• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.107-107
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• 2000

최근 반도체 소자의 고집적화 및 대용량화의 경향에 다라 MOSFET 소자 제작에 이동되는 게이트 산화막의 두께가 수 nm 정도까지 점점 얇아지는 추세이고 Giga-DRAM급 차세대 UNSI소자를 제작하기 위해 5nm이하의 게이트 절연막이 요구된다. 이런 절연막의 두께감소는 게이트 정전용량을 증가시켜 트랜지스터의 속도를 빠르게 하며, 동시에 저전압동작을 가능하게 하기 때문에 게이트 산화막의 두께는 MOS공정세대가 진행되어감에 따라 계속 감소할 것이다. 따라서 절연막 두께는 소자의 동작 특성을 결정하는 중요한 요소이므로 이에 대한 정확한 평가 방법의 확보는 공정 control 측면에서 필수적이다. 그러나, 절연막의 두께가 작아지면서 게이트 산화막과 crystalline siliconrksm이 계면효과가 박막의 두께에 심각한 영향을 주기 때문에 정확한 두께 계측이 어렵고 계측방법에 따라서 두께 계측의 차이가 난다. 따라서 차세대 반도체 소자의 개발 및 양산 체계를 확립하기 위해서는 산화막의 두께가 10nm보다 작은 1nm-5nm 수준의 박막 시료에 대한 두께 계측 방법이 확립이 되어야 한다. 따라서, 본 연구에서는 습식 산화 공정으로 제작된 3nm-7nm 의 게이트 절연막을 현재까지 알려진 다양한 두께 평가방법을 비교 연구하였다. 절연막을 MEIS (Medim Energy Ion Scattering), 0.015nm의 고감도를 가지는 SE (Spectroscopic Ellipsometry), XPS, 고분해능 전자현미경 (TEM)을 이용하여 측정 비교하였다. 또한 polysilicon gate를 가지는 MOS capacitor를 제작하여 소자의 Capacitance-Voltage 및 Current-Voltage를 측정하여 절연막 두께를 계산하여 가장 좋은 두께 계측 방법을 찾고자 한다.다. 마이크로스트립 링 공진기는 링의 원주길이가 전자기파 파장길이의 정수배가 되면 공진이 일어나는 구조이다. Fused quartz를 기판으로 하여 증착압력을 변수로 하여 TiO2 박막을 증착하였다. 그리고 그 위에 은 (silver)을 사용하여 링 패턴을 형성하였다. 이와 같이 공진기를 제작하여 network analyzer (HP 8510C)로 마이크로파 대역에서의 공진특서을 측정하였다. 공진특성으로부터 전체 품질계수와 유효유전율, 그리고 TiO2 박막의 품질계수를 얻어내었다. 측정결과 rutile에서 anatase로 박막의 상이 변할수록 유전율은 감소하고 유전손실은 증가하는 결과를 나타내었다.의 성장률이 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 줄어들어 성장률이 Silane가스량에 의해 지배됨을 볼 수 있다. UV-VIS spectrophotometer에 의한 비정질 SiC 박막의 투과도와 파장과의 관계에 있어 유리를 기판으로 사용했으므로 유리의투과도를 감안했으며, 유리에 대한 상대적인 비율 관계로 투과도를 나타냈었다. 또한 비저질 SiC 박막의 흡수계수는 Ellipsometry에 의해 측정된 Δ과 Ψ값을 이용하여 시뮬레이션한 결과로 비정질 SiC 박막의 두께를 이용하여 구하였다. 또한 Tauc Plot을 통해 박막의 optical band gap을 2.6~3.7eV로 조절할 수 있었다. 20$0^{\circ}C$이상으로 증가시켜도 광투과율은 큰 변화를 나타내지 않았다.부터 전분-지질복합제의 형성 촉진이 시사되었다.이것으로 인하여 호화억제에 의한 노화 방지효과가 기대되었지만 실제로 빵의 노화는 현저히 진행되었다

