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고주파 스퍼터링법으로 증착한 ZnO 박막의 응력 형성

  • 곽상현;이재빈;김형준
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.193-193
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    • 2000
  • 박막 내의 잔류 응력은 막의 기계적 전기적 물성을 변화시키는 등 박막에 많은 영향을 끼치는 것으로 알려져 있다. 이러한 응력은 박막의 증착 공정중 여러 가지 증착 조건에 의해서 변화하게 되는데, 특히 스퍼터링 시스템의 경우에는 증착 압력과 사용하는 가스, 인가되는 전력 등 기본적인 증착조건들에 상당한 영향을 받는다. 이러한 영향은 금속 박막의 경우 상당히 잘 알려져 있다. 또한 반도체 공정에서 금속화 과정중 금속 전극의 단락등을 막기 위해 많은 연구가 진행되어 왔다. 본 논문에서는 고주파 마그네트론 스퍼터링 시스템을 사용하여 산화 아연(ZnO)을 증착하고 여러 공정 변수들에 따른 응력의 변화를 관찰하였다. 실험에서 ZnO 타겟을 사용하였으며, 작동 가스로는 아르곤과 산소를 사용하였다. 증착한 박막들은 모두 압축 응력을 보였으며, 박막의 응력에 가장 큰 영향을 미치는 요소들은 압력, 산소와 아르곤의 비, 기판과 타겟과의 거리 등이었는데, 인가 전력에는 거의 영향을 받지 않았다. 일반적으로 스퍼터링 시스템에서의 압축응력은 atomic peening에 의해서 형성되는데, 박막을 두드리는 높은 에너지의 아르곤이나 산소의 유량과 에너지의 1/2승에 비례하는 것으로 알려져 있다. 그러나 본 시스템에서는 인가 전력을 높여도 응력이 증가하지 않았고, 타겟과의 거리를 줄이면 오히려 응력이 감소함을 보였다. 이는 박막의 응력이 peening 하는 입자의 에너지뿐만이 아니라 증착되는 물질의 증착 속도와도 밀접한 관련이 있음을 보여준다. 즉, 증착속도가 증가하면 peening하는 입자가 끼치는 응력의 효과가 반감되기 때문으로 수식을 통해 증명할 수 있었다.진탄화 처리시간을 변화시켰을 때 화합물층의 생성은 ${\gamma}$'상으로부터 시작되고 $\varepsilon$상은 즉시 ${\gamma}$'상을 소모하면서 생성되어 일정시간이 지난 후 $\varepsilon$상은 안정화되며 질소가스농도가 증가할수록 화합물 층내의 $\varepsilon$상분율은 역시 증가하였다. 한편 CH4 가스농도는 처리되는 강종에 따라 차이를 보이며 적정 CH4 가스농도를 초과시에는 $\varepsilon$상 생성은 억제되고 시멘타이트상이 생성되었다.e에서 발생된 질소 플라즈마를 구성하는 이온들의 종류와 그 구성비율을 연구하였다.여러 가지 응용으로의 가능성을 가지고 있다. 그 예로 plasma processing, plasma wave에 의한 입자 가속, 그리고 가스 레이저 활성 매질 발생 등이 있다. 특히 plasma processing의 경우 helicon plasma는 높은 밀도, 비교적 낮은 자기장, remote operation 등이 가능하다는 점에서 현재 연구가 활발히 진행되고 있다. 상업용으로도 PMT와 Lucas Signatone Corp.에 서 helicon source가 제작되었다. 또한 높은 해리율을 이용하여 저유전 물질인 SiOF의 증착에서 적용되고 있다. 이 외에도 다수의 연구결과들이 발표되었다. 잘 일치하였다.ecursor 분자들이 큰 에너지를 가지고 기판에 유입되어 치밀한 박막이 형성되었기 때문으로 사료된다.을수 있었다.보았다.다.다양한 기능을 가진 신소재 제조에 있다. 또한 경제적인

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A Collision detection from division space for performance improvement of MMORPG game engine (MMORPG 게임엔진의 성능개선을 위한 분할공간에서의 충돌검출)

