• Title/Summary/Keyword: 바나듐 산화물 박막

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반응성 스퍼터링에 의한 마이크로 박막 전지용 산화바나듐 박막의 제작 및 전기화학적 특성평가

  • 전은정;신영화;남상철;조원일;윤영수
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.49-49
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    • 1999
  • 리튬 이차 전지를 박막화함으로써 개발된 고상의 마이크로 박막전지는 임의의 크기 및 형태로의 제작이 가능하며 액체전해질을 사용하지 않기 때문에 작동 중 열 또는 기체 생성물이 생기지 않아 높은 안정성을 갖으며 광범위한 사용 온도 범위를 가진다. 위와 같은 장점으로 인하여 충전 가능한 고상의 박막형 리튬 이차 전지는 점진적으로 그 사용 범위가 크게 확대될 것으로 판단된다. 즉, 초소형 전자, 전기 소자는 물론이며 조만간 실현될 스마트 카드, 셀루러폰 및 PCS와 같은 개인용 휴대 통신장비의 전력 공급계로의 응용이 가능할 것이다. 특히 장수명, 고에너지 밀도를 갖는 초소형의 전지를 필요로 하는 microelectronics, MEMS등에 이용될 수 있는 이차전지에 대한 요구가 점점 가시화 됨에 따라 박막공정을 이용한 이차전지개발기술이 요구되고 있으며, 박막제조기술을 이용한 고상의 박막형 및 전지에 관한 연구가 증가하고 있다. 본 연구에서는 박막형 리튬 이차전지의 Cathode 물질로써 비정질의 산화바나듐 박막을 반응성 스퍼터링에 의하여 상온에서 증착하였다. 박막형 이차전지의 여러 가지 Cathode 물질중 산화바나듐은 다른 물질들과는 달리 비정질 형태로 매우 우수한 충방전 특성을 나타낸다. 이런 특성으로 인해 다소 전지자체의 성능은 낮지만 저전력 저전압을 필요로 하는 초소형 전자 소자와 혼성되어 이용할 수 있는 잠재성이 매우 높은 물질이다. 바나듐 타겟의 경우 타겟 표면의 ageing에 따라 증착되는 박막의 특성이 매우 달라지게 되므로 presputtering의 시간을 변화시키면서 실험하였다. 또한 스퍼터링 중의 산소의 분압도 타겟의 ageing에 많은 영향을 주므로 실험 변수로 산소분압을 변화시키면서 실험하였다. 증착된 산화바나듐 박막의 표면은 scanning electron microscopy로 분석하였으며 구조 분석은 X-선 회절분석, X-ray photoelectron spectroscopy 그리고Auger electron spectroscope로 하였다. 증착된 산화바나듐 박막의 전기화학적 특성을 분석하기 위하여 리튬 메탈을 anode로 하고 EC:DMC=1:1, 1M LiPF6 액체 전해질을 사용한 Half-Cell를 구성하여 200회 이상의 정전류 충 방전 시험을 행하였다. Half-Cell test 결과 박막의 결정성과 표면상태에 따라 매우 다른 전지 특성을 나타내었다.

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An Experimental Study of Synthesis and Characterization of Vanadium Oxide Thin Films Coated on Metallic Bipolar Plates for Cold-Start Enhancement of Fuel Cell Vehicles (연료전지 차량의 냉시동성 개선을 위한 금속 분리판 표면의 바나듐 산화물 박막 제조 및 특성 분석에 관한 연구)

  • Jung, Hye-Mi;Noh, Jung-Hun;Im, Se-Joon;Lee, Jong-Hyun;Ahn, Byung-Ki;Um, Suk-Kee
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.35 no.6
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    • pp.585-592
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    • 2011
  • The enhancement of the cold-start capability of polymer electrolyte fuel cells is of great importance in terms of the durability and reliability of fuel-cell vehicles. In this study, vanadium oxide films deposited onto the flat surface of metallic bipolar plates were synthesized to investigate the feasibility of their use as an efficient self-heating source to expedite the temperature rise during startup at subzero temperatures. Samples were prepared through the dip-coating technique using the hydrolytic sol-gel route, and the chemical compositions and microstructures of the films were characterized by X-ray diffraction, X-ray photoelectron spectroscopy, and field-emission scanning electron microscopy. In addition, the electrical resistance hysteresis loop of the films was measured over a temperature range from -20 to $80^{\circ}C$ using a four-terminal technique. Experimentally, it was found that the thermal energy (Joule heating) resulting from self-heating of the films was sufficient to provide the substantial amount of energy required for thawing at subzero temperatures.