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.457-457
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• 2010

Flexible organic light emitting diodes (F-OLEDs) requires excellent moisture permeation barriers to minimize the degradation of the F-OLEDs device. Specifically, F-OLEDs device need a barrier layer that transmits less than $10^{-6}g/m^2/day$ of water and $10^{-5}g/m^2/day$ of oxygen. To increase the life time of F-OLEDs, therefore, it is indispensable to protect the organic materials from water and oxygen. Severe groups have reported on multi-layerd barriers consisting inorganic thin films deposited by plasma enhenced chemical deposition (PECVD) or sputtering. However, it is difficult to control the formation of granular-type morphology and microscopic pinholes in PECVD and sputtering. On the contrary, atomic layer deoposition (ALD) is free of pinhole, highly uniform, conformal films and show good step coverage. Thus, $Al_2O_3/TiO_2$ multi-layer was deposited onto the polyethersulfon (PES) substrate by electron cyclotron resonance atomic layer deposition (ECR-ALD), and the water vapor transmission rates (WVTR) were measured. WVTR of moisture permeation barriers is dependent upon density of films and initial state of polymer surface. A significant reduction of WVTR was achieved by increasing density of films and by applying low plasma induced interlayer on the PES substrate. In order to minimize damage of polymer surface, a 10 nm thick $TiO_2$ was deposited on PES prior to a $Al_2O_3$ ECR-ALD process. High quality barriers were developed from $Al_2O_3$ barriers on the $TiO_2$ interlayer. WVTR of $Al_2O_3$ by introducing $TiO_2$ interlayer was recorded in the range of $10^{-3}g/m^2.day$ at $38^{\circ}C$ and 100% relative humidity using a MOCON instrument. The WVTR was two orders of magnitude smaller than $Al_2O_3$ barriers directly grown on PES substrate without the $TiO_2$ interlayer. Thus, we can consider that the $Al_2O_3/TiO_2$ multi-layer passivation can be one of the most suitable F-OLEDs passivation films.

• Journal of the Korean Vacuum Society
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• v.19 no.6
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• pp.495-500
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• 2010

In this study, $Al_2O_3$ and $TiO_2$ films was deposited on to PES (poly(ethersulfon) substrate by using atomic layer deposition as functions of deposition temperature and plasma power. The density and carbon contents of $Al_2O_3$ and $TiO_2$ films was changed by varying process conditions. High density thin films was achieved through optimizing the process conditions. Buffer layer was deposited prior to the processing of upper thin films to avoid PES surface destruction during the high power plasma process and to enhances the tortuous path for water vapor permeation for the defect decoupling effect. The water vapor transmission rate by using MOCON test was investigated to analyze the effect. Water vaper permeation properties was improved by using the inorganic multi-layer passivation layer and activation energy of the water vapor permeation was increased.

• Journal of the Korean Vacuum Society
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• v.19 no.6
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• pp.423-431
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• 2010

In order to teach the accumulated knowledge of nanoscience, nanoengineering and nanotechnology to graduate school students and young scientists with the sense of public engagement, Osaka University started from 2004 to prepare and offer various kinds of education and training programs such as trans-disciplinary graduate-school minor program, evening course refresher program, short-term international research training program, etc. It offers a series of lectures, partly broadcasted live to satellite classrooms. In addition, the students can join intensive hands-on training programs using modern facilities, allowing them to design, fabricate, measure, characterize and functionalize nanomaterials and nanodevices. In addition, there are four specially designed lectures and research training programs aimed for nanocommunication including social, legal and ethical relationship: "Nanotechnology Career-up Lectures", "Social Engagement on Nanotechnology", "Road Map Design on Nanotechnology", and "Project-Aimed Learning and Training Programs (PAL)". The outline of the whole programs is described together with the specialized programs for nanocommunication.