  • Lee, Sung-Ug
    • The KIPS Transactions:PartB
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    • v.10B no.5
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    • pp.567-574
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    • 2003
  • Application field of third dimension graphic is becoming diversification by the fast development of hardware recently. Various theory of details technology necessary to design game such as 3D MMORPG (Massive Multi-play Online Role Flaying Game) that do with third dimension. Cyber city should be absorbed. It is the detection speed that this treatise is necessary in game engine design. 3D MMORPG game engine has much factor that influence to speed as well as rendering processing because it express huge third dimension city´s grate many building and individual fast effectively by real time. This treatise nay get concept about the collision in 3D MMORPG and detection speed elevation of game engine through improved detection method. Space division is need to process fast dynamically wide outside that is 3D MMORPG´s main detection target. 3D is constructed with tree construct individual that need collision using processing geometry dataset that is given through new graph. We may search individual that need in collision detection and improve the collision detection speed as using hierarchical bounding box that use it with detection volume. Octree that will use by division octree is used mainly to express rightly static object but this paper use limited OSP by limited space division structure to use this in dynamic environment. Limited OSP space use limited space with method that divide square to classify typically complicated 3D space´s object. Through this detection, this paper propose follow contents, first, this detection may judge collision detection at early time without doing all polygon´s collision examination. Second, this paper may improve detection efficiency of game engine through and then reduce detection time because detection time of bounding box´s collision detection.

Enhancement of Cytotoxicity by the Combination of Anticancer Drugs in Human Lung Adenocarcinoma Cell Line (PC-14) (폐암세포주 (PC-14)에서 복합항암제 처치시 암세포살해능의 증강에 관한 연구)

  • Lee, Choon-Taek
    • Tuberculosis and Respiratory Diseases
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    • v.44 no.3
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    • pp.525-533
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    • 1997
  • Background : No ideal combination chemotherapy for lung cancer has been established even though lots of combination anticancer chemotherapies have been tried. For the combination of anticancer drugs, the interaction of anticancer drugs is very important but unpredictable factor. In this experiment, we designed and tested new experiment to measure the interaction of two anticancer drugs using MIT assay in an attempt to predict clinical response of the combination regimen. Methods : With human lung adenocarcinoma cell line (PC-14), the cytotoxic effect of cisplatin, adriamycin, mitomycin C and etoposide were measured by in vitro chemosensitivity test (MIT assay). The combined cytotoxic effects of combination of two drugs were also measured in every combination of the drug concentrations and analyzed the interaction by Anava analysis of two way factorial design. Results : Four individual drugs showed cytotoxic effects on PC-14 by dose dependent fashion. Comparison of two drug combinations revealed that mitomycin C + cisplatin and adriamycin + cisplatin combinations showed stronger synergistic cytotoxic effects. Conclusion : From this experiment, we suggest two combinations of mitomycin C + cisplatin and adriamycin + cisplatin as chemotherapeutic regimens for unresectable non-small cell lung cancer. Furthermore, this experimental design could be applied to other types of cancer requiring combination anticancer chemotherapy.

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Analysis of pollutant mixing on the water surface in rivers with GPS floaters (GPS부자를 이용한 하천 표면에서의 오염물질 혼합 거동 해석)

