• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.465-468
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• 2001

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into positioning characteristics. A one-dimensional aerostatic ceramic stage with ballscrew driven and laser scale feedback system is manufactured, aiming at investigating positioning characteristic of ultra-precision stage. We confirm, this ceramic aerostatic stage has a 10nm micro resolution, and can be reduced mean of position error by compensation of numeric control command. By means of analyzing relationship of position error and change of temperature, we build a on-line compensation algorithm of position error from the measured temperature data. So we can improve repeatability of ultra-precision stage up to 34%($0.095{\mu}$) of the normal condition.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.175-178
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• 2000

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into positioning characteristics. A one-dimensional aemstatic ceramic stage with ballscrew driven and laser scale feedback system is manufactured. aiming at investigating positioning characteristic of aerostatic stage, especially position error and repeatability, we analyze positioning behavior with other factors such as angular error, temperature. Experimemal results show that the aerostatic stage has a l0nm micro step response. Comparing experimental results and calculated abbe's error, we confirm that mean of position error is owing to angular error. And, also we confirm the temperature is dominant factor of repeatability in ten nm order.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.668-671
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• 2000

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into driven mechanism such as ballscrew. In this paper, fur investigating positioning characteristic of ballscrew and feedback device in aerostatic stage, we compare the positioning characteristic between full-closed(laser scale) and semi-closed(encoder) system. Experimental results show that the aerostatic stage has a 10nm micro step response and repeatability is improved up to 1.00${\mu}{\textrm}{m}$ using laser scale. We confirm the laser scale compensate error motion of ballscrew, so acquire 1.12${\mu}{\textrm}{m}$ positioning accuracy.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.31 no.4
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• pp.393-401
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• 1995

In this paper, vector analysis on the novel quick torque control of Induction Motors(I.M) based on voltage-controlled type is conducted. It was very difficult to get a step response of torque when the primary voltage was selected as control input of induction motors in conventional quick torque control methods. To solve this problem, the new control method was developed using a new concept of pulse addition which can realize the stepwise torque response of a specified settling time of $\Delta$. The new method was successfully confirmed through DSP(Digital Signal Processor) system-based experiments. However, it was a little difficult to understand the control mechanism intutionally. The purpose of this paper is to provide more understanding about the quick torque control mechanism using the vector analysis.