• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.152-152
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• 1999

1Gb급 이상 기억소자의 캐패시터 재료로 주목받고 있는 (Ba,Sr)TiO3 [BST] 박막의 전극재료로는 Pt, Ru, Ir과 같은 금속전극과 RuO2, IrO2와 산화물 전도체가 유망한 것으로 알려져 있다. 그런데, DRAM의 집적도가 증가하게 되면, BST같은 고유전율 박막을 유전재료로 사용한다 하더라도, 3차원적인 구조가 불가피하게 때문에 기존의 sputtering 방법으로는 우수한 단차피복성을 얻기 힘들므로, MOCVD법이 필수적이다. 본 연구에서는 기존에 연구되었던 Pt에 비해 식각특성이 우수하고, 비교적 낮은 비저항을 갖는 Ru 박막증착에 대한 연구를 행하였다. 본 연구에서는 수직형의 반응기와 저항 가열 방식의 susceptor로 구성된 저압 유기금속 화학증착기를 사용하여 최대 6inch 직경을 갖는 기판 위에 Ru박막을 증착하였다. Precursor로는 기존에 연구된 적이 없는 bis-(ethyo-$\pi$-cyclopentadienyl)Ru (Ru(C5H4C2H5)2, [Ru(EtCp)2])를 사용하였으며, bubbler의 온도는 85$^{\circ}C$로 하였다. Si, SiO2/Si를 사용하였으며, 증착온도 25$0^{\circ}C$~40$0^{\circ}C$, 증착압력 3Torr의 조건에서 Ru 박막을 증착하였다. Presursor를 운반하는 수송기체로는 Ar을 사용하였으며, carbon과 같은 불순물의 제거를 위해 O2를 첨가하였다. 증착된 박막은 XRD, SEM, 4-point probe등을 통해 구조적, 전기적 특성을 평가하였으며, 열역학 계산을 위해서는 SOLGASMIX-PV프로그램을 사용하였다. Ru 박막의 증착에 있어서 산소의 첨가는 필수적이었으며, Ru 박막의 증착속도는 30$0^{\circ}C$~40$0^{\circ}C$의 온도 영역에서 200$\AA$/min으로 일정하였으며, 첨가된 산소의 양이 적을수록 더 치밀하고 평탄한 표면형상을 보였으며, 또한 더 낮은 전기 전도도를 보였다. 그리고 증착된 박막은 12~15$\mu$$\Omega$cm 정도의 낮은 비저항 값을 나타냈으며 이것은 기존의 sputtering 법에 의해 증착된 Ru 박막의 비저항 값들과 비교될만하다. 한편, 높은 온도, 높은 산소분압 조건에서 RuO2의 형성을 관찰하였으며, 이것은 열역학적인 계산을 통해서 잘 설명할 수 있었다.

• Electrical & Electronic Materials
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• v.6 no.6
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• pp.537-544
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• 1993

기본조성이 0.5[Pb(Ni$_{1}$3/Nb$_{2}$3/)O$_{3}$]-0.5[0.65PbTiO$_{3}$ -0.35PbZrO$_{3}$] (PNN-PT-PZ)인 압전세라믹스를 NaCl-KCI를 사용한 flux의 양 및 소결온도에 따른 생성반응과 소결특성, 유전 및 압전특성을 조사하였다. 이때 1몰의 산화물에 대한 flux의 양은 0.1, 2 및 5mole로 하였으며 소결온도는 1000-1200.deg.C로 하였다. 본 연구의 flux법은 고상반응법에 비해 낮은 하소온도에서 pyrochlore상을 현저히 줄일수 있었으며 고상반응법보다 낮은 온도에서 치밀화가 이루어질뿐 아니라 유전 및 압전특성을 개선할 수 있었으며 소결온도도 낮출 수 있었다. Flux의 양이 증가할수록 결정의 입성장이 빨랐으며 유전 및 압전특성이 가장 좋은 flux의 첨가량의 조건은 1mole이었다.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.167-167
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• 2003

