• Title/Summary/Keyword: 반응 왜곡

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컷오프 탐침과 량뮤어 탐침을 이용한 Ar/CF4 유도결합 플라즈마 특성 진단

  • Son, Ui-Jeong;Kim, Yun-Gi;Wi, Seong-Seok;Kim, Dong-Hyeon;Lee, Hae-Jun;Lee, Ho-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.556-556
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    • 2013
  • 반도체 공정에서 널리 사용되고 있는 유도결합 플라즈마에서 전자밀도 분포특성이 컷오프탐침을 이용하여 측정되었다. 밀도측정에 일반적으로 많이 사용되고 있는 랭뮤어 탐침은 플루오르카본과 같은 반응성이 높은 가스를 사용하는 경우 탐침 끝부분이 증착 혹은 식각되거나 플라즈마전위 변동 때문에 V-I 곡선 특성이 왜곡되는 현상이 발생한다. 반면, 컷오프 탐침을 이용하는 경우 플라즈마 고유주파수를 실험적으로 결정하는데 여러 가지 제약이 있다. 본 연구에서는 두가지 측정방법의 비교를 통해 각 방법의 장단점을 실증적으로 비교하고 대면적 유도 결합플라즈마에서 전자밀도균일도를 조사하였다. 량뮤어 탐침법에서는 플라즈마와 탐침사이의 임피던스를 최소화 하는 튜닝회로의 최적화가 이루어 졌으며 컷오프 탐침에서는 안테나 구조에 따른 수신안테나의 신호전달 및 주파수특성에 대해 연구되었다.

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PID controller design for profile of the RTP system (RTP시스템의 프로파일작성을 위한 PID제어기 설계)

  • Hong, Sung-Hee;Choi, Soo-Young;Park, Ki-Heon
    • Proceedings of the KIEE Conference
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    • 2000.07d
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    • pp.2548-2550
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    • 2000
  • RTP(Rapid Thermal Processing)은 IC제조 공정과 관련된 열처리 과정에 사용되는 단일 웨이퍼프로세스 기술이다. 반도체 웨이퍼를 고속 열처리할 때 웨이퍼별로 작은 반응실에서 가열, 가공, 냉각된다. 현재 사용되는 반도체 열처리장비는 고온로(furnace)에의해 대부분 이루어지지만, 시간이 많이 걸려서 주문형반도체 생산과 같은 다양한 종류의 웨이퍼를 소량 생산하는데는 부적절하다. 이에 매우 적은 시간이 소요되는 RTP장비가 많이 연구되고 있다. 그러나 RTP는 예기치 못한 몇 가지의 문제점을 일으킨다. 그중 하나는 웨이퍼 표면에 분포된 온도의 불 균일성이다. 이러한 불 균일성은 웨이퍼의 표면에 심각한 왜곡(distortion)을 일으켜 좋지 못한 결과를 가져오게 한다. 이번 논문의 목적은 RTP시스템을 수학적으로 모델링하고, 이를 이용하여 멀티 램프 시스템의 입력값을 조절하여 이미 배치된 램프에 대한 최적의 온도 균일도에 알맞은 각 램프입력을 구하여 램프 입력 프로파일을 만들고 또한 이를 이용하여 외란에 대한 PID 제어기 설계를 목표로 한다.

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The Economics of GHP and EHP and the Countermeasures to Alleviate Winter Electricity Peaks (GHP와 EHP의 경제성 및 동계 전력피크 대응방안)

  • Yun, Won-Cheol;Sonn, Yang-Hoon
    • Environmental and Resource Economics Review
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    • v.20 no.2
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    • pp.381-398
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    • 2011
  • Recently, electricity peaks have frequently occurred in winter, and the concerns about failure in power supply are soaring. One of reasons is due to the increase in industrial demand with economic recovery, and the increases in household and commercial demand with unusual cold waves are spotted as a primary cause. Especially, the diffusion of electricity heat pumps (EHP) has led to the rapid increase in commercial electricity demand. The EHP diffusion is mainly associated with low electricity tariff and cheaper heating and cooling costs compared to those of gas-engine heat pumps (GHP). The problem is that distorted electricity tariff and herd behaviour toward heating and cooling devices could bring about nation-wide inefficiencies in resource allocation. The key countermeasures are as follows. The electricity tariff should be readjusted to a realistic level. The tariff scheme should be so modified that consumers rationally respond to the tariff. In addition, one should find ways to effectively manage electricity demand.

