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Deposition and Characteristics of TiN Thin Films by Atomic Layer Epitaxy (ALE 법에 의한 TiN 박막의 증착 및 특성)

  • Kim, Dong-Jin;Jung, Young-Bae;Lee, Myung-Bok;Lee, Jung-Hee;Lee, Yong-Hyun;Hahm, Sung-Ho;Lee, Jong-Hwa
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.6
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    • pp.43-49
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    • 2000
  • The TiN thin films were deposited by ALE(atomic layer epitaxy) on (100) silicon substrate. The TiN thin films were characterized by means of XRD, 4-point probe, AFM, AES and SEM. TEMAT(terakis(ethyl methy lamino)titanium) and $NH_3$ were injected into the reactor in sequence of TEMAT-$N_2-NH_3-N_2$ to ensure a saturated surface reaction. As a result, the depostion rate of the TiN film was controlled by self-limiting growth mechanism at temperature range form 150 to 220 $^{\circ}C$. Deposited TiN films, all of which show amorphous structure, had a fixed deposition rate of 4.5 ${\AA}$/cycle. The resistivity of 210 ~ 230 ${\mu}{\Omega}{\cdot}$cm and the surface r.m.s. roughness of 7.9 ~ 9.3 ${\AA}$ were measured. When TiN film of 2000 ${\AA}$ were deposited, a excellent step coverage were observed in a trench structure of 0.43${\mu}m$ contacts with 6:1 aspect ratio.

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Hydrogen Production by Auto-thermal Reforming of Ethanol over $M/Al_2O_3$ (M = Mn, Fe, Co, Ni, Cu) Catalysts ($M/Al_2O_3$ (M = Mn, Fe, Co, Ni, Cu) 촉매 상에서 에탄올 자열개질반응에 의한 수소 제조)

  • Youn, Min-Hye;Seo, Jeong-Gil;Cho, Kyung-Min;Park, Sun-Young;Kim, Pil;Song, In-Kyu
    • Clean Technology
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    • v.13 no.4
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    • pp.287-292
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    • 2007
  • [ $M/Al_2O_3$ ] (M = Mn, Fe, Co, Ni, Cu) catalysts supported on commercial alumina ($Al_2O_3$) were prepared by an impregnation method, and were applied to the hydrogen production by auto-thermal reforming of ethanol. It was revealed that each catalyst retained its own metallic phase and product distribution strongly depended on the identity of active metal. Among the catalysts prepared, $Ni/Al_2O_3$ and $Co/Al_2O_3$ showed the best catalytic performance in the auto-thermal reforming of ethanol. However, the reaction mechanisms over these two catalysts were different. Ni/Al_2O_3 catalyst showed 100% ethanol conversion at $500^{\circ}C$, but it exhibited a rapid decrease in hydrogen selectivity. Although $Co/Al_2O_3$ catalyst showed an excellent performance in hydrogen selectivity, on the other hand, no significant improvement in hydrogen yield was observed due to the low ethanol conversion over the catalyst.

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Fundamental Studies on the Equilibrium and Kinetics for the fractional Distillation Reaction of Waste Organic Solvent (폐용제 분별증류 회수 반응의 평형 및 속도론적 기초연구)

  • Noh Hyun-Sook;Kim Dong-Su
    • Resources Recycling
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    • v.11 no.6
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    • pp.38-46
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    • 2002
  • Fundamental investigations were conducted far the recovery process of waste organic solvent by fractional distillation in the aspects of equilibrium and kinetics. Mixture of toluene and xylene, which were both being used in the largest amount as industrial organic solvent, was taken as the artificial waste organic solvent and their distillation behaviors were studied. The purity of recovered solvent was investigated by Cir Chromatography and shown to be in the range of 94~98%. Based upon equilibrium calculations, the changes in the Gibbs free energy, standard enthalpy, and standard entropy for distillation reaction have been estimated. The standard enthalpy changes for toluene and xylene were shown to be 44.833 and 47.044 kJ $mol^{-1}$ respectively, which were similar to their molar heats of evaporation. The activation energies of distillation fur toluene and xylene obtained from kinetic studies were 3.281 and 2.699 kJ $mol^{-1}$ and they were about one tenths of the standard enthalpy changes of distillation reaction. The highness of the purity of recovered organic solvents suggested the possibility that the recovered waste organic sol-vent could partly replace the original solvent.

