• Journal of the KSME
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• v.53 no.9
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• pp.41-45
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• 2013

이 글에서는 탄소나노튜브와 멤스(MEMS: Microelectromechanical system) 소자의 융합 기술 및 응용 분야에 대하여 소개하고자 한다.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.11
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• pp.20-28
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• 2009

• Electrical & Electronic Materials
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• v.21 no.8
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• pp.25-32
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• 2008

• 유체기계공업학회:학술대회논문집
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• 2003.12a
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• pp.133-139
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• 2003

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• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.19 no.1
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• pp.61-70
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• 2008

This paper presents the flexible MEMS transmitter based on flexible printed circuit board or FPCB, which can be transformed to arbitrary shape. The FPCB is suitable to fabricate light weight and small size modules with the help of its thin thickness. Moreover a module based on FPCB can be attached on the arbitrary curved surface due to its flexible enough to be lolled up like paper. In this paper, the flexible MEMS transmitter integrated on FPCB for a short-distance sensor network which is based on orthogonal frequency division multiplexing(OFDM) communication system is proposed. The active device of the proposed flexible MEMS transmitter is fabricated on InGaP/GaAs HBT process which has been used for power amplifier design to take advantages of high linear and high efficient characteristics. Moreover, the passive devices such as the filter and signal lines are integrated and fabricated on the FPCB board. The performance of the fabricated flexible MEMS transmitter is analyzed with EVM characteristics of the output signal.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.241-242
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• 2008

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.131.1-131.1
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• 2005

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.625-626
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• 2013

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.23 no.12
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• pp.1082-1089
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• 2013

3-Axis sensor measurement system is needed for measuring ride quality of elevator. But because 3-Axis piezoelectric accelerometer is expensive. We developed 3-Axis sensor system which is suitable for measuring ride quality of elevator using cheap MEMS sensor. There are two types of MEMS sensor that are piezoresistive and capacitive type. The excellence of piezoresistive type in characteristic of frequency response and noise is confirmed compare to capacitive type as a result of this paper's experiment and reference. 3-Axis system using MEMS sensor needs MEMS's proper frequency response characteristic. Additionally noise characteristic of sensor and circuit, stiffness of assembly are needed for deciding frequency range and accuracy of amplitude.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1892-1897
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• 2003

A new thermal inkjet printer head on SOI wafer with virtual valve was proposed. It was composed of two rectangular heaters with same size. So we could call it T-jet(Twin jet). T-jet has a lot of merits. It has the advantage of being fabricated with one wafer and is easy to change the size of chamber, nozzle, restrictor and so on. However, above all, It is the best point that T-jet has a virtual valve. And it was manufactured on SOI wafer. The chamber was formed in its upper silicon whose thickness was 40um. The chamber's bottom layer was silicon dioxide of SOI wafer and two heaters were located underneath the chamber's ceiling. And the restirctor was made beside the chamber. Nozzle was molded by process of Ni plating. Ni was 30um thick. Nozzle ejection test was performed by printer head having 56 nozzles in 2 columns with 600NPI(nozzle per inch) and black ink. It measured a drop velocity of 12m/s, a drop volume of 30pl, and a maximum firing frequency of 12KHz for single nozzle ejection. Throwing out the ink drop in whole nozzles at the same time, it was observed that the uniformity of the drop velocity and volume was less than 4%.