• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2006.04a
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• pp.45-48
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• 2006

혼합유류(등,경유)로 오염된 대상부지의 토양특성을 파악하여 세척공법의 적용성을 판단하고, 적용성시험을 통하여 장치별 설계인자를 도출하였다. 시험결과 본 세척대상토양의 경우 계면활성제와 같은 첨가제를 주입하지 않고 물리적인 탈착공정만을 거쳐도 90%이상의 오염물질이 토양입자표면으로부터 탈착됨을 알 수 있었으며, 이를 반영하여 장치를 제작, 설치하였다. 세척대상 오염토량은 총 $12,225m^3$, 사업수행기간은 약 6개월, 세척장치에 주입된 세척토양의 평균오염농도는 약 3,152ppm 이었으며 세척 완료된 토양의 평균농도는 약 150ppm으로 약 97%의 제거효율을 보여 복원목표인 800ppm을 만족시킬 수 있었다. 그리고, 세척토양의 입도분포를 정확히 파악하고 분리시킬 토양입자 크기를 결정하여 현장 적용한 결과 세척공법으로부터 배출되는 응집슬러지를 최소화할 수 있었으며, 발생되는 세척폐수 또한 세척수 처리시스템을 거쳐 재활용 할 수 있도록 하였다. 이런 결과를 통하여 세척공법이 다른 Ex-situ 공법과 비교하였을 경우 현장의 적용성, 경제성, 복원기간 등을 감안하였을 경우 성공적인 세척공법의 적용사례라 할 수 있다.

• Journal of Soil and Groundwater Environment
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• v.14 no.5
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• pp.62-70
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• 2009

A field soil highly contaminated with petroleum hydrocarbons (JP-8 and diesel fuels) was employed for its remediation by a lab-scale thermal desorption process. The soil was collected in the vicinity of an underground storage tank in a closed military base and its contamination level was as high as 4,476 ppm as total petroleum hydrocarbon (TPH). A lab scale directly-heated low temperature thermal desorption (LTTD) system of 10-L capacity was developed and operated for the thermal treatment of TPH contaminated soils in this study. The desired operation temperature was found to be approximately $200-300^{\circ}C$ from the thermal gravimetric analysis of the contaminated field soils. The removal efficiencies higher than 90% were achieved by the LTTD treatment at $200^{\circ}C$ for 10 min as well as at $300^{\circ}C$ for 5 min. As the water content in the soils increased and therefore they were likely to be present as lumps, the removal efficiency noticeably decreased, indicating that a pre-treatment such as field drying should be required. The analysis of physical and chemical properties of soils before and after the LTTD treatment demonstrated that no significant changes occurred during the thermal treatment, supporting no needs for additional post-treatments for the soils treated by LTTD. The results presented in this study are expected to provide useful information for the field application and verification of LTTD for the highly contaminated geo-environment.

• Applied Chemistry for Engineering
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• v.1 no.2
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• pp.215-223
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• 1990

The effects of sulfur on the catalytic reaction between CO and NO on polycrystalline Pt surface, which is very important in the development of catalyst for automobile exhaust gas control, have been studied using thermal desorption spectrometry(TDS) under ultra-high vacuum(UHV) conditions. Sulfur weakened both the adsorptions of CO and NO by direct site blocking and indirect electronic effect. S(a) desorbing below 800 K gave little effect on reaction activity whereas S(a) desorbing above 800 K, which adsorbs as an atomic state, gave much effect on it. The adsorbed sulfur existed on the surface of platinum in the form of islands, and also reduced the adsorption energies of adsorbates by the long-ranged electronic effect. The platinum catalyst in the reaction between CO and NO was poisoned selectively by S(a), poisoning firstly the active sites of this reaction.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.128-128
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• 2016

