• Title/Summary/Keyword: 미세드릴

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Electrochemical Characterization of Anti-Corrosion Film Coated Metal Conditioner Surfaces for Tungsten CMP Applications (텅스텐 화학적-기계적 연마 공정에서 부식방지막이 증착된 금속 컨디셔너 표면의 전기화학적 특성평가)

  • Cho, Byoung-Jun;Kwon, Tae-Young;Kim, Hyuk-Min;Venkatesh, Prasanna;Park, Moon-Seok;Park, Jin-Goo
    • Journal of the Microelectronics and Packaging Society
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    • v.19 no.1
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    • pp.61-66
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    • 2012
  • Chemical Mechanical Planarization (CMP) is a polishing process used in the microelectronic fabrication industries to achieve a globally planar wafer surface for the manufacturing of integrated circuits. Pad conditioning plays an important role in the CMP process to maintain a material removal rate (MRR) and its uniformity. For metal CMP process, highly acidic slurry containing strong oxidizer is being used. It would affect the conditioner surface which normally made of metal such as Nickel and its alloy. If conditioner surface is corroded, diamonds on the conditioner surface would be fallen out from the surface. Because of this phenomenon, not only life time of conditioners is decreased, but also more scratches are generated. To protect the conditioners from corrosion, thin organic film deposition on the metal surface is suggested without requiring current conditioner manufacturing process. To prepare the anti-corrosion film on metal conditioner surface, vapor SAM (self-assembled monolayer) and FC (Fluorocarbon) -CVD (SRN-504, Sorona, Korea) films were prepared on both nickel and nickel alloy surfaces. Vapor SAM method was used for SAM deposition using both Dodecanethiol (DT) and Perfluoroctyltrichloro silane (FOTS). FC films were prepared in different thickness of 10 nm, 50 nm and 100 nm on conditioner surfaces. Electrochemical analysis such as potentiodynamic polarization and impedance, and contact angle measurements were carried out to evaluate the coating characteristics. Impedance data was analyzed by an electrical equivalent circuit model. The observed contact angle is higher than 90o after thin film deposition, which confirms that the coatings deposited on the surfaces are densely packed. The results of potentiodynamic polarization and the impedance show that modified surfaces have better performance than bare metal surfaces which could be applied to increase the life time and reliability of conditioner during W CMP.

Effects of Limestone Powder and Silica Fume on the Hydration and Pozzolanic Reaction of High-Strength High-Volume GGBFS Blended Cement Mortars (고강도 고함량 고로슬래그 혼합 시멘트 모르터의 수화 및 포졸란 반응에 미치는 석회석 미분말과 실리카퓸의 영향)

  • Jeong, Ji-Yong;Jang, Seung-Yup;Choi, Young-Cheol;Jung, Sang-Hwa;Kim, Sung-Il
    • Journal of the Korea Concrete Institute
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    • v.27 no.2
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    • pp.127-136
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    • 2015
  • To evaluate the effects of limestone powder and silica fume on the properties of high-strength high-volume ground granulated blast-furnace slag (GGBFS) blended cement concrete, this study investigated the rheology, strength development, hydration and pozzolanic reaction characteristics, porosity and pore size distribution of high-strength mortars with the water-to-binder ratio of 20, 50 to 80% GGBFS, up to 20% limestone powder, and up to 10% silica fume. According to test results, compared with the Portland cement mixture, the high-volume GGBFS mixture had much higher flow due to the low surface friction of GGBFS particles and higher strength in the early age due to the accelerated cement hydration by increase of free water; however, because of too low water-to-binder ratio and cement content, and lack of calcium hydroxide content, the pozzolanic reactio cannot be activated and the long-term strength development was limited. Limestone powder did not affect the flowability, and also accelerate the early cement hydration. However, because its effect on the acceleration of cement hydration is not greater than that of GGBFS, and it does not have hydraulic reactivity unlikely to GGBFS, compressive strength was reduced proportional to the replacement ratio of limestone powder. Also, silica fume and very fine GGBFS lowered flow and strength by absorbing more free water required for cement hydration. Capillary porosities of GGBFS blended mortars were smaller than that of OPC mortar, but the effect of limestone powder on porosity was not noticeable, and silica fume increased porosity due to low degree of hydration. Nevertheless, it is confirmed that the addition of GGBFS and silica fume increases fine pores.