• Journal of Wetlands Research
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• v.20 no.1
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• pp.63-71
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• 2018

The particle filtration mechanisms in an infiltration trench should be varying due to the different hydraulic conditions during stormwater runoff. The understanding of these variations associated with different filtration mechanisms and their effect on the particle removal efficiency is of vital importance. Therefore, a LID (Low Impact Development) system comprising of an infiltration trench packed with gravel and woodchip was investigated during the monitoring of several independent rainfall events. A typical rainfall event was divided into separate regimes and their corresponding flow conditions as well as filtration mechanisms in the trench were analyzed. According to hydraulic conditions, it was found out that filtration changes between vertical and horizontal flows as well as between unsaturated, saturated, and partially-saturated flows. Particle separation efficiency was high (55-76%) and was mainly governed by physical straining during the unsaturated period. It was then enhanced by diffusion during the saturated period (75-95%). When the trench became partially saturated at the end of the rainfall event, the efficiency decreased which was believed to be due to the existence of a negatively charged air-water interface which limited the removal to positively charged particles.

• Journal of Wetlands Research
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• v.20 no.3
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• pp.219-226
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• 2018

Interceptor sewer is installed underground near to the river side mostly ofstate-owned land and the management efficiency of public sewage disposal facilities is decreasing as too much infiltration/inflow(I/I) and river flow to interceptor sewer are caused by broken or deteriorated sewer. This also affects the sewer pipeline project and decreases its efficiency. Therefore, the aim of this study is to investigate interceptor sewer which has influence on the reduction of the project effect. The investigation were performed for three study areas. The study includes the investigation of current condition of interceptor sewer(sewer extension, pipe diameter, pipe type, installed year, installed locations, etc), investigation of inside of sewer by CCTV accompanied by pumping and dredging works where required, investigation of inside of manholes by eyes, calculation of pollutant load using the results of investigation of flow quantity and quality. Multipoint investigations were simultaneously performed for flow quantity at confluence area and other investigations were also performed for flow quantity and BOD for interceptor sewer and comparison of pollutant load, investigation of infiltration/inflow(I/I) caused by deterioration of interceptor sewer. As the result of the study, a main reason for reduced effect of sewer pipe improvement project was analyzed as the low-density sewage and I/I in public seweage treatment Facility due to deteriorated and unmanaged interceptor sewers.

• Korean Journal of Veterinary Research
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• v.35 no.3
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• pp.459-469
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• 1995

As S-nitrosothiols were proposed as nitrergic carriers in vascular and nonvascular smooth muscle, we have investigated the relaxant properties of several S-nitrosothiols in the porcine retractor penis(PRP) muscle and compared them with the effects of exogenously added NO, electrical field stimulation(EFS) of NANC nerves and sodium nitroprusside(SNP). Also the influences of oxyhemoglobin and hydroquinone on the relaxant responses were investigated. In addition, effects of NO on membrane potentials and its involvement in the generation of inhibitory junction potential(IJP) were investigated with conventional intracellular microelectrode technique. The results were summerized as follows. 1. Frequency-dependent relaxations of PRP muscle were induced by EFS to NANC nerve. Tetrodotoxin($1{\times}10^{-6}M$) abolished the relaxations of PRP muscle induced by EFS, and L-NAME(($2{\times}10^{-5}M$) and methylene blue($4{\times}10^{-5}M$) inhibited the relaxations. L-NAME-induced inhibition of the relaxations was reversed by L-arginine($1{\times}10^{-3}M$), but not by D-arginine. 2. Exogenous NO($1{\times}10^{-5}-1{\times}10^{-4}M$), sodium nitroprusside(($1{\times}10^{-7}-1{\times}10^{-4}M$) induced dose-dependent relaxations of PRP muscle. All S-nitrosothiols($1{\times}10^{-7}-1{\times}10^{-4}M$) tested relaxed the PRP muscle in dose-dependent manner and the potency order was SNAP>GSNO>CysNO>SNAC. 3. Oxyhemoglobin($5{\times}10^{-5}M$) blocked the relaxation induced by exogenous NO and inhibited EFS-, S-nitrosothiols-, and SNP-induced relaxation. 4. Hydroquinone($1{\times}10^{-4}M$) also abolished the relaxations induced by exogenous NO, and reduced the relaxations induced by S-nitrosothiols, but did not affect EFS- and SNP-induced relaxations. 5. SNP($2{\times}10^{-6}-5{\times}10^{-6}M$) relaxed muscle strips but the membrane potentials were not affected. 6. EFS with several pulses(1ms, 2Hz, 80V) produced an inhibitory junction potential(IJP) with muscle relaxation. They were abolished by TTX($2{\times}10^{-6}M$). $N^G$-nitro-$_{\small{L}}$-arginine(L-NNA, $2{\times}10^{-5}M$) abolished the muscle relaxation, but had no effect on IJP.