Characteristics of Copper Vanadium Oxide$(Cu_{0.5}V_2O_5)$ Cathode for Thin Film Microbattery (구리-바나듐 산화물 박막의 양극 특성 및 전 고상 전지의 제작)

  • Lim Y. C.;Nam S. C.;Park H. Y.;Yoon Y. S.;Cho W. I.;CHo B. W.;Chun H. S.;Yun K. S.
    • Journal of the Korean Electrochemical Society
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    • v.3 no.4
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    • pp.219-223
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    • 2000
  • All-solid state lithium rechargeable thin film batteries were fabricated with the configuration of$Cu_{0.5}V_2O_5/Lipon/Li$ using sequential thin film techniques. Copper vanadium oxide thin films and Lipon thin films were prepared by DC reactive dual source magnetron sputtering and RF magnetron sputtering, respectively. According to XRD analysis, we found out that copper vanadium oxide thin films were amorphous. The electrochemical behaviour of them was examined in half cell system using EC : DMC(1:1 in IM $LiPF_5$) liquid electrolyte. The ionic conductivity of Lipon thin film was $1.02\times10^{-6}S/cm$ at $25^{\circ}C$ and $Cu_{0.5}V_2O_5/Lipon/Li$ cell showed that the discharge capacity was about $50{\mu}Ah/cm^2{\mu}m$ beyond 500cyc1es.

Electrochemical Behavior of Vanadium Trungsten Oxide Thin Films Deposited by Sputtering (스퍼터링으로 증착한 바나듐 텅스텐 산화물 박막의 전기화학적 거동)

  • 박영신;이병일;주승기
    • Journal of the Korean institute of surface engineering
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    • v.30 no.2
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    • pp.121-127
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    • 1997
  • Vanadium tungsten oxide thin films were formed by RF magnetron sputtering and the effects of tungsten addition on the crystallinity and on the electrochemical behavior were investigated. X-ray analysis revealed that amorphized films could be obtained by tungase addition. In order to investigate the electrochemical behavior of the vanadium tungsten oxide films, electrochemical insertion and extraction of lithium were out in 1m $LiCIO_4$-PC-DME electrolyte using litium metal as a counter electrode. When the tungsten was added to the $V_2O_5$ films, cycling reversibility was considerably improved. Electrochemical test showed the cell capacity of about $70\mu\;Ah/\textrm{cm}^2-\mu\textrm{m}$ when the amount of additive tungseten reached 30 atomic percent. No appreciable degradation of the cell capacity could be observed after hundred cycles of insertion and extration od Li.

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Synthesis of Mixed Phase Vanadium Oxides Thin Films and Their Ethanol Gas Sensing Properties (혼합 상의 바나듐 산화물 박막 제작 및 에탄올 가스 감지 특성 연구)

  • Han, Soo Deok;Kang, Chong-Yun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.31 no.1
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    • pp.29-33
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    • 2018
  • Using a vanadium dioxide ($VO_2$) source, highly pure and amorphous vanadium oxide (VO) thin films were deposited using an e-beam evaporator at room temperature and high vacuum (<$10^{-7}$ Torr). Then, by controlling the post-annealing conditions such as $N_2:O_2$ pressure ratio and annealing time, we could easily synthesize a homogeneous $VO_2$ thin film and also mixed-phase VO thin films, including $VO_2$, $V_2O_5$, $V_3O_7$, $V_5O_9$, and $V_6O_{13}$. The crystallinity and phase of these were characterized by X-ray diffraction, and the surface morphology by FE-SEM. Moreover, the electrical properties and ethanol sensing measurements of the VO thin films were analyzed as a function of temperature. In general, mixed-phases as a self-doping effect have enhanced electrical properties, with a high carrier density and an enhanced response to ethanol. In summary, we developed an easy, scalable, and reproducible fabrication process for VO thin films that is a promising candidate for many potential electrical and optical applications.

Synthesis and Evaluation of Variable Temperature-Electrical Resistance Materials Coated on Metallic Bipolar Plates (온도 의존성 가변 저항 발열체로 표면 처리된 금속 분리판 제조 및 평가)

  • Jung, Hye-Mi;Noh, Jung-Hun;Im, Se-Joon;Lee, Jong Hyun;Ahn, Byung Ki;Um, Sukkee
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.11a
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    • pp.73.1-73.1
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    • 2010
  • For the successful cold starting of a fuel cell engine, either internal of external heat supply must be made to overcome the formation of ice from water below the freezing point of water. In the present study, switchable vanadium oxide compounds as variable temperature-electrical resistance materials onto the surface of flat metallic bipolar plates have been prepared by a dip-coating technique via an aqueous sol-gel method. Subsequently, the chemical composition and micro-structure of the polycrystalline solid thin films were analyzed by X-ray diffraction, X-ray fluorescence spectroscopy, and field emission scanning electron microscopy. In addition, it was carefully measured electrical resistance hysteresis loop over a temperature range from $-20^{\circ}C$ to $80^{\circ}C$ using the four-point probe method. The experimental results revealed that the thin films was mainly composed of Karelianite $V_2O_3$ which acts as negative temperature coefficient materials. Also, it was found that thermal dissipation rate of the vanadium oxide thin films partially satisfy about 50% saving of the substantial amount of energy required for ice melting at $-20^{\circ}C$. Moreover, electrical resistances of the vanadium-based materials converge on an extremely small value similar to that of pure flat metallic bipolar plates at higher temperature, i.e. $T{\geq}40^{\circ}C$. As a consequence, experimental studies proved that it is possible to apply the variable temperature-electrical resistance material based on vanadium oxides for the cold starting enhancement of a fuel cell vehicle and minimize parasitic power loss and eliminate any necessity for external equipment for heat supply in freezing conditions.

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