ matrix. This specimen was re-structured through the reduction process, and the grain sizes were distributed from 5 to $10\;{\mu}m$.

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Biological Activities of Rosaceae Plants Extracts (장미과 식물 추출물의 생물학적 활성)

  • Seo Jeong Min;Ahn Jeung-Youb
    • Journal of the Society of Cosmetic Scientists of Korea
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    • v.30 no.4 s.48
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    • pp.499-502
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    • 2004
  • DPPH radical-generating system was used to evaluate the antioxidant properties of the Rosaceae. The inhibitory effects of ethanolic extracts from Rosaceae plants were investigated on melanin biosynthesis which is closely related to hyperpigmentation. Of the Rosaceae extracts, Prunus sargentii, Rubus coreanus, Chaenomeles sinensis, Photinia glabra and Pyrus pyrifolia showed a potent inhibition of tyrosinase, the enzyme which converts 3-(3,4-dihydroxyphenyl) alanine (dopa) to dopachrome in the melanin biosynthetic process. Furthermore, MMT assay was used to check the cytotoxicity of extracts on the human foreskin fibroblast cell line, Hs68. Among the Rosaceae, bark of Prunus sargentii, bark wood of Photinia glabra and all parts or Chaenomeles sinensis showed more than $50\%$ inhibition of mushroom tyrosinase activity at 100 ug/mL and more than $80\%$ of strong DPPH radical-scavenging activity at 10 ug/mL. In audition to, they had no cytotoxic activity on Hs68. These results suggest that these extracts might be except a controler in pigmentation.

Analysis of Features of Korean Eighth Grades' TIMSS 2015 Achievement in Chemistry (우리나라 중학생들의 TIMSS 2015 화학 영역 성취 특성 분석)

  • Kwak, Youngsun
    • Journal of The Korean Association For Science Education
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    • v.38 no.5
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    • pp.625-633
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    • 2018
  • The goal of this study is to investigate the features of Korean eighth graders' achievement and its trend in Chemistry in TIMSS 2011 and TIMSS 2015, and to explore its implications for Korean science curriculum and in teaching science. With three science educators and six science teachers, we analyzed the characteristics of Korean eighth graders' achievement in Chemistry by test-curriculum matching analysis. According to the trend analysis of science topics with released items for Chemistry in TIMSS 2015, Korean students' percentage for correct answers has dropped in topics such as regularities in chemical reactions, oxidation-reduction, etc. since these topics are covered after the ninth grade in the 2009 revised curriculum. For science cognitive domains, Korean students showed weaknesses in 'applying' domain in TIMSS 2015. Based on the results, we suggested implications for improvement in middle school chemistry curriculum and how to improve science teaching and learning for students' better science competencies and real-world application of science knowledge.

Changes of Microbial Activity and Physicochemical Environment during Composting of Papermill Sludge in a Pilot Plant (제지슬럿지의 퇴비화 과정 중 미생물활성 및 이화학적 환경변화)

  • Chung, Young-Ryun;Chung, Man-Hoon;Han, Shin-Ho;Oh, Say-Kyun
    • Journal of the Korea Organic Resources Recycling Association
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    • v.3 no.2
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    • pp.79-89
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    • 1995
  • Changes of microbial activity and physicochemical environment during composting of papermill sludge(PMS) in the pilot plant equipped with an agitated bed reactor were monitored for establishing the efficient composting system. Microbial activity determined as the evolution of $CO_2$ increased for the first 10 days after introduction of PMS to the reactor and decreased thereafter. Population changes of microorganisms in the reactor-PMS were not typical as in windrow system. The ratio of thermophilic bacteria to mesophilic bacteria, however, increased slowly even 23 days after introduction. Temperature of PMS increased rapidly from the first day and reached $62^{\circ}C$ at 7 days after introduction and decreased slowly thereafter. The acidity of PMS was pH 6.8 initially, increased to pH 8.0 after 7 days and decreased to pH 7.4 after 23 days. Redox potential(Eh) of PMS was -320mV at the beginning of composting, but it was increased with time to reach -15mV after 23 days composting. However, Eh of PMS pre-sterilized before measurement was average 50mV, regardless of composting periods indicating the major role of microorganisms during composting process. Water content of PMS was 67% initially and decreased to about 50% after 23 days composting in the reactor. Less than 13 days-old compost inhibited growth of radish in the container mixture with bed soil. Based on statistical analysis of microbial and physicochemical parameters of PMS during composting, an equation was developed for determining compost maturity. A number of experiments using various organic wastes are required before application of the formular to the practical use.