Effective Geophysical Methods in Detecting Subsurface Caves: On the Case of Manjang Cave, Cheju Island (지하 동굴 탐지에 효율적인 지구물리탐사기법 연구: 제주도 만장굴을 대상으로)

  • Kwon, Byung-Doo;Lee, Heui-Soon;Lee, Gyu-Ho;Rim, Hyoung-Rea;Oh, Seok-Hoon
    • Journal of the Korean earth science society
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    • v.21 no.4
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    • pp.408-422
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    • 2000
  • Multiple geophysical methods were applied over the Manjang cave area in Cheju Island to compare and contrast the effectiveness of each method for exploration of underground cavities. The used methods are gravity, magnetic, electrical resistivity and GPR(Ground Pentrating Radar) survey, of which instruments are portable and operations are relatively economical. We have chosen seven survey lines and applied appropriate multiple surveys depending on the field conditions. In the case of magnetic method. two-dimensional grid-type surveys were carried out to cover the survey area. The geophysical survey results reveal the characteristic responses of each method relatively well. Among the applied methods, the electric resistivity methods appeared to be the most effective ones in detecting the Manjang Cave and surrounding miscellaneous cavities. Especially, on the inverted resistivity section obtained from the dipole-dipole array data, the two-dimensional distribution of high resistivity cavities are revealed well. The gravity and magnetic data are contaminated easily by various noises and do not show the definitive responses enough to locate and delineate the Manjang cave. But they provide useful information in verifying the dipole-dipole resistivity survey results. The grid-type 2-D magnetic survey data show the trend of cave development well, and it may be used as a reconnaissance regional survey for determining survey lines for further detailed explorations. The GPR data show very sensitive response to the various shallow volcanic structures such as thin spaces between lava flows and small cavities, so we cannot identify the response of the main cave. Although each geophysical method provides its own useful information, the integrated interpretation of multiple survey data is most effective for investigation of the underground caves.

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Fatigue fracture of different dental implant system under cyclic loading (반복하중에 따른 수종 임플란트의 피로파절에 관한 연구)

  • Park, Won-Ju;Cho, In-Ho
    • The Journal of Korean Academy of Prosthodontics
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    • v.47 no.4
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    • pp.424-434
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    • 2009
  • Statement of problem: Problems such as loosening and fractures of retained screws and fracture of implant fixture have been frequently reported in implant prosthesis. Purpose: Implant has weak mechanical properties against lateral loading compared to vertical occlusal loading, and therefore, stress analysis of implant fixture depending on its material and geometric features is needed. Material and methods: Total 28 of external hexed implants were divided into 7 of 4 groups; Group A (3i, FULL $OSSEOTITE^{(R)}$Implant), Group B (Nobelbiocare, $Br{\aa}nemark$ $System^{(R)}$Mk III Groovy RP), Group C (Neobiotec, $SinusQuick^{TM}$ EB), Group D (Osstem, US-II). The type III gold alloy prostheses were fabricated using adequate UCLA gold abutments. Fixture, abutment screw, and abutment were connected and cross-sectioned vertically. Hardness test was conducted using MXT-$\alpha$. For fatigue fracture test, with MTS 810, the specimens were loaded to the extent of 60-600 N until fracture occurred. The fracture pattern of abutment screw and fixture was observed under scanning electron microscope. A comparative study of stress distribution and fracture area of abutment screw and fixture was carried out through finite element analysis Results: 1. In Vicker's hardness test of abutment screw, the highest value was measured in group A and lowest value was measured in group D. 2. In all implant groups, implant fixture fractures occurred mainly at the 3-4th fixture thread valley where tensile stress was concentrated. When the fatigue life was compared, significant difference was found between the group A, B, C and D (P<.05). 3. The fracture patterns of group B and group D showed complex failure type, a fracture behavior including transverse and longitudinal failure patterns in both fixture and abutment screw. In Group A and C, however, the transverse failure of fixture was only observed. 4. The finite element analysis infers that a fatigue crack started at the fixture surface. Conclusion: The maximum tensile stress was found in the implant fixture at the level of cortical bone. The fatigue fracture occurred when the dead space of implant fixture coincides with jig surface where the maximum tensile stress was generated. To increase implant durability, prevention of surrounding bone resorption is important. However, if the bone resorption progresses to the level of dead space, the frequency of implant fracture would increase. Thus, proper management is needed.

