• Title/Summary/Keyword: 미세 채널

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Fabrication of Depth Probe Type Semiconductor Microelectrode Arrays for Neural Recording Using Both Dry and wet Etching of Silicon (실리콘 건식식각과 습식식각을 이용한 신경 신호 기록용 탐침형 반도체 미세전극 어레이의 제작)

  • 신동용;윤태환;황은정;오승재;신형철;김성준
    • Journal of Biomedical Engineering Research
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    • v.22 no.2
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    • pp.145-150
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    • 2001
  • 대뇌 피질에 삽입하여 깊이에 따라 신경 신호를 기록하기 위한 탐침형 반도체 미세전극 어레이(depth-type silicon microelectrode array, 일명 SNU probe)를 제작하였다. 붕소를 확산시켜 생성된 고농도 p-type doping된 p+ 영역을 습식식각 정지점으로 사용하는 기존의 방법과 달리 실리콘 웨이퍼의 앞면을 건식식각하여 원하는 탐침 두께만큼의 깊이로 트렌치(trench)를 형성한 후 뒷면을 습식식각하는 방법으로 탐침 형태의 미세 구조를 만들었다. 제작된 반도체 미세전극 어레이의 탐침 두께는 30 $\mu\textrm{m}$이며 실리콘 건식식각을 위한 마스크로 6 $\mu\textrm{m}$ 두께의 LTO(low temperature oxide)를 사용하였다. 탐침의 두께는 개발된 본 공정을 이용해서 5~90 $\mu\textrm{m}$ 범위까지 쉽게 조절할 수 있었다. 탐침의 두께를 보다 쉽게 조절할 수 있게 됨에 따라 여러 신경조직에 필요한 다양한 구조의 반도체 미세전극 어레이를 개발할 수 있게 되었다. 본 공정을 이용해서 개발된 4채널 SUN probe를 사용하여 흰쥐의 제1차 체감각 피질에서 4채널 신경 신호를 동시에 기록하였으며, 전기적 특성검사에서 기존의 탐침형 반도체 미세전극, 텅스텐 전극과 대등하거나 우수한 신호대 잡음비(signal to noise ratio, SNR)특성을 가짐을 확인하였다.

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A Channel Estimation Technique Based on Pilot Tones for OFDM Systems with a Symbol Timing Offset (시간 동기 옵셋을 갖는 OFDM 시스템을 위한 파일럿 톤 기반의 채널 추정 기법)

  • Park, Chang-Hwan;Kim, Jae-Kwon;Lee, Hee-Soo;Cho, Yong-Soo
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.32 no.10A
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    • pp.992-1003
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    • 2007
  • In this paper, a channel estimation technique based on pilot tones, which does not degrade channel estimation performance even with the existence of symbol timing offset (STO) in OFDM systems, is proposed. The proposed technique performs channel estimation by interpolating channels with respect to amplitude and phase with a minimum computational complexity, differently from the conventional interpolation techniques. The proposed technique requires neither the estimation of fine STO in advance nor trigonometric operation for phase interpolation, signifying a significant reduction in computational complexity. Since the performance of the proposed technique does not depend on the STO present in OFDM systems. It can be directly applied to the following areas in OFDM-based communication system: elimination of fine STO estimation step in the synchronization procedure, elimination of STO estimation step in multiuser uplink, and channel estimation in multi-hop relay system. It is verified by computer simulation that the proposed technique can improve the performance of channel estimation significantly in the presence of STOs, compared with previous channel estimation techniques based on pilot tones.

In situ Gelation of Monodisperse Alginate Hydrogel in Microfluidic Channel Based on Mass Transfer of Calcium Ions (미세 채널에서 칼슘이온 물질전달을 이용한 단분산성 알지네이트 하이드로젤 입자의 실시간 젤화)

  • Song, YoungShin;Lee, Chang-Soo
    • Korean Chemical Engineering Research
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    • v.52 no.5
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    • pp.632-637
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    • 2014
  • A microfluidic method for the in situ production of monodispersed alginate hydrogels using biocompatible polymer gelation by crosslinker mass transfer is described. Gelation of the hydrogel was achieved in situ by the dispersed calcium ion in the microfluidic device. The capillary number (Ca) and the flow rate of the disperse phase which are important operating parameters mainly influenced the formation of three distinctive flow regions, such as dripping, jetting, and unstable dripping. Under the formation of dripping region, monodispersed alginate hydrogels having a narrow size distribution (C.V=2.71%) were produced in the microfluidic device and the size of the hydrogels, ranging from 30 to $60{\mu}m$, could be easily controlled by varying the flow rate, viscosity, and interfacial tension. This simple microfluidic method for the production of monodisperse alginate hydrogels shows strong potential for use in delivery systems of foods, cosmetics, inks, and drugs, and spherical alginate hydrogels which have biocompatibility will be applied to cell transplantation.

