A Novel Cylindrical Capacitive Sensor for both Radial and Axial Motion Measurements

반경 방향 및 축 방향 운동 동시 측정을 위한 새로운 원통형 정전용량 변위센서

  • 김종혁 (서울대학교 기계항공공학부) ;
  • 안형준 (서울대학교 기계항공공학부) ;
  • 장동영 (서울산업대학교 산업정보시스템공학과)
  • Published : 2005.06.01

Abstract

Keywords

References

  1. Ahn, H. J., Jeon, S., Han, D. C., 'Error analysis of the cylindrical capacitive sensor for active magnetic bearing spindles,' Journal of Dynamics system, measurement and control, trans. of ASME, Vol. 122, pp.102-107, 2000 https://doi.org/10.1115/1.482433
  2. Jeon, S., Ahn, H. J., Chang, I. B. and Han, D. C., 'A New Design of Cylindrical Capacitive Sensor for On-line Precision Control of AMB Spindle,' IEEE Transactions on Instrumentation and measurement, Vol. 50, No. 3, pp.757-763, 2001 https://doi.org/10.1109/19.930450
  3. Gradshteyn, I. S. and Ryzhik, I. M., 'Table integrals, series, and product,' Academic press, Inc. 1982