• Title/Summary/Keyword: 비등방성 재료

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A Study on the Silicon Etching Characteristics in ECR using ${SF_6}/{Cl_2}$ Gas Mixtures (${SF_6}/{Cl_2}$ 혼합비에 따른 실리콘 식각 특성 고찰)

  • 이상균;강승열;권광호;이진호;조경익;이형종
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.2
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    • pp.114-119
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    • 2000
  • Etch characteristics of SF6/CI2 electron cyclotron resonance (ECR) plasmas have been investigated. Surface reaction of gas plasma with polysilicon was also analysed using X-ray photoelectron spectroscopy (XPS). At the same time, the relationship between surface reaction and the etched profile of polysilicon was examined using XPS. The etch rate of polysilicon and oxide increases with increasing flow rate of SF6 in the SF6/CI2 gas mixture, and tis selectivity also increase also increase. It was also found that as increasing flow rate of SF6 in the SF6/CI2 gas mixture, the atomic% of chlorine detected at surface region decrease, but F and S contents increase. At the same time, when the mixing ratio of SF6 gas increases, the anisotropy of etched polysilicon is sharply decreased in the 0%~10% range of the SF6 mixing ratio, but is rarely varied in the range over 10%, in spite of the large variations in flow rates. It can be explained that the bonding of S-Si due to SiSx(x$\leq$2) compound formed on the etched surface suppress the formation of Si-Cl and 'or Si-F bonding in the silicon etching.

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Development of RVE Reconstruction Algorithm for SMC Multiscale Modeling (SMC 복합재료 멀티스케일 모델링을 위한 RVE 재구성 알고리즘 개발)

  • Lim, Hyoung Jun;Choi, Ho-Il;Yoon, Sang Jae;Lim, Sang Won;Choi, Chi Hoon;Yun, Gun Jin
    • Composites Research
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    • v.34 no.1
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    • pp.70-75
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    • 2021
  • This paper presents a novel algorithm to reconstruct meso-scale representative volume elements (RVE), referring to experimentally observed features of Sheet Molding Compound (SMC) composites. Predicting anisotropic mechanical properties of SMC composites is challenging in the multiscale virtual test using finite element (FE) models. To this end, an SMC RVE modeler consisting of a series of image processing techniques, the novel reconstruction algorithm, and a FE mesh generator for the SMC composites are developed. First, micro-CT image processing is conducted to estimate probabilistic distributions of two critical features, such as fiber chip orientation and distribution that are highly related to mechanical performance. Second, a reconstruction algorithm for 3D fiber chip packing is developed in consideration of the overlapping effect between fiber chips. Third, the macro-scale behavior of the SMC is predicted by the multiscale analysis.

Characterization of In-plane Shear Behaviors of Woven Fabrics by Bias-extension and Trellis-frame Tests (편향 인장 및 트렐리스 시험에 의한 직물 복합재료의 면내 전단 물성 평가)

  • Lee, Won-Oh;Um, Moon-Kwang;Byun, Joon-Hyung;Cao, Jian
    • Composites Research
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    • v.23 no.5
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    • pp.8-14
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    • 2010
  • Three types of glass woven fabrics (plain, balanced twill, and unbalanced twill) having various sample sizes and aspect ratios were tested using the bias-extension tests. Real-time deformation images, force, and displacement data were collected. For the bias-extension test, the shear angle of the fabrics from the equation based on the crosshead displacement and fabric size was compared with direct manual measurements of the warp and weft angles as well as the optical measurement software. To determine the shear force, an analytical equation was introduced considering the kinematics of the bias-extension test. The obtained shear behaviors were further compared with the results by the trellis-frame test. The optical measurement methods showed that the mathematical method was reasonable before the shear angle of the fabrics reaches $30^{\circ}$ in the bias-extension tests. Also, the bias-extension test gave consistent behaviors with the trellis-frame test only for isotropic and homogeneous fabrics such as balanced plain and twill weaves.