Development of 4-Channel Particle Counter based on bluetooth Supporting FMS (FMS를 지원하는 블루투스 기반의 4-채널 미세 입자 계수기 개발)

  • Ohm, Woo-Yong;Ku, Ja-Yl;Park, Sung-Wook
    • Journal of the Institute of Electronics and Information Engineers
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    • v.51 no.3
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    • pp.185-193
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    • 2014
  • In this paper, we developed a 4-channel particle counter for measuring particles, temperature, humidity in production facilities of clean-room environment, and the measured data can be transmitted via bluetooth. To measure the particle size ranging 0.3um~5um, we designed optical lens, particle detection chamber and multi-channel particle detection circuit. And we also developed a FMS program for real-time monitoring of measuring data, which resulted in the stable operation.

Simple and Highly Efficient Droplet Merging Method Using a Microfluidic Device (미세유체소자를 이용한 간단하고 효율적인 액적의 병합)

  • Jin, Byung-Ju;Kim, Young-Won;Yoo, Jung-Yul
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.33 no.3
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    • pp.178-185
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    • 2009
  • Simple and highly efficient droplet merging method is proposed, which enables two nanoliter or picoliter droplets to merge regularly in a straight microchannel. Using a cross channel with inflows of one oil phase through the main channel and two water phases through the side channels, two droplets of different sizes can be generated alternatingly in accordance with flow rate difference of the water phases. It is shown that for a fixed oil phase flow rate, the flow rate of one water phase required for alternating droplet generation increases linearly with the flow rate of another water phase. By this method, the droplets are merged with 100 % efficiency without any additional driving forces.

Thermal and Flow Characteristic of the Microchannel Waterblock with Flow Distributions (미세채널 워터블록의 채널 내 유량분배에 따른 열유동 특성)

  • Choi, Mi-Jin;Kwon, Oh-Kyung;Cha, Dong-An;Yeun, Jae-Ho
    • Proceedings of the SAREK Conference
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    • 2008.11a
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    • pp.269-274
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    • 2008
  • The present study has been studied on a thermal and flow characteristic of the microchannel waterblock with flow distributions in each channels. Results of a numerical analysis using the CFX-11 are compared with results of an experiment. Numerical analysis and experiment are conducted under a heat transfer rate of 150W, inlet temperature of $20^{\circ}C$ and mass flow rates of $0.7{\sim}2.0\;kg$/min. Base temperature and pressure drop are investigated with standard deviations of mass flow rates in each channels of samples at 0.7 kg/min.

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The Characteristics of Wet Etch Process for Sub-micron Channel pattern with High Aspect Ratios (고 종횡비의 미세 채널 패턴에서의 습식 식각 특성 분석)

  • Lee, Chun-Su;Choe, Sang-Su;Baek, Jong-Tae;Yu, Hyeong-Jun
    • Korean Journal of Materials Research
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    • v.5 no.2
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    • pp.208-214
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    • 1995
  • In order to study on the penetrations of HF solution acording to the geometrical shrinkage of contact-hole pattern size, the wet etch characteristics for oxide in microchannel patterns was investigated. Microchannel patterns of LPCVD oxide surrounded by nitride film, with dimensions of 0.1~1$\mu\textrm{m}$ height and 0.1~20$\mu\textrm{m}$, width, were fabricated. And the etch rates of oxide in HF solution were observed. It was found that oxide etch rate for micro-channel patterns in HF was not affected by pattern sizes and initial aspect ratios up to $0.1 \times 0.1 \mu \textrm{m}^{2} size and 1.2$\mu\textrm{m}$ depth. Finally, it was concluded that there were no special limitations for penetrations of HF solution in wet processes according to the geometrical shrinkage of contact-hole pattern size.

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Influence of Aspect Ratio on Friction Characteristics in Rectangular Gas Microchannel Flow (사각 미세채널 유동에서 마찰특성에 미치는 종횡비의 영향)

  • Islam, M.T.;Lee, Y.W.
    • Journal of Power System Engineering
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    • v.13 no.2
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    • pp.18-29
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    • 2009
  • 미세유동에 대한 폭발적인 관심에 의해 이 분야의 연구는 다양한 측면에서 이루어지고 있다. 본 연구는 사각 미세채널에서의 슬립유동에 관한 연구 중 아직 제대로 이루어져 있지 않은 마찰특성에 관한 종횡비의 영향에 초점을 맞추어 3차원 수치해석을 행하였다. 그 결과 종횡비가 1.0 일 때 상하 벽면 및 좌우측 벽면에서의 전단음력은 동일하나, 종횡비가 감소함에 따라 전단응력은 상하 벽면과 좌우측 벽면이 상이한 강도로 증가함을 보였다. 또한 Knudsen 수의 증가에 따라서는 전단응력이 감소함을 알 수 있었다. 따라서 벽면에서의 전단응력은 종횡비를 증가시키거나 혹은 Knudsen 수를 증가시키면 감소시킬 수 있으며, 마찰계수(fRe)도 종횡비를 증가시키거나 혹은 Knudsen 수를 증가시키면 감소됨을 밝혔다.

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