Improvement in Adhesion Properties of Epoxy/Polyamide/MPD Reactive Blends by means of AP Plasma Treatment and Morphological Tuning (상압 플라즈마 표면처리와 형태학적 조절에 의한 에폭시/폴리아미드/MPD 반응성 블렌드의 접착력 향상)

  • Song, Hyun-Woo;Kang, Hak-Su;Kim, Won-Ho;Marzi, Stephan;Kim, Byung-Min;Choe, Young-Son
    • Polymer(Korea)
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    • v.33 no.4
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    • pp.284-289
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    • 2009
  • The morphology and mechanical properties of epoxy/polyamide/MPD reactive blends with various amount of polyamide were investigated. The cure behaviors, mechanical strengths, and morphological changes of the epoxy blend systems were analyzed by using DSC, UTM, and SEM, respectively. The amount of high soluble polyamide in epoxy ranged from 0 to 30 phr, and the cure reaction occurred at $170^{\circ}$ for 30 min. The start and maximum exothermic temperature in heat flows during cure reactions appeared at almost same temperature, indicating that soluble polyamide could rarely hinder the cure reactions. From the SEM images, it was found that the size of separated-phase was very fine about 100-300 nm, and at 20 phr of polyamide the boundary of separated-phase was unclear and the phase revealed co-continuous. By AP plasma treatment of specimen surface, the adhesion strength was increased by 20% due to enhanced surface free energy. By blending 20 phr of polyamide with epoxy, the adhesion strength was increased by 50% due to co-continuous phase in morphology. By considering the surface treatment of specimen and morphological tuning of the blends, it can be expected that the improvement in toughness and excellent adhesion strength can be achieved in structural adhesive systems.

Development of Competitive Indirect ELISA for the Detection of Buckwheat in Processed Foods (가공식품 중 메밀 검출을 위한 경합 ELISA의 개발)

  • Back, Su-Yeon;Do, Jeong-Ryong;Shon, Dong-Hwa
    • Korean Journal of Food Science and Technology
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    • v.46 no.3
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    • pp.269-275
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    • 2014
  • We developed a competitive indirect enzyme-linked immunosorbent assay (ciELISA) for determining the buckwheat content in processed foods by using rabbit polyclonal antibodies against buckwheat proteins (BWP). The detection limit of this assay was $0.05-100{\mu}g/mL$. The cross-reactivities of the anti-BWP antibodies toward BWP, buckwheat flour, whole buckwheat, and cereals (wheat flour, whole wheat, black bean, mung bean, red bean, brack rice, brown rice, glutinous rice, white rice, millet, African millet, nonglutinous millet, adlay, and rye) were 100, 17.9, 11.8, and 0%, respectively. Thus, the antibodies were found to be specific for buckwheat only. When buckwheat flour was heated for 30 min, the mean assay recoveries of BWP were 83.0% at $60-90^{\circ}C$ and 44.5% at $100^{\circ}C$. The spike test showed that the mean assay recoveries of buckwheat from raw noodle, boiled noodle, starch gel, and cereal flour were 99.1, 98.6, 81.1, and 104%, respectively. For the 22 commercial items tested, the qualitative coincidence ratio of assay result and the corresponding value indicated on the item's package label was 100%. However, the average quantitative coincidence ratios from 12 commercial items were 31.6%. Thus, the results suggest that ciELISA is an efficient tool to detect buckwheat in processed foods.

Introduction to Electrochemical Quartz Crystal Microbalance Technique for Leaching Study of Metals (금속 침출연구를 위한 전기화학적 미소수정진동자저울 기술 소개)

  • Kim, Min-seuk;Chung, Kyeong Woo;Lee, Jae-chun
    • Resources Recycling
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    • v.29 no.1
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    • pp.25-34
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    • 2020
  • Electrochemical Quartz Crystal microbalance is a tool that is capable of measuring nanogram-scale mass change on electrode surface. When applying alternating voltage to the quartz crystal with metal electrode formed on both sides, a resonant frequency by inverse piezoelectric effect depends on its thickness. The resonant frequency changes sensitively by mass change on its electrode surface; frequency increase with metal dissolution and decrease with metal deposition on the electrode surface. The relationship between resonant frequency and mass change is shown by Sauerbrey equation so that the mass change during metal dissolution can be measured in real time. Especially, it is effective in the case of reaction mechanism and rate studies accompanied by precipitation, volatilization, compound formation, etc. resulting in difficulties on ex-situ AA or ICP analysis. However, it should be carefully considered during EQCM experiments that temperature, viscosity, and hydraulic pressure of solution, and stress and surface roughness can affect on the resonant frequency. Application of EQCM was shown as a case study on leaching of platinum using aqueous chlorine for obtaining activation energy. A platinum electrode of quartz crystal oscillator with 1000 Å thickness exposed to solution was used as leaching sample. Electrogenerated chlorine as oxidant was purged and its concentration was controlled in hydrochloric acid solution. From the experimental results, platinum dissolution by chlorine is chemical reaction control with activation energy of 83.5 kJ/mol.

Matching Analysis between Actress Son Ye-jin's Core Persona and Audience Responses to Her Starring Works (배우 손예진의 코어 페르소나와 주연 작품에 대한 수용자 반응과의 정합성 분석)

