• Journal of the Korea Safety Management & Science
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• v.9 no.1
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• pp.145-156
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• 2007

This paper is to propose model classification and evaluation of measurement uncertainty. In order to obtain type A and B uncertainty, variety of measurement mathematical models are illustrated by example. The four steps to evaluate expanded uncertainty are indicated as following; First, to get type A standard uncertainty, measurement mathematical models of single, double, multiple, design of experiment and serial autocorrelation are shown. Second, to solve type B standard uncertainty measurement mathematical models of empirical probability distributions and multivariate are presented. Third, type A and B combined uncertainty, considering sensitivity coefficient, linearity and correlation are discussed. Lastly, expanded uncertainty, considering degree of freedom for type A, B uncertainty and coverage factor are presented with uncertainty budget. SPC control chart to control expanded uncertainty is shown.

• Proceedings of the KIEE Conference
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• 2003.07a
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• pp.540-542
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• 2003

In the high-power tests to be performed on electrical apparatus as circuit-breaker, load switch, fuse, transformers, insulators, cable and so on, the results of tests on these apparatus are extremely important to evaluate the performance of test object. The reliability of the results depends on the reliability of measuring systems used in the laboratories where tests are performed. This paper deals with factors of uncertainty and describes estimation of uncertainty in new measuring system used in high-power testing LAB. 1 in KERI.

• Proceedings of the IEEK Conference
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• 2002.06a
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• pp.171-174
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• 2002

In this study, we proposed a specification which is able to estimate tile uncertainty more easily and quickly and also able to maintain a confidence level when measuring tile magnitude and phase of 1-port and 2-port transmission.reflection coefficient using a VNA and attached coaxial cable probes. This proposed specification is available when it needs extra special condition of uncertainty estimation and when there is no additional standard equipment like as beadless airline or mismatch standard at the measurement institute. We compared and examined this proposed uncertainty estimation method with recommended EA specification and Agilent specification. As a result, we think that this proposed specification can be used as a reference for uncertainty estimation and calculation of VNA system, that is, a reference based on the IS0/1EC 17025 requirements.

• Analytical Science and Technology
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• v.16 no.1
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• pp.90-93
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• 2003

The standard uncertainties of two different approaches using the same data set are compared and evaluated using an example of gravimetric standard gas preparation. It is shown that the correlation between input quantities should be taken into account for the proper evaluation of uncertainty resulting from random effects.

• Journal of the Korea Institute of Military Science and Technology
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• v.5 no.1
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• pp.15-23
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• 2002

Uncertainty components and evaluation of the system of pressure measurement are presented in this paper. Since early in 1980s, measurement uncertainty is getting more important due to ISO/IEC 17025, which is established for international test and calibration laboratories. Up to now it is true that accuracy, precision, error and etc. have been commonly used in industry to define the amount of error to the products and equipment, but these terms ought to be united into uncertainity in the future. This paper describes how to indicate measurement uncertainty and types of measurement errors, and then shows the evaluation result of measurement system using piezoelectric pressure transducers.

• Journal of the Korea Institute of Military Science and Technology
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• v.2 no.2
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• pp.261-270
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• 1999

This paper presents how to evaluate the accuracy and uncertainty of the measuring techniques and the measurement systems, and establish their accreditation procedures. There are largely static error and dynamic error in the measurement error. In particular, the static error which always remains in the measurement systems is obtained by proposed error equations. In addition, the accreditation procedures are proposed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.498-499
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• 2007

금속 비저항의 측정방법은 4단자 방법을 비롯한 van der Pauw 방법, Four-Point Probe(FPP) 방법, eddy current 방법 등이 사용되고 있으며, 시료의 혈상과 크기에 따라서 그 측정방법은 각각 다르다. 본 연구에서는 그 중 4단자 방법에 의한 정밀측정방법과 측정불확도 평가에 관하여 고찰하였다. 4단자 방법은 시료가 바(bar)나 봉(rod) 형상이면 측정이 가능하며, 시료의 정밀가공과 측정기술을 통하여 측정 불확도를 줄일 수 있다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.387-390
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• 2002