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Effects of 3D Topography on Magnetotelluric Responses (MT 탐사의 3차원 지형효과)

  • Nam, Myung-Jin;Kim, Hee-Joon;Song, Yoon-Ho;Lee, Tae-Jong;Suh, Jung-Hee
    • Geophysics and Geophysical Exploration
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    • v.10 no.4
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    • pp.275-284
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    • 2007
  • For precise interpretation of magnetotelluric (MT) data distorted by irregular surface terrain, topography effects are investigated by computing apparent resistivities, phases, tippers and induction vectors for a three-dimensional (3D) hill-and-valley model. To compute MT responses for the 3D surface topography model, we use a 3D MT modeling algorithm based on an edge finite-element method which is free from vector parasites. Distortions on the apparent resistivity and phase are mainly caused by distorted currents that flow along surface topography. The distribution of tipper amplitudes over both hill and valley are the same, while the tipper points toward the center of hill and the base of the valley. The real part of induction vector also points in the same direction as that of tipper, while the imaginary part in the opposite direction.

Design and Fabrication of Improved Null-Type Torque Magnetometer (개선된 구조의 Null-Type 토크마그네토미터의 설계 및 제작)

  • Kim, Dong-Hyun;Shin, Sung-Chul;Hur, Jeen
    • Journal of the Korean Magnetics Society
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    • v.8 no.6
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    • pp.388-394
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    • 1998
  • We designed and fabricated an improved null-type torque magnetometer for measuring magnetic anisotropy of magnetic materials. This torque magnetometer has a measurement range of $~{\pm}15$ dyne.cm, and the range can be controlled. Resolution is ~0.0005 dyne.cm. Noise level is less than 0.01 dyne.cm with one measurement, and less than 0.004 dyne.cm with 10 averaged measuremets. The precision is less than 0.5 %. In contrast to typical null-type torque magnetometers, we placed a small ferrite magnet in the Helmholtz coil, instead of placing coil in the permanent magnet. From this novel sturucture, we can design a geometrically isotropic and relatively light-weight sample rod. Also, we can prevent the effect of input and output lines of coil exposed in the magnetic field in torque meter. Consequently, our novel null-type torque magnetometer can have a better sensitivity, faster response time, and smaller distortion of torque curve than commercially available torque magnetometers.

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Watershed priority evaluation for water circulation management (물순환 관리를 위한 소권역 우선순위평가)

  • Kim, Seokhyeon;Kim, Sinae;Gwak, Jihye;Lee, Hyunji;Kim, Hakkwan;Kang, Moon-Seong
    • Proceedings of the Korea Water Resources Association Conference
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    • 2022.05a
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    • pp.499-499
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    • 2022
  • 급격한 도시화와 이로인한 불투수면의 증가는 유역의 물순환을 왜곡시키고 있다. 직접유출의 증가와 침투량 감소로 이어지며 이는 지하수 함유량의 감소와 하천건천화를 유발한다. 환경부는 더 이상의 물순환 왜곡을 막기위해 물환경보전법상의 물순환율을 정의하고 물순환 관리목표를 설정하였으며, 제3차 강우유출 비점오염원관리 종합대책에서 물순환 사업 추진을 위한 소권역 별 우선순위산정을 과제로써 제시하고 있다. 대표적인 물순환 사업은 저영향개발기법 설치이다. 저영향 개발기법은 토지 및 공간을 이용해야하기 때문에 설치비용이 높고 위치선정에 제약이 많으며 유지관리도 어렵다. 이에 물순환 사업에는 단순 불투수면 뿐만아니라 사회, 경제적 요소까지 고려하여야한다. 본 연구에서는 물순환 우선순위를 산정하기위해 불투수면뿐만 아니라 사회, 경제적 요소까지 고려한 종합적인 우선순위를 산정하였다. 유역 물순환 평가를 위해 PSR framework을 이용하였다. PSR framework는 OECD가 개발한 지속가능성 평가 개념이며, Pressure, State, Response 세 가지 요소로 구분해 평가하게된다. PSR framework의 기본 개념은 인간의 활동들이 환경에 압력 (P)를 주고, 이로 인해 자연의 질과 영향 (S)을 미치며, 이에대한 회복을 위해 인식과 행동을 통해 정책과 제도 등을 통해 반응 (R)한다는 것이다. 본 연구에서는 PSR framework의 평가요소 Pressure는 불투수면 및 강우, State는 물순환, 하수관거, 수질, 수생태계, Response는 협력, 인식, 재정, 토지로 구분하여 평가하였다. 최종적으로 불투수면적 감축 대상 소권역('30년 무대책 불투수면적률 25% 이상)소권역에 대하여 최종우선순위를 산정하였다.

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The analysis of EU carbon trading and energy prices using vector error correction model (벡터오차수정모형을 이용한 유럽 탄소배출권가격 분석)

  • Bu, Gi-Duck;Jeong, Ki-Ho
    • Journal of the Korean Data and Information Science Society
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    • v.22 no.3
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    • pp.401-412
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    • 2011
  • This study uses a vector error correction model to analyze the daily time series data of the spot price of EUA (European Union Allowance). As endogenous variables, five variables are considered for the analysis, including prices of crude oil, natural gas, electricity and coal in addition to carbon price. Data period is Phase 2 period (April 21, 2008 to March 31, 2010) to avoid Phase 1 period (2005-2007) where the EUA prices were distorted. Unit-root and cointegration test results reveal that all variables have a unit root and cointegration vectors exist, so a vector error correction model is adopted instead of a vector autoregressive model.