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Electrochemical Properties of Copper(II) Complexes with Multidentate N,O-Schiff Base Ligands (여러 자리 산소-질소계 시프염기 리간드 구리(II) 착물의 전기화학적 특성)

  • Kim, Sun-Deuk;Jang, Gi-Ho;Kim, Jun-Kwang;Lee, Seong-Woo;Joung, Jae-Joung
    • Analytical Science and Technology
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    • v.9 no.4
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    • pp.345-354
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    • 1996
  • Algal(II) Multidentate N, O-Schiff base ligands, such as bis(salicylaldehyde) ethylenediimine(SED), bis(salicylaldehyde) propylenediimine(SPD), bis(salicylaldehyde) diethylenetriimine(SDT), bis (salicylaldehyde) triethylenetetraimine(STT) and bis(salicyl-aldehyde)tetraethylenepentaimine(STP) were prepared. Stepwise proton dissociation constants of the Schiff base were measured potentiometrically in ethanol and a mixture of 70% dioxane and 30% $H_2O$. The stability constants of copper(II)-Schiff base complexes were in the order of Cu(II)-SPD${\leq}$Cu(II)-SED~STT${\leq}$Cu(II)-STP. Oxidation-reduction process of the Cu(II)-Schiff base complexes was involved with one-electron reaction.

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Effect of Terminalia chebula on Physiological Activity in Mice (가자(Terminalia chebula) 추출물이 마우스의 생리활성에 미치는 영향)

  • 박종옥;이승은
    • Journal of Life Science
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    • v.14 no.1
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    • pp.148-153
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    • 2004
  • In this study, we investigated the effect of water, extract of Terminalia Chebula (TC) on physiological activity in mice. TC water extract showed hemagglutination against several different types of red blood cells. $LD_{50}$ of TC extract was 390 mg/kg (po). Treatment of TC water extract orally administered 200, 300 mg/kg daily for one week. Hepatic cytosolic enzymes, xanthine oxidase and aldehyde oxidase activities were significantly increased comparison with normal group. Treatment of TC water extract increased hepatic malondialdehyde (MDA) formation, and reduced glutathione content. We also found that the decreased activities of glutathione S-transferase and glutathione reductase but was not affected activities of $\gamma$-glutamylcysteine synthetase after treatment of TC water extract. These results suggested that increase of the hepatic lipid peroxide is caused by glutathione reduction.

Poly-3,4-dihydroxybenzoic Acid Film Electrodes Modified with Dopamine for Determination of Ti(IV) Ions (도파민으로 수식된 3,4-dihydroxybenzoic acid 고분자 피막전극을 이용한 Ti(IV)이온의 정량)

  • Cha, Seong-Keuck
    • Journal of the Korean Electrochemical Society
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    • v.6 no.2
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    • pp.130-133
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    • 2003
  • 3,4-dihydroxybenzoic acid(3,4-DHBA) was electropolymerized on glassy carbon electrode to give the GC/p-3,4-DHBA type electrode which was modified with dopamine by the help of 1-(3-dimethylaminopropyl)-3-ethyl carbodiimide hydrochloride(EDC) acting as a coupling agent. The carboxylic sites on the polymeric surface of p-3,4-DHBA and mine group at the dopamine gave a QCA(Au)/p-3,4-DHBA-dopamine type of modified electrodes. The o-quinone moieties at the electrode surface exhibited high selectivity to titanium ions in solution. The redox process of the electrode is hydroquinone : quinone +$2H^+2e^-$, which had two strong and two weak pairs of peaks at CV. The modified electrode can deposit Ti(IV) ions as much as $4.13\times10^{-5}gcm^{-2}$. The calibration curve of the electrodes, log of the surface coverage-normalized redox response vs log[Ti], exhibited an excellent correlation$(r{\geq}0.997)$ for titanium concentrations ranging from $5.25\times10^{-4}\;to\;5.25\tiems10^{-8}M.$.