Analytical and Experimental Study for Development of Composite Coil Springs (복합재 코일스프링 개발을 위한 수치해석 및 실험적 연구)

  • Oh, Sung Ha;Choi, Bok Lok
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.38 no.1
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    • pp.31-36
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    • 2014
  • This paper shows the feasibility of using carbon-fiber-reinforced polymer (CFRP) composite materials for manufacturing automotive coil springs. For achieving weight reduction by replacing steel with composite materials, it is essential to optimize the material parameters and design variables of the coil spring. First, the shear modulus of a CFRP beam model, which has $45^{\circ}$ ply angles for maximum torsional stiffness, was calculated and compared with the test results. The diameter of the composite spring was predicted to be 17.5 mm for ensuring a spring rate equal to that when using steel material. Finally, a finite element model of the composite coil spring with $45^{\circ}$ ply angles and 17.5 mm wire diameter was constructed and analyzed for obtaining the static spring rate, which was then compared with experimental results.

Bending, Free Vibration and Buckling Analysis of Anisotropic Composite Laminated Plate and Shell Structures (비등방성 복합적층판 및 쉘 구조의 휨, 자유진동 및 좌굴해석)

  • Yoon, Seok Ho
    • Journal of Korean Society of Steel Construction
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    • v.11 no.1 s.38
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    • pp.55-67
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    • 1999
  • The ratios of elastic to shear modulus of the structures as laminated composite plates and shells, are very large. They are much susceptible to effect of shear deformation. In order to obtain the accurate solutions of laminated composite plate and shells, the effects of shear strain should be considered for the analysis and design of them. Especially, the more exact solution can be obtained in applying to higher-order shear deformation theory. Therefore, in this paper, the third-order shear deformation theory is used to present the distributions of bending, the characteristics of natural frequencies and the buckling load according to the effects of ply orientation, number of layers for the laminated composite plates and shells with simply supported boundary conditions.

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Selective etch of silicon nitride, and silicon dioxide upon $O_2$ dilution of $CF_4$ plasmas ($CF_4$$O_2$혼합가스를 이용한 산화막과 질화막의 선택적 식각에 관한 연구)

  • 김주민;원태영
    • Electrical & Electronic Materials
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    • v.8 no.1
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    • pp.90-94
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    • 1995
  • Reactive Ion Etching(RIE) of Si$_{3}$N$_{4}$ in a CF$_{4}$/O$_{2}$ gas plasma exhibits such good anisotropic etching properties that it is widely employed in current VLSI technology. However, the RIE process can cause serious damage to the silicon surface under the Si$_{3}$N$_{4}$ layer. When an atmospheric pressure chemical vapor deposited(APCVD) SiO$_{2}$ layer is used as a etch-stop material for Si$_{3}$N$_{4}$, it seems inevitable to get a good etch selectivity of Si$_{3}$N$_{4}$ with respect to SiO$_{2}$. Therefore, we have undertaken thorough study of the dependence of the etch rate of Si$_{3}$N$_{4}$ plasmas on $O_{2}$ dilution, RF power, and chamber pressure. The etch selectivity of Si$_{3}$N$_{4}$ with respect to SiO$_{2}$ has been obtained its value of 2.13 at the RF power of 150 W and the pressure of 110 mTorr in CF$_{4}$ gas plasma diluted with 25% $O_{2}$ by flow rate.