  • Seo, Il Won;Park, Inhwan;Kim, Young Do;Han, Eun Jin
    • Proceedings of the Korea Water Resources Association Conference
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    • 2015.05a
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    • pp.103-103
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    • 2015
  • 유류유출사고와 같이 하천 수표면의 흐름에 따라 이동 확산하는 부유성 오염물질의 혼합해석을 위해 많은 연구자들은 입자추적모형을 사용한 혼합모의를 수행해왔다. 입자추적모형에서 오염물질의 혼합은 평균 유속 분포에 의한 결정론적인 이동과 난류유동에 의한 무작위적인 혼합으로 나타내며, 난류혼합에 의한 수평확산은 난류확산계수로 조절한다. 따라서 표면흐름에 의한 난류확산계수의 산정을 위해 많은 연구자들은 부유성 입자를 이용한 실내실험을 수행하여 수평확산계수를 산정했고(Engelund, 1969; Cederwall, 1971), 최근에는 GPS의 발전으로 인해 해양영역에서 GPS를 장착한 표면부자를 활용한 확산실험을 통해 수평확산계수를 산정한 바 있다(Kjellson and $D{\ddot{o}}{\ddot{o}}s$, 2012; Alpers 등, 2013). 하천수질오염사고의 약 43.5%가 유류유출에 의한 것이며(환경부, 2013), 이에 따라 표면흐름에 의한 오염물질 혼합해석이 필요하나, 하천에서 수평확산계수 산정을 위한 현장실험연구는 부족한 상황이다. 따라서 본 연구에서는 낙동강 본류에서 GPS부자를 이용한 입자추적실험을 수행하여 표면흐름에 의한 확산계수를 산정했다. GPS부자를 이용한 입자추적실험은 낙동강의 강정고령보 하류와 구미보 하류의 각각 세 지점에서 수행되었다. GPS부자는 바람에 의한 교란을 최소화하기 위해 지름 10 cm의 구형으로 제작하였으며 시범테스트를 통해 입자의 주 궤적 변화가 크지 않은 지점에 GPS부자를 투입했다. GPS부자는 오염물질의 사고유출을 가정하여 한 지점에 투입했고 GPS부자 사이의 간섭을 최소화하기 위해 25 ~ 35개의 GPS부자를 이용했다. 표면흐름에 의해 이동하는 부자의 위치는 GPS에 시계열로 저장됐고 ADCP를 이용하여 실험당시의 수리량을 측정했다. 입자위치의 시계열자료로부터 GPS부자의 확산범위의 시간변화를 계산했고 단순 모멘트법을 이용하여 종, 횡 방향 확산계수를 계산했다. 그 결과, 종 방향 확산계수는 $0.003{\sim}0.041m^2/s$로 계산되었고 횡 방향 확산 계수는 $0.001{\sim}0.012m^2/s$로 계산되어, 흐름방향의 유속성분에 의한 확산이 지배적인 것으로 나타났다. 지류 합류부에서는 이송이 지배적인 혼합이 발생되었고(Pe>1) Pe의 증가에 따라 수평확산계수가 감소되었다. 25~35개 GPS부자 궤적의 앙상블 평균으로부터 계산한 Integral time scale은 모멘트법으로부터 계산한 종, 횡 방향 확산계수와 비례하는 것으로 나타나, Taylor(1921)의 이론과 일치했다. 또한 실험수로에서 수행된 기존연구결과와 비교한 결과, 하폭 대 수심비, 마찰항의 증가에 따라 수평확산계수가 증가하는 경향을 나타내었다.

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The Clinical Significance of Serum Vascular Endothelial Growth Factor Levels Measured at Ovulation Triggering Day In Intrauterine Insemination Cycles (자궁강 내 인공수정을 위한 과배란유도 시 hCG 투여 일에 측정한 혈중 Vascular Endothelial Growth Factor의 임상적 의의)

  • Kim, Hyun-Jun;Jee, Byung-Chul;Suh, Chang-Suk;Kim, Seok-Hyun;Choi, Young-Min;Kim, Jung-Gu;Moon, Shin-Yong
    • Clinical and Experimental Reproductive Medicine
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    • v.34 no.1
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    • pp.33-39
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    • 2007
  • Objective: The objective of this study was to investigate whether serum levels of vascular endothelial growth factor (VEGF) measured at ovulation triggering day reflect ovarian response in intrauterine insemination (IUI) cycles. Methods: Forty-nine fertile women who undergoing superovulation and IUI were included. Superovulation was performed using clomiphene citrate (100 mg/d on day 3$\sim$7) in combination with human menopausal gonadotropin (150 IU every other day starting on day 5). Serum samples were obtained on the day of hCG administration and the levels of VEGF-A and estradiol were measured. The numbers of mature follicle $\geq$17 mm in diameter were also counted. Results: Serum VEGF-A levels did not correlate with the numbers of mature follicle count nor serum estradiol levels. Serum estradiol level was positively associated with mature follicle count. Serum VEGF-A levels tended to be lower in women with mature follicle count less than three or women with more than five. Conclusion: Our results indicate that serum VEGF-A levels do not have an association with superovulation outcome in IUI cycles. However, a tendency of lower VEGF-A level in poor and high responder suggests that those with extreme response to superovulation may be related with abnormal angiogenesis. Further studies should be warranted in larger populations.

