• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.32.2-32.2
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• 2011

반도체 생산공정에서 CMP (Chemical-mechanical planarization) 공정은 우수한 전기전도성 재료인 Cu의 사용과 다층구조의 소자를 형성하기 위해서 도입되었으며, 최근 소자의 집적도가 증가함에 따라 CMP 공정 비중은 점점 높아지고 있다. Cu CMP 공정에서 연마제인 슬러리는 금속 표면과의 물리적 화학적 반응을 동시에 사용하여 표면을 연마하게 되며, 연마특성을 향상시키기 위해 산화제, 부식방지제, 분산제 및 다양한 계면활성제가 첨가된다. 하지만 슬러리는 Cu 표면을 평탄화하는 동시에 오염입자, 유기오염물, 스크레치, 표면부식 등을 발생시키며 결과적으로 소자의 결함을 야기시킨다. 특히 부식방지제로 사용되는 BTA (Benzotriazole)은 Cu CMP 공정 중 Cu-BTA 형태로 표면에 흡착되어 오염원으로 작용하며 입자오염을 증가시시고 건조공정에서 물반점 등의 표면 결함을 발생시킨다. 이러한 문제점을 해결하기 위해 Cu 표면에서 식각과 부식반응을 최소화하며, 오염입자 제거 및 유기오염물을 효과적으로 제거하기 위한 Post-CMP 세정 공정과 세정액 개발이 요구된다. 본 연구에서는 오염입자 및 유기물 제거와 동시에 표면 거칠기와 부식현상을 제어할 수 있는 post Cu CMP 세정액을 개발 평가하였다. 오염입자 및 유기오염물을 제거하기 위해서 염기성 용액인 TMAH 사용하였으며, Cu 이온을 용해할 수 있는 Chelating agent와 표면 부식을 억제하는 부식 방지제를 사용하여 세정액을 합성하였다. 접촉각 측정과 FESEM(field Emission Scanning Electron Microscope) 분석을 통하여 CMP 공정에서 발생하는 유기오염물과 오염입자의 흡착과 제거를 확인하였으며 Cu 웨이퍼 세정 전후의 표면 거칠기의 변화와 식각량을 AFM(Atomic Force Microscope)과 4-point probe를 사용하여 각각 평가하였다. 또한 세정액 내에서의 연마입자의 zeta-potential을 측정 및 조절하여 세정력을 향상시켰다. 개발된 세정액과 Cu 표면에서의 화학반응 및 부식방지력은 potentiostat를 이용한 전기화학 분석법을 통해서 chelating agent와 부식방지제의 농도를 최적화 시켰다. 개발된 세정액을 적용함으로써 Cu-BTA 형태의 유기오염물과 오염입자들이 효과적으로 제거됨을 확인하였다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.8 no.3
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• pp.448-453
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• 1998

An inverted, stagnation point flow OMVPE reactor was studied by laser Raman spectroscopy. Pure rotational Raman scattering by the carrier gas $(N_2; or; H_2)$ was used to determine the axial centerline temperature profile in the reactor as a function of the inlet flow velocity and the rector aspect ratio. A larger temperature gradient normal to the susceptor surface was obtained with higher gas glow velocity, larger aspect ratio, and the use of a $N_2$ carrier gas.

• Progress in Medical Physics
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• v.21 no.2
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• pp.201-208
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• 2010

Recently, along with technology development of endoscopic equipment, a stent has been developed for the convenience of operation, shortening of recovery times, and reduction of patient's pain. To this end, optimal factors are simulated for the stent structure and mechanical reaction and verified using finite element analysis. In order to compare to present commercialized product such as Zilver (Cook, Bloomington, Indiana, USA) and S.M.A.R.T (Cordis, Bridgewater Towsnhip, New Jersey, USA), mechanical impact factors were determined through Taguchi factor analysis, and flexibility and expandability of all the products including ours were tested using finite element analysis. Also, important factors were sought that fulfill the optimal condition using central composition method of response surface analysis, and optimal design were carried out based on the important factors. From the centra composition method of Response surface analysis, it is found that importat factors for flexibility is stent thickness (T) and unit area (W) and those for expandability is stent thickness (T). In results, important factors for optimum condition are 0.17 mm for stent thickness (T) and $0.09\;mm^2$ for unit area (W). Determined and verified by finite element analysis in out research institute, a stent was manufactured and tested with the results of better flexibility and expandability in optimal condition compared to other products. Recently, As Finite element analysis stent mechanical property assessment for research much proceed. But time and reduce expenses research rarely stent of optimum coditions. In this research, Important factor as mechanical impact factor stent Taguchi factor analysis arrangement to find flexibility with expansibility as Finite element analysis. Also, Using to Center composition method of Response surface method appropriate optimized condition searching for important factor, these considering had design optimized. Production stent time and reduce expenses was able to do the more coincide with optimum conditions. These kind of things as application plan industry of stent development period of time and reduce expenses etc. be of help to many economic development.

