• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.220-220
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• 2010

펄스 직류 $BCl_3$ 플라즈마를 이용하여 GaAs와 AlGaAs의 건식식각을 연구하였다. 공정의 주요 변수는 펄스 직류 전압(350~550V), 펄스 직류 시간($0.4{\sim}1.2{\mu}sec$.), 펄스 직류 주파수(100~250kHz)이었다. 식각 실험 후 샘플의 식각률, 식각 선택도, 표면 형상을 비교, 분석하였다. 또한, 광학 발광 분석기(Optical Emission Spectroscopy)를 이용하여 식각하는 동안 플라즈마 방전 특성을 분석하였다. 표면 단차 측정기(Alpha-step IQ, Tencor)로 식각 깊이를 측정해 식각률을 계산하였다. 표면 거칠기 또한 단차 측정기의 표면 거칠기 프로그램을 이용하여 분석하였다. 식각 벽면과 표면 상태는 주사전자현미경(Field-emission scanning electron microscopy)을 이용하여 관찰하였다. 분석 결과는 1) 펄스 직류의 전압이 증가하면 전극에 걸리는 파워가 올라가고 GaAs와 AlGaAs의 식각률도 증가하였다. 2) 76 mTorr 공정 압력, $0.7{\mu}sec$. 펄스 직류 시간과 200 kHz 주파수 일 때 10 sccm $BCl_3$ 펄스 직류 플라즈마에서 GaAs와 AlGaAs 둘 다 약 $0.4{\mu}m/min$ 이상의 식각 속도를 보여주었다. 3) 식각 선택도는 펄스 직류의 전압이 높아지면 증가하였고, 펄스 직류 주파수의 증가도 공정 파워와 GaAs와 AlGaAs의 식각률을 증가시켰다. 4) 그러나 펄스 직류 주파수가 150kHz 이하일 때에는 GaAs와 AlGaAs가 거의 식각되지 않았다. 5) 표면 거칠기는 펄스 직류 주파수가 증가하면 미세하게 좋아졌고 플라즈마는 펄스 직류 주파수가 100~250kHz 일 때 생성되었다. 6) 펄스 직류 시간의 증가는 공정 파워, 식각률, 식각 선택도 모두의 증가를 가져왔다. 7) 광학발광분석기(OES) 데이타는 $BCl_3$ 플라즈마에서 넓은 범위(450~700nm)에서의 염소(Cl) 분자 피크를 나타내었다. 8) 전자 현미경 사진은 펄스 직류 전압이 400 V보다 550 V 일 때보다 더 이방성(Anisotropic)측면과 부드러운 표면을 나타냈지만, 조금의 홈(Trench)이 발견되었다. 결론적으로 펄스 직류 $BCl_3$ 플라즈마는 GaAs와 AlGaAs의 건식식각에서 우수한 결과를 나타냈었다.

• Journal of the Korean Institute of Gas
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• v.18 no.4
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• pp.56-62
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• 2014

The present study investigated numerically heat and mass transfer characteristics of a fixed bed reactor by using a computational fluid dynamics (CFD) code of Fluent (ver. 13.0). The temperature and species fraction were estimated for different porosities. For modeling of the catalyst in a fixed bed tube, catalysts were regarded as the porous material, and the empirical correlation of pressure drop based on the modified Eugun equation was used for simulation. In addition, the averaged porosities were taken as 0.545, 0.409, and 0.443 and compared with non-porous state. The predicted results showed that the temperature at the tube wall became higher than that estimated along the center line of tube, leading to higher hydrogen generation by the endothermic reaction and heat transfer. As the mean porosity increases, the hydrogen yield and the outlet temperature decreased because of the pressure drop inside the reformer tube.

• Journal of the Korean Society of Propulsion Engineers
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• v.21 no.3
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• pp.1-9
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• 2017

Numerical computations are performed to investigate the effect of pintle stroke on the performance of an internal pintle thruster. Results show that the thrust control ratio was less than 2% and the aerodynamic load ratio was 22% as the pintle stroke increased. The flow past the nozzle throat rapidly expanding because of the shape of the pintle, and a shock wave was generated. Particularly, at the pintle stroke distance of 4 and 5 mm, the shock wave hit the wall of the nozzle, results in peeling bubbles. Depending on the altitude, the thrust increased and the aerodynamic load decreased, but the difference was as small as 1.5%. In the presence of the bore, the reduction of the pintle tip area resulted in a decrease in aerodynamic load.

• Solar Energy
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• v.15 no.1
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• pp.3-11
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• 1995

Heat transfer phenomena during inward freezing process of the water in a horizontal cylinder were experimentally studied. The cooling temperature of a wall more significantly affects the timewise average temperature than the initial superheating temperature of the water. In addition, it was absolved that the timewise average temperature was influenced by the initial volume ratio of the water($V_l/V_{tot}$) at the same temperature conditons. One the other hand, the freezing speed of the upper part in the water-ice interface was quickly progressed due to natural convection. Furthermore, experimental observation showed that the frozen mass fraction($M_s/M_{tot}$) was influenced by the initial volume ratio of the water($V_l/V_{tot}$). It was noted that the frozen mass fraction for each $V_l/V_{tot}$ represented by $Ste^*$ and Fo.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2010.05a
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• pp.210-213
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• 2010