The effect of Ca-P coatings of anodized implant surface on response of osteoblast-like cells in vitro (임플란트 표면의 Ca-P 코팅 방법이 MG63 골모유사세포 반응에 미치는 영향에 대한 in vitro 연구)

  • Kim, Il-Yeon;Jung, Sung-Min;Hwang, Soon-Jung;Shin, Sang-Wan
    • The Journal of Korean Academy of Prosthodontics
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    • v.47 no.4
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    • pp.376-384
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    • 2009
  • Purpose: The purpose of this study was to evaluate the response of osteoblast-like cells to Ca-P coated surface obtained via Ion beam-assisted deposition (IBAD) method and Sol-Gel process on anodized surface by cellular proliferation and differentiation. Material and methods: The surface of a commercially pure titanium (Grade IV) discs with dimension of 10mm diameter and 2 mm thickness was modified by anodic oxidation under a constant voltage of 300 V. The experimental groups were coated with Ca-P by the IBAD method and Sol-Gel process on anodized surface. The surface roughness (Ra) of specimens was measured by optical interferometer and each surface was examined by SEM. To evaluate cell response, MG63 cells were cultured and cell proliferation, ALP activity and the ability of cell differentiation were examined. Also, cell morphology was examined by SEM. The significant of each group was verified by Kruskal-Wallis Test ($\alpha$=.05). Results: The Ra value of Ca-P coated surface by IBAD method was significantly higher than Ca-P coated surface by Sol-gel process (P < .05). The level of cell proliferation and ALP activity was higher in Ca-P coated surface by IBAD method (P<.05). The expression of ALP showed higher level expression in Ca-P coated surface by IBAD method. Cells grown on Ca-P coated surface by IBAD method were uniformly distributed and developed a very close layer. Conclusion: These experiments showed better performances of Ca-P coated surface by IBAD method with respect to Ca-P coated surface by Sol-gel process. Ca-P coated surface by IBAD method appear to give rise more mature osteoblast characteristics and might result in increased bone growth and bone-implant contact.

Effects of Omija (Schizandra chinensis Baillon) Concentrate on Blood Alcohol Clearance and Hepatoprotective Function in Rats Induced by Acute Ethanol Intoxication and Chronic Ethanol Treatment (오미자농축액이 급성주정중독량 및 장기간 주정을 투여한 흰쥐의 혈중 알코올 분해율과 간 기능 보호에 미치는 영향)