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Effects of Numerical Modeling on Concrete Heterogeneity (콘크리트 비균질성에 대한 수치모델의 영향)

  • Rhee, In-Kyu;Kim, Woo
    • Journal of the Korea Concrete Institute
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    • v.18 no.2 s.92
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    • pp.189-198
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    • 2006
  • The composition of most engineering materials is heterogeneous at some degree. It is simply a question of scale at which the level of heterogeneity becomes apparent. In the case of cementitious granular materials such as concrete the heterogeneity appears at the mesoscale where it is comprised of aggregate particles, a hardened cement paste and voids. Since it is difficult to consider each separate particle in the topological description explicitly, numerical models of the meso-structure are normally confined to two-phase matrix particle composites in which only the larger inclusions are accounted for. 2-D and 3-D concrete blocks(Representative Volume Element, RVE) are used to simulating heterogeneous concrete meso-structures in the form of aggregates in the hardened mortar with nearly zero-thickness linear or planar interfaces. The numerical sensitivity of these meso-structures are Investigated with respect to the different morphologies of heterogeneity and the different level of coupling constant among fracture mode I, II and III. In addition, a numerically homogenized concrete block in 3-D using Hashin-Shtrikman variational bounds provides an evidence of the effective cracking paths which are quite different with those of heterogenous concrete block. However, their average force-displacement relationship show a pretty close match each other.

A Study of the Advanced Composite Material Slab for Light Weight of Tall Building (초고층빌딩 경량화를 위한 복합신소재 슬래브에 관한 연구)

  • Han, Bong-Koo
    • Composites Research
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    • v.27 no.1
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    • pp.7-13
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    • 2014
  • For each construction material used, there is certain theoretical limit in sizes. For tall building construction, the reduction in slab weight is the first step to take in order to break such size limits. In this paper, the feasibility of such objective is proven and given by numerical analysis result. For a typical building slab, both concrete and advanced composite sandwich panels are considered. The concrete slab is treated as a special orthotropic plate to obtain more accurate result. For each panel, the deflection under the dead and live loads is compared, since both tensile and compressive strengths of the composites are far more higher than those of concrete. All types of sandwich panels considered, except one case, have self-weights less than one tenth of that of the reinforced concrete slab, with deflections less than that of the reinforced concrete slab.

Estimation of Dynamic Response of Advanced Composite Material Decks for Bridges Application under Various Vehicle Driving Velocities (복합재료 교량 바닥판의 주행속도에 따른 동적응답 평가)

  • 천경식;장석윤
    • Composites Research
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    • v.16 no.6
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    • pp.23-32
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    • 2003
  • Applications of advanced composite material in construction field are tending upwards and development of all composite material bridges is making progress rapidly in home and abroad due to their high strength to weight ratio. This paper formulated the dynamic responses of the laminated composite structures subjected to moving load and analyzed the various dynamic behaviors using the finite element method. The nondimensionalized natural frequencies of a simply supported square-laminated composite plate are considered for verifications. Mode superposition and Newmark direct integration method are applied for moving load analysis. For structural models, dynamic magnification factor calculated for various velocities of the moving load and displacements characteristics of laminated composite structures due to the moving load are investigated theoretically Numerical results are presented to study the effects of lamination scheme, stacking sequence, and fiber angle for laminated composite structures during moving load. The various results on moving load and lamination through numerical analysis will present an important basic data for development and grasp the behavior of all composite material bridges.

Higher-order Shear Deformable Analysis of Laminated Plates on Two-parameter Elastic Foundations (Two-parameter 탄성지반위에 놓인 고차전단변형 적층판의 해석)

  • Han, Sung-Cheon;Jang, Suk-Yoon
    • Journal of Korean Society of Steel Construction
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    • v.13 no.1
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    • pp.101-113
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    • 2001
  • The main purpose of this paper is to present deflections of laminated composite plates on the two-parameter foundations. that is an elastic foundation with shear layer. This paper focuses on the deformation behaviour of anisotropic structures on elastic foundations. The third-order shear deformation theory is applied by using the double-fourier series. To validate the derived equations the obtained displacements for simply supported isotropic and orthotropic plates on elastic foundations are compared with those of Timoshenko and LUSAS program. The results show an excellent agreement for the isotropic and LUSAS program. The results show an excellent agreement for the isotropic and orthotropic plates on the elastic foundations. Numerical results for displacements are presented to show the effects of side-to-thickness ratio aspect ratio, material anisotropy and shear modulus of foundations.

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