  • Kim, Jeong-Seob
    • Journal of Korea Entertainment Industry Association
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    • v.13 no.4
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    • pp.93-106
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    • 2019
  • Persona is an actor's external ego constructed by playing various roles, and his/her another self-portrait in the eyes of the audience. This study was conducted to analyze persona identity containing core persona(CP) and to gain implications for the growth strategy of the actress Son Ye-jin called "melo queen" by verifying consistency between the CP and audience responses to her starring works of the past. According to the related theories and models, the persona was firstly set as image, visuality, personality and consistency, and it was used to extract and sort descriptive texts about Son related news articles in the last 5 years of the six major Korean newspapers using the content analysis method. After that, we analyzed the number of viewers of her movies and the audience share of her dramas by genre. As a result, Son's persona components were found to have a proportion for 54.2% images (34.0% for melo and romance images, 20.2% for non-melo and romance images), 25.6% for visibility, 13.8% for consistency, and 6.4% for personality. Her CP was derived from a melo and romance image. Comparing this with the audience reaction, the melo romance genre dominated and showed consistency in the drama, but in the case of the film, the non-melo romance was dominant and did not match each other. The results were attributed to a wide gap between dramas and movies in terms of key viewers, box office factors, degree of genre hybridity and experimentality. Therefore, Son should actively use her CP in the drama and challenge the various roles in order to expand her persona spectrum in the film.

Photodegradation of Cellulosics(Part II) - Chemical Properties of Irradiated Cotton - (Cellulose의 광분해에 관한 연구(II) - 광조사된 면섬유의 화학적 성질을 중심으로 -)

  • 전경숙
    • Journal of the Korean Society of Clothing and Textiles
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    • v.18 no.1
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    • pp.15-22
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    • 1994
  • The formation of carbonyl group was dominant to other functional groups. Concentrations of both carboxyl and peroxide groups were found to rapidly reach low steady state values that increased slightly with increa-sing temperature and relatice humidity. Since the deg-radation of cellulose samples was in the initial stage and the conversion of glycosidic bonds and hydroxyl groups were very small, it was found that changes in the physical and chemical properties could be fitted to a first-order reaction model.

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결핵과 HIV감염

  • 최영화
    • 보건세계
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    • v.47 no.1 s.521
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    • pp.12-15
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    • 2000
  • HIV 감염자가 병원에 입원하며 의사가 가장 먼저 생각하는 일은 어떤 기회감염으로 이런 증상을 갖게 되었을까 하는 것이다. 생각할 수 있는 병도 많고 생각해야 할 병도 많지만 그 중에서도 가장 먼저 떠올리게 되는 것이 결핵이 아닌가 한다. 우선 빈도면에서 비교적 흔하고, 임상증상도 정상인과 같지 않은 점이 많아서 혼돈을 일으키는 경우가 많다. 림프종을 생각할 만큼 크고 빠르게 자란 목의 덩어리도 조직검사를 하면 결핵성 림프절염인 경우가 있고 복강내 림프절이 커지거나 뇌막염을 일으키기도 한다. 결핵약으로 치료를 하는 경우에도 해열되는데 기간이 많이 필요하고 치료 도중에 약화되는 경험을 하기도 하였다. 우리나라에서 발표된 보고에서도 서울대학교에서 발표한 173명의 환자들에서 가장 흔한 기회감염은 결핵이었다. 25$\%$의 환자에서 결핵이 발생하였으며, 환자 100명당 1년 동안의 결핵 발생률은 9.6이었다. 면역부전이 진행할수록 이 빈도는 증가한다고 보고한 바 있다. 따라서 HIV감염자를 관리, 치료하는 경우에는 결핵에 대한 충분한 이해가 필요한데 얼마전 New England Journal of Medicine에 HIV감염자에서의 결핵이라는 제목으로 발표된 자료가 있어 이를 정리하였다. 여러모로 도움이 되는 내용이지만 우리나라에서 사용할 수 있는 약제에 한계가 있고 BCG예방접종을 하기 때문에 피부반응 검사로 결핵발생을 예측하기도 어렵다는 점을 고려하면 모든 내용이 우리나라의 현실에 적용되는 것은 아니다.

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Inkjet head의 heater용 코발트실리사이드의 형성과 특성연구

  • 노영규;장호정;곽준섭
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2001.11a
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    • pp.217-221
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    • 2001
  • Poly-Si/SiO$_2$/Si의 하부기판구조 위에 Co금속을 E-beam evaporation 방식으로 증착하고 급속 열처리 방식을 통해 inkjet 프린터헤드의 heater로 사용 할 수 있는 코발트실리사이드를 형성하였다. RTA로 열처리 온도와 시간을 변수로하여 코발트실리사이드의 가장 안정적 결정상 및 성분분포를 찾고 이렇게 제작된 박막의 면저항과 표면특성을 통해 고온에서 사용 할 수 있는지를 연구하였다. 박막을 발열체(400~$600^{\circ}C$)로 사용하기 위해서는 발열체가 외부배선과의 접촉 저항보다 커야하고 저항이 고온에서 크게 변하면 안 된다. 코발트 실리사이드는 80$0^{\circ}C$ 20sec에서 발열체로 사용하기에 적당한 특성을 보였다. 그러나 실리사이드반응이 RTA에서 40$0^{\circ}C$ 20sec에서 형성되기 시작하지만 열처리 온도를 높일수록 박막의 면저항과 상변화가 일어남으로 발열체로 사용 할 수 없고, 90$0^{\circ}C$ 20sec 이상에서는 표면의 거칠어짐으로 인해 면저항이 증가하는 현상을 보여 역시 발열체로 사용 할 수 없음을 알 수 있었다.

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