Recent experimental data shows that the noticeable feature of irregular roughened spots on the fuel surface occurs during the combustion test. The generation of these unexpected patterns is likely to be resulted from the disturbed boundary layer due caused by wall blowing which is intended to simulate the process of fuel vaporization. LES without chemical reaction was conducted to investigate the flow characteristics at the near-fuel surface and the behavior of turbulent structures which is evolved by the wall blowing at the Reynolds number of 23,000. Cylindrical geometry was considered to get the most reality of the calculation results because real hybrid rocket motor is circular grain configuration. It was shown that the wall blowing pushed turbulent structures upwards making them tilted and this skewed displacement, in effect, left the foot prints of the structures on the surface. This change of kinematics may explain the formation of irregular isolated spots on the fuel surface observed in the experiment.

• Journal of the Korean Vacuum Society
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• v.19 no.3
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• pp.190-198
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• 2010

Asymmetric model for plasma uniformity by Ar and $CF_4$ was modeled by the antenna structure, the diameter of chamber, and the distance between source and substrate for the development of plasma equipment for 450 mm wafer. The aspect ratio of chamber was divided by diameter, distance from substrate, and pumping port area. And we found the condition with the optimized plasma uniformity by changing the antenna structure. The drift diffusion and quasi-neutrality for simplification were used, and the ion energy function was activated for the surface recombination and etching reaction. The uniformity of plasma density on substrate surface was improved by being far of the distance between substrate wall and chamber wall, and substrate and plasma source. And when the antenna of only 2 turns was used, the plasma uniformity can improve from 20~30% to 4.7%.

• Journal of the Korean Geosynthetics Society
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• v.3 no.1
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• pp.3-15
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• 2004

Geogrid reinforced soil structures with segmental block facing have been increased since 1990's, because of the convenience of installation and the flexible appearance. In this paper, the behavior of the segmental reinforced retaining wall was analysed with the results of field monitoring. The height and length of reinforced wall are 12m and 25m, respectively. The field measurement equipments are horizontal and vertical earth pressure cells, settlement plate, strain gauge, inclinometer, and displacement pin. Based on the field monitoring, the horizontal earth pressure was approximately 0.3times higher than that of the theoretical method and the maximum tensile strength of reinforcement was 26.2kN/m. The displacement of facing wall was 23mm at the point of 7.1m height of the wall and toward the wall facing. The results of the study indicate that the segmental reinforced retaining wall is in a stable condition because of good compaction & reinforcement effects, and long period of construction time. Finally, the computer program of SRWall is very useful tool to design the segmental reinforced retaining wall.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.48 no.1
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• pp.43-53
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• 2020

The effect of the relative location between pre-swirl nozzle and receiver hole on the performance of radial on-board injection type pre-swirl system was analyzed. In this study, tendency of the change of discharge coefficient and temperature drop efficiency were analyzed for 20 design points through the combination of 5 pre-swirl nozzle location and 4 receiver hole location. Discharge coefficient of system tended to be similar to the pressure ratio of the pre-swirl nozzle. System performance variation occurred as the flow structure in the cavity was affected by the surface, and the influence of the stationary surface is greater than that of the rotating surface. Discharge coefficient of system changed -1.39% to 1.25% and temperature drop efficiency changed -5.41% to 2.94% refer to reference design point.

• Membrane Journal
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• v.22 no.1
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• pp.35-45
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• 2012

We prepared the highly ordered nano-wires of polypyrrole, polyaniline conductive polymers and polypyrrole/ polyaniline conductive copolymers by templating the anodic aluminum oxide (AAO) porous membrane, in which pore diameter was 20 nm, 100 nm and 200 nm. Those conductive polymers were grown from pore inner surface of AAO membrane forming hollow tubes and then wire structures were formed after 3 hour polymerization. By removing AAO membrane templates using sodium hydroxide solution, the conductive polymer nano-wires were successfully obtained, of which diameter and length were close to the ones of nano-pores in AAO membrane template. Crystallinity and thermal stability of the conductive polymer nano-wires were higher than irregular ones that prepared by solution polymerization. Furthermore, the electrical resistance of conductive polymer nano-wires were reduced by about 4~60% compared with that of the irregular polymers prepared by solution polymerization.

• Journal of Cadastre & Land InformatiX
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• v.48 no.2
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• pp.213-225
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• 2018

For constructing three-dimensional (3D) spatial information occlusion region problem arises in the process of taking the texture of the building. In order to solve this problem, it is necessary to investigate the automation method to automatically recognize the occlusion region, issue it, and automatically complement the texture. In fact there are occasions when it is possible to generate a very large number of structures and occlusion, so alternatives to overcome are being considered. In this study, we attempt to apply an approach to automatically create an occlusion region based on learning by patterning the blocked region using the recently emerging deep learning algorithm. Experiment to see the performance automatic detection of people, banners, vehicles, and traffic lights that cause occlusion in building walls using two advanced algorithms of Convolutional Neural Network (CNN) technique, Faster Region-based Convolutional Neural Network (R-CNN) and Mask R-CNN. And the results of the automatic detection by learning the banners in the pre-learned model of the Mask R-CNN method were found to be excellent.