Bi가 첨가된 강유전체 YMnO$_3$ (YBM)와 YMnO$_3$을 펄스 레이저 증착법을 이용하여 MgO(111)기판 위에 증착하였다. 증착시 기판온도와 산소분압에 따른 YBM 박막과 YMnO3 박막의 결정성장거동에 대하여 연구하였고, Bi의 첨가량에 따른 YBM 박막의 저온결정성화 효과에 대하여 관찰하였다. YMnO$_3$는 830 $^{\circ}C$이상에서 산소분압이 감소함에 따라서 c축 우선성장 거동을 보였다. 그에 비해 YBM은 700 $^{\circ}C$이상에서 산소분압이 증가함에 따라 c축 우선성장 하는 것을 관찰하였다. 이것은 Bi 첨가효과로 인해 저온결정화와 높은 산소분압에서 c축 우선성장을 하는 것으로 생각된다. Atomic Force Microscopy (AFM)분석과 Secondary Electron Microscopy(SEM)을 통하여 Bi의 첨가량이 증가함에 따라서 표면거칠가 감소하고 grain size가 증가함을 알 수 있었다. Bi의 거동을 살펴 보기 위해 Rutherford Backscattering spectroscopy (RBS)분석을 해보았다. 이 분석을 통해 Bi를 첨가한 YMnO$_3$는 Bi가 표면에 산화물형태로 존재함을 알 수 있었다.

• Journal of the Korean Society of Marine Environment & Safety
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• v.22 no.2
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• pp.253-258
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• 2016

The $MnO_x-WO_3-TiO_2$ nanoscale powders were synthesized by sol-gel method in order to prevent the biological fouling on the ships and offshore structures. Powder characteristics and antifouling performance were investigated with respect to the crystalline, microstructure and surface property for application in self-polishing copolymer resins. The high antifouling activity of $TiO_2$-system biocide was attributed to its redox potential and soluble metal ions originating from tungsten oxides according to the improvements in the powder characteristics. Based on their physio-chemical characterizations, the specific surface areas of powders were about $90m^2/g$ and the grain size was in the region 100 ~ 150 nm. Powder characteristics and surface properties were improved by the addition of $WO_3$. Antifouling performance were analyzed according to their surface properties and static immersion tests to determine the effects of the $TiO_2$-system compounds. The surface of 2 wt. % added sample was clean for 5 month. This may be attributed to the ability of $MnO_x-WO_3-TiO_2$ powders to act as a promoter in antifouling agents.

• Applied Chemistry for Engineering
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• v.7 no.3
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• pp.543-553
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• 1996

Oxygen reduction in an alkaline fuel cell was studied by using perovskite type oxides as an oxygen electrode catalyst. The high surface area catalysts were prepared by malic acid method and had a formula of $La_{0.6}Sr_{0.4}Co_{1-x}Fe_xO_3$(x=0.00, 0.01, 0.10, 0.20, 0.35 and 0.50). From the result of XRD pattern and specific surface area due to the amount of Fe substitution and the consumption of ammonia-water, the complex formation of Fe ion with $NH_3$ was the main factor for both the phase stability of perovskite and the increase of specific surface area. Multi-step calcination was necessary to give a single phase of perovskite in catalyst precursor. The crystal structure of the catalysts was simple cubic perovskite, which was verified from the XRD patterns of the catalysts. The activity of oxygen reduction was monitored by the techniques of cyclic voltammetry, static voltage-current method, and current interruption method. The activity(current density) of oxygen reduction showed its minimum at x=0.01 and its maximum between 0.20 and 0.35 of x-value in $La_{0.6}Sr_{0.4}Co_{1-x}Fe_xO_3$. This tendency was independent of the change of surface area.

