• Title/Summary/Keyword: 반응진행변수

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플라즈마를 이용한 GaAs 반응성 이온 식각

  • Lee, Seong-Hyeon;No, Ho-Seop;Choe, Gyeong-Hun;Park, Ju-Hong;Jo, Gwan-Sik;Lee, Je-Won
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.05a
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    • pp.26.2-26.2
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    • 2009
  • 이 논문은 반응성 $BCl_3$ 플라즈마로 GaAs의 건식 식각을 진행한 후 그 결과에 대하여 연구 분석 한 것이다. 이 때 사용한 식각 공정 변수는 $BCl_3$ 플라즈마에서의 가스유량, 공정 압력과 RIE 척 파워의 변화이다. 먼저 공정 압력을 75 mTorr 고정시킨 후 $BCl_3$ 유량을 변화 (2.5~10 sccm)해서 실험하였다. 또한 BCl3의 유량을 5 sccm으로 고정시킨 후 공정압력을 변화(47~180 mTorr)해서 식각 실험을 실시하였다. 마지막으로 47 mTorr와 100 mTorr 의 각각의 공정압력에서 RF 척 파워를 변화시켜 (50~200 W) 실험하였다. GaAs 플라즈마 식각이 끝난 후 표면단차 측정기 (Surface profiler)를 사용하여 표면의 단차와 거칠기를 분석하였다. 그 후 그 결과를 이용하여 식각율 (Etch rate), 식각 표면 거칠기 (RMS roughness), 식각 선택비 (Selectivity) 등의 식각 특성평가를 하였다. 또한 식각 공정 중에 샘플 척에 발생하는 자기 바이어스와 $BCl_3$ 플라즈마 가스를 광학 발광 분석기 (Optical Emission Spectroscopy)를 이용하여 플라즈마의 상태를 실시간으로 분석하였다. 이 실험 결과에 따르면 공정 압력의 증가는 샘플 척의 자기 바이어스의 값을 감소시켰다. $BCl_3$ 압력 변화에 의한 GaAs의 식각 결과를 정리하면 5 sccm의 $BCl_3$ 가스유량과 RF 척 파워를 100 W로 고정시켰을 때 식각율은 47 mTorr에서 가장 높았으며, 그 값은 $0.42{\mu}m/min$ 이었다. GaAs의 식각 속도는 공정압력이 증가할수록 감소하였으며 180 mTorr에서는 식각율이 $0.03{\mu}m/min$로 거의 식각되지 않았다. 또한 공정압력을 75 mTorr, RF 척 파워를 100 W로 고정시키고, $BCl_3$ 가스유량을 2.5 sccm에서 10 sccm까지 변화시켰을 때, 10 sccm 의 $BCl_3$ 가스유량에서 가장 높은 식각율인 $0.87{\mu}m/min$이 측정되었다. 압력에 따른 GaAs의 식각 후 표면 거칠기는 최대 2 nm 정도로 비교적 매끈하였으며, 거의 식각되지 않은 180mTorr의 조건에서는 약 1 nm로 낮아졌다. 본 실험 조건에서 GaAs의 감광제에 대한 식각 선택비는 최대 약 3:1 이내였다.

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Equilibrium, Kinetic and Thermodynamic Parameter Studies on Adsorption of Acid Yellow 14 Using Activated Carbon (활성탄을 이용한 Acid Yellow 14 흡착에 대한 평형, 동역학 및 열역학 파라미터의 연구)

  • Lee, Jong Jib
    • Korean Chemical Engineering Research
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    • v.54 no.2
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    • pp.255-261
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    • 2016
  • Adsorption experiments of Acid Yellow 14 dye using activated carbon were carried out as function of adsorbent dose, pH, initial concentration, contact time and temperature. The equilibrium adsorption data were analyzed by Langmuir, Freundlich and Temkin isotherm model. The experimental data were best represented by Freundlich isotherm model. Base on the estimated Freundlich constant (1/n=0.129~0.212) and Langmuir separation factor ($R_L=0.202{\sim}0.243$), this process could be employed as effective treatment method. The heat of adsorption of Temkin isotherm model was 5.101~9.164 J/mol indicated that the adsorption process followed a physical adsorption. Adsorption kinetics experimental data were modeled using the pseudo-first-order and pseudo-second-order kinetic equation. It was shown that pseudo-second-order kinetic equation could best describe the adsorption kinetics. Base on the negative Gibbs free energy (-4.81~-10.33 kJ/mol) and positive enthalpy (+78.59 kJ/mol) indicate that the adsorption is spontaneous and endothermic process.