• Korean Journal of Veterinary Research
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• v.35 no.3
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• pp.447-458
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• 1995

This study was carried out to characterize nonadrenergic, noncholinergic(NANC) relaxation of porcine retractor penis(PRP) muscle induced by electrical field stimulation(EFS) and to investigate the actions of niric oxide(NO) and vasoactive intestinal polypeptide(VIP) as candidates for NANC neurotransmitters. Biphasic relaxations of PRP muscle were induced by EFS to NANC nerve. Rapid-phase relaxation was observed at low frequency(0.5-16Hz) and slow-phase relaxation followed during high frequency(8-60Hz). Both relaxations were frequency-dependent and TTX($1{\times}10^{-6}M$)-sensitive. L-NAME($2{\times}10^{-5}M$) inhibited the rapid-phase relaxation, but not the slow-phase relaxation. The inhibition of the rapid-phase relaxation with L-NAME was reversed by L-arginine ($1{\times}10^{-3}M$) but not by D-arginine($1{\times}10^{-3}M$). Methylene blue($4{\times}10^{-5}M$) reduced the rapid-phase relaxation. Exogenous No(ExoNO, $1{\times}10^{-5}-1{\times}10^{-4}M$) induced dose-dependent relaxations of PRP muscle. Oxyhemoglobin($5{\times}1^{-5}M$) blocked the relaxation induced by ExoNO and inhibited EFS-induced relaxation. Hydroquinone($1{\times}10^{-4}M$) also abolished the relaxation induced by ExoNO, but did not affect EFS-induced relaxation. L-NAME resistant slow-phase relaxation to EFS was inhibited by ${\alpha}$-chymotrypsin(2.5 U/ml). Both methylene blue($4{\times}10^{-5}M$) and Nethylmaleimide($1{\times}10^{-4}M$) reduced the slow-phase relaxation by EFS. [4-Cl-D-$Phe^6$, $Leu^{17}$]-VIP($3{\times}10^{-6}M$) inhibited the slow-phase relaxation by EFS. External applications of VIP ($1{\times}10^{-7}M$) caused relaxations that were simillar to the L-NAME resistant slow-phase relaxations induced by EFS, and relaxant effects of exogenous VIP were blocked by ${\alpha}$-chymotrypsin(2.5 U/ml).

• Korean Journal of Weed Science
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• v.12 no.2
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• pp.166-172
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• 1992

The identification on blue-queen algae which were collected from paddy rice fields of the whole nation was carried out in 1991. The blue-green algae identified were 20 species in 5 families including 7 species in the Chroococcaceae. 1 species in the Chamaesiphonaceae. 1 species in the Pleurocapsaceae, 6 species in the Nostocaeae and 5 species in the Oscillatoriaceae. Among the blue-green algae, 6 species in 4 genera including Cylindrospernum, Anabaenopsis, Anabaena and Nostoc were characterized by heterocysts concerning with nitrogen fixation capacity. A concentrated population of Oscillatoria spp. induced soil flakes with blue tint in paddy rice fields. The genera. Spirulina and Oscillatoria, showed their specific motility.