Cu 배선폭 미세화 기술은 반도체 디바이스의 성능 향상을 위한 핵심 기술이다. 현재 배선 기술은 lithography, deposition, planarization등 종합적인 공정 기술의 발전에 따라 10x nm scale까지 감소하였다. 하지만 지속적인 feature size 감소를 위하여 요구되는 높은 공정 기술 및 비용과 배선폭 미세화로 인한 재료의 물리적 한계로 인하여 배선폭 미세화를 통한 성능의 향상에는 한계가 있다. 배선폭 미세화를 통한 2차원적인 집적도 향상과는 별개로 chip들의 3차원 적층을 통하여 반도체 디바이스의 성능 향상이 가능하다. 칩들의 3차원 적층을 위해서는 별도의 3차원 배선 기술이 요구되는데, TSV(through-Si-via)방식은 Si기판을 관통하는 via를 통하여 chip간의 전기신호 교환이 최단거리에서 이루어지는 가장 진보된 형태의 3차원 배선 기술이다. Si 기판에 $50{\mu}m$이상 깊이의 via 및 seed layer를 형성 한 후 습식전해증착법을 이용하여 Cu 배선이 이루어지는데, via 내부 Cu ion 공급 한계로 인하여 일반적인 공정으로는 void와 같은 defect가 형성되어 배선 신뢰성에 문제를 발생시킨다. 이를 해결하기 위해 각종 유기 첨가제가 사용되는데, suppressor를 사용하여 Si 기판 상층부와 via 측면벽의 Cu 증착을 억제하고, accelerator를 사용하여 via 바닥면의 Cu 성장속도를 증가시켜 bottom-up TSV filling을 유도하는 방식이 일반적이다. 이론적으로, Bottom-up TSV filling은 sample 전체에서 Cu 성장을 억제하는 suppressor가 via bottom의 강한 potential로 인하여 국부적 탈착되고 via bottom에서만 Cu가 증착되어 되어 이루어지므로, accelerator가 없이도 void-free TSV filling이 가능하다. Accelerator가 Suppressor를 치환하여 오히려 bottom-up TSV filling을 방해한다는 보고도 있었다. 본 연구에서는 유기 첨가제의 치환으로 인한 TSV filling performance 저하를 방지하고, 유기 첨가제 조성을 단순화하여 용액 관리가 용이하도록 하기 위하여 suppressor만을 이용한 TSV filling 연구를 진행하였다. 먼저, suppressor의 흡착, 탈착 특성을 이해하기 위한 연구가 진행되었고, 이를 바탕으로 suppressor만을 이용한 bottom-up Cu TSV filling이 진행되었다. 최종적으로 $60{\mu}m$ 깊이의 TSV를 1000초 내에 void-free filling하였다.

• Korean Chemical Engineering Research
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• v.50 no.3
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• pp.551-555
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• 2012

Desorption reaction characteristics of the commercial activated carbons which were used for the removal of industrial odorants were investigated. BET specific surface area was analyzed to investigate the chemicophysical property of activated carbon. Adsorptivity of activated carbon was estimated by iodine number. Thermogravimetric analyzer (TGA) was used to investigate the desorption characteristics. Activation energies and reaction orders for reaction characteristics according to adsorption and desorption of activated carbons were estimated by employing the Friedman method and Freeman-Carroll method. Adsorptivity of reprocessed activated carbons were significantly lower than that of fresh activated carbons. In this study, it was found that the activation energies were 15.9~23.4 kJ/mol in Friedman method and 22.7~33.8 kJ/mol in Freeman-Carroll method.

• Korean Chemical Engineering Research
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• v.53 no.3
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• pp.391-396
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• 2015

To investigate the effect of the catalyst synthesis method on the oxidative dehydrogenation (ODH) of nbutenes, $BiFe_{0.65}MoP_{0.1}$ oxide catalysts were prepared with various synthesis methods such as co-precipitation, citric acid method, hydrothermal method, and surfactant templated method. The catalysts were characterized by X-ray Diffraction (XRD), $N_2$ sorption, and $NH_3/1$-butene-temperature programmed desorption ($NH_3/1$-butene-TPD) to correlate with catalytic activity in ODH reaction. Among the catalysts studied here, $BiFe_{0.65}MoP_{0.1}$ oxide catalyst prepared with co-precipitation method marked the highest activity showing 1-butene conversion, 79.5%, butadiene selectivity, 85.1% and yield, 67.7% after reaction for 14 h. From the result of $NH_3$-TPD, the catalytic activity is closely related to the acidity of the $BiFe_{0.65}MoP_{0.1}$-x oxide catalyst and acidity of the $BiFe_{0.65}MoP_{0.1}$ oxde catalyst prepared with co-precipitation method was higher than that of other catalysts. In addition, combined with the 1-butene TPD, the higher catalytic activity is closely related to the amount of weakly adsorbed intermediate (< $200^{\circ}C$) and the desorbing temperature of strongly adsorbed intermediates (> $200^{\circ}C$).

