• 한국정밀공학회지
• /
• 제20권12호
• /
• pp.64-72
• /
• 2003

This paper presents a small loading and positioning device using VCM (voice coil motor). The developed device consists of a VCM-based linear actuating system, a capacitance displacement sensor and a cantilever deflection sensing system. The trust force of the VCM proportional to applied current moves the column supported on two pairs of parallel leaf springs. The infinitesimal displacement of moved column is detected by capacitance displacement sensor with a resolution of 0.1nm and a repeatability of 1nm. Also, a micro cantilever with known stiffness (200N/m), which is mounted on the end of the column, is used as a force sensor to detect the load applied to a specimen. After the cantilever contacts with the specimen, the deflection of cantilever and the load applied to the specimen are measured by using an optical lever system which consists of a diode laser, a mirror and a PSD (position sensitive detector). In this paper, an experimental system was constructed and its actuator and sensing parts were tested and calibrated. Also, the constructed system was applied to the indentation experiment and the load-displacement curve of aluminum was obtained. Experimental results showed that the developed device can be applied for performing nano indentation.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2002년도 춘계학술대회 논문집
• /
• pp.357-360
• /
• 2002

Nowadays, the improvement and development of Multi-media, information and communication technology are rapidly processed. And many products, for example, digital camera, digital camcorder, and PDA, are used for them. They need large data storage capacity and small size, light storage system. Due to that, many studies and researches in data storage system have been carried out. Especially, micro drive system was presented by IBM.(1) However, its system is expensive and uneasy to be portable. In ODD technologies, 1 inch drive system is not yet or in processing status.(2) If to be possible and to be come up, it is cheap than HDD system and easy to transfer information. In this paper, a miniaturized actuator(about linch) is designed and tested for ODD system. Specially, it is adapted for NFR(Near-field Recoding) system using SIL(Solid Immersion Lens). It is the dual-servo actuator which consists of a coarse actuator and fine actuator. Its actuating force generation method is VCM(Voice Ceil Motor). The fine actuator has 4-wire suspensions and bobbin wrapped by coil and includes focusing motion as well as tracking motion. The coarse actuator has an actuating coil and V-grooved guide mechanism. Also, the characteristics of the designed actuator is estimated by sine-swept mode and LDV(Laser Doppler Vibro-meter).

• 한국정밀공학회지
• /
• 제18권8호
• /
• pp.174-181
• /
• 2001

Nowadays, the improvement and development of Multi-media and information & communication technology is rapidly processed. They need large data storage capacity. So that, many studies and researches in data storage have been carried out. According to them, the data storage capacity has been increased. But the limitation of storage capacity is happened for several problems. One of them is spot & pit size in optical and magnetic data storage and another is the resolution of actuators. The problems in spot & pit size are covered by new data storage methods-- for examples, AFM(Atomic Force Microscopy), MO(Magneto-optical) system, and NFR(Near-Field decoding) system etc. But the resolution limit of an actuator was not developed and doesn\`t follow up the development of spot & pit size. Because of them, we should improve a resolution of an actuator. Especially, in this paper an actuator if studied and designed for NFR (in using SIL(Solid Immersion Lens) system. It is a dual stage actuator, which consists of a Fine actuator and a Coarse actuator. and should desire 100nm accuracy. Its actuating force generation method is VCM(Voice Coil Motor). The Fine actuator is composed of 4-leaf springs and a bobbin wrapped by coil. The Coarse actuator has Coils and 3-Roller bearings. Also, The Characteristics of designed actuator for NFR system is estimated by Sine-Swept mode and LDV(Laser Doppler Vibro-meter).

• 한국정밀공학회지
• /
• 제19권12호
• /
• pp.163-170
• /
• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• 한국정밀공학회지
• /
• 제19권7호
• /
• pp.125-132
• /
• 2002

This paper shows an experimental magnetic levitation table using one degree-of-freedom active control. The magnetic levitation table using repulsions of permanent magnets was theoretically presented already. Thus the objective of this paper is to prove stable levitation with only one degree-of-freedom active control experimentally. For the design of the system, at first, permanent magnets are selected. Secondly, the spring constants of the virtual spring are obtained by simulation. Thirdly, the moving magnets are arranged using a stable layout relation. Fourthly, a linear voice coil motor is designed. Finally, the magnetic levitation system is manufactured. The phenomenon of stable levitation in the manufactured table is proven by means of dynamic time and frequency responses. The differences between the theoretical natural frequencies and experimental ones are analyzed. Also, stable range in the control direction is shown experimentally.

• Journal of Advanced Marine Engineering and Technology
• /
• 제37권1호
• /
• pp.91-98
• /
• 2013

엔진 및 회전기기의 진동은 선체의 피로도를 증가시켜 내구성을 저하시키는 원인이 된다. 이를 방지하기 위하여 엔진 및 회전기기와 선체사이에는 댐퍼를 부착하여 진동을 최소화 하고 있다. 일반적으로 선박에 부착하는 댐퍼는 수동형 댐퍼로 중 고주파의 특정 진동영역에 대하여 제진 특성을 갖도록 설계되어있지만 저주파영역에서는 그 효과를 기대하기 힘들다. 이에 본 연구에서는 보다 광대역의 진동신호에 대해 높은 제진특성을 얻기 위하여 VCM을 이용한 능동형 제진 장치를 개발하였다. 제진장치를 제어하기 위해 라우스휴리츠 안정조건과 한계감도법을 이용하여 PID제어기를 구성하였고, 제어기 출력은 2상한과 4상한 초퍼회로를 이용하여 VCM을 구동할 수 있도록 하였다. 시뮬레이션과 실제 실험을 통하여 제어알고리즘과 제어장치의 유용성을 확인하였다.