• Journal of the Korean Crystal Growth and Crystal Technology
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• v.23 no.5
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• pp.230-234
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• 2013

IR cut-off thin films consisted of ATO nanoparticles were successfully fabricated by sol-gel method. The coating solution was synthesized with organic/inorganic hybrid binder and ATO colloidal solution and ATO thin films were coated on a slide glass with the withdrawal speed of 5~40 mm/s. As the withdrawal speed increased from 5 mm/s to 40 mm/s, the thickness of coating thin films also increased from $1.05{\mu}m$ to $4.25{\mu}m$ and the IR cut-off in wavelength of 780~2500 nm increased from 49.5 % to 66.7 %. In addition, the pencil hardness of ATO thin films dried at $80^{\circ}C$ was ca. 5H and the coating films were not removed after a cross cutter tape test because of the hybrid binder synthesized with tetraethylorthosilicate and methyltrimethoxysilane. The surface morphologies, optical properties and film thickness of prepared thin films with a different withdrawal speed were measured by field emission scanning electron microscope (FE-SEM), UV-Vis spectrophotometer, and Dektak.

• Journal of the Microelectronics and Packaging Society
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• v.11 no.4 s.33
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• pp.55-59
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• 2004

We fabricates the $TiO_2$ thin film from anatase phase $TiO_2$ powder having good photocatalytic property using aerosol deposition method at room temperature. Aerosol deposition method, which sprays an aerosol powder with ultrasonic velocity and deposits a thin film on substrate at low temperature, has the advantages of low thermal stress and low cost. To fabricate the $TiO_2$ thin film, the aerosol bath pressure and chamber pressure were 500 torr and 0.4 torr, respectively. The difference of aerosol bath pressure and chamber pressure accelerated the $TiO_2$ nano powder to ultrasonic velocity through the nozzle of $0.4 mm{\times}10 mm$ and $TiO_2$ thin film was finally formed. SS mesh with diameter of 50 mm was used as a substrate to apply the $TiO_2$ thin film to water quality purification. The raw powder was dehydrated for the good dispersion of $TiO_2$ powder. To suppress the formation of second particle, the powder was dispersed for 90 min in alcohol bath by ultrasonic treatment and desiccated. The grain size of $1 {\mu}m$ was observed in $TiO_2$ thin film deposited on SUS mesh by scanning electron microscopy (SEM). The anatase phase of $TiO_2$ thin film was also observed by X-ray diffraction (XRD) and the anatase phase of raw powder was nicely maintained after aerosol deposition. The results are applicable to water treatment filter having photocatalytic reaction.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.339-339
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• 2012

지난 몇 년 동안, 투명 비정질 산화물 반도체는 유기 발광 다이오드, 플렉서블 전자 소자, 솔라 셀, 바이오 센서 등 많은 응용분야에 연구되고 있다. 투명 비정질 산화물 반도체 그룹들 중, 특히 비정질 IGZO 박막 트랜지스터는 비정질 상태임에도 불구하고 높은 이동도와 낮은 동작 전압으로 훌륭한 소자 특성을 보인다. 이러한 고성능의 IGZO 박막 트랜지스터는 RF 마그네트론 스퍼터링이나 pulsed laser deposition과 같은 고진공 장비를 이용하여 이미 여러 그룹에서 제작되고 발표되었다. 하지만 진공 증착 시스템은 제조 비용의 절감이나 디스플레이 패널의 대면적화에 큰 걸림돌이 되고 있고, 이러한 문제점을 극복하기 위해서 용액 공정은 하나의 해결책이 될 수 있다. 용액 공정의 가장 큰 장점으로는 저온 공정이 가능하기 때문에 글라스나 플라스틱 기판에서 대면적으로 제작할 수 있고 진공 장비가 필요없기 때문에 제조 비용을 획기적으로 절감시킬 수 있다. 본 연구에서는 high-k 게이트 절연막과 IGZO 채널 층을 용액 공정을 이용하여 박막 트랜지스터를 제작하고 그에 따른 전기적 특성을 분석하였다. IGZO의 몰 비율은 In, Ga, Zn 순으로 각각 0.2 mol, 0.1 mol, 0.1 mol로 제작하였고, high-k 게이트 절연막으로는 Al2O3, HfO2, ZrO2을 제작하였다. 또한, 용액 공정 IGZO TFT를 제작하기 전, 용액 공정 high-k 게이트 절연막 캐패시터를 제작하여 그 특성을 분석하였다. 다양한 용액 공정 high-k 게이트 절연막 중, 용액공정 HfO2를 이용한 IGZO TFT는 228.3 [mV/dec]의 subthreshold swing, 18.5 [$cm^2/V{\cdot}s$]의 유효 전계 이동도, $4.73{\times}106$의 온/오프 비율을 보여 매우 뛰어난 전기적 특성을 확인하였다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2014.11a
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• pp.244-245
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• 2014

본 연구에서는 은 나노와이어를 도포 한 후 온풍을 이용하여 용매를 건조시키는 공정을 진행 후 광학적, 전기적 특성을 평가 하였다. 은 나노와이어를 스포이드로 글라스 위에 도포한 후 약 $120^{\circ}C$의 온도와 17m/s의 풍속을 가진 바람을 30초간 기판에 조사하였으며, 같은 방법으로 1 ~ 3회 반복하여 기판의 전기적, 광학적 특성을 조사 하였다. 그 결과, 550nm에서 3회 반복 도포 시 87.8%의 투과율과 18ohm/sq의 면저항을 가지는 투명 박막을 얻을 수 있었다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.11a
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• pp.72-73
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• 2012

Metal line을 형성하는 방법에는 그라비아 인쇄, 잉크젯 인쇄, photo 공정 후 박막 증착 공정 등을 많이 사용한다. 본 연구에서는 Micro-imprinting 공정과 DFR photo lithography 공정을 통해 음각의 미세한 pattern을 형성한 후 sputtering과 printing을 이용하여 pattern의 filling을 통해 metal line을 구현하는 것을 목표로 하였다. Pattern을 형성한 후 RIE 공정을 통해 기판 표면의 친수성 처리를 하고, SAM 공정을 통해 코팅 막의 소수성 처리를 하였다. Sputtering과 전면 프린팅 및 건조 후 strip 공정을 통해 metal line을 형성하고, 이에 대한 표면 특성과 전기적 특성을 분석하였다.