• Proceedings of the Mineralogical Society of Korea Conference
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• 2003.05a
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• pp.10-10
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• 2003

일라이트-스멕타이트 혼합층광물(I-S)은 열역학적으로 상호 대립적인 두 가지 모델로 이해되고 있다. 첫째, MacEwan 결정자 모델은 I-S를 5-20개의 스멕타이트와 일라이트 층으로 구성된 결정자로 해석한다. 이러한 모델은 분산과 재응집 과정을 기초로 하는 X-선 회절분석(XRD)에서 기인한 것으로 Reynolds의 XRD 모델과 동일하다. 둘째, 기본입자 모델은 I-S를 물리적으로 분리될 수 있는 최소 입자인 기본입자가 $c^{*-}$축 방향으로 응집된 응집체로 해석한다. 이러한 모델은 분산 과정을 기초로 하는 주사전자현미경(TEM) 관찰에서 기인한 모델이다. 강일모 등(2002)은 이 두 가지 모델을 비교함으로써 1< $N_{F}$<100/% $S_{XRD}$ ( $N_{F}$=평균 기본입자 층개수, %$S_{XRD}$=XRD 분석을 통하여 측정된 팽창성)을 도출하였다. 이 식은 기본입자모델과 Eberl & Srodon(1988)이 제시한 최대 팽창성(%$S_{MAX}$)을 동시에 해석할 수 있게 해준다. %$S_{MAX}$는 XRD 모델에서는 고려하지 않는 I-S 결정자 상$\cdot$하부에 존재하는 두 개의 0.5nm 규산염층을 하나의 스멕타이트 층으로 간주하여 얻어진 팽창성이다. Srodon et al.(1992)은 %$S_{MAX}$=100/ $N_{F}$을 제시하였으며, 강일모 등(2002)은 %$S_{MAX}$는 기하학적으로 기본입자가 무한적층을 하였을 때 관찰되는 %$S_{XRD}$와 동일함을 밝힌 바 있다. 만약, XRD 분석을 위한 시료 준비과정에서 I-S 결정자가 분산되었다가 재응집을 한다면, XRD에서 관찰되는 결과는 일차적으로 기본입자의 적층성에 영향을 받게 된다. 따라서, 기본 입자의 적층성은 XRD 분석을 이용하여 I-S 구조를 해석하는데 매우 중요한 요인이다. 본 연구는 기본입자의 적층성을 정량화하기 위해 %$S_{XRD}$=A/ $N_{F}$ (0$S_{MAX}$=100/ $N_{F}$로부터 얼마나 벗어나 있는가는 지시해 준다 금성산화산암복합체에서 산출되는 11개 I-S 시료와 14개의 Drits et al.(1998) 자료로부터 1nA=-0.14 $N_{F}$+4.7의 실험식을 도출할 수 있었으며, 기본입자의 적층성은 일차적으로 기본입자의 두께에 의해 영향을 받는 것으로 관찰되었다. Nadeau(1985)는 기본입자두께분포로부터 I-S 결정자의 팽창성을 측정하기 위하여 Ps=$\Sigma$p(N)/N을 제시하였다(Ps=스멕타이트 층 비율, N=기본 입자 층개수, p(N)=N의 확율). 그러나 위식은 실질적으로 %$S_{MAX}$를 제공해주기 때문에 %$S_{XRD}$를 유추하는데는 부적합하다. 본 연구는 이를 변형하여 Ps=$\Sigma$p(N)A(N)/N을 제시하였다(A(N)=N에 대한 A값). 위의 실험식을 사용하여 헝가리산 Zempleni 시료(15%$S_{XRD}$)의 기본입자분포로부터 %$S_{XRD}$를 계산한 결과, 16%$S_{XRD}$의 결과값을 얻을 수 있었다. 따라서, 본 연구에서 도출한 관계식들이 유효함을 확인할 수 있었다.계식들이 유효함을 확인할 수 있었다.