• Korean Journal of Optics and Photonics
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• v.21 no.1
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• pp.21-25
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• 2010

In this paper, in order to enhance the image reconstruction performance of white light scanning interferometry(WLI), we demonstrate the scattered point noise filtering performance of post-processing methods. Median filtering is similar to using an averaging filter. Because the median value is less sensitive than the mean to extreme values, the median filter can remove the scattered point noise from a height-map without significantly reducing the sharpness of the image. In several specific cases, however, the median filter can't remove the scattered point noise. Therefore, we propose a comparative mean filter that uses order-statistic filtering and the mean of the neighborhood pixels. The performance is demonstrated by measuring an array of metal solder balls fabricated on PCB. The proposed method reduced the noise pixels by 4.4 percent.

• Proceedings of the Optical Society of Korea Conference
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• 2009.02a
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• pp.125-126
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.724-724
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• 2004

• Proceedings of the Optical Society of Korea Conference
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• 2007.02a
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• pp.17-18
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.63-64
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• 2007

• Proceedings of the Optical Society of Korea Conference
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• 2005.07a
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• pp.24-25
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• 2005

• Proceedings of the Optical Society of Korea Conference
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• 2004.02a
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• pp.28-29
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• 2004

• Applied Microscopy
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• v.41 no.4
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• pp.223-228
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• 2011

White light scanning interferometry has been employed to analyze surface features of diverse specimens. Long established in the field of materials engineering, the technique provides quantitative three-dimensional data as well as qualitative morphological images. It uses white light that is split and reflected from a reference mirror and an object. Merged together, the light generates interference patterns representing topographical contours of the object surface. The amplitude of the z-axis data is differentiated by gray scale. The technique allows the rapid, noncontact, and wide-field measurements for morphometry of biological specimens including chondrocytes, tooth enamel, and plant leaves. Quantification of the dimension of surface structures such as width, length, and elevation angle could be achievable by white light scanning interferometry. The light reflection from plant leaves has been assumed to be sufficient for the technique. Without special specimen preparations like conductive metal coating, the technique can be increasingly used for quantitative three-dimensional surface measurements of biological specimens.

• Journal of the Korean Institute of Intelligent Systems
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• v.23 no.4
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• pp.286-291
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• 2013

In this paper, in-line type flip chip bump 3D inspection equipment, using white light interferometer with large F.O.V., which is aimed to be used in flip chip bump test process is developed. Results of flip chip bump height measurement in many substrates and repeatability test results for the bumps in fixed location of each substrate are shown. Test results from test bench and those from developed flip chip bump 3D inspection equipment are compared and as a result repeatability is improved by reducing the impact of system vibration. A valuation basis for the testing quality of flip chip bump 3D inspection equipment is proposed.

• Korean Journal of Optics and Photonics
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• v.16 no.4
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• pp.319-325
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• 2005

A signal processing method for white light interferometry (WLI), which performs a series of analog signal processing steps to locate the central interference fringe position at high speed: is developed and applied to a WLI temperature sensor system. We found that the new method has random walk of $0.019^{\circ}C/\sqrt{Hz}$ with good linearity. However, the temperature change in the path-matching interferometer results in drift of the measured sensor output. The temperature dependence of drift in the WLI temperature sensor system, was calculated to be $1.42{\mu}m/^{\circ}C$. It is also found that the relationship between the peak spacing in the interferogram and the spacing measured by the method can be nonlinear when the fringe spacing is comparable to the coherence length of the source.