• Korean Journal of Optics and Photonics
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• v.3 no.4
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• pp.273-279
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• 1992

Position reading devices such as optical encoders are most essential components in numerical control (NC) machines and robots. Fabrication process of optical NC-scales was developed for domestic production. The whole process using photo-lithographic techniques consists of about 10 steps. The process parameters were to be carefully determined through many trial experiments. The scale marks of metal film was printed on a glass substrate. The optimum values of various process parameters were extrilcted. The quality of scale marks was attributed to the each process parameters.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.19 no.2
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• pp.70-74
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• 2009

Effect of the processing variables on the formation of $Pb(Sc_{1/2}Nb_{1/2})O_3$(hereafter PSN) thin layers prepared on Pt(111)/Ti/$SiO_2$/Si substrates using the sol-gel and the spin coating method has been studied. After each deposition, the coated films were heated at $370^{\circ}C$ for 5 min. Then they were finally sintered at temperature range of $600{\sim}700^{\circ}C$ by RTA(rapid thermal annealing). The final multilayered films showed a (111) preferred orientation. On a while, the layer-by-layer crystallization of multilayered amorphous thin films without the intermediate heating exhibited a (100) preferred orientation. In case of heat treatment in the tube furnace with the heating rate of $4^{\circ}C/min$, (100) and (111) oriented thin layers were formed simultaneously. The microstructure of the deposited films were dense and crack-free with thickness of 300nm, irrespective of the processing variables.

• Applied Chemistry for Engineering
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• v.34 no.1
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• pp.30-35
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• 2023

The glass bead surface was coated using a TiO₂ sol, after which dry-treated (TB) and calcined (TBc) samples were prepared. Photocatalytic degradation of methylene blue and toluene, as well as characterization of the TiO₂ thin films, were carried out. The TiO₂ thin film of the TB sample had the same shape as the sponge foam, according to FE-SEM, XPS, and FTIR analyses, and contained both amorphous and crystalline TiO₂. On the other hand, crystalline TiO₂ was mainly present in the TiO₂ thin film of the TBc sample, and needle-shaped particles and tiny ones were mixed. The adsorption capacity for methylene blue and the degradation rate of the TBc sample were less than 10 % compared with those of the TB sample, and the adsorption capacity and degradation rate of the TBc sample decreased similarly as the amount of TiO₂ coating increased. The amount of toluene adsorption for the TBc sample (46 mg/g) was smaller than that of the TB sample with the same coating amount, but the degradation rate was similar. In the case of the TB sample, the degradation rate for toluene decreased less than the adsorption capacity as the amount of TiO₂ coating increased. This result is considered to be because, in the non-calcined TB sample, the active site reduction of the crystalline particles occurred less and the specific surface area of the amorphous texture decreased as the amount of TiO₂ coating increased.

• Polymer(Korea)
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• v.28 no.5
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• pp.433-443
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• 2004

The membranes of the blends of chitosan and polycaprolactarn (PA6) were prepared in formic acid. FT-IR data revealed that hydrogen bonding between amide and hydroxyl groups of chitosan and PA6, respectively, was formed. Thermogravimetric analysis demonstrated that the blend samples contain water. DMA results showed that the dissipation of water in the samples significantly reduced the storage modulus (E'). The mechanical loss tangent (tan $\delta$) data of the blend samples showed the $\beta$d loss peak around $0^{\circ}C$. The blend samples were completely dried in a vacuum and then exposed to high moisture to absorb water which would cause, so called, w-bridges between the molecules. The E' data of these regained samples increased abnormally and additional loss peak appeared on the shoulder of the peak around $50^{\circ}C$. Under dry condition, the samples with a blend ratio of 40/60 for chitosan/PA6 displayed a better miscibility between two components.

• Applied Chemistry for Engineering
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• v.22 no.1
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• pp.81-86
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• 2011

The aqueous solution of Sunset Yellow-FCF (SY-FCF) began to show schlieren texture at room temperature when its concentration reaches 25 wt%. A further increase of the concentration of SY-FCF to 28 wt% resulted in a perfect nematic liquid crystal phase. However, more than 30 wt% of SY-FCF in aqueous solution was required to make an optically anisotropic film simply by shear coating. In our study, concentration of SY-FCF solution, coating speed, drying temperature, and relative humidity were considered as coating parameters affecting the preparation of optically anisotropic thin films. From analysis of variance analysis (ANOVA), the solution concentration was revealed as a main factor affecting the film thickness. The drying temperature and solution concentration were main factors affecting the transmittance of parallel direction ($T_o$). Especially, SY-FCF aqueous solution with high concentration induced a better alignment of LC columns and produced highly oriented anisotropic films. In this study, optically anisotropic films prepared by 33 wt% of SY-FCF in aqueous solution showed 89.7~98.7% of degree of polarization.