Equilibrium Kinetics and Thermodynamic Parameters Studies for Eosin Yellow Adsorption by Activated Carbon (활성탄에 의한 Eosin Yellow의 흡착에 대한 평형, 동력학 및 열역학 파라미터에 관한 연구)

  • Lee, Jong Jib
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.15 no.5
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    • pp.3319-3326
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    • 2014
  • Eosin yellow is used a dye and colorant but it is harmful toxic substance. In this paper, batch adsorption studies were carried out for equilibrium, kinetics and thermodynamic parameters for eosin yellow adsorption by activated carbon with varying the operating variables like pH, initial concentration, contact time. Equilibrium adsorption data were fitted into Langmuir, Freundlich, Temkin and Dubinin-Radushkevich isotherms. By estimated Langmuir constant value, $R_L$=0.067-0.083, and Freundlich constant value, $\frac{1}{n}=0.237-0.267$, this process could be employed as effective treatment for removal of eosin yellow. From calculated Temkin constant, value, B=1.868-2.855 J/mol, and Dubinin-Radushkevich constant, value, E=5.345-5.735 kJ/mol, this adsorption process is physical adsorption. From kinetic experiments, the adsorption process were found to confirm to the pseudo second order model with good correlation coefficient($r^2$=0.995-0.998). The mechanism of the adsorption process was determined two step like as boundary and intraparticle diffusion.

Finite Element Analysis and Optimal Design of Shape Memory Composite Material Stents using Taguchi Method (다구찌 방법을 이용한 형상기억 복합재료 스텐트 유한요소 해석 및 최적설계)

  • Young Bin Kim;Suji Kim;Heechan Song;Heoung-Jae Chun
    • Composites Research
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    • v.37 no.4
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    • pp.301-309
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    • 2024
  • Shape memory stents are used for treating vascular conditions like myocardial infarction, angina, and arteriosclerosis through their shape memory behavior. These stents are inserted into blood vessels to expand them, and their performance in terms of flexibility, elastic recovery, and deformation is influenced by their design. In this study, parameters affecting stent structural design were analyzed using Taguchi method, aiming to design structures that consider flexibility, elastic recovery, and deformation. Reflecting the actual conditions faced by stents, ISO standards were incorporated, and finite element analysis was conducted, considering shape memory composite material properties obtained from tensile tests, specifically hyperealstic properties. Ultimately, statistical significance of stent structural design was evaluated through ANOVA (Analysis of Variance), and an improved optimal design model compared to the existing one was proposed.

Studies on Reaction Parameters for Composting of Paper Mill Sludge in a Small-Scale Reactor and Static Piles (제지슬럿지의 퇴비화를 위한 반응변수 연구)

  • Han, Shin Ho;Chung, Young Ryun;Cho, Cheon Hee;Kang, Moon Hee;Oh, Say Kyun
    • Journal of the Korea Organic Resources Recycling Association
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    • v.2 no.2
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    • pp.19-29
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    • 1994
  • A large volume of paper mill sludge(PMS) is produced every day from paper industries after treatments of waste water and it costs too much to dispose of the sludge. Since PMS consists mostly of biodegradable organic matter, cellulose, it is desirable to recycle it by proper treatments such as composting. In this study, experiments were conducted using a small scale reactor(12l) to establish optimum conditions for efficient composting of PMS of which initial pH, C/N ratio, and moisture content were 7.1, 28~30, and 60~65%, respectively. No heavy metals such as mercury, cadmimum, and lead were not detected in the PMS. Various levels of forced aeration, 1 minute aeration per every 30, 60, 120, 240, and 480 minutes were applied and 1 minute aeration per 60 and 120 minutes found to be proper for composting of 8l PMS in this system. Relationship between $CO_2$ production and temperatures was positively correlated with r> 0.82 suggesting that the normal decomposition of PMS by microorganisms occurred. However, under the condition of aeration interval over than 240 minutes, a negative relationship between two parameters was found indicating the occurrence of abnormal(maybe anaerobic) degradation. The amount of added nitrogen also affected composting of PMS resulting in the increase of $CO_2$ production and temperature. Semi-field tests using 100kg PMS in a static pile sysem showed that PMS could be composted efficiently under optimal environmental conditions. The parameters determining efficiency of composting such as C/N ratio, aeration, moisture content, and pH need to be monitored.

