• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1532-1533
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• 2007

Hollow형 미세바늘 어레이는 주사기와 패치의 장점을 결합하여 여러 종류의 약물을 통증 없이, 전달할 수 있게 한다. 본 논문에서는 건식 식각 방법과 습식 식각 방법을 이용하여 hollow형 실리콘 미세바늘 어레이를 제작하는 제작 공정과 그 결과를 제시하였다. 미세바늘 어레이의 형태는 실리콘 웨이퍼의 앞면에서 세 번의 식각 공정을 이용해 제작되었는데, 첫 번째 건식 식각 공정으로 피부에의 침투를 원활히 하기 위해 바늘 끝을 형성하고, 두 번째 건식 식각 공정으로 바늘의 길이를 조절하며, 마지막 HNA solution을 이용한 습식 식각 공정으로 바늘을 더 가늘게 만들면서 끝을 더 날카롭게 식각한다. 바늘을 통해 약물전달이 가능하도록 웨이퍼의 뒷면으로부터 건식 식각 공정을 이용해 약물 주입통로를 형성하였다. 제작된 Hollow형 실리콘 미세바늘 어레이는 $170\;{\mu}m$의 너비와 $230\;{\mu}m$의 길이, 직경 $40\;{\mu}m$의 약물 주입통로를 가지고 있으며, $1\;cm^2$의 시편 위에 $1000\;{\mu}m$의 피치로 $9{\times}9$ 개의 바늘을 형성하였다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.12
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• pp.1871-1876
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• 2004

We demonstrate a novel fabrication technology for the microneedle array that can be used in the medical test field, which is transdermal drug delivery and blood analyte sampling. Previous researchers have used silicon-processed micromachining, a reactive ion etching, and molding techniques for the fabrication of microneedle array. However, these fabrication techniques have somewhat limitations apply to the microneedle array fabrication according to its application. Inclined LIGA process is suggested to overcome these problems. This process provides easier, sharper and longer out-of-plane microneedle array structure than conventional silicon-processed fabrication method did. Additionally, because of the advantage of the LIGA process based on mold fabrication for mass production, the polymer, PMMA(PolyMethylMethAcrylate), based microneedle array is useful as the mold base of nickel electroplating process; on the other hand, silicon-processed microneedle array is used in itself. In this research, we fabricate different types of out-of-plane microneedle array, which have different shape of tip, base and hole structure, using the inclined LIGA process. The fabricated microneedles have proper mechanical strength, height and sharpness to puncture human hand epidermis or dermis with less pain and without needle tip break during penetrating the skin.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.12
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• pp.2221-2225
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• 2007

Hollow-type microneedle array can be used for painless, continuous and stable drug delivery through a human skin. The needles must be sharp and have sufficient length in order to penetrate the epidermis. An array of hollow-type silicon microneedles was fabricated by using deep reactive ion etching and HNA wet etching with two oxide masks. Isotropic etching was used to create tapered tips of the needles, and anisotropic etching of Bosch process was used to make the extended length and holes of microneedles. The microneedles were formed by three steps of isotropic, anisotropic, and isotropic etching in order. The holes were made by one anisotropic etching step. The fabricated microneedles have $170{\mu}m$ width, $40{\mu}m$ hole diameter and $230{\mu}m$ length.