Multivariate quantile regression tree (다변량 분위수 회귀나무 모형에 대한 연구)

  • Kim, Jaeoh;Cho, HyungJun;Bang, Sungwan
    • Journal of the Korean Data and Information Science Society
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    • v.28 no.3
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    • pp.533-545
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    • 2017
  • Quantile regression models provide a variety of useful statistical information by estimating the conditional quantile function of the response variable. However, the traditional linear quantile regression model can lead to the distorted and incorrect results when analysing real data having a nonlinear relationship between the explanatory variables and the response variables. Furthermore, as the complexity of the data increases, it is required to analyse multiple response variables simultaneously with more sophisticated interpretations. For such reasons, we propose a multivariate quantile regression tree model. In this paper, a new split variable selection algorithm is suggested for a multivariate regression tree model. This algorithm can select the split variable more accurately than the previous method without significant selection bias. We investigate the performance of our proposed method with both simulation and real data studies.

MT response on the two dimensional anisotropic structure (2차원 이방성 구조의 MT 반응)

  • Lee, Chun Gi;Gwon, Byeong Du
    • Journal of the Korean Geophysical Society
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    • v.2 no.2
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    • pp.123-134
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    • 1999
  • Magnetotelluric responses may be affected by strong anisotropy of the high-conductivity layers (HCL) in the upper mantle or lower crust. We have studied two-dimensional anisotropy MT modelling to examine the effect of high anisotropic media. Electrical properties of a homogeneous anisotropic body are defined by a symmetric conductivity tensor and the problem is described by coupled diffusion equation in the frequency domain. In two-dimensional anisotropic environments, diagonal elements of the impedance tensor have higher values than those in isotropic environments. In some cases, TM mode phases reach more than 90°and apparent resistivities decrease for some frequency range because of telluric distortion. GB decomposition may be used to recover regional responses, but can be affected by the regional anisotropic effect. Considering these results, BC87 dataset was interpreted with a modified anisotropic model.

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MOTHER-CHILD RELATIONSHIP OF CHILDREN WITH REACTIVE ATTACHMENT DISORDER (반응성애착장애아의 어머니-아동 관계)

  • Shin, Yee-Jin;Lee, Kyung-Sook;Park, Sook-Kyung
    • Journal of the Korean Academy of Child and Adolescent Psychiatry
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    • v.8 no.1
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    • pp.22-33
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    • 1997
  • The objective of this study is to understand disordered parent-child relationships of Reactive Attachment Disorder(RAD) systematically through the mother’ internal working model of child. In this study, RAD mothers’internal representations of the child were compared with mothers’of control group and association between mothers’ representation classifications and children’ attachment classifications was examined. Also individual differences in mother-child interaction by mothers’representation classifications was observed. The subjects of this study were 40 2-5 year-old children and their mothers, 20 attachment disordered dyads and 20 normal dyads of control group. Mothers were interviewed using the Working Model of the Child(Zeanah, Benoit & Barton 1986) to classify internal representations of child. Children’ attachment patterns were assessed by the Strange Situation Procedure. For observation of motherchild interaction, Each dyad was seen in DPICS devised by Eyberg and Robinson(1983). The results of the study were as follows:1) Among RAD group, 55% of mothers were classified as disengaged and 45% classified as distorted, while all mothers of control group were classified as balanced. In rating scales, there were significant differences in all 3 representation classifications in Intensity of involvement and Coherence. In Intensity of involvement disengaged representations had the lowest score and distorted representations had the lowest score in Coherence. 2) Mothers’representation classifications were related to children’ attachment classifications. All mothers of control group whose children were classified as secure were classified as balanced. Among RAD’ mothers, by contrast, 82% of mothers classified as disengaged had children classified as anxious-avoidant, 56% of mothers classified as distorted had children classified as disorganized / disoriented and 33% of mothers classified as distorted had children classified as anxious-resistant. 3) There were individual differences in mother-child interactions by mothers’representation classifications. In the child-centered play, mothers classified as disengaged used discriptive statement, reflective statement and discriptive-reflective question less than balanced mothers. Mothers classified as distorted used direct command and indirect command more than balanced mothers. In the clean-up task, mothers classified as disengaged and distorted used direct command and indirect command more than balanced mothers. The results of this study suggest that parents’working model of the child is an important factor to understand parent-child attachment relationships and their interactions. The understanding of parents’ working model of the child is thought to enrich our understanding of disordered parent-child relationships and to provide useful informations for specific and successful treatments.

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