Systemic literature review on the impact of government financial support on innovation in private firms (정부의 기술혁신 재정지원 정책효과에 대한 체계적 문헌연구)

  • Ahn, Joon Mo
    • Journal of Technology Innovation
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    • v.30 no.1
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    • pp.57-104
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    • 2022
  • The government has supported the innovation of private firms by intervening the market for various purposes, such as preventing market failure, alleviating information asymmetry, and allocating resources efficiently. Although the government's R&D budget increased rapidly in the 2000s, it is not clear whether the government intervention has made desirable impact on the market. To address this, the current study attempts to explore this issue by doing a systematic literature review on foreign and domestic papers in an integrated way. In total, 168 studies are analyzed using contents analysis approach and various lens, such as policy additionality, policy tools, firm size, unit of analysis, data and method, are adopted for analysis. Overlapping policy target, time lag between government intervention and policy effects, non-linearity of financial supports, interference between different polices, and out-dated R&D tax incentive system are reported as factors hampering the effect of the government intervention. Many policy prescriptions, such as program evaluation indices reflecting behavioral additionality, an introduction of policy mix and evidence-based policy using machine learning, are suggested to improve these hurdles.

Estimate Customer Churn Rate with the Review-Feedback Process: Empirical Study with Text Mining, Econometrics, and Quai-Experiment Methodologies (리뷰-피드백 프로세스를 통한 고객 이탈률 추정: 텍스트 마이닝, 계량경제학, 준실험설계 방법론을 활용한 실증적 연구)

  • Choi Kim;Jaemin Kim;Gahyung Jeong;Jaehong Park
    • Information Systems Review
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    • v.23 no.3
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    • pp.159-176
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    • 2021
  • Obviating user churn is a prominent strategy to capitalize on online games, eluding the initial investments required for the development of another. Extant literature has examined factors that may induce user churn, mainly from perspectives of motives to play and game as a virtual society. However, such works largely dismiss the service aspects of online games. Dissatisfaction of user needs constitutes a crucial aspect for user churn, especially with online services where users expect a continuous improvement in service quality via software updates. Hence, we examine the relationship between a game's quality management and its user base. With text mining and survival analysis, we identify complaint factors that act as key predictors of user churn. Additionally, we find that enjoyment-related factors are greater threats to user base than usability-related ones. Furthermore, subsequent quasi-experiment shows that improvements in the complaint factors (i.e., via game patches) curb churn and foster user retention. Our results shed light on the responsive role of developers in retaining the user base of online games. Moreover, we provide practical insights for game operators, i.e., to identify and prioritize more perilous complaint factors in planning successive game patches.

Development of Sample Survey Design for the Industrial Research and Development Statistics (표본조사에 의한 기업 연구개발활동 통계 작성방안)

  • Cho, Seong-Pyo;Park, Sun-Young;Han, Ki-In;Noh, Min-Sun
    • Journal of Technology Innovation
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    • v.17 no.2
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    • pp.1-23
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    • 2009
  • The Survey on the Industrial Research and Development(R&D) is the primary source of information on R&D performed by Korea industrial sector. The results of the survey are used to assess trends in R&D expenditures. Government agencies, corporations, and research organizations use the data to investigate productivity determinants, formulate tax policy, and compare individual company performance with industry averages. Recently, Korea Industrial Technology Association(KOITA) has collected the data by complete enumeration. Koita has, currently, considered sample survey because the number of R&D institutions in industry has been dramatically increased. This study develops survey design for the industrial research and development(R&D) statistics by introducing a sample survey. Companies are divided into 8 groups according to the amount of R&D expenditures and firm size or type. We collect the sample from 24 or 8 sampling strata and compare the results with those of complete enumeration survey. The estimates from 24 sampling strata are not significantly different to the results of complete enumeration survey. We propose the survey design as follows: Companies are divided into 11 groups including the companies of which R&D expenditures are unknown. All large companies are included in the survey and medium and small companies are sampled from 70% and 3%. Simple random sampling (SRS) is applied to the small company partition since they show uniform distribution in R&D expenditures. The independent probability proportionate to size (PPS) sampling procedure may be applied to those companies identified as 'not R&D performers'. When respondents do not provide the requested information, estimates for the missing data are made using imputation algorithms. In the future study, new key variables should be developed in survey questionnaires.