In this paper, we accomplish uncertainty evaluation and performance test of the volumetric interferometer using two spherical wavefronts emitted from the ends of two single mode fibers. We verify that the volumetric interferometer has the volume uncertainty of 690nm through the error analysis and it has the resolution of 0.1 0.1$\mu\textrm{m}$ for x axis which is the same order of repeatability for x axis. Also, we obtain the systematic error of $1\mu\textrm{m}$ for $60\times 60\times 20 mm^3$ working volume using self-calibration with an artifact plate.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.2124-2125
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• 2011

금속의 비저항 측정방법은 4단자 방법, van der Pauw 방법, Four-Point Probe(FPP) 방법, eddy current 방법 등이 있다. 이들의 측정방법은 다르지만 동일한 시료에 대해 평가한 비저항은 측정 불확도 범위 내에서 일치하여야 한다. 이에 따라 균질한 비자성 금속(STS 316)을 선정한 후 비저항을 평가한 결과 4단자와 van der Pauw 방법에 의한 비저항(도전율)은 각각 75.86 ${\mu}{\Omega}{\cdot}cm$(2.273 %IACS)과 75.84 ${\mu}{\Omega}{\cdot}cm$(2.273 %IACS)로서 거의 동일한 결과를 나타냈으며, Four Point Probe(FPP) 방법은 75.91 ${\mu}{\Omega}{\cdot}cm$(2.271 %IACS), eddy current 방법은 76.63 ${\mu}{\Omega}{\cdot}cm$(2.25 %IACS)으로 나타났다.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.141-141
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• 2012

X-선 반사율 측정법(XRR)은 비파괴적인 측정방법과 수 nm의 두께를 정밀하게 측정할 수 있는 장점으로 인하여 반도체 산업현장에서 많은 관심과 연구가 이루어지고 있다. 이러한 XRR은 두께 분석 측정의 정밀도를 향상시키고 부정확한 결과를 방지하기 위하여 측정기기를 검증하고 보정할 수 있는 두께 표준물질을 필요로 하고 있다. 본 연구에서는 XRR용 두께 표준물질을 이온빔 스퍼터링 증착방법을 이용하여 제작하였다. 두께 표준물질 제작에 있어 공기 중 노출에 의해 산화가 되지 않는 산화물 박막과 산화물 기판을 선택하였다. 후보물질은 glass, sapphire, quartz, SiO2기판과 HfO2, Ta2O5, Cr2O3 산화물 타켓을 이용하여 박막을 제작하였다. 제작된 후 보물질은 교정된 XRR을 통하여 박막의 두께, 계면 및 표면 거칠기, 밀도등 박막의 구조특성분석을 하였다. Glass, quartz의 경우 기판 표면 거칠기가 좋지 않아 제작된 샘플의 X-선 반사율 곡선이 급격히 떨어지면서 측정되는 각도의 영역이 작아졌다. Sapphire로 제작한 시편은 측정된 데이터와 simulation의 curve fitting이 양호하지 않았다. 이 중 SiO2기판을 사용하고 HfO2박막을 증착한 샘플이 다른 후보물질보다 XRR curve fitting 결과가 가장 양호하여 두께 표준물질로 응용하기에 적절하였다. 그리고 AFM (Atomic Force MicroScope)을 이용하여 기판의 거칠기 및 증착한 박막표면 거칠기 측정을 하였고, TEM (Transmission Electron Microscope)으로 두께 측정을 하여 XRR로 얻은 데이터와 비교하였다. 이러한 결과를 토대로 XRR용 두께 표준물질 제작할 수 있었고, 추후 불확도 평가 및 비교실험을 통하여 제작된 XRR용 두께 표준물질을 이용할 수 있을 것으로 기대된다.