• Proceedings of the IEEK Conference
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• 2006.06a
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• pp.585-586
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• 2006

본 논문에서는 MEMS 용량형 변위 센서의 제작과 함께, 미세 변위 측정을 위한 테스트 샘플을 제작하였다. 아래의 그림 1, 2는 각각 스테이지에 장착할 MEMS 용량형 변위 센서 및 미세 변위 측정을 위한 테스트 샘플의 개념도를 보여주고 있다. 테스트 샘플의 감지 부분은 스테이지에 장착할 센서와 정확히 일치를 시켰으며, 미세 변위를 주기 위해서 comb-drive actuator 형태의 운동부를 두었다. 운동부에서는 DC 및 AC 전압을 인가함으로써 미세 변위를 얻을 수 있었으며, 사용된 DC 전압은 20V였으며, 1.4kHz의 AC 전압을 크기를 변화시키며 인가하였다.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.20 no.3
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• pp.639-646
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• 2016

In this study, the contactless measurement method with a optical displacement sensor(ODS, ADNS 9500) was proposed to overcome flaws in a rotary encoder based measurement under particular circumstances, such as a slippage and a case of little rotational inertia. The performance tests of the optical displacement sensor using data acquisition board and National Instruments's LabVIEW program were performed to accomplish accurate displacement measurements and the performance characteristics according to measurement direction, speed, acceleration, height and surface types were discovered through the repetitive tests. The experimental results indicate that, in order to get an accurate in-plane motion, the height(distance between the ODS and the target surface) has to be maintained at the range of 2.4 mm to 3.2 mm and the sensitivity(resolution) should be modified and applied to the formulae for displacement calculation, considering its measurement direction, speed and surface type.

• Journal of the Korean Society for Nondestructive Testing
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• v.25 no.5
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• pp.350-355
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• 2005

The probes of fiber optic OTDR (Optical Time Domain Reflectometry) sensor was developed to measure displacements of social infrastructures. This probe was simply constructed with two conventional optical fiber connectors, and a fiber bending part, which transforms displacement to optical loss. When the displacement was affected on the bending loss part, the reflected light intensity of one optical connector was changed. The displacement was determined from this reflected light intensity change of the connector. fiber optic OTDR displacement sensor was developed as the multiplexed type of one fiber line with 5 sensor probes. Multiplexing operation was tested by these 5 sensor probes.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1508-1510
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• 2003

비접촉 방식인 광 삼각측량법(optic triangulation method)에 의한 고정도 변위센서를 반도체 레이저 다이오드와 리니어 CCD를 이용하여 구현하였다. 개발한 고유의 알고리듬을 채용하여 측정 분해능 보다 적은 CCD pixel(256 pixel)로 고분해능(2,560분해능, $4{\mu}m$)을 실현함으로써, 결과적으로 저가이며 소형의 고정도 변위센서를 개발하였다. 또 검출물체의 색상이나 재질에 따른 검출특성의 현저한 차이를 보상하기 위하여 LFTC(laser flash time control)과 AGC(auto gain control)을 적용하여 안정된 검출결과를 얻을 수 있었다. 개발된 변위센서의 특성은 다음과 같다. 측정 거리:30mm, 유효측정 범위: -5.09${\sim}$5.10mm, 분해능:4um, 직선성:${\pm}1%$.

• Korean Journal of Optics and Photonics
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• v.15 no.5
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• pp.415-422
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• 2004

We propose and present a new multiplexed bend loss type single-mode fiber-optic sensor system for displacement measurement in order to measure the displacement of several mm of civil engineering structures such as bridges and buildings. We make a bend loss type fiber-optic sensor for measuring displacements using the signal difference between two reflection signals due to various bend losses generating at a pair of optical connectors by using the optical time domain reflectometer. And we fabricate a multiplexed bend loss type fiber-optic sensor detecting linear displacements of 4 measuring positions of an object by setting these new 4 fiber-optic sensors on a single mode fiber simultaneously. We find that the multiplexed fiber-optics displacement sensor has linearity of 0.9942, maximum displacement of 6 mm, and accuracy of 6% for 4 measuring points.

• Journal of the Korean Magnetics Society
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• v.6 no.1
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• pp.36-39
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• 1996

We have constructed a disp1acerrent sensor for measuring dynamic magnetostriction of an arrvrphous ribbon under alternating magnetic field using fiber optic Fabry-Perot interferorreter. The signal of the sensor was depen¬dent on the index matching oil and the optical isolator. The resolution of the sensor was $30{\AA}$ and the measured peak to peak magnetostriction of the amorphous ribbon $Fe_{81}B_{13.5}Si_{3.5}C_{2}$ was $28{\times}10^{-6}$.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.120-125
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• 2006

본 연구에서는 기존의 레이저 변위센서 대신 접촉형 변위센서를 이용하여 마스크-기판간 갭 간격 및 평형 조절 장치를 구현함으로써 기판의 표면 상태에 관계없이 정확한 마스크-기판간 갭의 조정, 평형 유지가 가능하도록 하였다.

• Journal of the Korea institute for structural maintenance and inspection
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• v.10 no.4
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• pp.160-166
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• 2006

Optical Fiber Bragg Grating sensor has a good performance to measure microscopic displacement which can measure strain of lining concrete and cylindrical structure like high intensity containment building and it can present many advantages like a corrosion resistance from the durability point of view. Then it can measure plane geometrical displacement of cylindrical structures with two-way displacement FBG sensor module. According to the test result, measurement of FBG sensor is better performance than other electric sensor system and 2D-level measurement. As a test result, Resolution of the two-way displacement sensor module with FBG sensors are more 10 times than other LVDT or 2D surveying.

• Journal of the Korean Magnetics Society
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• v.25 no.1
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• pp.27-30
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• 2015

In this study, the LC resonators were fabricated with ferrite cores and external capacitors, and then their characteristics were investigated for the purpose of developing new displacement sensor. The frequency dependence of impedance of single resonator was estimated. There were two resonance peaks on the impedance spectrum; one by self inductance and the other by mutual inductance. The resonance frequency was shifted linearly in direct proportion to displacement of the resonator showing the proposed device, a pair of LC resonators, could be used a precision displacement sensor.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.6 s.171
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• pp.30-39
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• 2005