  • Han, Chan-Kyu;Seong, Ki-Seung;Lee, Kyung-Won;Park, Sung-Sun;Jeong, Ji-Yun;Kim, Sung-Soo
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.43 no.8
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    • pp.1139-1147
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    • 2014
  • We investigated whether or not Schisandra chinensis (SC), a traditional herbal medicine, has protective effects against alcohol-induced fatty liver and blood alcohol clearance. Two tests focused on acute intoxication and chronic ethanol treatment were carried out. For the chronic ethanol treatment test, rats were fed ethanol by intragastric administration everyday for 8 weeks to induce alcoholic fatty liver. Ethanol treatment significantly increased blood alcohol concentration at 90 min after acute ethanol intoxication. Compared with the two ethanol-treated groups, rats administered ethanol along with SC extracts showed an approximately 13% increased blood alcohol clearance rate at 360 min. Chronic ethanol treatment significantly increased serum and hepatic triglyceride (TG) levels, and caused fatty degeneration of liver. Ethanol treatment also elevated the serum total-cholesterol (TC) level. However, after feeding of ethanol plus SC extracts, ethanol-induced elevation of hepatic TG levels reversed, whereas elevation of serum TG and TC levels was not observed after treatment with SC extracts. Ethanol treatment significantly increased ${\gamma}$-GT, aspartate aminotransferase, and alanine aminotransferase activities after 8 weeks. Compared with the ethanol-fed group, rats administered ethanol plus SC extracts for 4 weeks showed attenuated fatty degeneration as well as decreased hepatic function test values. SC administration also significantly increased intracellular lipid accumulation in hepatocytes and reduced steatosis score and hepatic TG levels, as measured by biochemical and histolopathological analyses. Our results indicate that the protective effects of SC are accompanied by a significant decrease in hepatic TG levels, thereby suggesting SC has the ability to prevent ethanol-induced fatty liver, by reducing hepatic TG and enzyme levels in alcoholic rats.

Change of Frequency of Chromosome Aberration by Time Interval after Radiation Therapy (방사선 치료후 시간경과에 따른 염색체이상 빈도의 변화)

  • Kim, Mi-Sook;Yi, Chun-Ja;Ha, Sung-Whan;Song, Myung-Jae;Kim, Hee-Jeun
    • Journal of Radiation Protection and Research
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    • v.19 no.1
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    • pp.51-68
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    • 1994
  • It is good method to use frequency of chromosome aberration in Lymphocytes for a biological dosimetry in cases of accidental exposure to radiation. But in cases of past exposure, biological dosimetry is limited because the frequency of aberration decreases by time after exposure. To provide a basic data for estimation of past radiation exposure, the changing pattern of frequency of unstable chromosome aberration by time interval after exposure was studied. Observation was made on peripheral lymphocytes of 41 blood samples from 20 patients treated for uterine cervical carcinoma and endometrial carcinoma. The patients received 50.4Gy radiation to whole pelvis. Elapsed times after the completion of radiation therapy were 1 day, 3, 6, 9, 12, 24, 52, 104, 156, 208, 260 and 520 weeks. All the blood sample were microcultured. The Ydr, Qdr and Qdra were calculated from frequency of unstable aberration. Ydr did not decrease for 3 weeks after radiation therapy, and thereafter, decreased very rapidly and reached 0.05 at two years after radiation therapy and decreased very slowly until 5 years after radiation therapy. Relationship between unstable chromosome aberration and time interval after radiation therapy was described as $Ydr=0.259{\times}exp(-0.0429T)+0.0560{\times}exp(-0.00106T)$ (time in weeks) Qdr remained constant at 1.51 until 24 weeks after radiation therapy and then decreased to 1.17 at 52 weeks. Therafter, it did not change. Qdra remained constant at 1.10 for 12 weeks after radiation therapy and decreased to 0.81 at 52 weeks. Thereafter, it remained constant. Two superimposed exponential Ydr disappearance rate suggests that it is possible to calculate the past exposure dose. When the elapsed time after exposure is short, Qdr and Qdra are useful papameters for biological dosimetry for past radiation exposure.

