• Title/Summary/Keyword: 빔 집속

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A Study on the Micro-fracture Behavior of the MEMS Material at Elevated Temperature (고온용 MEMS 재료의 마이크로 파괴거동에 관한 연구)

  • Woo, Byung-Hoon;Bae, Chang-Won;Moon, Kyong-Man;Bae, Sung-Yeol;Higo, Yakichi;Kim, Yun-Hae
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.31 no.5
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    • pp.550-555
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    • 2007
  • The effective fracture toughness testing of materials intended for application in Micro Electro Mechanical Systems (MEMS) devices is required in order to improve understanding of how micro sized material used in device may be expected to perform upon the micro scale. ${\gamma}$-TiAl based materials are being considered for application in MEMS devices at elevated temperatures. Especially, in Alloy 4, both ${\alpha}_2$ and ${\gamma}$ lamellae were altered markedly in 3,000 h, $700^{\circ}C$ exposure. Parallel decomposition of coarse ${\alpha}_2$ into bunches of very fine (${\alpha}_2+{\gamma}$) lamellae. Parallel decomposition of coarse ${\alpha}_2$ into bunches of very fine (${\alpha}_2+{\gamma}$) lamellae. The materials were examined 2 types Alloy 4 on heat exposed specimen($700^{\circ}C$, 3,000 h) and no heat exposed one. Micro sized cantilever beams were prepared mechanical polishing on both side at $25{\sim}30{\mu}m$ and electro final stage polishing to observe lamellar orientation of same colony with EBSD (Electron Backscatter Diffraction Pattern). Through lamellar orientation as inter-lamellae or trans-lamellae, Cantilever beam was fabricated with Focused Ion Beam(FIB). The directional behavior of the lamellar structure was important property in single material, because of the effects of the different processing method and variations in properties according to lamellar orientation. In MEMS application, it is first necessary to have a reliable understanding of the manufacturing methods to be used to produce micro structure.

Measurement of the Shear Modulus of an Ultrasound Tissue Phantom (초음파 연조직 팬텀에서 횡탄성의 측정)

  • Park, Jeong-Man;Choi, Seung-Min;Kwon, Sung-Jae;Jeong, Mok-Kun
    • The Journal of the Acoustical Society of Korea
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    • v.31 no.6
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    • pp.399-409
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    • 2012
  • In this paper we propose a method for measuring the shear modulus of an ultrasound soft tissue phantom using an acoustic radiation force. The proposed method quantitatively determines the shear modulus based on the rise time of a displacement induced by an acoustic radiation force at the focal point of a focused ultrasound beam. The shear wave speed and shear modulus obtained from the proposed method and a shear wave propagation method were compared to verify the validity of the proposed method. In the shear wave propagation method, the shear modulus is first computed by measuring the propagating speed of a shear wave induced in a phantom by a limited-diffraction transmit field, and then was compared to that obtained with the proposed method in an ultrasound data acquisition system calibrated based on the first computed shear modulus. The relative errors between the two methods were found to be 4% for shear wave speed and less than 9% for shear modulus, confirming the usefulness of the proposed method.

Design of the Near Field Microwave Guide Type of Probe Having Enhanced High Transmission Efficiency and Smaller Beam Spot Area (고 투과 효율과 소형 빔 스팟 면적을 갖는 근접장 마이크로웨이브 도파관 탐침의 설계)

  • Ko, Ji-Hwan;Cho, Young-Ki
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.26 no.12
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    • pp.1058-1063
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    • 2015
  • In this article, we propose a near field microwave scanning probe structure in which two short conducting rods are attached to the center of the ridged(H-type) aperture, thereby reducing significantly the beam spot area while maintaining the high transmission efficiency through the output coupling H-type(ridged) aperture. Here the two short parallel conducting rods seem to play an important role of concentrating the transmitted electromagnetic energy through the H-type aperture and so reducing the beam area for high resolution. For validation of the proposed theory, the near field waveguide probe is fabricated according to the simulated results and its return loss characteristics versus frequencies are measured. The comparison between theory and experiment is seen to be in good agreements.

Characteristics of Polarization and Birefringence for Submicron a-Ge Thin Film on Quartz Substrate Formed by Focused-Ion-Beam (석영 기판 위에 집속 이온빔 기술에 의해 형성된 비정질 게르마늄 박막 미세 패턴의 편광 및 복굴절 특성)

  • Shin, Kyung;Ki, Jin-Woo;Park, Chung-Il;Lee, Hyun-Yong;Chung, Hong-Bay
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.05a
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    • pp.617-620
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    • 1999
  • In this study, the polarization e(fecal and the birefringence effect of amorphous germanium (a-Ge) thin films were investigated by using linearly polarized He-Ne laser beam. The a-7e thin films were deposited on the quarts substrate by plasma enhanced chemical vapor deposition (PECVD) and thermal vacuum evaporation In order to obtain the optimum grating arrays, inorganci resists such as Si$_3$N$_4$ and a-Se$_{75}$ Ge$_{25}$ , were prepared with the optimized thickness by Monte Carlo (MC) simulation. As the results of MC simulation, the thickness ofa-Se$_{75}$ Ge$_{25}$ resist was determined with Z$_{min}$ of 360$\AA$ . The resists were exposed to Ga$^{+}$-FIB with accelerating energies of 50 keV, developed by wet etching, and a-Ge thin film was etched by reactive ion-etching (RIE). Finally, we were obtained grating arrays which grating width and linewidth are 0.8${\mu}{\textrm}{m}$, respectively and we studied the polarization and birefringence effect in transmission grating array made of high refractive amorphous material, and the applicability as waveplates and polarizers in optical device.e.e.

