• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.87-88
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.601-602
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• 2008

• Journal of the Korean Society for Precision Engineering
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• v.22 no.4
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• pp.167-172
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• 2005

In this paper. micro electrochemical machining (ECM) for micro structure fabrications is presented. By applying ultra short pulses. the chemical reaction can be restricted only to the region very close to the electrode. Micro ECM is applied to machining micro structures through electrochemical milling process becasuse it doesn't suffer from tool wear. Using this method. 3D micro structures were machined on stainless steel. It was found that micro machining is possible with good surface quality in the low concentration electrolyte,0.1 M H₂SO₄. In ECM, as the machining depth increases, better flushing of electrolyte is required for sufficient ion supply. Layer-by-layer milling is advantageous in flushing. However, layer-by-layer milling causes taper of structures. To reduce the taper, application of a disk-type electrode was introduced. By electrochemical milling, various 3D micro structures including a hemisphere with 60 ㎛ diameter were fabricated.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.4
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• pp.101-108
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• 2002

A specially-built EMM (Electrochemical Micro Machining) / PECM (Pulse Electrochemical Machining) cell, a electrode tool filled with non-conducting material, a electrolyte flow control system and a small & stable gap control unit are developed to achieve accurate dimensions of recesses. Two electrolytes, aqueous sodium nitrate and aqueous sodium chloridc arc applied in this study. The farmer electrolyte has better machine-ability than the latter one because of its appropriate changing to the transpassive state without pits on the surface of workpiece. It is easier to control the machining depth precisely by micrometer with pulse current than direct current. This paper also presents an identification method for the machining depth by in-process analysis of machining current and inter electrode gap size. The inter electrode gap characteristics, inc1uding pulse current, effective volumetric electrochemical equivalent and electrolyte conductivity variations, are analyzed based on the model and experiments.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.05a
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• pp.85-91
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• 2004

최근 MEMS 기술의 비약적인 발달로 인해 미세 가공 기술을 이용하여 높은 종횡비를 갖는 각종 전기소자나 엑츄에이터 들의 제작에 관한 연구가 활발히 진행되고 있다. 금속 구조물을 형성하기 위해서 전해도금의 방식이 널리 쓰여지고 있는데, 이에 본 논문에서는 니켈 전해도금을 위한 장치를 제작하고, 온도, pH, 교반 및 전류밀도 등에 따른 영향을 조사하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.151-152
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.229-230
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.27-28
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.107-108
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• 2010

• Proceedings of the KSME Conference
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• 2001.06c
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• pp.502-506
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• 2001

This paper presents a new method for cutting steel with a diamond tool using electrolysis. The electrolysis is adopted in the diamond cutting to prevent the high chemical activity between a diamond tool and an iron-based workpiece. The basic principle of the method is to oxdize a thin substrate of the workpiece by electrolysis ahead of the diamond tool which cuts the oxidized layer. A desired shape can be obtained by repeating this process. The cutting force is reduced because the diamond tool removes only the weakened material by electroysis. The reduction of the cutting force suppresses the excessive wear of the diamond tool. The oxidization penetrates several micrometers in depth along the previously formed shape. The corrosion rates depend on current density and make suggestions on the optimum cutting conditions.