• Journal of the Korean Vacuum Society
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• v.1 no.2
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• pp.277-285
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• 1992

플라즈마 화학기상증착법과 저압 화학기상증착법을 사용하여 실리콘 기판 위에 텅 스텐 박막을 증착하였다. 반응기체로 WF6를 사용하였으며 환원기체로는 SiH4를 사용하였다. 플라즈마 증착법에 의한 텅스텐 박막의 성장은 환원기체의 유무에 상관없이 주로 기상 반응 에 의한 텅스텐 덩어리들의 증착에 의하여 이루어졌으며 비교적 균일도가 낮은 박막표면을 이루었다. 저압 화학증착법의 경우 환원기체를 사용하지 않았을 때에는 실리콘 기판에 의한 제한된 환원반응에 의해 텅스텐이 증착되었으나, 환원기체를 사용했을 때에는 초기의 실리 콘 기판에 의한 환원반응과 이어 일어나는 SiH4 기체와의 불균일계 환원반응의 두 단계반응 에 의하여 텅스텐 박막 증착이 이루어졌다. 저압 화학증착법의 경우 텅스텐 박막의 특성은 플라즈마 증착법에서 보다 우수하였으며 박막 성장은 island by island 양식을 따르는 것으 로 추정되었다. 박막은 $\alpha$-W의 체심입방 구조로 이루어졌으며 박막이 성장함에 따라 단결정 구조가 증가하였다.

• The KSFM Journal of Fluid Machinery
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• v.19 no.2
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• pp.16-20
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• 2016

Design optimization of a transonic compressor rotor(NASA rotor 37) was carried out using response surface method(RSM) which is one of the optimization methods. A numerical simulation was conducted using ANSYS CFX by solving three-dimensional Reynolds-averaged Navier Stokes(RANS) equations. Response surfaces that were based on the results of the design of experiment(DOE) techniques were used to find an optimal shape of blade which has the maximum aerodynamic performance. Two objective functions, viz., the adiabatic efficiency and the loss coefficient were selected with three design configurations to optimize the blade shape. As a result, the efficiency of the optimized blade is found to be increased.

• 전기의세계
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• v.54 no.9
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• pp.24-28
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• 2005

• 한국생물공학회:학술대회논문집
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• 2001.11a
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• pp.303-307
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• 2001

Operation conditions to maximize the hydrolysis of beef tallow was investigated by using the response surface method. In the response surface analysis, reaction temperature, pressure, and ratio of fat to water was considered as independent variables. The concentrations of triglycerides. diglycerides, monoglycerides and free fatty acids were considered as dependent. variables. The optimum conditions for the hydrolysis was as follows' the reaction temperature was $271^{\circ}C$, pressure 86 bar and ratio of fat to water was 106.08g / 133.93 g. The maximum concentration of free fatty acids was 96.49 % at these optimum conditions.

• Journal of the Korea Concrete Institute
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• v.21 no.6
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• pp.745-752
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• 2009

This paper presents the optimized mixing design of lightweight aerated concrete using hydrogen peroxide. Design of experiments in order to the optimized mixing design was applied and commercial program (MINITAB) was used. Statistical analysis was used to Box-Behnken (B-B) method in response surface analysis. The influencing factors of experimental are unit cement content, water ratio and hydrogen peroxide ratio. According to the analysis of variance, at the hardened state, water ratio and hydrogen peroxide ratio affects on dried density, compressive strength and bending strength of lightweight aerated concrete, but unit cement content affects on only dried density. In the results of response surface analysis, to obtain goal performance, the optimized mixing design for lightweight aerated concrete using hydrogen peroxide were unit cement content of 800 kg/$m^3$, water ratio of 44.33% and hydrogen peroxide ratio of 10%.

• Journal of the Korean Vacuum Society
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• v.2 no.3
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• pp.360-367
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• 1993

텅스텐 박막 증착의 메카니즘을 밝히기 위하여 먼저 SiH4와 WF6의 열분해 반응에 관한 열역학적 결과들과 표면 촉매 반응에 대한 이론적인 결과들을 고찰하였다. 실험적으론 저압 화학기상 증착법을 이용하여 WF6를 SiH4로 환원시켜 텅스텐 박막을 Si(100) 기판위에 증착하였으며 증착반응 중의 기판 표면의 변화를 in-situ로 측정하였다. 증착 메카니즘을 밝히기 위하여 반응기체를 WF6, SiH4, WF6＋SiH4, WF6$\longrightarrow$SiH4$\longrightarrow$WF6＋SiH4로 달리하여 반응시켰으며 그 때의 박막 특성과 표면 및 단면 형상을 측정하였다. 이론적인 고찰과 실험적인 결과들로부터 텅스텐 박막은 먼저 Si 기판에 의한 WF6의 환원반응으로 인한 증착과 이어서 SiH4에 의한 WF6의 환원으로 증착됨을 밝혔다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.1
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• pp.97-105
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• 2015