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Output Characteristics of Multikilowatt Chemical Oxygen-Iodine Laser (수 kW급 Chemical Oxygen-Iodine Laser의 출력특성)

  • 김택수;김성훈;권성옥;최윤동;김철중
    • Proceedings of the Optical Society of Korea Conference
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    • 2000.08a
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    • pp.102-103
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    • 2000
  • 화학레이저는 화학연료의 반응에서 생성되는 막대한 화학에너지를 이용하여 레이저를 발생시키며, 반응하는 화학연료의 양에 따라 수천 kW의 고출력을 낼 수 있는 가장 강력한 레이저이다. 화학레이저인 Chemical Oxygen-Iodine Laser(COIL)는 염소기체(Cl$_2$)를 염기성 과산화수소수 용액과 반응시켜 고에너지의 여기산소(O$_2$($^1$$\Delta$))를 생성시키고 여기산소가 다시 요오드 원자와 반응하면서 1.3 $mu extrm{m}$ 파장의 레이저를 발생시킨다.(1)-(2) 이와같은 COIL 레이저는 발진효율이 높고 포화 강도가 높아 수십 kW 급의 고출력이 용이하게 이루어 질 수 있으며 광섬유 전송시 광손실이 가장 적어 레이저 빔의 원격 전송에 의한 재료가공에 적합한 레이저이다. 가공용레이저로 많이 사용하는 $CO_2$ 레이저에 비해 발진 파장이 짧으므로 재료의 광흡수율이 높아 일반 산업분야의 용접/절단에서 기존의 $CO_2$ 레이저를 대체할 것으로 기대되는 상용성이 큰 레이저이다.(3)-(4) 또한 COIL은 우수한 집속 특성을 유지하면서도 고출력의 개발이 가능하다. 이미 외국에서는 비록 단시간 동안 동작하지만 수백 kW급이 실현되었으며 수천 kW 급 고출력 항공기탑재형 COIL 이 수백 km의 거리에서 미사일을 요격하기위해 지금 개발중에 있다.(5) 일반 산업용 광섬유에 의해 쉽게 전송되는 파장인 1.315 $\mu\textrm{m}$ 인 수십 kW 급 COIL 은 조선 등의 중공업산업용 및 원자력 제염/해체분야에서 다용도 기술로서 광범위하게 사용될 것이다. COIL은 다양한 재료와 다양한 두께의 구조물 절단, 표면처리 그리고 용접에도 이용될 수 있다. COIL의 산업화는 빠르게 발전하고 있으며 산업용으로써 장시간 연속사용이 가능한 20-30 kW급 시설이 곧 개발될 것으로 기대된다. 따라서 개발될 고출력 화학레이저가 앞으로 원자력시설의 해체시 작업자의 안전성 향상에 크게 기여할 수 있게 되었다.(6) 여기서는 화학레이저인 COIL 장치와 기본적인 원리, 그리고 염소유량에 따른 출력특성등을 살펴보기로 하겠다. (중략)

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Development of the Automated Ultrasonic Flaw Detection System for HWR Nuclear Fuel Cladding Tubes (중수로형 핵연료 피복관의 자동초음파탐상장치 개발)

  • Choi, M.S.;Yang, M.S.;Suh, K.S.
    • Nuclear Engineering and Technology
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    • v.20 no.3
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    • pp.170-178
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    • 1988
  • An automated ultrasonic flaw detection system was developed for thin-walled and short tubes such as Zircaloy-4 tubes used for cladding heavy-water reactor fuel. The system was based on the two channels immersion pulse-echo technique using 14 MHz shear wave and the specially developed helical scanning technique, in which the tube to be tested is only rotated and the small water tank with spherical focus ultrasonic transducers is translated along the tube length. The optimum angle of incidence of ultrasonic beam was 26 degrees, at which the inside and outside surface defects with the same size and direction could be detected with the same sensitivity. The maximum permissible defects in the Zircaloy-4 tubes, i.e., the longitudinal and circumferential v notches with the length of 0.76mm and 0.38mm, respectively and the depth of 0.04 mm on the inside and outside surface, could be easily detected by the system with the inspection speed of about 1 m/min and the very excellent reproducibility. The ratio of signal to noise was greater than 20 dB for the longitudinal defects and 12 dB for the circumferential defects.

