• Journal of the Microelectronics and Packaging Society
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• v.19 no.1
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• pp.61-66
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• 2012

Chemical Mechanical Planarization (CMP) is a polishing process used in the microelectronic fabrication industries to achieve a globally planar wafer surface for the manufacturing of integrated circuits. Pad conditioning plays an important role in the CMP process to maintain a material removal rate (MRR) and its uniformity. For metal CMP process, highly acidic slurry containing strong oxidizer is being used. It would affect the conditioner surface which normally made of metal such as Nickel and its alloy. If conditioner surface is corroded, diamonds on the conditioner surface would be fallen out from the surface. Because of this phenomenon, not only life time of conditioners is decreased, but also more scratches are generated. To protect the conditioners from corrosion, thin organic film deposition on the metal surface is suggested without requiring current conditioner manufacturing process. To prepare the anti-corrosion film on metal conditioner surface, vapor SAM (self-assembled monolayer) and FC (Fluorocarbon) -CVD (SRN-504, Sorona, Korea) films were prepared on both nickel and nickel alloy surfaces. Vapor SAM method was used for SAM deposition using both Dodecanethiol (DT) and Perfluoroctyltrichloro silane (FOTS). FC films were prepared in different thickness of 10 nm, 50 nm and 100 nm on conditioner surfaces. Electrochemical analysis such as potentiodynamic polarization and impedance, and contact angle measurements were carried out to evaluate the coating characteristics. Impedance data was analyzed by an electrical equivalent circuit model. The observed contact angle is higher than 90o after thin film deposition, which confirms that the coatings deposited on the surfaces are densely packed. The results of potentiodynamic polarization and the impedance show that modified surfaces have better performance than bare metal surfaces which could be applied to increase the life time and reliability of conditioner during W CMP.

• Korean Journal of Plant Tissue Culture
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• v.25 no.4
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• pp.257-261
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• 1998

The repeated subcultures of in vitro plant materials in wasabi became highly vitrified and the capacity for multiple shoot formation from the vitrified plant materials was very low. In order to improve the quality of in vitro propagated planting materials, the experiments were carried out using culture vessels capped with membrane filter(MF). When vitrified shoots were cultured on MS medium with 0.2mg/L BA in the vessels with MF or without MF for 60 days, the shoots in the vessels with MF did not vitrified. In contrast, the shoots grown in the vessels without MF vitrified at 65%. The stomates of vitrified leaves were circular and inflated, whereas those of normal leaves acclimatizated in the vessels with MF were ovate in shape. The hardened shoots were also cultured on MS media without sucrose containing 0.01mg/L IBA in vessels with(photoautotrophic culture) or without(control) MF. Sucrose was necessary for survival of the in vitro plantlets in the vessels without MF. After 20 days of culture, the shoots in the vessels without MF on the sucrose-free media turned yellow and died. But the shoots in the vessels with MF in the sucrose-free media produced a lot of roots. When shoots were cultured on MS medium with 2% sucrose containing 0.01mg/L IBA in the vessels with(photomixotrophic culture) or without(heterotrophic culture) MF, best growth occured in photomixotrophic culture.

• Journal of Legislation Research
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• no.54
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• pp.193-216
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• 2018

Das Leben des Embryos ist als solche ein Rechtsgut, das einen durch das Strafrecht hinreichend $gesch{\ddot{u}}tzt$ werden sollen. Daher versteht es sich von selbst, $da{\ss}$ auch bei der Schwangere die ihren eigenen $empf{\ddot{a}}ngenen$ Embryo beseitigenden Handlungen nicht $unbeschr{\ddot{a}}nkt$ gebilligt werden $k{\ddot{o}}nnten$. Es $k{\ddot{o}}nnte$ bei der Schwangere wegen ihrer $Interessenverh{\ddot{a}}ltnisse$ mit ihrem Embryo z. B. endlosen deren Verantwortlichkeiten nur die $Erlaubnism{\ddot{o}}glichkeiten$ ${\ddot{u}}bergelegt$ werden. Wie der Bundesverfassungsgericht schon ${\ddot{u}}berzeugt$ hat, $k{\ddot{o}}nnte$ das Leben des Embryos keinen vom Strafrechtschutz $ausschlie{\ss}enden$ Teil anerkannt werden, sondern nur in besonderen $F{\ddot{a}}llen$ ausnahmsweise dessen Verletzung erlaubt werden. ${\ddot{U}}ber$ die Reichweite der ausnahmsweisen anerkannten Erlaubnisse gegen einer Rechtsgutsverletzung sollte es im Allgemeinen $abh{\ddot{a}}ngig$ unter Zeitraum und Umwelt konkret ausgefargt werden. Daher kann eine konkrete Diskussion ${\ddot{u}}ber$ Rechtsfertigungsgrund des Schwangerschaftsabbruchs nur erstenmal anfangen, nachdem ein strafrechtlicher Schutz des Embryolebens $pr{\ddot{a}}zis$ ausgeforscht wird. Bis jetzt hat das Strafrecht das Rechtsgut als Leben des Embryos zu leicht bewertet und damit hat die Strafe des Schwangerschaftsabbruchs zu niedrig bestimmt. Die niedrige Strafe des Schwangerschaftsabbruchs $enth{\ddot{a}}lt$ die Gefahr, die die Erlaubnisreichweite des Schwangerschaftsabbruchs ungerecht ausdehnt. Die Handlung der Schwangere sollte minder bestraft werden, um das Sebstbestimmungsrecht der Schwangere hoch $w{\ddot{u}}rdigen$ zu $k{\ddot{o}}nnen$. Letztlich braucht der Versuch des Schwangerschaftsabbruchs zu bestrafen. Der Versuch und die Vollendung ${\ddot{u}}ber$ die Verletzung des Embryolebens sollten deren Unterschiede im ihren Unrechtsgehalt anerkannt werden, weil der Normzweck des Schwangerschaftsabbruchs im Schutz des Lebens des Embryos besteht. Und damit in den $F{\ddot{a}}lle$, die in Folge des versuchten Schwangerschaftsabbruchs die Schwangere verletzt oder gestorben wird, $k{\ddot{o}}nnten$ die Meinungsstreiten $aufgeh{\ddot{o}}rt$ werden.

• Journal of Venture Innovation
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• v.4 no.1
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• pp.1-21
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• 2021

Recently, as the number of foreigners residing in Korea has increased, Korea is preparing to enter a multicultural country. This study was conducted to present a social integration model for the purpose of solving the social problem of social integration of multicultural families. The purpose of this study is as follows. First, this study examines the role of local social capital for social integration by improving the quality of life of multicultural families and increasing their intention to participate in society. Second, the purpose of this study is to examine the effects of multicultural family members on the formation of local social capital, subjective quality of life and social participation intention, focusing on the role of social enterprises. To achieve the purpose of this study, members of multicultural families living in Seoul and Gyeonggi Province were selected as samples, and responses to local social capital, subjective quality of life, social participation intention and social identity were collected through structured questionnaires. A total of 363 valid questionnaires were tested for the relationship between variables through the structural equation model. The analysis result of this study is that first, human social capital and corporate social capital of members of multicultural families have a significant positive effect on subjective quality of life. Second, it was found that the corporate social capital and community social capital of members of multicultural families had a significant positive effect on the intention to participate in society. Third, it was found that the subjective quality of life of members of multicultural families did not significantly affect their intention to participate in society. Finally, it was found that social identity plays a partly controlling role when community capital of multicultural family members affects their intention to participate in society. Through this analysis result, it is expected that it will play a meaningful role as basic data for policy proposals for social integration of multicultural families.