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Inhibition of Viability and Genetic Change in Hypoxia-treated Lung Pericytes (허파혈관주위세포에서 저산소증에 의한 생존능의 억제와 유전자 발현의 변화)

  • Shin, Jong Wook;Kim, Kae-Young;Lee, Young Woo;Jung, Jae Woo;Lee, Byoung Jun;Kim, Jae-Yeol;Jo, Inho;Park, In Won;Choi, Byoung Whui
    • Tuberculosis and Respiratory Diseases
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    • v.57 no.1
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    • pp.37-46
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    • 2004
  • Background : Lung pericytes are important constituent cells of blood-air barrier in pulmonary microvasculature. These cells take part in the control of vascular contractility and permeability. In this study, it was hypothesized that change of lung pericytes might be attributable to pathologic change in microvasculature in acute lung injury. The purpose of this study was how hypoxia change proliferation and genetic expression in lung pericytes. Methods : From the lungs of several Sprague-Dawley rats, performed the primary culture of lung pericytes and subculture. Characteristics of lung pericytes were confirmed with stellate shape in light microscopy and immunocytochemistry. 2% concentration of oxygen and $200{\mu}M$ $CoCl_2$ were treated to cells. Tryphan blue method and reverse transcription-polymerase chain reaction were done. Results : 1. We established methodology for primary culture of lung pericytes. 2. Hypoxia inhibited cellular proliferation in pericytes. 3. Hypoxia could markedly induce vascular endothelial growth factor(VEGF) and smad-2. 4. Hypoxia-inducible factor-$1{\alpha}$(HIF-$1{\alpha}$) was also induced by 2% oxygen. Conclusion : Viability of lung pericytes are inhibited by hypoxia. Hypoxia can stimulate expression of hypoxia-responsive genes. Pericytic change may be contributed to dysfunction of alveolar-capillary barrier in various pulmonary disorders.

Impact Resistance Reliability of Sn-1.2Ag-0.5Cu-0.4In Solder Joints (Sn-1.2Ag-0.5Cu-0.4In 조성 솔더 접합부의 내 충격 신뢰성 평가)