• Korean Chemical Engineering Research
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• v.58 no.2
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• pp.266-272
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• 2020

In this study, the production of ethyl levulinate from chitosan using successive acid-catalyzed hydrolysis and esterification was investigated. To optimize and analysis the reaction factors and heir reciprocal interaction, response surface methodology was introduced. In the effect of water content in ethanol solvent, the production yield of ethyl levulinate was high at 5% water content (or 95% ethanol). As a result of optimization of reaction factors, 30.1% ethyl levulinate yield was obtained under the condition of 200 ℃, 3.19% chitosan, 0.49M sulfuric acid, 5% water content, and 58 min. Finally, the formation yield of ethyl levulinate was tended to enhance by increase of combined severity factor. This result indicated that the potential of chitosan as feedstock for production of chemicals and fuels.

• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.882-884
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• 1999

금속 다층박막과 미세입상 합금박막에서 발견된 Giant Magnetoresistance(GMR)현상에 고무되어 최근에는 50년대에 밝혀졌던 산화물 자기저항 재료에 관하여 새롭게 연구하고 있다. Perovskite 구조를 가지는 $La_{1-x}Ca_{x}MnO_{3}$ 박막에서 큰 자기저항을 얻었으며 이를 Colossal Magentoresistance (CMR)이라 한다. 본 연구에서는 $La_{1-x}Ca_{x}MnO_{3}$ 분말을 고상반응법과 자발착화연소 합성법(Glycine-Nitrate Process)으로 각각 제조하였으며 비교 분석하였다. TGA을 이용하여 불순물과 미반응 물질을 확인하여 적당한 하소온도를 결정하였고 XRD를 이용하여 결정상을 분석하였다. Dilatometer를 이용해 $1400^{\circ}C$까지의 열팽창율을 측정하였다. BET로 비 표면적을 비교하였으며, 주사전자현미경(SEM)으로 각각 제조된 분말의 입자상태와 입자성장을 확인하였다. GNP법으로 합성한 경우가 고상반응법을 이용한 경우보다 입자의 크기가 submicron 단위로 미세하고 비표면적도 수배 컸으며, 고순도의 perovskite 구조를 갖는 $La_{1-x}Ca_{x}MnO_{3}$ 분말을 얻을 수 있었다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.700-703
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• 2004

A reliability analysis and design procedure based on the design of experiment (DOE) is combined with the response surface method (RSM) for numerical efficiency. The procedure established is based on a 3$^n$ full factorial DOE for numerical quadrature using explicit formula of optimum levels and weights derived for general distributions. The full factorial moment method (FFMM) shows good performance in terms of accuracy and ability to treat non-normally distributed random variables. But, the FFMM becomes very inefficient because the number of function evaluation required increases exponentially as the number of random variables considered increases. To enhance the efficiency, the response surface moment method (RSMM) is proposed. In RSMM, experiments only with high probability are conducted and the rest of data are complemented by a quadratic response surface approximation without mixed terms. The response surface is updated by conducting experiments one by one until the value of failure probability is converged. It is calculated using the Pearson system and the four statistical moments obtained from the experimental data. A measure for checking the relative importance of an experimental point is proposed and named as influence index. During the update of response surface, mixed terms can be added into the formulation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.754-758
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• 2002

According to the enlargement of production facilities and structures, the requirements of high-capacity load cells are increased for monitoring the process conditions in many fields. Generally, however, the accuracy of the column-type high-capacity load cells is not enough due to the geometric nonlinearity. It is supposed to result from the fact that the whole spring element is under high-level stress for the uniform strain field. In this paper, a new shape of spring element is developed which utilizes the stress concentration. As a design criterion, an object function which quantifies the degree of nonlinearity is defined and optimized by use of response surface modeling. As a result, the weight of the spring element is reduced shout 50% in comparison to the conventional shape. The bonding positions of stain gages are found. which show theoretically zero geometrical nonlinearity, while the ratio of overload protection is reduced from 130% to 125% Also it is shown that the response surface method is very efficient in the optimization approach by use of FEM.

• Journal of Ocean Engineering and Technology
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• v.27 no.2
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• pp.27-32
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• 2013

A valve is a marine structure that is subjected to multiple seawater loads. Therefore, it is necessary to define the kind of loads applied to it to confirm whether the structure has sufficient strength. In this research, we aimed to find the optimal solution for the stress and deformation of valves under various loads. We first selected design variables and implement a finite element analysis according to changes in the thickness of each component of a valve based on a central composite design. Next we developed a regression model of the response surface. Using this model, we calculated the optimal objective value based on NSGA-II. Finally, to confirm the correspondence between the optimal objective value and the real FEM value, we compared the optimal result and structural analysis result to verify the performance of NSGA-II.

• Proceedings of the KWS Conference
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• 2000.04a
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• pp.224-227
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• 2000

• Proceedings of the Korean Vacuum Society Conference
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• 1997.07a
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• pp.76-77
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• 1997