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The Paradox of Grant Allen's Physiological Reductionism (그랜트 알렌의 생리학적 환원주의의 역설)

  • Lee, Sungbum
    • Cross-Cultural Studies
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    • v.44
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    • pp.411-430
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    • 2016
  • One of central issues in the Literature and Science discourses during the Victorian era is the relation of physiology to psychology. Many thinkers tackle the question of whether or not psychic phenomena can be reducible to their physiological bases. For instance, Victorian physiologist William Benjamin Carpenter claims that there should be a boundary between physiological and psychological qualities. Yet, his contemporary writer Grant Allen contends for the reduction of psychology into physiology. In the essay, I discuss Grant Allen's work Physiological Aesthetics (1877) so as to eventually problematize his physiological reductionism. I especially highlight the paradox of his physiological aesthetics. In order to clarify my argument, I introduce two concepts: evolutionary aesthetics and physiological reductionism. On the one hand, Allen argues for the development of aesthetic appreciation. The gradual evolution from gaudy to serene colors, for instance, reflects the fine differentiation of sensory organs. He believes that the existence of varied aesthetic pleasures corresponds to the evolution of sensory nerve structures. Nonetheless, Allen ironically gives more weight to the commonality of aesthetic experiences than to this teleological ordering of aesthetic experiences. He argues that there is no fundamental difference among humans in terms of their aesthetic assessments. Furthermore, there is even no essential distinction among plants, animals, and humans in light of their aesthetic appraisals, he states firmly. Although he asserts the gradual advance of aesthetic feelings caused by the intricacy of nervous systems, he simultaneously trivializes the evolution of aesthetic appraisal. In the essay, I highlight this paradox in Allen's physiological aesthetics. It should be underscored, lamentably enough, that Allen seeks biological purity by erasing fine lines among physiology, psychology, and sociality. He estranges aesthetic experiences from subjective variations and their socio-cultural contexts. He makes great efforts to eliminate individual differences and socio-cultural specificities in order to extremely biologize aesthetic experiences. Hence, Allen's physiological aesthetics is marked as the politics of physiological purification.

Statistical Analysis of 1,000 Cases of Kawasaki Disease Patients Diagnosed at a Single Institute (단일 기관에서 진단받은 가와사끼병 환아 1,000례의 통계학적 분석)

  • Hwang, Dae Hwan;Sin, Kyoung Mi;Choi, Kyong Min;Choi, Jae Young;Sul, Jun Hee;Kim, Dong Soo
    • Clinical and Experimental Pediatrics
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    • v.48 no.4
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    • pp.416-424
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    • 2005
  • Purpose : To find the risk factors associated with coronory artery lesions, non-responsiveness to intravenous immunoglobulin(IVIG) treatment, and recurrences in Kawasaki disease patients. Methods : We retrospectively analyzed 1,000 Kawasaki disease patients who were admitted to Yonsei University Medical Center from September 1990 to December 2003. We compared between responder and non-responder groups to IVIG treatment as well as between relapsed and non-relapsed groups, and as to the relapsed group, we also compared variables between patients in their first and second attack states. Finally, factors associated with longer-fever duration from disease onset were evaluated. Results : Longer fever durations before and after IVIG treatment, male sex, lower Hgb and Hct level, higher WBC count and segmented WBC proportion, and higher CRP and Harada's score were related with coronary artery lesions. Non-responsiveness was related to higher WBC count, segmented WBC proportion, CRP, SGPT, Harada's score, and pyuria. Moderate-to-severe coronary artery dilatations and recurrences were more commonly seen among the non-responder group. No significant predictive factors for recurrence were found. In the relapsed group, lower WBC count, CRP, and shorter fever duration from disease onset were observed in their second attack state. Fever duration from disease onset showed positive correlation with WBC count, CRP, and Harada's score and negative correlation with Hgb levels. Conclusion : Higher WBC count, CRP, and higher Harada's score were related to both higher incidences of coronary artery lesions and non-responsiveness to IVIG treatment, and these factors were also related with longer fever duration. Non-responders to IVIG treatment showed higher recurrence rate and more moderate-to-severe coronary artery dilatations than responders.