• Korean Chemical Engineering Research
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• v.49 no.6
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• pp.720-725
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• 2011

Gold catalysts supported on metal-oxides were prepared by co-precipitation using the various metal nitrates and chloroauric acid as precursors, and effect of water addition on the catalytic activity in CO oxidation was investigated. Among the various supported gold catalysts, Au/$Co_{3}O_{4}$ and Au/ZnO catalysts showed the excellent activity for CO oxidation. Water in the reactant gas had a negative effect on the oxidation activity over Au/$Co_{3}O_{4}$ catalysts and a positive effect on that over Au/ZnO, which means the activity depends strongly on the nature of support. It was also confirmed that no significant change in the particle size of gold was observed after reaction both in dry and wet conditions. This fact suggested that the deactivated catalyst due to a carbonate species could be regenerated by water addition in the reactant gas.

• Journal of the Korean Ceramic Society
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• v.41 no.1
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• pp.57-61
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• 2004

Zinc Oxide (ZnO) have the crystal structure of wurtzite which is semiconducting oxide with band gap energy of 3.3eV. $In_2O_3$-doped ZnO films were fabricated by electron beam evaporation at $400^{\circ}C$ and their characteristics were investigated. The content of $In_2O_3$ in ZnO films had a marked effect on the electrical properties of the films. As $In_2O_3$ content decreased. $In_2O_3$-doped ZnO films was converted amorphous into crystallized films and showed a better characteristics generally as a transparent conducting oxide. As $In_2O_3$-doped ZnO films were prepared by $In_2O_3$-doped ZnO pellet with 0.2at% of $In_2O_3$ content, the value of resistivity was about $6.0 {\times} 10^{-3} {\Omega}cm$. The transmittance was higher than 85% throughout the visible range.

• Resources Recycling
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• v.23 no.3
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• pp.37-43
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• 2014

A study has been made on the recovery of tin and copper from waste solder stripper by oxalate precipitation. With the increasing of the oxalic acid addition, tin was precipitated effectively and removed above 99.5% of tin when the oxalic acid, in an amount 1.0-1.5 times the stoichometric requirement, was added. But, in this case, only 2.0% of copper was precipitated and lead, iron were not precipitated. So, tin was selectively removed from the waste solution. With the increasing of the reaction temperature, the removal percentage of tin was increased and maximum value at arounf $60^{\circ}C$ and decreased with increase in the temperature any more. After filtering the precipitate and drying in oven, $SnO_2$ was obtained from the precipitate. After removal of tin in stripping solution, above 91% of copper was selectively removed by Cu-oxalate by addition of oxalic acid.

• Journal of the Korean Ceramic Society
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• v.39 no.2
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• pp.190-193
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• 2002

3mol% $Y_2O_3$ Partially-Stabilized Zirconia single Crystals (PSZCs) containing a small quantity (<0.5%) of rare-earth oxides ($CeO_2,\;Tb_2O_3$) were prepared by using a direct high-frequency skull melting technique to evaluate hydrothermal stability in an autoclave. Pole exhibited no $t{\rightarrow}m$ phase transformation during aging for 5h at temperatures from 150 to 250$^{\circ}C$ and 4MPa water vapor pressure in an autoclave, resulting in excellent hydrothermal stability.

• Journal of Sensor Science and Technology
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• v.5 no.2
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• pp.21-27
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• 1996

Thick film $TiO_{2}/WO_{3}$ butane gas sensors were fabricated by the screen printing method and their gas sensing characteristics were investigated. The sensitivity of $TiO_{2}/WO_{3}$ thick film was higher than that of pure $WO_{3}$ film to butane. The $WO_{3}$ film with 2wt.% $TiO_{2}$ showed the highest sensitivity to butane. And the optimum heat treatment temperature was $650^{\circ}C$. That film showed the highest sensitivity to butane at the operating temperature of $350^{\circ}C$. The sensitivity of the film to 20000ppm butane in air was 80% at the operating temperature of $350^{\circ}C$.