• Title/Summary/Keyword: 미세공정기술

Search Result 593, Processing Time 0.024 seconds

Application of MODIS Aerosol Data for Aerosol Type Classification (에어로졸 종류 구분을 위한 MODIS 에어로졸 자료의 적용)

  • Lee, Dong-Ha;Lee, Kwon-Ho;Kim, Young-Joon
    • Korean Journal of Remote Sensing
    • /
    • v.22 no.6
    • /
    • pp.495-505
    • /
    • 2006
  • In order to classify aerosol type, Aerosol Optical Thickness (AOT) and Fine mode Fraction (FF), which is the optical thickness ratio of small particles$(<1{\mu}m)$ to total particles, data from MODIS (MODerate Imaging Spectraradiometer) aerosol products were analyzed over North-East Asia during one year period of 2005. A study area was in the ocean region of $20^{\circ}N\sim50^{\circ}N$ and $110^{\circ}E\simt50^{\circ}E$. Three main atmospheric aerosols such as dust, sea-salt, and pollution can be classified by using the relationship between AOT and FF. Dust aerosol has frequently observed over the study area with relatively high aerosol loading (AOT>0.3) of large particles (FF<0.65) and its contribution to total AOT in spring was up to 24.0%. Pollution aerosol, which is originated from anthropogenic sources as well as a natural process like biomass burning, has observed in the regime of high FF (>0.65) with wide AOT variation. Average pollution AOT was $0.31{\pm}0.05$ and its contribution to total AOT was 79.8% in summer. Characteristic of sea-salt aerosol was identified with low AOT (<0.3), almost below 0.1, and slightly higher FF than dust and lower FF than pollution. Seasonal analysis results show that maximum AOT $(0.33{\pm}0.11)$ with FF $(0.66{\pm}0.21)$ in spring and minimum AOT $(0.19{\pm}0.05)$, FF $(0.60{\pm}0.14)$ in fall were observed in the study area. Spatial characteristic was that AOT increasing trend is observed as closing to the eastern part of China due to transport of aerosols from China by the prevailing westerlies.

Dry Etching of Flexible Polycarbonate and PMMA in O2/SF6/CH4 Discharges (O2/SF6/CH4 플라즈마를 이용한 플렉시블 Polycarbonate와 PMMA의 건식 식각)

  • Joo, Y.W.;Park, Y.H.;Noh, H.S.;Kim, J.K.;Lee, J.W.
    • Journal of the Korean Vacuum Society
    • /
    • v.18 no.2
    • /
    • pp.85-91
    • /
    • 2009
  • There has been a rapid progress for flexible polymer-based MEMS(Microelectromechanical Systems) technology. Polycarbonate (PC) and Poly Methyl Methacrylate (PMMA), so-called acrylic, have many advantages for optical, non-toxic and micro-device application. We studied dry etching of PC and PMMA as a function of % gas ratio in the $O_2/SF_6/CH_4$ temary plasma. A photoresist pattern was defined on the polymer samples with a mask using a conventional lithography. Plasma etching was done at 100 W RIE chuck power and 10 sccm total gas flow rate. The etch rates of PMMA were typically 2 times higher than those of PC in the whole experimental range. The result would be related to higher melting point of PC compared to that of PMMA. The highest etch rates of PMMA and PC were found in the $O_2/SF_6$ discharges among $O_2/SF_6$, $O_2/CH_4$ and $SF_6/CH_4$ and $O_2/SF_6/CH_4$ plasma composition (PC: ${\sim}350\;nm/min$ at 5 sccm $O_2/5$ sccm $SF_6$, PMMA: ${\sim}570\;nm/min$ at 2.5 sccm $O_2/7.5$ sccm $SF_6$). PC has smoother surface morphology than PMMA after etching in the $O_2/SF_6/CH_4$ discharges. The surface roughness of PC was in the range of 1.9$\sim$3.88 nm. However, that of PMMA was 17.3$\sim$26.1 nm.

Effect of Antibody Immobilization Method to Magnetic Micro Beads on its Immunobinding Characteristics (자성 미세입자에의 항체 고정화 방법이 면역결합반응에 미치는 영향)

  • Choi, Hyo Jin;Hwang, Sang Youn;Jang, Dae Ho;Cho, Hyung Min;Kang, Jung Hye;Seong, Gi Hun;Choo, Jae Bum;Lee, Eun Kyu
    • Korean Chemical Engineering Research
    • /
    • v.44 no.1
    • /
    • pp.65-72
    • /
    • 2006
  • Recent technical advances in the biorecognition engineering and the microparticle fabrication may enable us to develop the single step purification using magnetic particle, because of its simplicity, efficacy, ease of automation, and process economics. In this study, we used commercial magnetic particles from Seradyn, Inc. (Indianapolis, USA). It was ca. 2.8 micron in diameter, consisted of polystyrene core and magnetite coating, and its surface had carboxyl groups. The model, capture protein was IgG and anti-IgG was used as the ligand molecule. We studied the different surfaces ('nude', ester-activated, and anti-IgG coated) for their biorecognition of IgG. At a high pH condition, we could reduce non-specific binding. Also anti-IgG immobilized magnetic particle could capture IgG more selectively. We attempted 'oriented immobilization' of anti-IgG, in which the polysaccharides moiety near the C-terminus was selectively oxidized and linked to the hydrazine-coated MP, to improve the efficacy of biorecognitive binding. Using this method, the IgG capturing ability was improved by ca. 2 fold. From the binary mixture of the IgG-insulin, IgG could be more selectively captured. In summary, the oriented immobilization of oxidized anti-IgG proved to be as effective as the streptavidin-biotin system and yet simpler and cost-effective. This immobilization method can find its applications in protein biochips and biotargeting.