• Transactions of the Korean Society of Mechanical Engineers A
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• v.40 no.8
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• pp.731-736
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• 2016

Three-dimensional (3D) high-aspect-ratio (HAR) microstructures for biomedical applications (e.g., microneedle, microadhesive, etc.) are microfabricated using the hybrid ultraviolet (UV) lithography in which inclined, rotational, and reverse-side UV exposure processes are combined together. The inclined and rotational UV exposure processes are intended to fabricate tapered axisymmetric HAR microstructures; the reverse-side UV exposure process is designed to sharpen the end tip of the microstructures by suppressing the UV reflection on a bottom substrate which is inevitable in conventional UV lithography. Hybrid UV lithography involves fabricating 3D HAR microstructures with an epoxy-based negative photoresist, SU-8, using our customized UV exposure system. The effects of hybrid UV lithography parameters on the geometry of the 3D HAR microstructures (aspect ratio, radius of curvature of the end tip, etc.) are measured. The dependence of the end-tip shape on SU-8 soft-baking condition is also discussed.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.1
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• pp.73-76
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• 2010

The issue of inspection and characterization of microstructures has emerged as a major consideration in design, fabrication, and detection of MEMS devices. However, the conventional measurement techniques, including scanning electron microscopy (SEM) imaging, atomic force microscopy (AFM) scanning, and mechanical surface profiler, require often destructive process or may be difficult to measure with a wafer scale. In this paper, we characterize the surface profiles of microstructures using an optical scanner based on a DVD pick-up module. Scanning images of the microstructures are successfully generated using the intensity of reflected light from different depths of the surface profiles, based on the focus error signal (FES) from photodiodes. It is shown that the proposed optical scanner can be used as an alternative measurement system with high performance and low cost, compared to conventional measurement techniques.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.5
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• pp.19-23
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• 2004

최근 산업의 고도화와 함께 초고온, 방사선노출 등과 같은 극한환경에서 사용되는 구조물과 MEMS 와 같은 미소 구조물(Hicrostructure)이 많아지고 있으며, 이들의 변형해석을 위한 기존의 접촉식 기법들은 그 한계를 극복해야 할 필요가 있다 해결방안으로 레이저를 이용한 비접촉 측정방식이 많은 발전을 해오고 있으며, 특히, 스페클간섭법(Speckle inteferometry)기반의 변형해석 기술이 가장 뛰어난 기술로 인정받고 있다. 스페클간섭법은 컴퓨터 화상처리기술에 힘입어 전자처리 스페클간섭법(Electronic Speckle Pattern Interferometry : ESPI)으로 발전을 하고 있으며, 자동차와 같은 대형구조물의 변형해석에서 MEMS 구조물과 같은 미소구조물 변형해석까지 그 적용범위가 매우 넓다. 본 논문에서는 ESPI 를 이용한 변형해석분야의 국내외 기술현황 및 적응사례, 발전방향를 소개하였다.(중략)

• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.7-14
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• 2004

나노 임프린트 기술은 기존의 광학적 리소그라피 (optical lithography) 기술보다 저렴한 비용으로 나노 구조물을 대량으로 제조할 수 있을 것으로 기대되고 있는 기술이다. 현재까지 반도체 공정기술의 주류를 이루고 있는 광학적인 리소그라피 기술은, 100nm이상의 CD(Critical Dimension)를 가지는 구조물들을 정밀하게 제조하여, 미소전자공학 (microelectronics) 소자, MEMS/MEMS, 광학소자 등의 제품들을 대량으로 생산하는 데에 널리 활용되고 있다. 반도체 소자의 고집적화 경향에 따라 100 nm 이하의 CD를 가지는 나노 구조물들을 제조할 필요성이 높아지고 있지만, 광학적인 방법으로는 광원의 파장보다 작은 구조물들을 제조하기가 어렵다. 보다 짧은 파장을 가지는 광원을 이용하는 리소그라피 장비가 계속적으로 개발되고 있으나, 그에 따른 장비 비용 및 제조 단가가 기하급수적으로 증가하고 있다.(중략)