• Proceedings of the Materials Research Society of Korea Conference
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• 2010.05a
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• pp.6.1-6.1
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• 2010

원자층 증착 기술 (Atomic Layer Deposition)은 기판 표면에서 한 원자층의 화학적 흡착 및 탈착을 이용한 nano-scale 박막 증착 기술이기 때문에, 표면 반응제어가 우수하며 박막의 물리적 성질의 재현성이 우수하고, 대면적에서도 균일한 두께의 박막 형성이 가능하며 우수한 계단 도포성을 확보 할 수 있다. 최근 ALD에 의한 박막증착 방법 중 플라즈마를 이용한 ALD 증착 방법에 대한 다양한 연구가 진행되고 있다. 플라즈마는 반응성이 좋은 이온과 라디컬을 생성하여 소스간 반응성을 좋게 하여, 소스 선택의 폭을 넓어지게 하고, 박막의 성질을 좋게 하며, 생산성을 높일 수 있는 장점이 있다. 그러나 플라즈마를 사용함으로써 플라즈마 내에 이온들이 가속되서 박막 증착 중에 기판 및 박막에 손상을 입혀 박막 특성을 열화 시킬 가능성이 있다. 따라서 플라즈마 발생 영역을 기판으로부터 멀리 떨어뜨린 원거리 플라즈마 원자층 공정이 개발 되었다. 이 기술은 플라즈마에서 생성된 ion이 기판이나 박막에 닫기 전에 전자와 재결합 되거나 공정 chamber에서 소멸하여 그 영향을 최소하고 반응성이 좋은 라디칼과의 반응만을 유도하여 향상된 막질을 얻을 수 있도록 하였다. 따라서 이 원거리 플라즈마 원자층 증착기술은 나노 테크놀러지 소자 개발하기 위한 나노 박막 기술에 있어서 그 활용이 점점 확대될 것이다. 그 적용으로써 리모트 플라즈마 원자층 증착 방법을 이용한 고유전 물질 개발이 있다. 반도체 소자의 고집적화 및 고속화가 요구됨에 따라 집적회로의 크기를 혁신적으로 축소하여 스위칭 속도(switching speed)를 증가시키고, 전력손실 (power dissipation)을 줄이려는 시도가 이루어지고 있다. 그 중 하나로 고유전율 절연막은 트렌지스터 소자의 스케일링 과정에 수반하여 커지는 게이트 누설 전류를 억제하기 위한 목적으로 도입되었다. 유전율이 크면 동일한 capacitance를 내는데 필요한 물리적인 두께를 늘릴 수 있어 전자의 tunneling을 억제할 수 있고 전력손실을 줄일 수 있기 때문이다. 이와 같은 고유전율 물질이 게이트 산화막으로 사용되기 위해서 높은 유전상수 열역학적 안정성, 낮은 계면 전하밀도, 낮은 EOT, 전극 물질과의 양립성 등의 특성이 요구되는데, 이에 따라 많은 유전물질에 대한 연구가 진행되었다. 기존 gata oxide를 대체하기 위한 가장 유력한 후보 재료로 주목 받고 있는 high-k 물질들로는 Al2O3, HfO2, ZrO2, La2O3 등이 있다. 본 발표에서는 ALD의 종류에 따른 기술을 소개하고 그 응용으로 고유전율 물질 개발 연구 (고유전율 산화물 박막의 증착, 고유전율 산화물의 열적 안정성 평가, Flatband 매카니즘 규명, 전기적 물리적 특성 분석)에 대해서 발표 하고자 한다.