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Synthesis of Chromium Nitride and Evaluation of its Catalytic Property (크롬 질화물(CrN)의 합성 및 촉매특성에 관한 연구)

  • Lee, Yong-Jin;Kwon, Heock-Hoi
    • Applied Chemistry for Engineering
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    • v.17 no.5
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    • pp.451-457
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    • 2006
  • We synthesized phase pure CrN having surface areas up to $47m^2/g$ starting from $CrCl_{3}$ with $NH_{3}$. Thermal Gravimetric Analysis coupled with X-ray diffraction was carried out to identify solid state transition temperatures and the phase after each transition. In addition, the BET surface areas, pore size distributions, and crystalline diameters for the synthesized materials were analyzed. Space velocity influenced a little to the surface areas of the prepared materials, while heating rate did not. We believe it is due to the fast removal of reaction by-products from the system. Temperature programmed reduction results revealed that the CrN was hardly passivated by 1% $O_{2}$. Molecular nitrogen was detected from CrN at 700 and $950^{\circ}C$, which may be from lattice nitrogen. In temperature programmed oxidation with heating rate of 10 K/min in flowing air, oxidation started at or higher than $300^{\circ}C$ and resulting $Cr_{2}O_{3}$ phase was observed with XRD at around $800^{\circ}C$. However the oxidation was not completed even at $900^{\circ}C$. CrN catalysts were highly active for n-butane dehydrogenation reaction. Their activity is even higher than that of a commercial $Pt-Sn/Al_{2}O_{3}$ dehydrogenation catalyst in terms of volumetric reaction rate. However, CrN was not active in pyridine hydrodenitrogenation.

Parameter Sensitivity Analysis of VfloTM Model In Jungnang basin (중랑천 유역에서의 VfloTM 모형의 매개변수 민감도 분석)

  • Kim, Byung Sik;Kim, Bo Kyung;Kim, Hung Soo
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.29 no.6B
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    • pp.503-512
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    • 2009
  • Watershed models, which are a tool for water cycle mechanism, are classified as the distributed model and the lumped model. Currently, the distributed models have been more widely used than lumped model for many researches and applications. The lumped model estimates the parameters in the conceptual and empirical sense, on the other hand, in the case of distributed model the first-guess value is estimated from the grid-based watershed characteristics and rainfall data. Therefore, the distributed model needs more detailed parameter adjustment in its calibration and also one should precisely understand the model parameters' characteristics and sensitivity. This study uses Jungnang basin as a study area and $Vflo^{TM}$ model, which is a physics-based distributed hydrologic model, is used to analyze its parameters' sensitivity. To begin with, 100 years frequency-design rainfall is derived from Huff's method for rainfall duration of 6 hours, then the discharge is simulated using the calibrated parameters of $Vflo^{TM}$ model. As a result, hydraulic conductivity and overland's roughness have an effect on runoff depth and peak discharge, respectively, while channel's roughness have influence on travel time and peak discharge.

Bigdata Analysis of Fine Dust Theme Stock Price Volatility According to PM10 Concentration Change (PM10 농도변화에 따른 미세먼지 테마주 주가변동 빅데이터 분석)