• Journal of Korean Tunnelling and Underground Space Association
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• v.16 no.5
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• pp.471-485
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• 2014

The monitoring method of geotechnical structures using acoustic emission(AE) and microseismicity(MS) is to detect the microscopic deformation and fracture behavior in the inner structures by measuring induced acoustics and vibrations. It can identify a pre-indication of failure by taking advantage of the characteristics that the amount and occurrence rates of AE and MS increase rapidly prior to large scale destruction of the target structures. The monitoring system consisting of high-quality sensors, high-speed data acquisition device and the operation program is required for the practical application of this method. Recently, the AE and MS monitoring systems have been localized. In particular, the developed operation software which can analyze and interpret the measured signals was demonstrated through a number of applications to domestic fields. This report introduces the configuration and features of developed monitoring system, then the challenges and future direction of AE monitoring in geotechnical structures are discussed.

• Tunnel and Underground Space
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• v.28 no.4
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• pp.293-303
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• 2018

Monitoring is the act of collecting and analyzing accurate engineering information using various methods and instruments. The purposes of the monitoring are design verification, construction management, quality control, safety management, and diagnose of structure etc.. The diagnose evaluation of the geotechnical structures corresponds to the confirmation of the structural performance. It is aimed to judge the soundness of geotechnical structures considering the degree of damage due to the environmental change and elapsed time. Recently, microseismicity, which is widely known in Korea, can be used for safety management and diagnoses of structure as it detects the micro-damage without disturbance of the structure. This report provides guideline on the procedure for assessing an underground oil storage cavern using microseismic monitoring techniques. Guidelines cover the selection of monitoring systems, sensor array, sensor installation and operation of systems, and interpretation.

• Tunnel and Underground Space
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• v.10 no.1
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• pp.59-69
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• 2000

Acoustic emission is n burst of microseismic waves generated by microscopic failure due to deformation in materials. The study on the detection of initiation and propagation of microcracks from acoustic emission measurement is very important for the evaluation of the stability of underground rock structures by the nondestructive letting method. In this study, acoustic emission was measured under uniaxial stiffness loading test used to obtain the complete stress-strain curves of marble and concrete used as reinforced materials of rock structures. The analysis of acoustic emission parameters and source location were performed to discuss the characteristics of the deformation and failure behavior of rock and concrete. And acoustic emission was measured under cyclic loading test to verify the Kaiser effect associated with the damage of materials, in situ stress of rock, and stress history of concrete structure.

• Tunnel and Underground Space
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• v.23 no.6
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• pp.521-537
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• 2013

While microseismicity induced by hydraulic stimulation carried out for EGS is useful means in estimating the range of permeability increase, it also affect surface structures and environments. In order to establish a mitigation plan for microseismicity triggered by hydraulic stimulation, we reviewed world-wide guidelines on the impact of ground vibration on the surface structure and human environment by blasting. Case studies from Europe and USA on the microseismicity by hydraulic stimulation are presented and suggestions are made for the guidelines on ground vibration by hydraulic stimulation for the ongoing Pohang EGS project.

• Tunnel and Underground Space
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• v.30 no.1
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• pp.1-14
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• 2020

Microseismic monitoring is utilized for the performance verification and safety management of the structure by detecting fine levels of damage. In order to construct a highly reliable microseismic monitoring system, the role of signal conditioner is critical. The signal conditioner helps with accurate data collection and precision control of the device, and performs additional functions such as signal conversion, linearization, and amplification. In this technical report, noise reduction signal conditioner suitable for mining sites was developed and reviewed for the purpose of implementing more precise monitoring by supplementing the previously developed microseismic monitoring system.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.12 no.1
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• pp.77-87
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• 1994

One of the often espoused merits of close-range photogrammetry is the effectiveness of the method for measuring non-accessible objects of unusual and complex shape. In this study, techniques of deformation measurement using close-range photogrammetry for electric power structures were developed. Absolute deformation could be found efficiently through close-range photogrammetry in the structure deformation analysis based on time variation. Also, feasibility of the structures management system was presented based on this study.