  • Yu, A-Mi;Lee, Chang-Woo;Kim, Jeong-Han;Kim, Mok-Soon;Lee, Jong-Hyun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.226-226
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    • 2008
  • 지난 10여년 동안 Sn-3.0Ag-0.5(wt%)Cu 합금은 대표 무연솔더 조성으로 다양한 전자제품의 실장 및 접합에 적용되어 왔으며, 그 신뢰성 역시 충분히 검증된 바 있다. 그러나 최근 Ag 가격의 급격한 상승과 솔더 접합부의 내 충격 신뢰성을 보다 향상시키고자 하는 업계의 동향은 Ag의 함량이 낮은 무연솔더 조성의 적용 확대를 유도하고 있다. 이에 따라 본 연구자들은 저 Ag 함유 무연슬더로 Sn-1.2Ag-0.5Cu-0.4In 조성을 제안한 바 있는데, 이는 Sn-3.0Ag-0.5Cu 조성 이상의 solderability를 가지면서도 그 금속원료 가격이 약 20% 가량 저렴한 특징을 가진다. 또한 열 싸이클링 (cycling) 테스트를 통한 슬더 조인트의 신뢰성을 평가한 결과, Sn-3.0Ag-0.5Cu에 크게 뒤떨어지지 않는 양호한 특성이 관찰되었다. 따라서 본 연구에서는 열 싸이클링 테스트와 더불어 최근 그 중요성이 지속적으로 커지고 있는 내 충격 신뢰성 평가 시험을 실시하여 개발된 4원계 무연솔더 조성의 기계적 특성을 기존 무연솔더 조성과 비교, 분석해 보았다. 각 솔더 조성은 솔더 볼 형태로 제조되어 CSP(Chip Scale Package) 상에 범핑 (bumping)되었으며, CSP를 PCB(Printed Circuit Board) 상에 실장하는 공정에서도 Sn-3.0Ag-0.5Cu 및 Sn-1.2Ag-0.5Cu-0.4In의 두 종류의 솔더 페이스트가 사용되었다. 본 연구에서의 내 충격 신뢰성 시험에는 자체 제작한 rod drop 시험기를 사용하였는데, 고정된 CSP 실장 board의 후면 부위를 일정한 높이에서 추를 반복적으로 자유 낙하시켜 급격한 충격을 주는 방식으로 실험을 실시하였다. 이 때 추의 무게는 30g, 낙하 높이는 10cm 였으며, 추의 낙하 시 측정된 board 의 휨 변위량은 약 0.7mm로 측정되었다. 사용된 CSP와 PCB 는 모두 daisy chain 방식으로 연결되어 있기 때문에 저항측정기를 사용한 간단한 실시간 저항 측정 방법으로 시험 이력에 따른 파단부의 발생 시점과 대략의 위치를 손쉽게 확인할 수 있었다. 솔더 조인트의 파단 기준 저항값으로 $1000\Omega$을 설정하였으며. 각 조건 당 5 개 이상의 샘플에 대해 평가를 실시한 후 그 평균값을 조사하였다. 시험 결과 제안된 Sn-1.2Ag-0.5Cu-0.4In 조성은 대표적인 저 Ag 함유 조성인 Sn-1.0Ag-0.5Cu에 비해서는 떨어지는 내 충격 신뢰성을 나타내었지만, 우수한 연성에 기인하여 Sn-3.0Ag-0.5Cu 조성에 비해서는 약 2 배 이상 우수한 신뢰성이 관찰되었다. 또한 CSP의 실장 시 Sn-3.0Ag-0.5Cu보다 Sn-1.2Ag-0.5Cu-0.4In 조성 솔더 페이스트를 적용한 경우에서 보다 우수한 내 충격 신뢰성을 나타내어 기본적으로 개발된 Sn-1.2Ag-0.5Cu-0.4In 솔더 페이스트가 Sn-3.0Ag-0.5Cu 조성의 기존 솔더 페이스트 보다 내 충격 신뢰성이 우수함을 검증할 수 있었다. 각 조성의 솔더 조인트를 $150^{\circ}C$ 에서 500시간 aging한 후 실시한 내 충격 신뢰성 평가에서는 모든 조성에서 그 신뢰성이 급감하는 경항을 나타내었으나, Sn-1.2Ag-0.5Cu-0.4In가 Sn-l.0Ag-0.5Cu보다도 그 상대적인 신뢰성이 우수한 것으로 관찰되었다. 이와 같이 aging 후 실시하는 충격시험은 가장 실제적인 상황과 유사한 조건이므로 상기의 실험 결과는 매우 고무적이었으며, 이에 대한 보다 면밀한 분석이 요청되었다. 마지막으로 파면 및 미세조직 관찰을 통하여 각 조성에서의 충격 파단 특성을 비교, 분석해 보았다.

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Factors Affecting the Property of $CaCO_3$Precipitated from $CaCl_2-Na_2CO_3-H_2O$ System ($CaCl_2-Na_2CO_3-H_2O$ 반응계에서 침강성탄산칼슘의 성상에 영향을 주는 인자에 관하여)

  • Song, Young-Jun;Park, Charn-Hoon;Cho, Dong-Sung
    • Resources Recycling
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    • v.5 no.4
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    • pp.32-41
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    • 1996
  • The objective of this study was to investigate the facton affecting the property of CaCO, farmed from CaClz-Na,CO,-HiOsystem. The effcct of the concentmtlon of reaclants, impurity, the pH of reaction, the addition of sccd crystal, and injectingvelocity af reaclant solution an thc yield oI CaCO; polymorphs. parlide size and whiteness of CaCO, were investigated. Thcmqor resulls are ;o fallows; I The optimum concentratinn of reildilnts for forming vaterlte and aragonite is the range of 0.1-1.0 mol/l, when the yicld of vittcrite and araga~nles howed 7542% and XU-90%. respedively. 2. Among thc composition of impunticscontained h limestone, Fe' decrease the wh~tcness nf CaCO;. md Mg" increase the yield of aragonite. 3. The pHrange of vaterite and aragonite are formed with high yield is 8-11, and Calcite is famed in pH 6-8 with big particle size of 1over and in pH 11-13 with small particle size of I under. 4. The yicld of calcite and aragonite was increased by addingthc seed cryst.al nf itself.d cryst.al nf itself.

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