  • Kim, Mu Jeong;Lim, Gyoo Gun
    • Journal of Service Research and Studies
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    • v.10 no.1
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    • pp.55-67
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    • 2020
  • Fine dust has recently become one of the greatest concerns of Korean people and has been a target of considerable efforts by governments and local governments. In the academic world, many researches have been carried out in relation to fine dust, but the research on the economic field has been relatively few. So we wanted to know how fine dust affects the economy. Big data of PM10 concentration for fine dust and fine dust theme stock price were collected for five years from 2013 to 2017. Regression analysis was performed using the linear regression model, the generalized least squares method. As a result, the change in the fine dust concentration was found to have a effect on the related theme stocks' price. When the fine dust concentration increased compared to the previous day, the fine dust theme stocks' price also showed a tendency to increase. Also, according to the analysis of stock price change from 2013 to 2017 based on fine dust theme stocks, companies with large regression coefficients were changed every year. Among them, the regression coefficients of Monalisa were repeatedly high in 2014, 2015, 2017, Samil Pharmaceutical in 2015, 2016 and 2017, and Welcron in 2016 and 2017, and the companies were judged to be sensitive to the concentration of fine dust. The companies that responded the most in the past 5 years were Wokong, Welcron, Dongsung Pharmaceutical, Samil Pharmaceutical, and Monalisa. If PM2.5 measurement data are accumulated enough, it would be meaningful to compare and analyze PM2.5 concentration with independent variables. In this study, only the fine dust concentration is used as an independent variable. However, it is expected that a more clear and well-explained result can be found by adding appropriate additional variables to increase the explanatory power.

Preparation of Cosmeceuticals Containing Wheat Sprout Extracts: Optimization of Emulsion Stability Using CCD-RSM (밀싹 추출물이 함유된 Cosmeceuticals의 제조: CCD-RSM을 이용한 유화안정성 최적화)

  • Jang, Hyun Sik;Ma, Xixiang;Lee, Seung Bum
    • Applied Chemistry for Engineering
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    • v.32 no.3
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    • pp.320-325
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    • 2021
  • In this study, an optimization for the production of water emulsion was designed by adding an extract of wheat sprout, which is known to contain a large amount of antioxidants. The central composite design of reaction surface analysis method (CCD-RSM) was used for the optimization process. The amount of emulsifier, emulsification time, and added amount of wheat sprout extract were selected as independent variables based on our preliminary experiments. The mean droplet size (MDS), viscosity, and emulsion stability index (ESI) were set as the responses to evaluate the stability of the emulsion. For each independent variable, the P-value and coefficient of determination were evaluated to verify the reliability of the experiments. From the result of CCD-RSM, optimum conditions for the emulsification were determined as 23.6 min, 7.7 wt.%, and 3.9 wt.% for the emulsification time, amount of emulsifier, and amount of sprout, respectively. From the optimized condition obtained, MDS, viscosity, and ESI after 7 days from reaction were estimated as 252.3 nm, 616.7 cP, and 88.7%, respectively. The overall satisfaction was 0.9137, which supported the validity of the experiments, and the error rate was measured at 0.5% or less by advancing the experiments. Therefore, an optimized process for producing an emulsion by adding the malt extract was designed by the CCD-RSM.

AC impedance study on the interface between organic electrolyte and amorphous $WO_3$ thin film relating to the electrochemical intercalation of lithium (비정질 $WO_3$ 박막과 전해질 계면에서의 리튬 층간 반응의 교류 임피던스 해석)

  • Kim Byoung-Chul;Ju Jeh-Beck;Sohn Tae-Won
    • Journal of the Korean Electrochemical Society
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    • v.1 no.1
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    • pp.33-39
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    • 1998
  • To AC impedance study was performed in this study on the interfacial reaction between organic electrolyte and amorphous tungsten oxides thin film, cathodically coloring oxide, prepared by e-beam evaporation method in the 1 M $LiClO_4/PC$ organic solution. The electrochemical reactions at the interface were analyzed by the transient method and the complex impedance spectroscopy. The impedance spectrums showed that the electro-chemical intercalation of lithium cations was consisted of the following three steps; the first step, the charge transfer reaction of lithium cation at the interface between amorphous tungsten oxides thin film and the organic electrolyte, the second step, the adsorption of lithium atom on the surface of amorphous tungsten oxides thin film, and then the third step, the absorption and the diffusion of lithium atom into amorphous tungsten oxides thin layer. The bleaching and the coloring characteristics of amorphous tungsten oxides thin film were explained in terms of thermodynamic and kinetic variables, the simulated $R_{ct},\;C_{dl},\;D$ and $\sigma_{Li}$ by CNLS fitting method. Especially it was found that the limiting values of electrochromic reaction were the molar ratio of lithium, y=0.167 and the electrode potential, E=2.245 V (vs. Li).