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Measuring Plate Thickness Using Spatial Local Wavenumber Filtering (국소 공간 웨이브넘버 필터링 기법을 이용한 평판 구조물 두께 측정)

  • Kang, To;Lee, Jeong Han;Han, Soon Woo;Park, Jin Ho;Park, Gyuhae;Jeon, Jun Young
    • Journal of the Korean Society for Nondestructive Testing
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    • v.36 no.5
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    • pp.370-376
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    • 2016
  • Corrosion on the surface of a structure can generate cracks or cause walls to thin. This can lead to fracturing, which can eventually lead to fatalities and property loss. In an effort to prevent this, laser imaging technology has been used over the last ten years to detect thin-plate structure, or relatively thin piping. The most common laser imaging was used to develop a new technology for inspecting and imaging a desired area in order to scan various structures for thin-plate structure and thin piping. However, this method builds images by measuring waves reflected from defects, and subsequently has a considerable time delay of a few milliseconds at each scanning point. In addition, the complexity of the system is high, due to additional required components, such as laser-focusing parts. This paper proposes a laser imaging method with an increased scanning speed, based on excitation and the measurement of standing waves in structures. The wavenumber of standing waves changes at sections with a geometrical discontinuity, such as thickness. Therefore, it is possible to detect defects in a structure by generating standing waves with a single frequency and scanning the waves at each point by with the laser scanning system. The proposed technique is demonstrated on a wall-thinned plate with a linear thickness variation.

Reliability of Sn-Ag-Cu Solder Joint on ENEPIG Surface Finish: 1. Effects of thickness and roughness of electroless Ni-P deposit (ENEPIG 표면처리에서의 Sn-Ag-Cu 솔더조인트 신뢰성: 1. 무전해 Ni-P도금의 두께와 표면거칠기의 영향)

  • Huh, Seok-Hwan;Lee, Ji-Hye;Ham, Suk-Jin
    • Journal of the Microelectronics and Packaging Society
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    • v.21 no.3
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    • pp.43-50
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    • 2014
  • By the trends of electronic package to be smaller, thinner and more integrative, the reliability of interconnection between Si chip and printed circuit board is required. This paper reports on a study of high speed shear energy of Sn-4.0wt%Ag-0.5wt%Cu (SAC405) solder joints with different the thicknesses of electroless Ni-P deposit. A high speed shear testing of solder joints was conducted to find a relationship between the thickness of Ni-P deposit and the brittle fracture in electroless Ni-P deposit/SAC405 solder. A focused ion beam (FIB) was used to polish the cross sections to reveal details of the microstructure of the fractured pad surface with and without $HNO_3$ vapor treatment. The high speed shear energy of SAC405 solder joint with $1{\mu}m$ Ni-P deposit was found to be lower without $HNO_3$ vapor, compared to those of over $3{\mu}m$ Ni-P deposit. This could be due to the edge of solder resist in $1{\mu}m$ Ni-P deposit, which provides a fracture location for the weakened shear energy of solder joints and brittle fracture in high speed shear test. With $HNO_3$ vapor, the brittle fracture mode in high speed shear test decreased with increasing the thickness of Ni-P deposit. Then the roughness (Ra) of Ni-P deposits decreased with increasing its thickness. Thus, this gives the evidence that the decrease in roughness of Ni-P deposit for Eelectroless Ni/ Electroless Pd/ Immersion Au (ENEPIG) surface play a critical role for improving the robustness of SAC405 solder joint.

Study on Determination of Boron using the PGAA Facility at HANARO Research Reactor (하나로의 즉발감마선 방사화분석 장치를 이용한 붕소의 정량에 대한 연구)

  • Chung, Young-Sam;Cho, Hyun-Jae;Moon, Jong-Hwa;Kim, Sun-Ha;Kim, Young-Jin
    • Analytical Science and Technology
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    • v.16 no.5
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    • pp.391-398
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    • 2003
  • Basic research for the determination of boron content in biological sample has been carried out using the PGAA facility of the 24MW research reactor(HANARO). For investigation of characteristics for the measurement condition, neutron flux and its homogeneity were measured at irradiating geometry. The size of thermal neutron beam collimated from beam guide is $2{\times}2cm^2$ at the sample position. The neutron flux measured was the range of $1.0{\sim}6.5{\times}10^7n{\cdot}cm^{-2}{\cdot}s^{-1}$, and flux distribution from center within the radius of 4.5 mm and 9.0 mm was $5.77{\pm}0.71{\times}10^7n{\cdot}cm^{-2}{\cdot}s^{-1}$ and $4.68{\pm}1.64{\times}10^7n{\cdot}cm^{-2}{\cdot}s^{-1}$, respectively. Accordingly, sample size is adjusted within 10 mm for a homogeneous irradiation of high quality. Measurement system is designed to reduce the background source by Compton scattering and to improve the analytical sensitivity. To investigate the energy calibration and Compton suppression effect of gamma-ray counting system, the background conditions on both of Compton and single-mode were measured using NaCl standard. On the other hand, degree of spectral interference for sodium 472 keV peak as a matrix effect in the sample is established for an accurate boron analysis, and then boron content in three certified reference materials (NIST SRM 1570a, 1547, 1573a) was measured by using two modes and the results were compared with each other.