• Journal of Soil and Groundwater Environment
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• v.11 no.6
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• pp.61-68
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• 2006

Soil washing techniques coupled with high pressure air jet were applied for diesel-contaminated soils sampled by an underground oil reservoir of which the initial total petroleum hydrocarbon (TPH) ($2,828{\pm}206\;mg/kg$) exceeded 5 times of current standard level (500 mg/kg) regulated by the Soil-Environment Conservation Law. Through several tests, we found that the position of impeller has a critical impact for washing efficiencies. The highest washing efficiency was obtained at an oblique angle (30 degree) for the impeller and optimized mixing speed (300 rpm) that could have high shearing forces. Considered economical and feasible aspects, the optimum mixing time was 10 min. Rate constants of TPH removal derived from the first-order equation were not linearly increased as mixing speed increased, indicating that mechanical mixing has some limits to enhance the washing efficiencies. Application of high-pressure air jet in washing process increased the washing efficiency. This increase might be caused by the fact that the surface of micro-air bubbles strongly attached hydrophobic matters of soil particles. As the pressure of air jet increased, the separation efficiencies of TPH-contaminated soil particles increased. In the combined process of high-pressure air jet and mixing by impeller, the optimum mixing speed and air flow-rate were determined to be 60 rpm and $2\;kg/cm^2$, respectively. Consequently, the washing technique coupled with high-pressure air jet could be considered as a feasible application for remediating petroleum-contaminated soils.

• Applied Chemistry for Engineering
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• v.29 no.5
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• pp.571-580
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• 2018

In this study, hybrid adsorbents (SS) were prepared by mixing spent coffee grounds (SCG) and sericite, a kind of clay minerals, to adsorb Pb(II) from an aqueous solution. In FT-IR analyses, the main functional groups of SS adsorbents were O-H, C=O and C-N groups. The specific surface area, cation exchange capacity and the pore diameter of SS were larger than those of using SCG and sericite. Formation conditions of the SS adsorbent were the optimum pyrolysis temperature of $300^{\circ}C$, SCG : sericite ratio of 8 : 2, and particle size of 0.3 mm. Langmuir adsorption isotherm was more suitable than Freundlich one, and the maximum adsorption capacity was reached 44.42 mg/g. As a result of the adsorption thermodynamic analysis, the adsorption of Pb(II) onto SS was the physical adsorption and exothermic process in nature. The regeneration of SS adsorbent using distilled water showed 88~92% recovery and the active site of SS adsorbent decreased with increasing the reuse cycle time. As a result, SS adsorbent showed that it can be used to remove Pb(II) easily, inexpensively and efficiently without any pre-treatment from aqueous solutions.

• Applied Chemistry for Engineering
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• v.18 no.6
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• pp.592-598
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• 2007

The adsorption capability of cobalt phthalocyanine derivatives was investigated by means of X-ray diffractometor (XRD), FT-IR spectroscopy, scanning electron microscopy (SEM), and temperature programmed desorption (TPD). According to TPD results for ammonia, cobalt phthalocyanine derivatives showed two desorption peaks at low temperature ($100{\sim}150^{\circ}C$) and high temperature ($350{\sim}400^{\circ}C$) indicating that there were two kinds of acidities. Tetracarboxylic cobalt phthalocyanine (Co-TCPC) has a stronger desorption peak (chemical adsorption) at high temperature and a weaker desorption peak (physical adsorption) at low temperature than cobalt phthalocyanine (Co-PC). The specific surface areas of Co-TCPC and Co-PC were 37.5 and $18.4m^2/g$, respectively. The pore volumes of Co-TCPC and Co-PC were 0.17 and $0.10cm^3/g$, respectively. The adsorption capability of triethyl amine calculated by breakthrough curve at 120 ppm of equilibrium concentration was 24.3 mmol/g for Co-TCPC and 0.8 mmol/g for Co-PC. The removal efficiencies of dimethyl sulfide of Co-TCPC and Co-PC in batch experiment of 225 ppm of initial concentration were 92 and 18%, respectively. The removal efficiencies of trimethyl amine of Co-TCPC and Co-PC in batch experiment of 118 ppm of initial concentration were 100 and 17%, respectively.