Multiresponse optimization (MRO) seeks to find the setting of input variables, which optimizes the multiple responses simultaneously. The approach of weighted mean squared error (WMSE) minimization for MRO imposes a different weight on the squared bias and variance, which are the two components of the mean squared error (MSE). To date, a weighted sum-based method has been proposed for WMSE minimization. On the other hand, this method has a limitation in that it cannot find the most preferred solution located in a nonconvex region in objective function space. This paper proposes a Tchebycheff metric-based method to overcome the limitations of the weighted sum-based method.

• Resources Recycling
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• v.28 no.2
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• pp.23-30
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• 2019

An color sorting technique was introduced to recycle End-of-life automobile shredded bumpers. The color sorting is a innovate method of separating the differences in the color of materials which are difficult to separate in gravity and size classification by using a camera and an image process technique. Experiments were planned and optimal conditions were derived by applying BBD (Box-Behnken Design) in the reaction surface method. The effects of color sensitivity, feed rate and sample size were analyzed, and a second-order reaction model was obtained based on the analysis of regression and statistical methods and $R^2$ and p-value were 99.56% and < 0.001. Optimum recovery was 94.1% under the conditions of color sensitivity, feed rate and particle size of 32%, 200 kg/h, and 33 mm respectively. The recovery of actual experiment was 93.8%. The experimental data agreed well with the predicted value and confirmed that the model was appropriate.

• Electrical & Electronic Materials
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• v.4 no.4
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• pp.344-353
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• 1991

무정형 SiC 박막을 수평형 CVD반응기로부터 SiH$_{4}$ 및 H$_{2}$를 반응기체로 하여 실리콘 웨이퍼위에 증착시켜 제조하였다. 박막 성장 속도는 상압에서 650.deg.C와 850.deg.C범위에서 측정되었다. 반응기체의 유량은 1000sccm으로 고정하였으며 SiH$_{4}$와 CH$_{4}$의 유량을 변화시켰다. 증착 반응속도식으로 표면 반응이 율속단계인 Eley-Rideal 모델과 SiH$_{4}$와 CH$_{4}$의 종도에 m차로 비례하는 두가지 속도식을 가정하였다. 증착시간에 따른 SiC 박막두께의 측정으로부터 얻은 증착 반응 속도로부터 회귀 분석법에 의하여 두가지 반응속도식의 반응속도 상수를 구하였다. 얻어진 반응속도식에 의해서 계산된 값과 실험치를 비교한 결과 0.15차의 반응속도식이 Eley-Rideal반응기구보다 약산 더 잘 맞음을 알 수 있으나 두 모델 다 약간씩 실험결과와 차이가 나고 있다. 이것은 본 실험의 증착 조건의 율속단계가 확산 단계와 표면 반응 단계의 전이영역 즉 본 실험의 증착조건에서 확산속도와 표면 반응속도가 비슷하기 때문으로 생각된다. 또한 Eley-Rideal 반응기구에서 부터 얻어진 SiH$_{4}$ 및 CH$_{4}$의 흡착평형상수 $K_{s}$ 와 $K_{c}$ 값을 비교하면 1000K이하에서는 $K_{s}$ 가 $K_{c}$ 보다 큰 값을 가지는데 이것은 Gibbs 자유에너지 최소화 방법에서 구한 결과와 일치하였다.

• Korean Chemical Engineering Research
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• v.47 no.3
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• pp.287-291
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• 2009

The heterogeneous decomposition of ammonia on a quartz surface in an inverted, stagnation-point flow reactor was investigated using a measurement reactor and a numerical model of the reactor. In the experiments, 8 mole% of ammonia in nitrogen was used and the temperature of an electric heater was set in the range $300{\sim}900^{\circ}C$ to heat the quartz surface where the decomposition took place. Gas temperatures and ammonia concentrations in the reactor obtained using in situ Raman spectroscopy were analyzed with the numerical model and it was revealed that, depending on the heater temperature, the temperature of the quartz surface was estimated to be in the range $235{\sim}619^{\circ}C$ and the activation energy of the decomposition on the surface was in the range 10.9~15.8 kcal/mol.